Abstract: An optical probe includes a laser light source that emits laser light, a collimator lens that converts the laser light into parallel light, a light shape changing section that converts the parallel light into linear laser light, an irradiating section to irradiate an object with a selected part of the linear laser light, an image pickup section that picks up an image of the object based on the laser light reflected from the object, and a controller that controls irradiation of the linear laser light. The linear laser light is composed of a plurality of parts including one end part and the other end part; and the irradiating section irradiates the object with the parts of the linear laser light sequentially from the one end part to the other end part.

Abstract: A shape measuring apparatus includes: an irradiating part configured to irradiate work with a linear line laser, the irradiating part including: a light source configured to produce laser light; a first optical member configured to linearly spread the laser light from the light source and generate the line laser; and a second optical member, provided between the light source and the first optical member, configured to adjust an area of irradiation with a line laser on the work; a first sensor configured to receive a line laser reflected by the work and capture an image of the work; a lens configured to form an image of a line laser reflected by the work on an imaging surface of the first sensor; and a control part configured to control adjustment of the area of irradiation with the line laser on the work by the second optical member.

Abstract: A shape measuring apparatus includes a first light source, a second light source, an optical system, an image capturer, and a controller. The first light source emits visible light. The second light source emits measurement light used in a measurement. The optical system emits the visible light and the measurement light at the same position on a work piece. The image capturer captures an image of the measurement light reflected by the work piece. The controller is configured to cause the emission of the visible light onto the work piece with the first light source when determining a measurement position, and to control the emission of the measurement light onto the work piece with the second light source when making the measurement.

Abstract: An image measuring apparatus includes: a light source; an imaging device; and a controller configured to adjust a light emission amount of the light source based on a light reception amount of the imaging device, wherein: when a light reception amount of the light receiving element is more than a maximum value, the controller reduces a light amount of the light source in next light reception; when the light reception amount of the light receiving element is less than the maximum value, the controller increases the light amount of the light source in the next light reception; and when the light amount of the light source reaches the maximum light amount and the light reception amount is smaller than a minimum value, the controller makes the light amount of the light source in the next light reception a minimum light amount.

Abstract: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12).

Abstract: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12).

Abstract: Disclosed is a shape measurement device including: a light irradiation unit which irradiates linear light onto a work; an imaging element which images reflected light reflected by the work; and an image-forming lens which forms an image of the reflected light reflected by the work on an imaging plane of the imaging element, and a light irradiation plane of the light irradiation unit, a principal plane including a principal point of the image-forming lens, and the imaging plane of the imaging element satisfy a Scheimpflug principle. The shape measurement device further includes: an image obtaining region selection unit which divides the imaging plane of the imaging element into a plurality of regions, and selects, as an image obtaining region, a region for use in measurement from the plurality of regions in response to at least one of measurement accuracy and a size of a measurement range.

Abstract: A calibrating jig comprises a reference sphere, and a reflecting plate configured to support the reference sphere from a lower side thereof and mirror-reflect light in a case that the reference sphere is illuminated from an upper side thereof.

Abstract: An optical probe includes a laser light source that emits laser light, a collimator lens that converts the laser light into parallel light, a light shape changing section that converts the parallel light into linear laser light, an irradiating section to irradiate an object with a selected part of the linear laser light, an image pickup section that picks up an image of the object based on the laser light reflected from the object, and a controller that controls irradiation of the linear laser light. The linear laser light is composed of a plurality of parts including one end part and the other end part; and the irradiating section irradiates the object with the parts of the linear laser light sequentially from the one end part to the other end part.

Abstract: Disclosed is a shape measurement device which scans a surface of a work by a probe in a noncontact manner and measures a surface shape of the work. The probe includes: a light irradiation unit which irradiates linear light onto the work; and an imaging unit which images reflected light of the light irradiated from the light irradiation unit, the reflected light being reflected by the work. The imaging unit includes: an imaging element which images an image of the work; an image-forming lens which forms the image of the reflected light being reflected by the work on an imaging plane of the imaging element; and a lens exchange unit which makes the image-forming lens exchangeable.

