Patents by Inventor Masaki Utsumi

Masaki Utsumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9673154
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Grant
    Filed: May 5, 2016
    Date of Patent: June 6, 2017
    Assignee: PANASONIC CORPORATION
    Inventors: Makoto Tsutsue, Masaki Utsumi
  • Publication number: 20160247771
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Application
    Filed: May 5, 2016
    Publication date: August 25, 2016
    Inventors: Makoto TSUTSUE, Masaki UTSUMI
  • Patent number: 9082779
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Grant
    Filed: March 31, 2014
    Date of Patent: July 14, 2015
    Assignee: PANASONIC CORPORATION
    Inventors: Makoto Tsutsue, Masaki Utsumi
  • Publication number: 20150194391
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Application
    Filed: March 19, 2015
    Publication date: July 9, 2015
    Inventors: Makoto TSUTSUE, Masaki UTSUMI
  • Publication number: 20140210056
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Application
    Filed: March 31, 2014
    Publication date: July 31, 2014
    Applicant: Panasonic Corporation
    Inventors: Makoto TSUTSUE, Masaki UTSUMI
  • Patent number: 8710595
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Grant
    Filed: July 12, 2013
    Date of Patent: April 29, 2014
    Assignee: Panasonic Corporation
    Inventors: Makoto Tsutsue, Masaki Utsumi
  • Patent number: 8618618
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Grant
    Filed: July 17, 2012
    Date of Patent: December 31, 2013
    Assignee: Panasonic Corporation
    Inventors: Makoto Tsutsue, Masaki Utsumi
  • Publication number: 20130299948
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Application
    Filed: July 12, 2013
    Publication date: November 14, 2013
    Inventors: Makoto TSUTSUE, Masaki UTSUMI
  • Patent number: 8508002
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Grant
    Filed: July 17, 2012
    Date of Patent: August 13, 2013
    Assignee: Panasonic Corporation
    Inventors: Makoto Tsutsue, Masaki Utsumi
  • Publication number: 20120280401
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Application
    Filed: July 17, 2012
    Publication date: November 8, 2012
    Applicant: Panasonic Corporation
    Inventors: Makoto TSUTSUE, Masaki UTSUMI
  • Patent number: 8247876
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Grant
    Filed: June 28, 2011
    Date of Patent: August 21, 2012
    Assignee: Panasonic Corporation
    Inventors: Makoto Tsutsue, Masaki Utsumi
  • Publication number: 20120018820
    Abstract: A semiconductor device includes a converter that converts an acoustic pressure into an electrical signal and an amplifier element that includes an amplifier circuit that amplifies the electrical signal outputted from the converter. The converter includes a pedestal including a cavity formed from an upper face to a lower face thereof, and a vibration film located so as to cover an opening of the cavity on the side of the upper face. The vibration film vibrates in accordance with the acoustic pressure to thereby convert the acoustic pressure into an electrical signal. The amplifier element is located under the converter so as to cover the cavity.
    Type: Application
    Filed: September 28, 2011
    Publication date: January 26, 2012
    Applicant: PANASONIC CORPORATION
    Inventors: Masaki UTSUMI, Kyoko FUJII, Takahiro NAKANO
  • Publication number: 20110254136
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Application
    Filed: June 28, 2011
    Publication date: October 20, 2011
    Applicant: Panaconic Corporation
    Inventors: Makoto TSUTSUE, Masaki Utsumi
  • Publication number: 20110204487
    Abstract: A semiconductor device includes: a semiconductor substrate; a through electrode passing through the semiconductor substrate in a thickness direction of the semiconductor substrate; an internal electrode provided in a part of the top surface of the semiconductor substrate and electrically connected to the through electrode which reaches the part; a first protective film covering the top surface except a part of the internal electrode; a second protective film formed apart from the first protective film, on the part of the internal electrode, the part being not covered by the first protective film; and metal wiring formed on the back surface of the semiconductor substrate and electrically connected to the through electrode, the second main surface being on a side of the semiconductor substrate opposite the first main surface.
