Abstract: A projection device includes a first and a second tilting mirror matrix, each including a plurality of tilting mirrors. A cover glass covers the tilting mirrors. An imaging lens system includes a relay lens system which images the tilting mirrors of the first tilting mirror matrix onto the tilting mirrors of the second tilting mirror matrix. Thus light reflected by the tilting mirrors of the first tilting mirror matrix onto tilting mirrors of the second tilting mirror matrix, and a projection lens system, which projects light reflected by tilting mirrors of the second tilting mirror matrix, in order to produce an image, is provided. The imaging lens system further includes a correction element which corrects at least one image error caused by the light obliquely passing through the cover glasses.

Abstract: An imaging optical system has a plurality of mirrors, which image an object field in an object plane into an image field in an image plane. A reflection face of at least one of the mirrors is configured as a free form face which cannot be described by a rotationally symmetrical function. The object field has an aspect ratio greater than 1. A ratio of a minimal and a maximal transverse dimension of the object field can be less than 0.9.

Abstract: A projection device includes a first and a second tilting mirror matrix, each including a plurality of tilting mirrors. A cover glass covers the tilting mirrors. An imaging lens system includes a relay lens system which images the tilting mirrors of the first tilting mirror matrix onto the tilting mirrors of the second tilting mirror matrix. Thus light reflected by the tilting mirrors of the first tilting mirror matrix onto tilting mirrors of the second tilting mirror matrix, and a projection lens system, which projects light reflected by tilting mirrors of the second tilting mirror matrix, in order to produce an image, is provided. The imaging lens system further includes a correction element which corrects at least one image error caused by the light obliquely passing through the cover glasses.

Abstract: A projection device includes a first and a second tilting mirror matrix, each including a plurality of tilting mirrors. A cover glass covers the tilting mirrors. An imaging lens system includes a relay lens system which images the tilting mirrors of the first tilting mirror matrix onto the tilting mirrors of the second tilting mirror matrix. Thus light reflected by the tilting mirrors of the first tilting mirror matrix onto tilting mirrors of the second tilting mirror matrix, and a projection lens system, which projects light reflected by tilting mirrors of the second tilting mirror matrix, in order to produce an image, is provided. The imaging lens system further includes a correction element which corrects at least one image error caused by the light obliquely passing through the cover glasses.

Abstract: Imaging optics includes a first mirror in the imaging beam path after the object field, a last mirror in the imaging beam path before the image field, and a fourth to last mirror in the imaging beam path before the image field. In an unfolded imaging beam path between the object plane and the image plane, an impingement point of the chief ray on a used region of each of the plurality of mirrors has a mirror spacing from the image plane. The mirror spacing of the first mirror is greater than the mirror spacing of the last mirror. The mirror spacing of the fourth to last mirror is greater than the mirror spacing of the first mirror. Chief rays that emanate from points of the object field that are spaced apart from another have a mutually diverging beam course, giving a negative back focus of the entrance pupil.

Abstract: An optical observation instrument has two optical transmission channels for transmitting two partial ray bundles (9A, 9B). The optical observation instrument has a main objective (1) common to the optical transmission channels, an electronic image sensor (7) for sequentially recording the partial ray bundles (9A, 9B), an intermediate imaging optical system (3) between the main objective (1) and the image sensor (7) and common to the optical transmission channels, and a tilting mirror matrix (5) between the main objective (1) and the image sensor (7). The intermediate imaging optical system (3) is arranged so that the respective partial ray bundle (9A, 9B) is deflected toward the image sensor (7) and passes the intermediate imaging optical system (3) both on the way from the main objective (1) to the tilting mirror matrix (5) and on the way from the tilting mirror matrix (5) to the image sensor (7).

Abstract: A projection system having a first tilting mirror matrix, a second tilting mirror matrix, and an imaging lens, which projects the first tilting mirror matrix onto the second tilting mirror matrix, wherein each tilting mirror matrix has multiple tilting mirrors, the tilting axes of which are positioned in a modulator surface plane. The imaging lens includes a first lens and an imaging mirror, and the imaging mirror forms an aperture stop of the imaging lens, wherein the aperture diaphragm includes an angle of other than 90° with the normal of the modulator surface of the first tilting mirror matrix without taking into account any optical path folds.

Abstract: A projection device includes a first and a second tilting mirror matrix, each including a plurality of tilting mirrors. A cover glass covers the tilting mirrors. An imaging lens system includes a relay lens system which images the tilting mirrors of the first tilting mirror matrix onto the tilting mirrors of the second tilting mirror matrix. Thus light reflected by the tilting mirrors of the first tilting mirror matrix onto tilting mirrors of the second tilting mirror matrix, and a projection lens system, which projects light reflected by tilting mirrors of the second tilting mirror matrix, in order to produce an image, is provided. The imaging lens system further includes a correction element which corrects at least one image error caused by the light obliquely passing through the cover glasses.

Abstract: An imaging system with an imaging lens system for imaging an object into an image plane is disclosed. The imaging lens system contains an optical component for a higher depth of field, of which the refractive power is alterable and the optical effect remains rotation-symmetrical.

