Patents by Inventor Makoto Matsuo
Makoto Matsuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6712674Abstract: A polishing apparatus includes a polishing pad rotated by a surface plate rotating shaft about a surface plate axis, a slurry conduit supplying slurry to an upper surface of the polishing pad, a substrate holding mechanism holding a substrate, a substrate rotating shaft rotating the substrate holding mechanism about a substrate axis, and a rotating mechanism rotating the substrate axis or the surface plate axis about an eccentric axis. The angular velocity of rotation about the eccentric axis is set larger than the angular velocity of rotation about the substrate axis or the surface plate axis. Thus, the effective contact area between a small area on the substrate and the polishing pad is increased, biased wear of abrasive grains on the polishing pad is prevented, clogging of the polishing pad is suppressed, and new abrasive grains and new chemicals can be supplied with high efficiency to each area of the substrate. Thus, the polishing rate is improved.Type: GrantFiled: September 19, 2001Date of Patent: March 30, 2004Assignee: Towa CorporationInventors: Makoto Matsuo, Masataka Takehara, Michio Osada
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Patent number: 6699583Abstract: To provide a lathing method and apparatus capable of realizing lathing of a bar member made of a hard cutting material and lathing a stock made of a hard cutting material by a lathe including an NC automatic lathe, although lathing of the hard cutting material is impossible in a conventional case, a round bar is rotatably held to be fed along the longitudinal direction of the round bar by a guide bush fixed on the main body side of the lathing apparatus, and the round bar is sequentially fed from the guide bush to a machining tool arranged on the main body side, thereby lathing the round bar in a cantilevered state. For this purpose, a round bar having a solid lubricant layer having a predetermined thickness on the outer surface of the round bar in advance, thereby lathing the round bar so as to reduce friction.Type: GrantFiled: March 31, 1999Date of Patent: March 2, 2004Assignees: Kabushiki Kaisha Matsuo Kogyo Sho, Nitto Kogyo Kabushiki KaishaInventor: Makoto Matsuo
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Patent number: 6637303Abstract: A workpiece is cut by a cutting tool that is attached to a cylindrical support body vibrated by at least two piezoelectric drive elements. The efficiency of the mechanical vibration is improved by attaching the piezoelectric drive elements to a cylindrical body portion (7,7.1,7.2) of the tool support body (2) and by providing the support body with a plurality of necked-down end sections. At least the cylindrical body portion (7,7.1,7.2) is a cylinder with a substantially circular cross-section or with a circular cross-section to provide a constant or a substantially constant bending rigidity of the cylindrical tool support body.Type: GrantFiled: March 27, 2001Date of Patent: October 28, 2003Inventors: Toshimichi Moriwaki, Eiji Shamoto, Makoto Matsuo
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Patent number: 6493013Abstract: In the information recording an reproducing method and apparatus according to the present invention, a piece of picture image information is recorded as an analog quantity or a digital quantity an information carrying medium in a planar manner at a high density, charge potential is read for outputting electric signals to correspond to the recorded picture image information and then the outputted signals are printed out by means of various display unit or output device, with high quality and high resolution as well as ease processing of the information. The information carrying medium provides a long period of storage of information and enables stored picture image information to be repeatedly reproduced with a picture quality according to need.Type: GrantFiled: March 7, 1997Date of Patent: December 10, 2002Assignee: Dainippon Printing Co., Ltd.Inventors: Hiroyuki Obata, Takashi Aono, Hiroshi Mohri, Masato Koike, Hideaki Amano, Norikazu Saito, Makoto Matsuo, Minoru Utsumi, Chihaya Ogusu, Shunsuke Mukasa, Yoshiaki Kudo
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Publication number: 20020160695Abstract: There are provided a shaft rotating around the shaft's center in a direction in which a blade rotates, and the blade fixed to the shaft and moving at a rate of movement, wherein the shaft's center rotates at a predetermined rate of rotation with a small radius of rotation rapidly, the rate of rotation being greater than the rate of movement. Thus the blade is pressed against and thus cuts a substrate and produces chips and the blade is disengaged from the substrate and the chips thus move in the direction in which the blade rotates and the chips are thus removed from between the cutting edge of the blade and the substrate. This can provide reduced working resistance and hence enhanced working efficiency and also prevent the blade surface from having significant frictional heat. Furthermore, the generated frictional heat can readily dissipate and the blade can thus have a long life.Type: ApplicationFiled: March 20, 2002Publication date: October 31, 2002Applicant: TOWA CORPORATIONInventors: Michio Osada, Masataka Takehara, Makoto Matsuo
