Abstract: Heating characteristic value at any measuring point of an object at any measuring location of an heating furnace is determined as a single invariable by using temperature (Tint and Ts) measured at the measuring point of the object and heating temperature (Ta) and heating time (t) at the measuring location of the heating furnace. The heating characteristic value (m-value) may be calculated without using physical characteristics of the object. By using the m-value, temperature profile of the object heated under modified heating condition may be simulated in a short period of time without actually heating and measuring temperature of the object at high accuracy level. By using such simulation, appropriate heating condition for heating an object in accordance with desired heating condition may easily be determined.

Abstract: According to this plasma processing method, a surface of a micro gap provided between a first subject to be processed and a second subject to be processed is processed. According to this plasma processing method, the first and second subjects to be processed are disposed within a process chamber. Then, the pressure inside the process chamber is reduced, and a mixed gas containing oxygen and helium is introduced. In addition, in the pressure-reduced process chamber, plasma is generated so as to process the surfaces of the first and second subjects to be processed facing each other in the micro gap. By applying this method to a workpiece having a circuit board and an electronic component in which an electrode on the circuit board is coupled with an electrode on the electronic component, a sealing resin is easily filled in between the circuit board and the component.

Abstract: The quantity of supply heat of heated gas is controlled so that a supply heat quantity of the heated gas when no heat treatment of solder or the like is needed is made smaller than a supply heat quantity of the heated gas when heat treatment of solder or the like is needed, reducing consumption power when no heat treatment is needed for a board.

Abstract: A reflow soldering device extracts a vaporized component of a contaminative material, such as flux, from exhaust gas from a reflow furnace. The device includes a conveyor for transferring a circuit substrate, a heater for heating the transferred circuit substrate, a cooler for cooling the circuit substrate which has been reflow soldered by heater, discharge pipes and a discharge blower for discharging an exhaust gas at high temperature from the heater to the outside of the device, and a flux remover mounted in the discharge pipes which cools the exhaust gas to 70.degree. C. and below, preferably 60.degree. C. and below, so as to cause a vaporized component, such as flux contained in the exhaust gas, to become liquid or solid and to be removed.