Abstract: A projection system having a first tilting mirror matrix, a second tilting mirror matrix, and an imaging lens, which projects the first tilting mirror matrix onto the second tilting mirror matrix, wherein each tilting mirror matrix has multiple tilting mirrors, the tilting axes of which are positioned in a modulator surface plane. The imaging lens includes a first lens and an imaging mirror, and the imaging mirror forms an aperture stop of the imaging lens, wherein the aperture diaphragm includes an angle of other than 90° with the normal of the modulator surface of the first tilting mirror matrix without taking into account any optical path folds.

Abstract: A projection system having a first tilting mirror matrix, a second tilting mirror matrix, and an imaging lens, which projects the first tilting mirror matrix onto the second tilting mirror matrix, wherein each tilting mirror matrix has multiple tilting mirrors, the tilting axes of which are positioned in a modulator surface plane. The imaging lens includes a first lens and an imaging mirror, and the imaging mirror forms an aperture stop of the imaging lens, wherein the aperture diaphragm includes an uneven angle of 90° together with the normal of the modulator surface of the first tilting mirror matrix without taking into account any optical path folds.

Abstract: Imaging optics for optical devices, with which reflections of the illumination light, which is guided through the same optical elements as the observation light, are kept from reaching the observation pupil of the imaging beam path. The non-reflective imaging optics include at least two refractive optical elements, which are utilized for illumination as well as observation. The at least two refractive optical elements are designed approximately wedge-shaped and are tilted at a random azimuth angle of at least 5° and/or are positioned off-center in the beam path to block out the single reflections of the illumination, occurring at the optical system surfaces, for the observation. The imaging optics are for optical devices, particularly in ophthalmology thought the invention is applicable to other ophthalmological devices as well as to optical devices outside of this field.

Abstract: A method and device are provided for time-sequential recording of three-dimensional images each of which has at least one first and one second partial image. The device has a sensor (13) with pixels (16) subdivided into two mutually different pixel groups. An imaging optical unit has a switchable changeover device (9) that images the partial images of the three-dimensional image time-sequentially onto the sensor (13). A control unit is connected to the sensor (13) and the changeover device (9) to control the reading of the sensor (13) and the switching states of the changeover device (9) so that the changeover device (9), during the imaging of the partial images onto the sensor (13) assumes at least one switching state in which excerpts of different partial images are fed to the different pixel groups of the sensor (13).

Abstract: An optical observation instrument has two optical transmission channels for transmitting two partial ray bundles (9A, 9B). The optical observation instrument has a main objective (1) common to the optical transmission channels, an electronic image sensor (7) for sequentially recording the partial ray bundles (9A, 9B), an intermediate imaging optical system (3) between the main objective (1) and the image sensor (7) and common to the optical transmission channels, and a tilting mirror matrix (5) between the main objective (1) and the image sensor (7). The intermediate imaging optical system (3) is arranged so that the respective partial ray bundle (9A, 9B) is deflected toward the image sensor (7) and passes the intermediate imaging optical system (3) both on the way from the main objective (1) to the tilting mirror matrix (5) and on the way from the tilting mirror matrix (5) to the image sensor (7).

Abstract: In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of elements arranged so that during operation the plurality of elements image radiation at a wavelength ? from an object plane to an image plane. At least one of the elements is a reflective element that has a rotationally-asymmetric surface positioned in a path of the radiation. The rotationally-asymmetric surface deviates from a rotationally-symmetric reference surface by a distance of about ? or more at one or more locations of the rotationally-asymmetric surface.

Abstract: An imaging optical system has a plurality of mirrors, which image an object field in an object plane into an image field in an image plane. A reflection face of at least one of the mirrors is configured as a free form face which cannot be described by a rotationally symmetrical function. The object field has an aspect ratio greater than 1. A ratio of a minimal and a maximal transverse dimension of the object field can be less than 0.9.

Abstract: An anamorphic imaging objective having multiple effective optical surfaces. One of the effective surfaces is implemented as anamorphic and one of the effective surfaces is implemented as a free-form surface, which has an aspheric contour in at least one of the two main sections and which has precisely two planes of mirror symmetry, the main sections lying in the planes of mirror symmetry.

Abstract: In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of elements arranged so that during operation the plurality of elements image radiation at a wavelength ? from an object plane to an image plane. At least one of the elements is a reflective element that has a rotationally-asymmetric surface positioned in a path of the radiation. The rotationally-asymmetric surface deviates from a rotationally-symmetric reference surface by a distance of about ? or more at one or more locations of the rotationally-asymmetric surface.

Abstract: Imaging optics includes a first mirror in the imaging beam path after the object field, a last mirror in the imaging beam path before the image field, and a fourth to last mirror in the imaging beam path before the image field. In an unfolded imaging beam path between the object plane and the image plane, an impingement point of the chief ray on a used region of each of the plurality of mirrors has a mirror spacing from the image plane. The mirror spacing of the first mirror is greater than the mirror spacing of the last mirror. The mirror spacing of the fourth to last mirror is greater than the mirror spacing of the first mirror. Chief rays that emanate from points of the object field that are spaced apart from another have a mutually diverging beam course, giving a negative back focus of the entrance pupil.

Abstract: An imaging optics has a plurality of mirrors which image an object field in an object plane in an image field in an image plane. A pupil plane is arranged in the imaging beam path between the object field and the image field. A stop is arranged in the pupil plane. The pupil plane is tilted at an angle (?) with respect to the object plane, where ? is greater than 0.1°. The imaging optics results allows for a manageable combination of small imaging errors, manageable production and good throughput.