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Publication number: 20020152851Abstract: A workpiece is cut by a cutting tool that is attached to a cylindrical support body vibrated by at least two piezoelectric drive elements. The efficiency of the mechanical vibration is improved by attaching the piezoelectric drive elements to a cylindrical body portion (7,7.1,7.2) of the tool support body (2) and by providing the support body with a plurality of necked-down end sections. At least the cylindrical body portion (7,7.1,7.2) is a cylinder with a substantially circular cross-section or with a circular cross-section to provide a constant or a substantially constant bending rigidity of the cylindrical tool support body.Type: ApplicationFiled: March 27, 2001Publication date: October 24, 2002Inventors: Toshimichi Moriwaki, Eiji Shamoto, Makoto Matsuo
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Publication number: 20020119021Abstract: An elliptical vibratory cutting apparatus includes a control mechanism which applies a sinusoidal voltage having a predetermined phase difference to piezoelectric elements. Flexure vibrations are accordingly generated in X and Y directions. An amount of interference, caused by vibrations in one direction, with vibrations in another direction, is correctively eliminated by the control mechanism (interference eliminating unit 22). A workpiece is thus cut by means of a cutting tool through elliptical vibrations.Type: ApplicationFiled: February 21, 2002Publication date: August 29, 2002Inventors: Eiji Shamoto, Norikazu Suzuki, Toshimichi Moriwaki, Makoto Matsuo
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Patent number: 6428932Abstract: Zinc alloy powder for alkaline batteries containing Bi at a rate of 0.01-0.1% by weight, In at a rate of 0.01-0.1% by weight, Mg at a rate of 0.0005-0.03 % by weight and unavoidable impurities, such as Pb, Cd and Cu, capable of improving high-rate performance and being suitable for using as a cathode active substance for alkaline batteries is provided.Type: GrantFiled: May 19, 2000Date of Patent: August 6, 2002Assignee: Mitsui Mining & Smelting Company, Ltd.Inventors: Mitsuo Shinoda, Keiichi Kagawa, Seiji Fuchino, Kouji Morita, Yoshiaki Tanino, Makoto Matsuo, Akira Oyama
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Publication number: 20020037685Abstract: A polishing apparatus includes a polishing pad rotated by a surface place rotating shaft, a slurry conduit supplying slurry to an upper surface of the polishing pad, a substrate holding mechanism holding a substrate, a substrate rotating shaft rotating the substrate holding mechanism about a substrate axis and a rotating mechanism rotating the substrate axis about an eccentric axis. Angular velocity of rotation of the substrate axis about the eccentric axis is set larger than angular velocity of rotation of the substrate holding mechanism about the substrate axis. Thus, contact area between a small area on the substrate and the polishing pad is increased, bias wear of abrasive grains on the polishing pad is prevented, clogging of the polishing pad is suppressed, and new abrasive grains and new chemicals can be supplied with high efficiency to each area of the substrate. Thus, polishing rate is improved.Type: ApplicationFiled: September 19, 2001Publication date: March 28, 2002Applicant: TOWA CORPORATIONInventors: Makoto Matsuo, Masataka Takehara, Michio Osada
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Publication number: 20020005888Abstract: In the information recording an reproducing method and apparatus according to the present invention, a piece of picture image information is recorded as an analog quantity or a digital quantity an information carrying medium in a planar manner at a high density, charge potential is read for outputting electric signals to correspond to the recorded picture image information and then the outputted signals are printed out by means of various display unit or output device, with high quality and high resolution as well as ease processing of the information. The information carrying medium provides a long period of storage of information and enables stored picture image information to be repeatedly reproduced with a picture quality according to need.Type: ApplicationFiled: March 7, 1997Publication date: January 17, 2002Applicant: DAI NIPPON PRINTINGInventors: HIROYUKI OBATA, TAKASHI AONO, HIROSHI MOHRI, MASATO KOIKE, HIDEAKI AMANO, NORIKAZU SAITO, MAKOTO MATSUO, MINORU UTSUMI, CHIHAYA OGUSU, SHUNSUKE MUKASA, YOSHIAKI KUDO
