Abstract: A reticle has a phase-shifting pattern region, a normal pattern (chrome pattern) region, and a shielding region. The phase-shifting pattern region has first and second apertures and mask portions located therebetween. The first apertures transmit light opposite in phase to light transmitted by the second apertures. The normal pattern region has apertures and mask portions. The semiconductor chip regions of a resist film formed on a wafer are exposed stepwise through the phase-shifting pattern region. Subsequently, the portions of the semiconductor chip regions exposed through the phase-shifting pattern region are exposed through the normal pattern region.

Abstract: A resist pattern is formed with a phase-shifting mask 4 in which transparent regions through an opaque region are different 180.degree. in phase from one another. In this case, when positive resist 1 is subjected to exposure, the widths of the opaque regions 5A and 5B of the mask 4 are changed according to a pattern adjacent thereto, so that a fine pattern having the same line width is formed with high accuracy.

Abstract: A light equipment irradiating a target with light adjusts light from a light source in a light source optical system and introduces the same into an acousto-optic device, for separating the same into its spectral components and modulating the same in the acousto-optic device. A condensing optical system condenses first order diffractive light outgoing from the acousto-optic device, so that an irradiation optical system irradiates a target with the same. A photodetection device comprises a photoreceiving part and a data processing part, so that the photoreceiving part converts a signal responsive to the fluctuation of modulated measuring light to a plurality of signals of different degrees of amplification simultaneously outputting same. The data processing part selects a non-saturated value of an amplifier or an A-D convertor while maintaining the largest degree of amplification from these signals, and lock-in processes same with a modulation frequency modulating the measuring light.

Abstract: To secure a highly accurate measurement value of biological information with minimized variation by positioning a target part of a living body with good reproducibility and by positioning the target part of the living body easily with high reproducibility without pressing blood vessels in the living body. The concentration of a particular component in the living body is measured by the use of a transmitted or reflected spectrum obtained by projecting light onto the target part of the living body. A biological information measuring template 2 includes a shape memory medium 6 having a contact surface which, when the target part is pressed to the contact surface, undergoes change according to the shape of the target part, to thereby store the shape. The target part 1 of the living body is arranged at a store portion of the shape memory medium and is illuminated by light.

Abstract: A BPSG film is formed on a semiconductor substrate and caused to reflow under an atmosphere of flowing Ar gas. Then, a chemically amplified resist is applied to the surface of the BPSG film to form a resist film, which is exposed to the irradiation of a KrF excimer laser through a mask. Since no lone pair of electrons exists on the surface of the BPSG film, an acid in the resist film is not deactivated and hence a reaction is evenly induced by an acid catalyst. After the development of the resist film, a resist pattern having an excellent profile with no footing is obtained.

Abstract: A concave urine collector is set under a front end portion of a stool body, so that urine can be collected in a bowl. Single fiber holes are set on a front end and a left side of the urine collector respectively, while condenser lenses for condensing light on the bowl side, an excitation light fiber member carrying excitation light from an excitation light source and a Raman light receiving fiber member for receiving Raman light are set in the fiber holes respectively. The excitation light fiber member is connected with the excitation light source, and the Raman light receiving fiber member communicates with a spectro-detector. A Raman signal separated into its spectral components detected by the spectro-detector is data-processed by a data processing part, and outputted from a data output part as a measurement result.

Abstract: A light source pa light of a plurality of wavelengths of a near infrared region, and a spectroscopic part selects a wavelength subjected to absorption by lactic acid as a measuring wavelength from measuring light of a plurality of wavelengths emitted from the light source part. A probe comes into contact with an organism measuring portion and irradiates the organism measuring portion with the measuring light of the wavelength selected by the spectroscopic part, while a photoreceiving part detects transmitted/scattered light of the measuring light incident upon the organism measuring portion. A light signal detected by the photoreceiving part is converted to absorbance in a signal processing part, so that the concentration of lactic acid is calculated by a host computer serving as an arithmetic-control part and displayed on a display part. No reagent is required, while difference between lactic acid concentrations varied with measuring portions can also be noninvasively measured.