Patents by Inventor Masao Yamawaki

Masao Yamawaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for transferring semiconductor wafers
    Patent number: 4069009
    Abstract: An apparatus for automatically transferring semiconductor wafers is disclosed. Semiconductor wafers are loaded on a boat which is placed on a pair of first supporting bars. A pair of second supporting bars are driven by a motor to repeat circular motion between the first supporting bars. The second supporting bars, circularly moving in parallel with the first supporting bars, forwardly transfer the boat. The boat is kept uplifted over the first supporting bars during the forward transfer thereof. Repetition of the circular motion of the second supporting bars makes the automatic transfer of the semiconductor wafers to be heat-treated in a semiconductor manufacturing system.
    Type: Grant
    Filed: October 8, 1976
    Date of Patent: January 17, 1978
    Assignee: Nippondenso Co., Ltd.
    Inventors: Masao Yamawaki, Katsuo Aoki, Yoshio Oka, Takao Suzuki, Osamu Ina, Kinihiko Hara