Abstract: A neutral or near neutral pH etching solution for effectively etching molybdenum and tungsten including: an aqueous ferricyanide ion solution, a soluble molybdate or tungstate, and an essential compound such that upon combination of said soluble molybdate or tungstate and said essential compound, a heteropoly compound is formed in which said essential compound contributes at least one heteroatom to said heteropoly compound.The etching solution is most preferably used for etching molybdenum or tungsten which is adhered or proximate to a base-sensitive material.

Abstract: Disclosed is a method of chem-mech polishing an electronic component substrate. The method includes the following steps;obtaining a substrate having at least two features thereon or therein which have a different etch rate with respect to a particular etchant; andcontacting the substrate with a polishing pad while contacting the substrate with a slurry containing the etchant wherein the slurry includes abrasive particles, a transition metal chelated salt and a solvent for the salt.The chem-mech polishing causes the at least two features to be substantially coplanar. Also disclosed is the chem-mech polishing slurry.

Abstract: The present invention provides a method of synthesizing amorphous cordierite-forming glasses from organometallic precursors. Either the sol-gel/.beta.-diketonate technique or the amorphous chelating hydroxycarboxylate process can be used advantageously. The method of the present invention can also be used to form 5 component comprised and 2 component comprised amorphous compositions wherein one of the components is an oxide of silicon.

Abstract: A method of synthesizing amorphous Group IIIA-Group VA compounds. A first solution is prepared which consists of a tris(trialkylsilyl) derivative of either a Group IIIA or Group VA element dissolved in an organic solvent. A second solution is then prepared which consists of a halide of the other of the Group IIIA or Group VA element dissolved in an organic solvent. Then the first and second solutions are mixed such that a Group IIIA-Group VA compound is formed along with a trialkylhalosilane by-product. The final step of the method consists of removing the trialkylhalosilane by-product and organic solvent mixture to form the Group IIIA-Group VA condensed phase.

Abstract: A metal etching process involving an oxidation-reduction reaction where the metal being etched is oxidized and the active ingredient in the etchant solution is reduced, incorporates contacting said metal with an etching solution containing an active ingredient selected from the group consisting of ferric ions, ferricyanide ions, ceric ions, chromate ions, dichromate ions, and iodine, and introducing ozone into said etching solution to rejuvenate and agitate the solution.

Abstract: The process for producing microsized amorphous particles of a metal phosphate incorporates the steps offorming a solution of a metal alkoxide in an organic solvent,forming an aqueous phosphoric acid solution,introducing the alkoxide and the phosphoric acid solutions into a reactor vessel wherein the solutions are immiscible and forming two separate liquid phases with an interface,applying agitation to at least the region of the interface to promote a reaction between the metal alkoxide and said phosphoric acid at the interface,collecting the reaction product, andfiring it in an oxygen containing environment at a temperature sufficiently high to drive off the organic residue.

Abstract: This invention provides a process for production of a microcrystalline metal oxide having an average particle size less than about 1000 angstroms.An important feature of the invention process involves the application of ultrasonic wave energy during the stage that a solution of metal organic compounds is being treated to form a gelled solution. The ultrasonic energy input during the gelling stage enhances the production of a high purity metal oxide powder having fine grain particles of uniform microspheric dimensions.

Abstract: This invention provides a process for production of a microcrystalline metal oxide having an average particle size less than about 1000 angstroms.An important feature of the invention process involves the application of ultrasonic wave energy during the stage that a solution of metalorganic compounds is being treated to form a gelled solution. The ultrasonic energy input during the gelling stage enhances the production of a high purity metal oxide powder having fine grain particles of uniform microspheric dimensions.

Abstract: This invention provides a process for the production of poly(p-phenylene) which involves subjecting a liquid reaction medium containing 4,4'-dihalobiphenyl and alkali metal, e.g. lithium coupling reactants to activation with ultrasonic energy.

Abstract: This invention provides a process for the preparation of ferrimagnetic spinel fibers composed of crystallites corresponding to the formula:M.sub.1 Fe.sub.2 O.sub.4where M is a divalent metal such as manganese, iron, cobalt, nickel, copper, zinc, cadmium, magnesium, barium, strontium, or any combination thereof.

Abstract: This invention provides a process for producing a fine grain metastable tetragonal zirconia which has an average particle size less than about 1000 angstroms in diameter.The process involves multistage thermolysis of precursor solids comprising a homogeneous mixture of .beta.-ketonate compounds of zirconium and a stabilizer metal such as yttrium.

Abstract: The present invention provides an improved gel precipitation method for producing a Ni.sub.0.7 Zn.sub.0.3 Fe.sub.2 O.sub.4 type of ferrimagnetic spinel powder which has an average particle size of less than about 1000 angstroms.

Abstract: This invention provides a process for the preparation of ferrimagnetic spinel fibers composed of crystallites corresponding to the formula:M.sub.1 Fe.sub.2 O.sub.4where M is a divalent metal such as manganese, iron, cobalt, nickel, copper, zinc, cadmium, magnesium, barium, strontium, or any combination thereof.

Abstract: This invention provides an improved process for producing a microcrystalline ferrimagnetic spinel via an amorphous organometallic precursor.The process produces a high purity ferrite powder such as Ni.sub.0.7 Zn.sub.0.3 Fe.sub.2 O.sub.4 which has an average particle size less than about 1000 angstroms.

Abstract: The preparation of soluble polysilastyrene comprising reacting phenylmethyldichlorosilane and dimethyldichlorosilane in the mole ratio of 1 to 0.25-2 in the solvent solution in the presence of sodium.