Abstract: Disclosed is a shape measurement device including: a light irradiation unit which irradiates linear light onto a work; an imaging element which images reflected light reflected by the work; and an image-forming lens which forms an image of the reflected light reflected by the work on an imaging plane of the imaging element, and a light irradiation plane of the light irradiation unit, a principal plane including a principal point of the image-forming lens, and the imaging plane of the imaging element satisfy a Scheimpflug principle. The shape measurement device further includes: an image obtaining region selection unit which divides the imaging plane of the imaging element into a plurality of regions, and selects, as an image obtaining region, a region for use in measurement from the plurality of regions in response to at least one of measurement accuracy and a size of a measurement range.

Abstract: A calibrating jig comprises a reference sphere, and a reflecting plate configured to support the reference sphere from a lower side thereof and mirror-reflect light in a case that the reference sphere is illuminated from an upper side thereof.

Abstract: A surface texture measuring instrument includes a contact piece to be in contact with an object, a sensor driving mechanism that moves the contact piece along the surface of the object, a controller that controls the sensor mechanism, and a force sensor that detects a measuring force exerted on the contact piece when the contact piece is brought into contact with the object. The controller includes a target value output that outputs a target value of the measuring force, a feedback controller that performs feedback control of the sensor driving mechanism based on a deviation between the measuring force and the target value, and a feedback compensator provided on the feedback controller. The feedback compensator performs feedback compensation in accordance with the measuring force.

Abstract: An image measuring apparatus includes: a light source; an imaging device; and a controller configured to adjust a light emission amount of the light source based on a light reception amount of the imaging device, wherein: when a light reception amount of the light receiving element is more than a maximum value, the controller reduces a light amount of the light source in next light reception; when the light reception amount of the light receiving element is less than the maximum value, the controller increases the light amount of the light source in the next light reception; and when the light amount of the light source reaches the maximum light amount and the light reception amount is smaller than a minimum value, the controller makes the light amount of the light source in the next light reception a minimum light amount.

Abstract: A calibrating jig comprises a reference sphere, and a reflecting plate configured to support the reference sphere from a lower side thereof and mirror-reflect light in a case that the reference sphere is illuminated from an upper side thereof.

Abstract: An input tool has: an I/O unit having a digimatic interface; a first signal conversion unit that converts a measurement signal in a signal format according to an HID keyboard protocol capable of being processed by an HID driver; a second signal conversion unit that converts the measurement signal into a signal format according to a virtual serial port protocol capable of being processed by a VCP driver; a conversion controller that makes one of the first signal conversion unit and the second signal conversion unit to convert a signal format of the measurement signal; and a USB communicator having a USB interface that is connectable with a PC, the USB communicator outputting the measurement signal.

Abstract: A form measuring mechanism (100) which measures form of an object (102) by bringing a probe (124) into direct contact with the object includes a plurality of reference spheres (130a, 130b) for calibrating the probe, a judging system/controller (154) for judging form abnormal values common in position and size to each other and form abnormal values not common to each other obtained by measuring the reference spheres, and a notifying display unit (156) for notifying at least any one of a contamination or dust adhering state of the probe judged from the common form abnormal values and a worn state and contamination or dust adhering states of the reference spheres judged from the form abnormal values not common to each other.

Abstract: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12).

Abstract: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12).

Abstract: A probe straightness measuring method includes: placing a measurement jig having a measurement reference surface with a known profile error on a stage surface of an XY stage so that the measurement reference surface is slanted in a moving direction of the XY stage; measuring a displaced position of the measurement piece by a displacement detector of the probe each time the XY stage is moved for a predetermined distance while controlling a driving actuator so that the measurement piece of a probe touches the measurement reference surface at a constant pressure; and calculating a straightness error of a measurement-piece moving mechanism on a basis of a measured position of the measurement piece obtained in the measuring, a nominal position of the measurement piece obtained by a calculation and a slant angle of the measurement reference surface.