Patents by Inventor Kurt Weiner
Kurt Weiner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8220502Abstract: A pressure gauge may be coupled to a vessel into which a liquid chemical is to be dispensed. The volume of the vessel may be known and a control device may determine an initial pressure of the vessel using the pressure gauge. A volume of liquid chemical may be dispensed into the vessel which may cause the pressure within the vessel to increase to a second pressure. The control device may determine the second pressure using the pressure gauge may calculate the volume of liquid chemical dispensed into the vessel using the volume of the vessel, the initial pressure of the vessel, and the second pressure of the vessel.Type: GrantFiled: December 28, 2007Date of Patent: July 17, 2012Assignee: Intermolecular, Inc.Inventors: Rajesh Kelekar, Gaurav Verma, Kurt Weiner
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Publication number: 20120149137Abstract: In embodiments of the current invention, methods of combinatorial processing and a test chip for use in these methods are described. These methods and test chips enable the efficient development of materials, processes, and process sequence integration schemes for semiconductor manufacturing processes. In general, the methods simplify the processing sequence of forming devices or partially formed devices on a test chip such that the devices can be tested immediately after formation. The immediate testing allows for the high throughput testing of varied materials, processes, or process sequences on the test chip. The test chip has multiple site isolated regions where each of the regions is varied from one another and the test chip is designed to enable high throughput testing of the different regions.Type: ApplicationFiled: February 17, 2012Publication date: June 14, 2012Applicant: Intermolecular, IncInventors: Gaurav Verma, Kurt Weiner, Prashant Phatak, Imran Hashim, Sandra Malhotra, Tony Chiang
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Publication number: 20120149180Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.Type: ApplicationFiled: December 21, 2011Publication date: June 14, 2012Applicant: Intermolecular, Inc.Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
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Publication number: 20120142197Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.Type: ApplicationFiled: February 14, 2012Publication date: June 7, 2012Applicant: Intermolecular, Inc.Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
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Patent number: 8143619Abstract: In embodiments of the current invention, methods of combinatorial processing and a test chip for use in these methods are described. These methods and test chips enable the efficient development of materials, processes, and process sequence integration schemes for semiconductor manufacturing processes. In general, the methods simplify the processing sequence of forming devices or partially formed devices on a test chip such that the devices can be tested immediately after formation. The immediate testing allows for the high throughput testing of varied materials, processes, or process sequences on the test chip. The test chip has multiple site isolated regions where each of the regions is varied from one another and the test chip is designed to enable high throughput testing of the different regions.Type: GrantFiled: October 15, 2010Date of Patent: March 27, 2012Assignee: Intermolecular, Inc.Inventors: Gaurav Verma, Kurt Weiner, Prashant Phatak, Imran Hashim, Sandra Malhotra, Tony Chiang
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Patent number: 8082045Abstract: A method to graphically create a recipe for processing a substrate includes displaying graphical images that present processing operations to be performed on the substrate, allowing a user to set properties of the processing operations by manipulating the graphical images, and generating the recipe based on the properties of the processing operations set by the user and synchronizing the plurality of processing operations based on the properties. The graphical images may be time-bars in a Gantt-like chart that allows the user to see the sequence, the timing, and the durations of the processing operations.Type: GrantFiled: June 29, 2007Date of Patent: December 20, 2011Assignee: Intermolecular, Inc.Inventors: Yoshiki Ashizawa, Heng-Cheng Pal, Patrick Ngatchou, Kurt Weiner, John Schmidt
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Publication number: 20110303696Abstract: A pressure gauge may be coupled to a supply line which carries liquid from a bottle to either one or more mixing vessels and/or one or more reactors in a combinatorial processing tool. A control device may monitor the pressure measured by the pressure gauge, and the control device may be configured to change the pressure supplied to the bottle based on a comparison of the measured pressure to a predetermined pressure value. The control device may adjust the pressure provided to the bottle using a pressure regulator coupled to the pressure source. By changing the pressure provided to the bottle, the control device may maintain a relatively constant flow rate of fluids from the liquid source into one or more mixing vessels and/or the one or more reactors.Type: ApplicationFiled: August 22, 2011Publication date: December 15, 2011Applicant: INTERMOLECULAR, INC.Inventors: Rajesh Kelekar, Gaurav Verma, Kurt Weiner
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Publication number: 20110262644Abstract: A structure for independently supporting a wafer and a mask in a processing chamber is provided. The structure includes a set of extensions for supporting the wafer and a set of extensions supporting the mask. The set of extensions for the wafer and the set of extensions for the mask enable independent movement of the wafer and the mask. In one embodiment, the extensions are affixed to an annular ring which is capable of moving in a vertical direction within the processing chamber. A processing chamber, a mask, and a method for combinatorially processing a substrate are also provided.Type: ApplicationFiled: June 27, 2011Publication date: October 27, 2011Applicant: INTERMOLECULAR, INC.Inventors: Rick Endo, Kurt Weiner, James Tsung
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Patent number: 8039052Abstract: The various embodiments of the invention provide for relative movement of the substrate and a process head to access the entire wafer in a minimal space to conduct combinatorial processing on various regions of the substrate. The heads enable site isolated processing within the chamber described and method of using the same are described.Type: GrantFiled: December 27, 2007Date of Patent: October 18, 2011Assignee: Intermolecular, Inc.Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao
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Patent number: 8037894Abstract: A pressure gauge may be coupled to a supply line which carries liquid from a bottle to either one or more mixing vessels and/or one or more reactors in a combinatorial processing tool. A control device may monitor the pressure measured by the pressure gauge, and the control device may be configured to change the pressure supplied to the bottle based on a comparison of the measured pressure to a pre-determined pressure value. The control device may adjust the pressure provided to the bottle using a pressure regulator coupled to the pressure source. By changing the pressure provided to the bottle, the control device may maintain a relatively constant flow rate of fluids from the liquid source into one or more mixing vessels and/or the one or more reactors.Type: GrantFiled: December 27, 2007Date of Patent: October 18, 2011Assignee: Intermolecular, Inc.Inventors: Rajesh Kelekar, Gaurav Verma, Kurt Weiner
