Abstract: The present invention improves the transportation efficiency of an automatic transport system for transporting and article to attain the above object, the automatic transport system includes a front detecting device which detects an obstruction in a non-contact state in an area through which an automatic transport vehicle passes and a projection surface of the automatic transport vehicle. When the front detecting device detects the obstruction in the area, the running speed of the automatic transport vehicle is reduced or the automatic transport vehicle is stopped.

Abstract: An overhead conveyance device and an overhead conveyance vehicle that can convey a conveying object, while keeping it at a minimum distance from surrounding equipment when the overhead conveying vehicle turns around during conveyance of the conveying object. The overhead conveyance device (1) is so structured that even when a carriage part (6) of the overhead conveyance vehicle (5) enters a branching part (3) for allowing the carriage part to change in traveling direction and turns around, the conveying object (25) grasped by a hand (9) can be kept unchanged in direction.

Abstract: An endoscope system comprises an endoscope for industrial use, a remote control unit, a light source unit, a CCU, a motor-driven angling unit, a drum rotation variable resistor, a power supply unit, a buzzer, and a microphone. These apparatuses constituting a basic system are controlled by a system control CPU incorporated in a control unit. The system control CPU in the control unit is connected to an angle control CPU in the motor-driven angling unit and a DSP control CPU in the CCU over signal lines. Moreover, the system control CPU is connected to a remote control CPU in the remote control unit through a connector over a signal line. Consequently, the complex functions of the apparatuses are controlled in a centralized manner. This results in improved ease of use.

Abstract: An object of the present invention is to improve the transportation efficiency of an automatic transport system for transporting an article. In order to attain the above object, the automatic transport system of the present invention comprises a front detecting device which detects an obstruction in a non-contact state in an area through which an automatic transport vehicle passes and a projection surface of said automatic transport vehicle, and when said front detecting device detects the obstruction in said area, the running speed of said automatic transport vehicle is reduced or said automatic transport vehicle is stopped.

Abstract: A load port for semiconductor equipment includes a transporting apparatus 18 and/or a moving apparatus 30 for respectively transporting a carrier base 14 and moving a cover 15, using a smaller force until the carrier base 14 and/or the cover 15 reaches a predetermined position that is at a predetermined distance from an opening 16 of the equipment. This position is at a distance where it is no longer possible to catch a hand or other object between the carrier base 14 or cover 15 and the semiconductor equipment. Then, the carrier base 14 and/or the cover 15 is transported or moved towards the opening 16 by the transporting apparatus 18 and/or moving apparatus 30 respectively transporting the carrier base 14 and/or moving the cover 15 towards the opening 16 to completely close the opening 16 using a larger force.

Abstract: A mechanical interface apparatus which is capable of loading semiconductor wafers stored in a sealed container into a processing apparatus without adversely affecting the surfaces of the semiconductor wafers due to exposure to external air or dust. When a sealed container 100 is placed on top of a processing apparatus 200, latch mechanisms 201 are activated to engage with a flange 103, so as to affix the container body 101. Then, valves 3 and 5 are opened to perform a gas purge, after which a drive mechanism provided inside a lock operating mechanism 220 is operated in order to withdraw lock arms 111 from concave portions 103a, thereby unlocking the bottom lid 110. Then, wafer cassettes 106 inside the container are lowered to a predetermined position by means of an in-apparatus elevator mechanism 202, and the wafer cassettes are loaded into the processing apparatus 200 by a cassette loading mechanism.

Abstract: A transport system has a track provided along a transport route forming a main route and at least one branch route connected to the main route at a branch point. A first power supply line is provided along the main route; a second power supply line is provided along the branch route and a transport vehicle moves along the track. There is a drive unit for driving the transport vehicle along the track with the drive unit being attached to the transport vehicle, a route selector for selecting a branch route at the branch point and a power receiver for receiving electric power from the first and second power supply lines to supply electric power to the drive unit.

Abstract: In an overhead hoist transfer having a moving carriage with a hand portion, which holds a load, elevatably suspended therefrom; and a means for teaching an appointed stop position on a placement base, on which said load is placed, to said moving carriage, LEDs 7a and 7b are installed at the hand portion 6, and a position detecting portion 12 consisting of a lens 12a and PSD 12b is installed at the placement base 53 side, in order to automatically and accurately enable a teaching of position correcting data in a short time without use of any manpower.

