Abstract: A compact, easily manufactured, axisymmetric mechanism can be configured to change the magnitude of a short-movement linear motion, or also reverse the movement direction, of an actuator for control of movable elements. The mechanism is bidirectional and reversible, functioning symmetrically, and does not contain any gears nor lead screw threads. It is constantly loaded, so that force change is achieved without mechanical backlash, introducing hysteresis. The movement conversion is generally proportional and suitable for use in actuating a fluid control valve intended for modulating the control of fluids.

Abstract: A high conductance valve for use in fluid delivery systems is comprised of a flat non-circular orifice ridge adjacent to which a control plate having a planar control surface is proximally positioned to adjust the valve effective opening area and thereby the conductance of the valve. The length of the non-circular orifice ridge periphery is substantially greater than the circumference of a similarly sized circular orifice and therefore the realized effective opening area is also substantially greater despite having a similar footprint.

Abstract: A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.

Abstract: A malleable gasket suitable for high purity fluid delivery systems has flat axial end surface sealing regions on opposing sides, and further includes a raised inner lip on a first side and a raised outer lip on a second side. The raised lips align the gasket within a fluid delivery conduit by engaging features in the face of one or more fluid delivery elements joined together, and simultaneously provide protection to the sealing regions during normal handling and fluid delivery system assembly.

Abstract: A mechanism for coupling motion of a piezoelectric actuator in axisymmetric devices like modulating proportional valves uses actuator extension motion to cause translation away from a mechanism mounting plane and thereby enables lifting open of a valve element instead of the usual pushing closed of the valve element. The mechanism does not contain any gears nor leadscrew threads, and in usual practice is constantly loaded, so apparent change of direction is achieved without mechanical backlash introducing hysteresis. The mechanism surrounds a piezoelectric stack actuator by contacting opposite ends of the piezoelectric stack, whereby extension motion lengthening the actuator causes a lifting portion of the mechanism to translate toward the bulk of the actuator while the proximally adjacent mounting portion of the mechanism remains at a fixed location.

Abstract: A gasket retainer that is absent sharp corners, has apertures of reasonable dimensional tolerance, and may be conveniently made by a variety of manufacturing processes. The retainer is made from thin flat springy material that readily returns to form after slight bending. Representative gasket capturing apertures are of smoothly non-convex outline with major dimension sufficiently large to allow passage of a ring shaped gasket turned on edge and minor dimension sufficiently small to engage, on approximately opposite circular segments that each engage along less than one third of a gasket circumference, a cavity or groove on the outside diameter periphery of the gasket turned flat parallel to the retainer material sheet. Fasteners may be retained by similar apertures.

Abstract: A malleable gasket suitable for high purity fluid delivery systems has flat axial end surface sealing regions on opposing sides, and further includes a raised inner lip on a first side and a raised outer lip on a second side. The raised lips align the gasket within a fluid delivery conduit by engaging features in the face of one or more fluid delivery elements joined together, and simultaneously provide protection to the sealing regions during normal handling and fluid delivery system assembly.

Abstract: A compact, easily manufactured, axisymmetric mechanism can be configured to change the magnitude of a short-movement linear motion, or also reverse the movement direction, of an actuator for control of movable elements. The mechanism is bidirectional and reversible, functioning symmetrically, and does not contain any gears nor lead screw threads. It is constantly loaded, so that force change is achieved without mechanical backlash, introducing hysteresis. The movement conversion is generally proportional and suitable for use in actuating a fluid control valve intended for modulating the control of fluids.

Abstract: A flow substrate including a body having a first surface and a second opposing surface, a plurality of ports defined in a first surface of the body, a plurality of apertures defined in a second surface of the body, a plurality of fluid pathways, each fluid pathway of the plurality of fluid pathways including a first segment extending between a respective aperture of the plurality of apertures and a first port of a respective pair of ports and a second segment extending between the respective aperture and a second port of the respective pair of ports, and at least one cap. The at least one cap has a first surface constructed to seal at least one aperture of the plurality of apertures, and a second opposing surface.

Abstract: A flow substrate including a body having a first surface, a second opposing surface, a plurality of pairs of ports defined in the first surface, a plurality of fluid pathways extending between each respective pair of ports and in fluid communication with each port of the respective pair of ports, and at least one cap. Each fluid pathway is formed in the second surface. The at least one cap has a first surface constructed to seal at least one fluid pathway, and a second opposing surface. At least one of the body and the at least one cap includes a weld formation formed in at least one of the second surface of the body and the second surface of the at least one cap constructed to surround the at least one fluid pathway and facilitate welding of the at least one cap to the body along the weld formation.

