Abstract: An electric brake device includes an electric motor; a braking force application mechanism configured to apply a braking force on a vehicle wheel; a lock mechanism configured to assume one of a locked condition; a temperature sensor configured to measure an ambient temperature of a vehicle; and a freezing preventive power supply unit configured to initiate supply of an electric power to the electric motor or a drive source of the lock mechanism. The freezing preventive power supply unit interrupts the supply of the electric power to the electric motor or the drive source of the lock mechanism when the temperature detected by the temperature sensor exceeds a second preset temperature T2 that is higher than a first preset temperature T1.

Abstract: A substrate processing method of processing a substrate using a block copolymer containing a hydrophilic polymer and a hydrophobic polymer, the substrate processing method includes: a block copolymer coating step of applying the block copolymer onto the substrate on which a predetermined projecting and recessed pattern is formed, to form a coating film of the block copolymer; a polymer separation step of phase-separating the block copolymer into the hydrophilic polymer and the hydrophobic polymer; a polymer removal step of selectively removing the hydrophilic polymer from the phase-separated block copolymer; and after the block copolymer coating step and before the polymer removal step, a film thickness reduction step of reducing a film thickness of the coating film of the block copolymer.

Abstract: The electric linear motion actuator includes an electric motor, a drive shaft configured to be rotated by the electric motor, a rotation-to-linear motion converting mechanism configured to convert the rotational motion of the drive shaft to the axial linear motion of an axially movably supported outer ring member, and an electric locking mechanism incorporated in a reduction gear mechanism in which the rotation of a rotor shaft of the electric motor is reduced in speed and transmitted to the drive shaft. When the electric locking mechanism is energized, the power transmission path shifts to the locked state in which power cannot be transmitted, and when the electric locking mechanism is de-energized thereafter, the power transmission path is kept in the locked state. The electric locking mechanism is built in a motor case of the electric motor so that the electric motor and the electric locking mechanism are unitized.

Abstract: Described herein are technologies to facilitate device fabrication, especially those that involve spin-on coatings of a substrate (e.g., wafer). More particularly, technologies described herein facilitate the planarization (i.e., flatness) of spin-on coatings during the device fabrication to form a uniformly planar film or layer on the substrate. This abstract itself is not intended to limit the scope of this patent. The scope of the present invention is pointed out in the appending claims.

Abstract: A substrate treatment method using a block copolymer containing a hydrophilic polymer and a hydrophobic polymer includes a polymer separating step, wherein a ratio of a molecular weight of the hydrophilic polymer in the block copolymer is adjusted to 20% to 40% so that the hydrophilic polymers align at positions corresponding to a hexagonal close-packed structure in a plan view after the polymer separating step, and at the polymer separating step, a columnar first hydrophilic polymer is phase-separated on each of circular patterns of hydrophobic coating films and a columnar second hydrophilic polymer is phase-separated between the first hydrophilic polymers, and a diameter of the circular pattern is set so that the first hydrophilic polymers and the second hydrophilic polymers align at positions corresponding to the hexagonal close-packed structure in a plan view.

Abstract: The present invention, when forming a pattern on a substrate, forms a film of a block copolymer containing at least two polymers on the substrate, heats the film of the block copolymer under a solvent vapor atmosphere to subject the block copolymer to phase separation, and removes one of the polymers in the film of the phase-separated block copolymer, thereby accelerating fluidization of the polymers of the block copolymer to enable acceleration of the phase separation.

Abstract: The present invention, when forming a pattern on a substrate, forms a film of a block copolymer containing at least two polymers on the substrate, heats the film of the block copolymer under a solvent vapor atmosphere to subject the block copolymer to phase separation, and removes one of the polymers in the film of the phase-separated block copolymer, thereby accelerating fluidization of the polymers of the block copolymer to enable acceleration of the phase separation.

Abstract: A substrate treatment method includes: a polymer separation step of phase-separating a block copolymer into a hydrophilic polymer and a hydrophobic polymer; and a polymer removal step of selectively removing the hydrophilic polymer from the phase-separated block copolymer, wherein in the polymer removal step, the hydrophilic polymer is removed by: irradiating the phase-separated block copolymer with an energy ray; then supplying a first polar organic solvent having a first degree of dissolving the hydrophilic polymer, being lower in boiling point than water and capable of dissolving water, and not dissolving the hydrophobic polymer, to the block copolymer; and then supplying a second polar organic solvent having a second dissolving degree lower than the first dissolving degree, being higher in boiling point than water, and not dissolving the hydrophobic polymer, to the block copolymer.

Abstract: A substrate treatment method of treating a substrate using a block copolymer containing a hydrophilic polymer and a hydrophobic polymer, includes: a resist pattern formation step of forming a predetermined resist pattern by a resist film on the substrate; a thin film formation step of forming a thin film for suppressing deformation of the resist pattern on a surface of the resist pattern; a block copolymer coating step of applying a block copolymer to the substrate after the formation of the thin film; and a polymer separation step of phase-separating the block copolymer into the hydrophilic polymer and the hydrophobic polymer.

Abstract: The present invention is configured to: form, on a substrate, a neutral layer having an intermediate affinity to a hydrophilic polymer and a hydrophobic polymer; form a resist pattern by performing exposure processing on a resist film formed on the neutral layer and then developing the resist film after the exposure processing; perform a surface treatment on the resist pattern by supplying an organic solvent having a polarity to the resist pattern; apply the block copolymer onto the neutral layer; and phase-separate the block copolymer on the neutral layer into the hydrophilic polymer and the hydrophobic polymer.