    Type: Application
    Filed: May 4, 2011
    Publication date: August 25, 2011
    Applicant: PANASONIC CORPORATION
    Inventors: TAKAHIRO NAKANO, MASAKI UTSUMI, HIKARI SANO
  • Patent number: 7994589
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Grant
    Filed: August 18, 2010
    Date of Patent: August 9, 2011
    Assignee: Panasonic Corporation
    Inventors: Makoto Tsutsue, Masaki Utsumi
  • Publication number: 20110147905
    Abstract: In a semiconductor element, upper through-hole conductor portions and lower through-hole conductor portions are formed such that pore size A of the joint surface of the upper through-hole conductor portion and the lower through-hole conductor portion is smaller than pore size B of the upper through-hole conductor portion on the major surface of the semiconductor element and pore size C of the lower through-hole conductor portion on the other surface of the semiconductor element. Further, electrode portions are formed respectively on the top surfaces of the upper through-hole conductor portions and protrusions 4 are formed respectively on the top surfaces of the electrode portions. Moreover, an optical member pressed in contact with the protrusions is fixed on the semiconductor element with an adhesive.
    Type: Application
    Filed: March 3, 2011
    Publication date: June 23, 2011
    Applicant: PANASONIC CORPORATION
    Inventors: Masaki Utsumi, Hikari Sano, Hiroaki Fujimoto, Yoshihiro Tomita
  • Publication number: 20110147871
    Abstract: To provide a semiconductor device and a method of manufacturing the same, which have a device structure ensuring high degrees of reliability and mass-productivity at low cost. A semiconductor device includes: a substrate including an imaging area and having a first main surface and a second main surface; an electrode formed on the first main surface; an external electrode formed on the second main surface; a conductive portion which is formed in a through hole penetrating the substrate, and electrically connects the electrode and the external electrode; an optical element which is placed on the first main surface and has a convex surface including a convex portion; and a light transmitting element which is bonded to the optical element so as to cover the convex portion and has a flat upper surface.
    Type: Application
    Filed: February 28, 2011
    Publication date: June 23, 2011
    Applicant: PANASONIC CORPORATION
    Inventors: Masaki UTSUMI, Takahiro NAKANO, Hikari SANO
  • Patent number: 7948039
    Abstract: A seal ring structure is formed through a multilayer structure of a plurality of dielectric films in a peripheral part of a chip region to surround the chip region. A dual damascene interconnect in which an interconnect and a plug connected to the interconnect are integrated is formed in at least one of the dielectric films in the chip region. Part of the seal ring structure formed in the dielectric film in which the dual damascene interconnect is formed is continuous. A protection film formed on the multilayer structure has an opening on the seal ring. A cap layer connected to the seal ring is formed in the opening.
    Type: Grant
    Filed: November 4, 2008
    Date of Patent: May 24, 2011
    Assignee: Panasonic Corporation
    Inventors: Makoto Tsutsue, Masaki Utsumi
  • Publication number: 20110108957
    Abstract: A semiconductor substrate (1) includes a plurality of semiconductor elements (2) in which functional elements are constructed and which is formed in a grid pattern, wherein continuous linear grooves (3) are formed on longitudinal and lateral separating lines (4) that individually separate the plurality of semiconductor elements (2) with the exception of intersections of the separating lines (4) and portions corresponding to corners of each semiconductor element (2).
    Type: Application
    Filed: December 8, 2010
    Publication date: May 12, 2011
    Applicant: Panasonic Corporation
    Inventors: Masaki Utsumi, Takahiro Kumakawa
  • Publication number: 20110039365
    Abstract: A method for fabricating a semiconductor device includes: the step (a) of forming a vibrating film on a predetermined region of each of a plurality of chips included in a semiconductor wafer; the step (b) of forming, on the semiconductor wafer, an intermediate film containing a sacrifice layer located on the vibrating film of each of the chips; and the step (c) of forming a fixed film on the intermediate film. This method further includes, after the step (c), the step (d) of subjecting the semiconductor wafer to blade dicing to separate the chips, and the step (e) of removing, by etching, the sacrifice layer to provide a cavity between the vibrating film and the fixed film.
    Type: Application
    Filed: October 27, 2010
    Publication date: February 17, 2011
    Applicant: PANASONIC CORPORATION
    Inventors: Masaki UTSUMI, Takahiro Kumakawa, Masami Matsuura, Yoshihiro Matsushima