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Publication number: 20010036728Abstract: In the formation of the wiring as a gate electrode of a polycide structure or a polymetal structure using a high melting-point metal, sharp recesses 24 on the surface of a polycrystalline silicon film 6 in the area situated the concave portions 4 generated at the ends of a trench element-isolating insulator 3 are removed. Thereafter an amorphous high melting-point metal silicide film or an amorphous high melting-point metal film via a nitride film of a high melting-point metal is formed on the flattened silicon film. Then, the amorphous high melting-point metal film or the like is crystallized to form a crystallized high melting-point metal film or the like. The polycrystalline silicon film 6a and the high melting-point metal silicide film 8 or the like are patterned to form the gate electrode of an MOS transistor. According to the manufacturing method, the occurrence of cracks in the high melting-point metal film or the high melting-point metal silicide film on a silicon film can be suppressed.Type: ApplicationFiled: April 19, 2001Publication date: November 1, 2001Applicant: NEC CorporationInventors: Toshiki Shinmura, Makoto matsuo, Eiichi Soda
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Publication number: 20010005610Abstract: The present invention discloses a semiconductor device, and a manufacturing method thereof, which is obtained by forming a logic circuit part capable of performing a high speed arithmetic processing and memory cell part of a DRAM having a high information holding characteristic, on the same substrate.Type: ApplicationFiled: December 22, 2000Publication date: June 28, 2001Inventors: Tadashi Fukase, Makoto Matsuo
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Patent number: 6088903Abstract: To provide a lathing method and apparatus capable of realizing lathing of a bar member made of a hard cutting material and lathing a stock made of a hard cutting material by a lathe including an NC automatic lathe, although lathing of the hard cutting material is impossible in a conventional case, a round bar is rotatably held to be fed along the longitudinal direction of the round bar by a guide bush fixed on the main body side of the lathing apparatus, and the round bar is sequentially fed from the guide bush to a machining tool arranged on the main body side, thereby lathing the round bar in a cantilevered state. Alternatively, a stock is gripped by the chuck of a lathe which performs turning or a lathing device which performs any other machining in addition to the turning, and the stock is lathed while the outer surface thereof is held to prevent an off-axis error.Type: GrantFiled: March 31, 1999Date of Patent: July 18, 2000Assignees: Kabushiki Kaisha Matsuo Kogyo Sho, Nitto Kogyo Kabushiki KaishaInventor: Makoto Matsuo
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Patent number: 5981123Abstract: The present invention relates to an electrostatic information recording medium in which a charge retaining layer having high insulating properties is laminated on an electrode, and an electrostatic information recording/reproducing process wherein, while said electrostatic information recording medium is positioned in opposition to a photosensitive member on which a photoconductive layer is laminated, the recording medium is subjected to information exposure with the application of voltage between both electrodes to accumulate electrostatic charges thereon depending upon the dosage of said information exposure, and the electrostatic information thus accumulated is reproduced by potential reading.The present electrostatic information recording medium has an information density as expressed in terms of a high recording capacity of the order of 8.times.10.sup.8 bits/cm.sup.Type: GrantFiled: September 22, 1997Date of Patent: November 9, 1999Assignee: Dai Nippon Printing Co. Ltd.Inventors: Makoto Matsuo, Minoru Utsumi, Masayuki Iijima, Yukio Taniguchi, Hiroyuki Obata, Seiji Take
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Patent number: 5983057Abstract: In the information recording an reproducing method and apparatus according to the present invention, a piece of picture image information is recorded as an analog quantity or a digital quantity an information carrying medium in a planar manner at a high density, charge potential is read for outputting electric signals to correspond to the recorded picture image information and then the outputted signals are printed out by means of various display unit or output device, with high quality and high resolution as well as ease processing of the information. The information carrying medium provides a long period of storage of information and enables stored picture image information to be repeatedly reproduced with a picture quality according to need.Type: GrantFiled: June 5, 1995Date of Patent: November 9, 1999Assignee: Dai Nippon Printing Co. LtdInventors: Makoto Matsuo, Minoru Utsumi, Chihaya Ogusu, Shunsuke Mukasa, Yoshiaki Kudo, Hiroyuki Obata, Takashi Aono, Hiroshi Mohri, Masato Koike, Hideaki Amano, Norikazu Saito
