Abstract: A storage apparatus includes a storage shelf that stores a container, a purge device that is provided to the storage shelf and is able to perform a purge process on the container, and a purge determiner that determines at least one of a necessity of the purge process and a condition of the purge process in accordance with at least one of a transport source of the container to the storage shelf and a transport destination of the container from the storage shelf.

Abstract: A purge device capable of appropriately purging a container while saving purge gas includes a first purge nozzle that supplies a purge gas to a container to be purged, an internal state detector capable of detecting an internal state of the container before a purging process with the first purge nozzle is started, and a purge determiner that determines purge conditions for the container based on a detection result from the internal state detector.

Abstract: A purge device capable of appropriately purging a container while saving purge gas includes a first purge nozzle that supplies a purge gas to a container to be purged, an internal state detector capable of detecting an internal state of the container before a purging process with the first purge nozzle is started, and a purge determiner that determines purge conditions for the container based on a detection result from the internal state detector.

Abstract: A purge device is capable of removing particles adhering to a gas introduction port in a container or on surrounding areas of a purge nozzle. The purge device includes a nozzle that is able to blow a gas, and a purge controller that controls the nozzle to blow the gas therethrough in a state in which a bottom surface of a container to be purged faces the nozzle.

Abstract: A purge device capable of appropriately purging a container in accordance with a type of a container includes a type detector that detects a type of a container to be purged, and a purge controller that determines purge conditions for the container based on a detection result from the type detector.

Abstract: A purge apparatus is a purge apparatus that purges an inside of a storage container in which a product is stored, with a purge gas. The purge apparatus includes a discharge pipe that connects to a discharge port of the storage container to discharge the purge gas inside the storage container, a meter that measures an exhaust flow rate that is a flow rate of the purge gas flowing through the discharge pipe when the purging is carried out, and a detector that determines whether the purging is satisfactory, based on the exhaust flow rate measured by the meter.

Abstract: A purge stocker includes a first supply unit including N first purge apparatuses, each having a first supply unit configured to support a storage container, a first supply pipe configured to supply the purge gas into the storage container supported by the first supporting unit, and a first flow rate adjusting unit configured to adjust the flow rate of the purge gas in the first supply pipe; and a second supply unit including M second purge apparatuses, each having a second supporting unit configured to support the storage container and a second supply pipe configured to supply the purge gas into the storage container supported by the second supporting unit. When the storage containers are supported by a certain number of second supporting units, the second supply unit supplies the storage containers with the purge gas through the respective second supply pipes.

Abstract: A purge device includes a supply flow rate adjuster, which adjusts a supply flow rate of a purge gas supplied to a storage container through a supply pipe, and an intake flow rate adjuster, which adjusts an intake flow rate of the purge gas taken in from an inside of the storage container through a discharge pipe to prevent the pressure of the inside of the storage container from becoming negative relative to an outside of the storage container. The supply flow rate adjuster adjusts the supply flow rate in at least two stages including a first flow rate and a second flow rate that is higher than the first flow rate. When the supply flow rate is the first flow rate, the intake flow rate adjuster sets the intake flow rate to zero.

Abstract: A purge device includes an internal space defined by a chassis, and performs a purge process where an inside of a storage container in the internal space with an article being accommodated is purged with a purge gas. The purge device includes an air blower that is located outside the chassis, and sends air to an area where a gas including the purge gas in the internal space leaks through an opening in the chassis so as to diffuse the gas including the purge gas leaking from the opening.

Abstract: A nozzle prevents obstruction of alignment of a container without using an actuator. When the nozzle contacts the container before an alignment member does, the container is guided by a guide surface of the nozzle, the nozzle is lowered by a load applied from the container so that the alignment member contacts the container to align the container, and purge gas is injected from the nozzle into the container.

Abstract: A purge device capable of appropriately purging a container in accordance with a type of a container includes a type detector that detects a type of a container to be purged, and a purge controller that determines purge conditions for the container based on a detection result from the type detector.

