Abstract: A worked nozzle ring for a gas turbine, in particular an aircraft engine, having at least one shroud and at least one blade sheet arranged thereon, whereby, in order to create a worked nozzle ring that is easy to manufacture, the blade sheet comprises, at the frontal side, at least one two-dimensionally profiled connecting space region that is placed in a profiled opening formed in the shroud by beam cutting and is connected therewith.

Abstract: A device and a method for etching a substrate, in particular a silicon body, by using an inductively coupled plasma. A high-frequency electromagnetic alternating field is generated using an ICP source, and an inductively coupled plasma composed of reactive particles is generated by the action of a high-frequency electromagnetic alternating field on a reactive gas in a reactor. In addition, a static or time-variable magnetic field is generated between the substrate and the ICP source, for which purpose at least two magnetic field coils arranged one above the other are provided. The direction of the resulting magnetic field is also approximately parallel to the direction defined by the tie line connecting the substrate and the inductively coupled plasma.

Abstract: A worked nozzle ring for a gas turbine, in particular an aircraft engine, having at least one shroud and at least one blade sheet arranged thereon, whereby in order to create a worked nozzle ring that is easy to manufacture, the blade sheet comprises, at the frontal side, at least one two-dimensionally profiled connecting space region that is placed in a profiled opening formed in the shroud by means of beam cutting and is connected therewith.