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Publication number: 20110248264Abstract: In embodiments of the current invention, methods of combinatorial processing and a test chip for use in these methods are described. These methods and test chips enable the efficient development of materials, processes, and process sequence integration schemes for semiconductor manufacturing processes. In general, the methods simplify the processing sequence of forming devices or partially formed devices on a test chip such that the devices can be tested immediately after formation. The immediate testing allows for the high throughput testing of varied materials, processes, or process sequences on the test chip. The test chip has multiple site isolated regions where each of the regions is varied from one another and the test chip is designed to enable high throughput testing of the different regions.Type: ApplicationFiled: October 15, 2010Publication date: October 13, 2011Inventors: Gaurav Verma, Kurt Weiner, Prashant Phatak, Imran Hashim, Sandra Malhotra, Tony Chiang
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Publication number: 20110209663Abstract: The various embodiments of the invention provide for relative movement of the substrate and a process head to access the entire wafer in a minimal space to conduct combinatorial processing on various regions of the substrate. The heads enable site isolated processing within the chamber described and method of using the same are described.Type: ApplicationFiled: May 12, 2011Publication date: September 1, 2011Applicant: INTERMOLECULAR, INC.Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao
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Patent number: 7993461Abstract: A structure for independently supporting a wafer and a mask in a processing chamber is provided. The structure includes a set of extensions for supporting the wafer and a set of extensions supporting the mask. The set of extensions for the wafer and the set of extensions for the mask enable independent movement of the wafer and the mask. In one embodiment, the extensions are affixed to an annular ring which is capable of moving in a vertical direction within the processing chamber. A processing chamber, a mask, and a method for combinatorially processing a substrate are also provided.Type: GrantFiled: May 30, 2007Date of Patent: August 9, 2011Assignee: Intermolecular, Inc.Inventors: Rick Endo, Kurt Weiner, James Tsung
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Patent number: 7824935Abstract: In embodiments of the current invention, methods of combinatorial processing and a test chip for use in these methods are described. These methods and test chips enable the efficient development of materials, processes, and process sequence integration schemes for semiconductor manufacturing processes. In general, the methods simplify the processing sequence of forming devices or partially formed devices on a test chip such that the devices can be tested immediately after formation. The immediate testing allows for the high throughput testing of varied materials, processes, or process sequences on the test chip. The test chip has multiple site isolated regions where each of the regions is varied from one another and the test chip is designed to enable high throughput testing of the different regions.Type: GrantFiled: July 2, 2008Date of Patent: November 2, 2010Assignee: Intermolecular, Inc.Inventors: Gaurav Verma, Kurt Weiner, Prashant Phatak, Imran Hashim, Sandra Malhotra, Tony Chiang
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Publication number: 20100163404Abstract: A shadow mask for patterning a substrate during a semiconductor process. In one implementation, the shadow mask may include a plate having openings in the shape of individual dies on the substrate and having an area slightly greater than the substrate, and a layer having openings in the shape of features patterned on the substrate, wherein the layer is coupled to a bottom surface of the plate by an epoxy.Type: ApplicationFiled: December 30, 2008Publication date: July 1, 2010Inventors: Indranil De, Kurt Weiner
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Publication number: 20100001269Abstract: In embodiments of the current invention, methods of combinatorial processing and a test chip for use in these methods are described. These methods and test chips enable the efficient development of materials, processes, and process sequence integration schemes for semiconductor manufacturing processes. In general, the methods simplify the processing sequence of forming devices or partially formed devices on a test chip such that the devices can be tested immediately after formation. The immediate testing allows for the high throughput testing of varied materials, processes, or process sequences on the test chip. The test chip has multiple site isolated regions where each of the regions is varied from one another and the test chip is designed to enable high throughput testing of the different regions.Type: ApplicationFiled: July 2, 2008Publication date: January 7, 2010Inventors: Gaurav Verma, Kurt Weiner, Prashant Phatak, Imran Hashim, Sandra Malhotra, Tony Chiang
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Publication number: 20090155936Abstract: A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.Type: ApplicationFiled: December 11, 2008Publication date: June 18, 2009Inventors: Kurt Weiner, Aaron Francis, Ken Williams
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Publication number: 20090069924Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.Type: ApplicationFiled: September 5, 2008Publication date: March 12, 2009Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng
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Publication number: 20090068849Abstract: The various embodiments of the invention provide for relative movement of the substrate and a process head to access the entire wafer in a minimal space to conduct combinatorial processing on various regions of the substrate. The heads enable site isolated processing within the chamber described and method of using the same are described.Type: ApplicationFiled: December 27, 2007Publication date: March 12, 2009Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao
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Publication number: 20090061108Abstract: A combinatorial processing chamber is provided. The combinatorial processing chamber is configured to isolate a radial portion of a rotatable substrate support, which in turn is configured to support a substrate. The chamber includes a plurality of clusters process heads in one embodiment. An insert having a base plate disposed between the substrate support and the process heads defines a confinement region for a deposition process in one embodiment. The base plate has an opening to enable access of the deposition material to the substrate. Through rotation of the substrate and movement of the opening, multiple regions of the substrate are accessible for performing combinatorial processing on a single substrate.Type: ApplicationFiled: February 7, 2008Publication date: March 5, 2009Inventors: Rick Endo, Kurt Weiner, Indranil De, James Tsung, Maosheng Zhao, Jeremy Cheng