Abstract: A substrate treatment method includes: forming a plurality of circular patterns of a resist film on a substrate; thereafter applying a first block copolymer; then phase-separating the first block copolymer into a hydrophilic polymer and a hydrophobic polymer; thereafter selectively removing the hydrophilic polymer; then selectively removing the resist film from a top of the substrate; thereafter applying a second block copolymer to the substrate; then phase-separating the second block copolymer into a hydrophilic polymer and a hydrophobic polymer; and thereafter selectively removing the hydrophilic polymer from the phase-separated second block copolymer. A ratio of a molecular weight of the hydrophilic polymer in the first block copolymer and the second block copolymer is 20% to 40%.

Abstract: A substrate treatment method includes: forming a plurality of circular patterns of a resist film on a substrate; thereafter applying a first block copolymer; then phase-separating the first block copolymer into a hydrophilic polymer and a hydrophobic polymer; thereafter selectively removing the hydrophilic polymer; then selectively removing the resist film from a top of the substrate; thereafter applying a second block copolymer to the substrate; then phase-separating the second block copolymer into a hydrophilic polymer and a hydrophobic polymer; and thereafter selectively removing the hydrophilic polymer from the phase-separated second block copolymer. A ratio of a molecular weight of the hydrophilic polymer in the first block copolymer and the second block copolymer is 20% to 40%.

Abstract: An electric linear motion actuator includes a locking mechanism for locking and unlocking the rotor shaft of an electric motor. The locking mechanism includes circumferentially arranged locking holes provided in a gear of a reduction gear mechanism, a locking pin moved toward and away from the locking holes, and engaged in one locking hole to lock the gear when the locking pin is moved toward the gear, and a linear solenoid for moving the locking pin toward and away from the gear. The plunger of the linear solenoid and the locking pin are formed as separate parts, and disposed coaxial with each other with their end faces axially facing each other. This prevents the moment load applied from the gear to the locking pin from acting on the plunger, thereby preventing damage to a bobbin slidably supporting the radially inner surface of the plunger.

Abstract: The present invention is a pattern forming method of forming a pattern on a substrate using a block copolymer, the pattern forming method including the steps of: forming a film of a block copolymer containing at least two kinds of polymers on the substrate; heating the film of the block copolymer; irradiating the heated film of the block copolymer with ultraviolet light in an atmosphere of an inert gas; and supplying an organic solvent to the film of the block copolymer irradiated with the ultraviolet light.

Abstract: The electric brake actuator with a parking function is provided with: detection unit which is provided in a vehicle in which the electric brake actuator is provided and is capable of detecting movement of the vehicle from a stop state; and determination unit configured to determine whether or not a locking mechanism has shifted to a parking locking state, by using a detection signal outputted from the detection unit, when the locking mechanism is driven by an actuator so as to switch from an unlocking state to the parking locking state.

Abstract: An electric linear motion actuator includes planetary rollers mounted between the radially inner surface of an outer ring member and the radially outer surface of a rotary shaft, and a carrier rotatable about the rotary shaft and including radially movable roller shafts rotatably supporting the respective planetary rollers. Elastic rings each having circumferentially separate ends are each wrapped around the roller shafts to radially inwardly bias the roller shafts, thereby bringing the respective planetary rollers into elastic contact with the radially outer surface of the rotary shaft. Each elastic ring is prevented from rotating relative to the roller shafts, thereby preventing one of the roller shafts from being axially aligned with the gap between the circumferential separate ends, causing the elastic ring to be radially compressed and thus making it impossible for the elastic rings to radially bias the roller shafts.

Abstract: A photoresist pattern used for forming a pattern of a block copolymer is formed on a substrate, and then an acid solution is supplied and an alkaline solution is further supplied to the photoresist pattern so as to slim and smooth the photoresist pattern. A block copolymer solution is applied to the substrate on which the smoothed photoresist pattern has been formed, to form a film of the block copolymer, and the film is heated.

Abstract: The present invention, when forming a pattern on a substrate, forms a film of a block copolymer containing at least two polymers on the substrate, heats the film of the block copolymer under a solvent vapor atmosphere to subject the block copolymer to phase separation, and removes one of the polymers in the film of the phase-separated block copolymer, thereby accelerating fluidization of the polymers of the block copolymer to enable acceleration of the phase separation.

Abstract: An electric brake device includes an electric motor; a braking force application mechanism configured to apply a braking force on a vehicle wheel; a lock mechanism configured to assume one of a locked condition; a temperature sensor configured to measure an ambient temperature of a vehicle; and a freezing preventive power supply unit configured to initiate supply of an electric power to the electric motor or a drive source of the lock mechanism. The freezing preventive power supply unit interrupts the supply of the electric power to the electric motor or the drive source of the lock mechanism when the temperature detected by the temperature sensor exceeds a second preset temperature T2 that is higher than a first preset temperature T1.

Abstract: A linear motion actuator includes an outer ring member mounted in a housing, a rotary shaft rotated by a motor, planetary rollers mounted between the outer ring member and the shaft and supported by a carrier rotatable about the shaft. A helical rib is formed on the inner surface of the outer ring member which is engaged in helical grooves formed in outer surfaces of the planetary rollers. When the shaft rotates, the planetary rollers rotate and revolve, thereby axially moving the outer ring member. Uneven axial loads applied to the planetary rollers from the outer ring member are supported by thrust bearings disposed between the planetary rollers and an inner disk of the carrier. Aligning seats are provided between each opposed pair of the planetary rollers and the thrust bearings such that the contact surfaces of the aligning seats shift relative to each other under the uneven axial loads.