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Patent number: 5974920Abstract: To provide a lathing method capable of realizing lathing of a bar member made of a hard cutting material and lathing a stock made of a hard cutting material by a lathe including an NC automatic lathe, although lathing of the hard cutting material is impossible in a conventional case, a round bar is rotatably held to be fed along the longitudinal direction of the round bar by a guide bush fixed on the main body side of the lathing apparatus, and the round bar is sequentially fed from the guide bush to a machining tool arranged on the main body side, thereby lathing the round bar in a cantilevered state. For this purpose, a round bar having a solid lubricant layer having a predetermined thickness on the outer surface of the round bar in advance, thereby lathing the round bar so as to reduce friction.Type: GrantFiled: December 24, 1997Date of Patent: November 2, 1999Assignees: Kabushiki Kaisha Matsuo Kogyo Sho, Nitto Kogyo Kabushiki KaishaInventor: Makoto Matsuo
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Patent number: 5933367Abstract: A control gate is loaded with a negative voltage pulse and a source region is loaded with a positive constant voltage pulse while a drain region is at a floating state. More specifically, the absolute value of the voltage applied to the control gate is increased with time for a period from the start of a memory erasing action (the application of the pulse voltage) to 2 msec and then remains constant from 2 msec to the end of the memory erasing action. As the result, a potential difference between the source region and the control gate at the start of the memory erasing action is smaller than that at the end of the memory erasing action. This prevents the tunnel oxide layer from receiving a high electric field stress at the start of the memory erasing action, thus improving the write/erase endurance.Type: GrantFiled: March 18, 1998Date of Patent: August 3, 1999Assignee: NEC CorporationInventors: Makoto Matsuo, Ayumi Yokozawa
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Patent number: 5834035Abstract: In an apparatus for molding resin to seal electronic parts, an internal die space defined at least by pots, cull portions, resin passages and cavities when an upper mold section and a lower mold section are closed, is cut off or sealed from the exterior atmosphere. Thereupon the die space is evacuated using a first evacuation by a vacuum source and a second or instantaneous evacuation by an instantaneous evacuation mechanism. The vacuum source for the first evacuation may be an active vacuum pump, while the instantaneous evacuation mechanism may be a vacuum tank that has been previously pumped down, for example. Using this apparatus, it is possible to quickly improve the degree of vacuum in the internal die space by efficiently and reliably discharging air, moisture and gas from the internal die space to the exterior due to a synergistic action of the evacuation and the instantaneous evacuation. Consequently, the formation of voids in resin molded members is prevented.Type: GrantFiled: December 18, 1996Date of Patent: November 10, 1998Assignee: Towa CorporationInventors: Michio Osada, Yoshihisa Kawamoto, Makoto Matsuo, Koichi Araki
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Patent number: 5753538Abstract: In a method of sealing electronic parts with molded resin, a hollow sealing member is arranged on a mold surface of an upper mold section of a mold comprising the upper mold section and a lower mold section, so that the hollow sealing member is pressurized and expanded to convexly project from the mold surface of the upper mold section. In this state, the lower mold section is upwardly moved to be brought into contact with the expanded hollow sealing member. Further, an internal space portion, including pots, cull portions, resin passages and cavities, which is enclosed with the expanded hollow sealing member is set in a state isolated from the exterior when the upper mold section and the lower mold section are closed, so that the internal space portion is forcibly evacuated in this state. Thus, air, moisture and gases are efficiently and reliably suction-discharged from the internal space portion, whereby the internal space portion is set at a prescribed degree of vacuum.Type: GrantFiled: March 6, 1995Date of Patent: May 19, 1998Assignee: Towa CorporationInventors: Takaki Kuno, Yoshihisa Kawamoto, Makoto Matsuo, Koichi Araki, Satoshi Nihei
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Patent number: 5731116Abstract: The present invention relates to an electrostatic information recording medium in which a charge retaining layer having high insulating properties is laminated on an electrode, and an electrostatic information recording/reproducing process wherein, while said electrostatic information recording medium is positioned in opposition to a photosensitive member on which a photoconductive layer is laminated, the recording medium is subjected to information exposure with the application of voltage between both electrodes to accumulate electrostatic charges thereon depending upon the dosage of said information exposure, and the electrostatic information thus accumulated is reproduced by potential reading.The present electrostatic information recording medium has an information density as expressed in terms of a high recording capacity of the order of 8.times.10.sup.8 bits/cm.sup.Type: GrantFiled: May 26, 1995Date of Patent: March 24, 1998Assignee: Dai Nippon Printing Co., Ltd.Inventors: Makoto Matsuo, Minoru Utsumi, Masayuki Iijima, Yukio Taniguchi, Hiroyuki Obata, Seiji Take