Abstract: A method of preventing a mass flow controller from participating in crosstalk in an array of mass flow controllers is described. The method includes sensing and providing a signal indicative of a fluid pressure inside of a mass flow controller with a pressure sensor contained within the mass flow controller, determining a response of a control valve to a rapid pressure perturbation at the inlet of the mass flow controller using the signal indicative of the fluid pressure to avoid overcompensation for the rapid pressure perturbation, and adjusting a control valve contained within the mass flow controller downstream of the pressure sensor, based on the determined response, so that the mass flow controller avoids overcompensating for the rapid pressure perturbation. The pressure sensor is positioned such that the pressure sensor is sensitive to rapid pressure perturbations at the inlet of the mass flow controller.

Abstract: The disclosure pertains to a space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The present invention also pertains to an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.

Abstract: Described is a space-conserving integrated fluid delivery system particularly useful for gas distribution in semiconductor processing equipment. The system includes integrated fluid flow network architecture, and may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded. Subsequent to diffusion bonding, a stainless steel diffusion bonded part may advantageously be treated to enhance corrosion resistance using a series of steps designed to bring more chromium to the surface of the steel.

Abstract: The disclosure pertains to a space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The present invention also pertains to an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.

Abstract: A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The invention pertains to a diffusion bonded integrated fluid flow network architecture, which includes, in addition to a layered substrate containing fluid flow channels, an in-line filter and may include various fluid handling and monitoring components. The integrated fluid delivery system that is formed from a layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.

Abstract: Apparatus and a method for associating an electronic patient record with the corresponding patient are described. A data processor accesses a patient record not associated with a unique person and compares the patient identification data to corresponding data in a known patient record to identify a set of likely matching patients. An input is provided for selecting a matching patient. Also disclosed is apparatus for providing customized patient discharge instructions relating information in the electronic patient record to patient-specific discharge instructions. A data processor inserts the patient specific instructions into draft instructions, thereby producing patient-specific discharge instructions. An updated version of charting by exception is disclosed, using macros to positively record data on a medical record that is not specifically marked on a template by the attending medical professional.

Abstract: Apparatus is provided including an input device, a medical risk database, a data processor, and a communication device. Data entered in the input device, usually by a health care professional, defines a patient data record. The medical risk database associates certain patient data entered into the data record, which increases the risk of a missed medical care opportunity, with additional medical care to address the risk. The communication device responds to the identification of patient data presenting a medical risk by communicating to a health care professional additional medical care selected to identify and take advantage of a medical care opportunity. Templates are also disclosed having “red light green light” indicators that indicate red to prompt consideration of a system and green to indicate it has been considered. A triage template and key information to provide additional information to the diagnosing or treating professional are also provided.

Abstract: A combination manual/pneumatic shut-off valve (11) is disclosed. The valve comprises a housing (13); a valve chamber (17) which is disposed in the housing and which has a fluid inlet (19) and a fluid outlet (21); a diaphragm (23); a valve seat (25); a pneumatically driven actuator (29) which is adapted to move the diaphragm from a first position in which the diaphragm and the valve seat form a seal between the fluid inlet and the fluid outlet, to a second position in which the fluid inlet and fluid outlet are in open communication with each other; and a handle (31) adapted to manually move the diaphragm from the second position to the first position by way of the actuator, independently of the pneumatic control signal. The valve allows the length of process fluid control assemblies, and hence the size of fluid panels, to be reduced by combining the functionalities of a manual valve and a pneumatic valve into a single element.

Abstract: The disclosure pertains to a space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The present invention also pertains to an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.

Abstract: The disclosure pertains to a compact integrated fluid control valve useful in controlling process fluids handled as part of a semiconductor processing operation. In the wetted section of the valve, process fluids enter through one or more entrance ports and exit through an annular metallic valve seat. In the valve's drive section, a sliding cylinder, including an upper horizontal member tied to a lower horizontal member, moves up and down. The lower horizontal member presses a diaphragm against the valve seat to close the valve, and moves away from the valve seat to permit fluid flow through the valve. A spring presses at the top of the upper horizontal member of the sliding cylinder, while a controlled pneumatic pressure is applied at the bottom of the upper horizontal member. The balance between the force of the spring and the force of the pneumatic pressure determines the extent to which the valve is open.