Abstract: A flow substrate including a body having a first surface and a second opposing surface, a plurality of pairs of ports defined in the first surface of the body, a plurality of fluid pathways extending between each respective pair of ports and in fluid communication with each port of the respective pair of ports, and at least one cap. Each fluid pathway is formed in the second surface of the body. The at least one cap has a first surface constructed to seal at least one fluid pathway, and a second opposing surface. At least one of the body and the at least one cap includes a weld formation formed in at least one of the second surface of the body and the second surface of the at least one cap constructed to surround the at least one fluid pathway and facilitate welding of the at least one cap to the body along the weld formation.

Abstract: A fluid delivery system that includes flow substrates and manifolds that minimize the number of fluid conduit ports and seals needed to build standardized fluid delivery sticks. Each flow substrate has a component attachment surface with one or more component conduit ports and an associated plurality of fastener apertures. Some flow substrates incorporate a transverse manifold connection conduit port on a surface opposite the component attachment surface. Fastener apertures associated with the transverse manifold connection conduit port are accessible adjacent to installed fluid handling components. Transverse connection between fluid delivery sticks use a welded assembly of fluid conduits to provide a transverse connecting lower layer which is sealingly retained by fasteners inserted from above through apertures associated with the transverse manifold connection conduit port.

Abstract: The ring seal and retainer assembly includes an annularly shaped ring seal defining a radial inner surface, a radial outer surface, first and second axial end surfaces, a central bore for fluid or gas passage, and a groove formed on the ring seal's radial outer surface forming a recessed interior wall. A retainer is provided for affixing and positioning a ring seal in a sealing assembly. The retainer includes a circular sidewall sized and positioned to engage and cover the ring seal's radial outer surface. The retainer includes a plurality of inwardly projecting tabs for projecting into the groove formed on the ring seal's radial outer surface. The tabs are flexible and sized to engage the ring seal groove's interior wall to center and affix the ring seal within the retainer. In a preferred embodiment, the circular sidewall includes upper and lower inwardly projecting edges forming a “C” shaped cross-section.

Abstract: A flow substrate including a body having a first surface and a second opposing surface, a plurality of pairs of ports defined in the first surface of the body, a plurality of fluid pathways extending between each respective pair of ports and in fluid communication with each port of the respective pair of ports, and at least one cap. Each fluid pathway is formed in the second surface of the body. The at least one cap has a first surface constructed to seal at least one fluid pathway, and a second opposing surface. At least one of the body and the at least one cap includes a weld formation formed in at least one of the second surface of the body and the second surface of the at least one cap constructed to surround the at least one fluid pathway and facilitate welding of the at least one cap to the body along the weld formation.

Abstract: An ultrasonic flow sensor that includes a conduit having a length, a first ultrasonic transducer disposed at a first position along the length of the conduit, a second ultrasonic transducer disposed at a second position along the length of the conduit, the second position being spaced apart from the first position, a first reflecting interface and a second reflecting interface. The first reflecting interface is in registration with the first ultrasonic transducer to receive first acoustic energy from the first ultrasonic transducer and to reflect the first acoustic energy in a direction generally along a length of the conduit and into a fluid within the conduit. The second reflecting interface is in registration with the second ultrasonic transducer to receive second acoustic energy from the second ultrasonic transducer and to reflect the second acoustic energy in a direction generally along the length of the conduit and into the fluid within the conduit.

Abstract: A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.

Abstract: The present application relates to fluid flow systems and more particularly to fluid flow systems for use in the semiconductor industry. In one embodiment, the present invention is directed to a fluid stick adapted to be mounted to a mounting surface. The fluid stick includes a first flow component positioned in the fluid stick and a second flow component positioned in the fluid stick between the first flow component and the mounting surface and in fluid connection with the first flow component.

Abstract: A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.

Abstract: The present application relates to fluid flow systems and more particularly to fluid flow systems for use in the semiconductor industry. In one embodiment, the present invention is directed to a fluid stick adapted to be mounted to a mounting surface. The fluid stick includes a first flow component positioned in the fluid stick and a second flow component positioned in the fluid stick between the first flow component and the mounting surface and in fluid connection with the first flow component.

Abstract: A fluid panel subassembly comprising: a component; substrate a seal, a body, and an insert; wherein the body is fastened to the insert to form a substrate with the substrate seal therein, and the component is fastened to the body such that, the component is positioned over the substrate seal.