Abstract: Neodymium-doped yttrium calcium oxyborate (Nd:YCOB) is the single active gain element for a solid-state laser device capable of achieving both lasing and self-frequency doubling optical effects. A pumping source for optically pumping Nd:YCOB can generate a laser light output of approximately 400 mW at approximately 1060 nm wavelength and a self-frequency doubled output of approximately 60 mW at approximately 530 nm wavelength. Thus, a laser device can be designed that is compact, less expensive and a high-powered source of visible, green laser light.

Abstract: A tunable, solid state laser device with both visible and infrared laser emission is developed with a trivalent ytterbium-doped yttrium calcium oxyborate crystal as the host crystal. The Yb:YCOB crystal generates an infrared fundamental light over a wide bandwidth, from approximately 980 nanometers (nm) to approximately 1100 nm. The bandwidth generated by the Yb:YCOB crystal is approximately 100 nm wide and supports the generation of pulsed infrared light or when self-frequency doubled provides a compact, efficient, source of tunable, visible, blue or green laser light in wavelengths of approximately 490 nm to approximately 550 nm.

Abstract: A tunable, solid state laser device with both visible and infrared laser emission is developed with a trivalent ytterbium-doped yttrium calcium oxyborate crystal as the host crystal. The Yb:YCOB crystal generates an infrared fundamental light over a wide bandwidth, from approximately 980 nanometers (nm) to approximately 1100 nm. The bandwidth generated by the Yb:YCOB crystal is approximately 100 nm wide and supports the generation of pulsed infrared light or when self-frequency doubled provides a compact, efficient, source of tunable, visible, blue or green laser light in wavelengths of approximately 490 nm to approximately 550 nm.

Abstract: Neodymium-doped yttrium calcium oxyborate (Nd:YCOB) is the single active gain element for a solid-state laser device capable of achieving both lasing and self-frequency doubling optical effects. A pumping source for optically pumping Nd:YCOB can generate a laser light output of approximately 400 mW at approximately 1060 nm wavelength and a self-frequency doubled output of approximately 60 mW at approximately 530 nm wavelength. Thus, a laser device can be designed that is compact, less expensive and a high-powered source of visible, green laser light.

Abstract: A high repetition-rate laser plasma target source system wherein ice crystals are irradiated by a laser and lithography system. The target source system comprises in a preferred embodiment a liquid tank source and freezer means which freezes microscopic particles into crystal shapes which are projected by a nozzle jet from a high repetition rate liquid-droplet injector into the path of a flashing laser beam, which results in producing soft x-rays of approximately 11.7 nm and 13 nm. Uncollected and unshot target crystals are collected and reliquified by a heater source in order to be recycled back to the liquid tank source. Optionally an auxiliary source and detector system can be used to allow for instantaneous triggering of the laser beam. The target source system can be incorporated into well known EUV lithography systems for the production of wafer chips.

Abstract: A high repetition-rate laser plasma target source system and lithography system is disclosed. The target source system comprises in a preferred embodiment a liquid tank source and freezer which freezes microscopic particles into crystal shapes which are projected by a nozzle jet from a high repetition rate liquid-droplet injector into the path of a flashing laser beam, which results in producing soft x-rays of approximately 13 nm. Uncollected and unshot target crystals are collected and reliquified by a heater source in order to be recycled back to the liquid tank source. Optionally an auxiliary source and detector system can be used to allow for instantaneous triggering of the laser beam. The target source system can be incorporated into well known EUV lithography systems for the production of wafer chips.