Abstract: A pickup sensor for picking up an image on a floor is installed on a mobile body with a working machine mounted thereon in order to correct for the position deviation of a working machine due to possible deviation in the stop position of a mobile body to always ensure accurate working without increasing the working time of the overall system at the time of stopping the mobile body at a predetermined position and allowing said working machine to perform predetermined operation according to previously given teaching data. At the time the teaching data is given, the pickup sensor picks up an image (reference picked image) including a regular pattern and a predetermined identification mark formed on a floor. At the time the working machine works, the pickup sensor also picks up an image (on-pause picked image) on the floor surface at the stop position.

Abstract: An automated guided vehicle includes a transporting portion having an upper surface and a driving device, the transporting portion being movable by the driving device; a transferring device provided on the upper surface of the transporting portion, the transferring device being capable of transferring a workpiece to or from an apparatus; and a mounting portion formed on the upper surface of the transporting portion, the mounting portion having at least two opening portions which allow an operation for transferring the workpiece. In the automated guided vehicle, photosensors are respectively arranged on the opening portions to detect an object which intrudes into a predetermined area or projects from the predetermined area, and a control device monitors a state of the photosensors and controls the transferring device or the driving device in accordance with the state of the photosensors.

Abstract: A signal cable for transmitting a plurality of signals is applied to a video endoscope having a solid state image pick-up device. Signal lines for transmitting substantially the same signals of the plurality of signals are combined and stranded into a stranded line. The stranding pitch of the stranding line is different from that of a stranding line for transmitting other signals.

Abstract: A portable closed container has a container body, and a lid for opening and hermetically closing the opening of the container body, in which an internal atmosphere thereof is replaced with an inner atmosphere suitable for an article contained in the container through a gas purging operation. The container is improved such that the lid is a hollowed body with at least one purging wall hole.

Abstract: Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a predetermined processing step; a portable closed container for accommodating a cassette containing said electronic substrate; a purging station for gas-purging said portable closed containers; and a storage member for storing said portable closed containers, wherein said cassette accommodates said electronic substrates which have been cleaned by said cleaning equipment being set in said portable closed container and purged with an inert gas in said purging station, and said portable closed container or containers is stored in said storing section when necessary.

Abstract: A sealable container for accommodating semiconductor wafers, which includes a hollow main body having an opening for receiving or removing the semiconductor wafers, a lid member for plugging the opening, a lock for locking and releasing the lid member in the opening of said main body, and a pressure-equalizing mechanism for allowing an interior portion of the main body to be communicable with an exterior portion thereof in cooperation with the lock.

Abstract: A conveying system provides a cassette accommodating workpieces; a container containing the cassette; a transferring device for conveying the cassette while supporting it or conveying the container which is empty or contains the cassette while supporting it, the transferring device having a supporting device for supporting the cassette. In the conveying system, a handle is provided on the upper surface of the container so that it is supported by the supporting device.

Abstract: Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a predetermined processing step; a portable closed container for accommodating a cassette containing said electronic substrate; a purging station for gas-purging said portable closed containers; and a storage member for storing said portable closed containers, wherein said cassette accommodates said electronic substrates which have been cleaned by said cleaning equipment being set in said portable closed container and purged with an inert gas in said purging station, and said portable closed container or containers is stored in said storing section when necessary.

Abstract: Disclosed is a wafer conveying system for a clean room which is high in wafer conveying efficiency, and makes it possible to achieve a variety of processing operations with high efficiency.

Abstract: A gas purge unit for a portable closed container is defined by a purge box including an opening, and a container stand around the opening on which a closed container is set; a gas supplying inlet coupled to a gas supplying source, and a gas discharging outlet; and a lifting mechanism for closing the opening from inside of the purge box and controlling the locking and unlocking operations of a locking mechanism provided in the lid of the container.

Abstract: In an automatic transferring system using a portable closed container in which articles to be conveyed between a first equipment and a second equipment are set in the portable closed container, which is automatically conveyed by an unmanned conveying vehicle; the automated guided vehicle has a container interface in its carriage which is adapted to control the operation of automatically taking the articles in and out of the closed container.

Abstract: An ID recognizing system for a semiconductor manufacturing system includes IC modules set in surfaces of containers which accommodate wafers and are conveyed from one device to another in the semiconductor manufacturing system. Each IC module is capable of transmitting and receiving signals from fixed stations and includes a reloadable memory. The semiconductor manufacturing system is made up of a number of devices for performing manufacturing operations on the wafers in the containers, and each of the devices include one of the fixed stations. The IC module is powered by the energy of radio waves received from the fixed station in the device in which said container has been placed for processing of the wafers therein. The radio communication is in the form of communication packets which include data on individual wafers in the cassettes so that the individual wafers can be processed separately.