Abstract: A storage apparatus includes a storage shelf that stores a container, a purge device that is provided to the storage shelf and is able to perform a purge process on the container, and a purge determiner that determines at least one of a necessity of the purge process and a condition of the purge process in accordance with at least one of a transport source of the container to the storage shelf and a transport destination of the container from the storage shelf.

Abstract: A purge device is capable of removing particles adhering to a gas introduction port in a container or on surrounding areas of a purge nozzle. The purge device includes a nozzle that is able to blow a gas, and a purge controller that controls the nozzle to blow the gas therethrough in a state in which a bottom surface of a container to be purged faces the nozzle.

Abstract: A gas injection device a placement portion on which a first or second container is placed, an ejection portion which is placed on the placement portion and ejects a purge gas, and a sealing portion protruding from the placement portion so as to surround a periphery of the ejection portion. The ejection portion, with the purge gas being injected into an inlet of the second container, does not come in contact with the inlet. The sealing portion, with the purge gas being injected into an inlet of the FOUP, does not impede the contact between the ejection portion and the inlet.

Abstract: A purge device configured to purge the inside of a storage container storing a product with purge gas includes a plurality of placing units, each configured to place the storage container thereon, a plurality of supply pipes configured to supply purge gas to the storage container placed on the corresponding placing unit, a main pipe connected to the supply pipes and configured to supply the purge gas to the supply pipes, and an MFC configured to adjust the flow rate of the purge gas in the main pipe.

Abstract: A gas inlet made of an elastic material is prevented from getting scratched by contact with a nozzle, and adhesion between the gas inlet and the nozzle is prevented. A container is positioned, and a purge gas is introduced from the nozzle into a gas inlet hole in the center of a circular bottom surface of the gas inlet provided on the bottom of the container. The nozzle has a planar top end surface having a size equal to or greater than that of the bottom surface of the gas inlet, and a nozzle hole in the center of the top end surface, and has a size equal to or smaller than that of the gas inlet hole. The top end surface is roughened or includes a lubricant so that the top end surface and the gas inlet are mutually slidable.

Abstract: A stocker includes cells including a purge function and cells not including the purge function. A cell not including the purge function is easily changed to a cell that includes the purge function. The stocker includes a frame to which multiple cell supports not including a cleaning gas supplying nozzle are configured to be attached along the vertical direction or the horizontal direction, and the base of a stocker unit is attached to the frame. The stocker unit includes a pipe configured to supply cleaning gas that is provided along the base, and multiple cell supports including the purge function that are attached to the base and are aligned along the vertical direction or the horizontal direction. Each cell support preferably is configured to support a container and includes a nozzle configured to supply cleaning gas from the pipe to the container.

Abstract: The safety of a worker is ensured, and the area in which purging is halted is limited to the minimum. The inner space of a device is divided into a working area and a non-working area, and purging of articles in the working area is halted and the purging of the articles in the non-working area is continued. The oxygen concentration in the working area is measured, and if the oxygen concentration of the working area decreases to a predetermined value or less, the purging of the articles in the non-working area is halted.

Abstract: A container is placed at a predetermined position on a purge device to prevent the container from getting caught on a nozzle. When the container is lowered and placed on the purge device, the two facing sides of the front end of the container's bottom surface and the front end of a recessed part, and the two facing sides of both left and right side ends of the container's bottom surface are guided by a front guide, side guides and a center guide. Following that, the nozzle is brought into contact with the bottom surface of the container.

Abstract: A purge stocker includes a first supply unit including N first purge apparatuses, each having a first supply unit configured to support a storage container, a first supply pipe configured to supply the purge gas into the storage container supported by the first supporting unit, and a first flow rate adjusting unit configured to adjust the flow rate of the purge gas in the first supply pipe; and a second supply unit including M second purge apparatuses, each having a second supporting unit configured to support the storage container and a second supply pipe configured to supply the purge gas into the storage container supported by the second supporting unit. When the storage containers are supported by a certain number of second supporting units, the second supply unit supplies the storage containers with the purge gas through the respective second supply pipes.