Abstract: A thermal treatment apparatus that performs a thermal treatment on a metal-containing film formed on a substrate, includes: a treatment chamber that houses the substrate; a thermal treatment plate that is provided inside the treatment chamber and mounts the substrate thereon; and a moisture supply unit that supplies moisture to the metal-containing film, wherein at the time of the thermal treatment, moisture is supplied to the metal-containing film of the substrate on the thermal treatment plate and an atmosphere in the treatment chamber is exhausted from a central portion of the treatment chamber.

Abstract: A technique enabling a stable resist pattern forming process, when substrate processing apparatuses that perform a resist coating process separately from a developing process. A wafer having been heated after a resist coating process in a first substrate processing apparatus is also heated before an exposure process in a second substrate processing apparatus. Thus, even when amine in an atmosphere adheres to the wafer while it is being transported from the first substrate processing apparatus to the second substrate processing apparatus, the amine scatters by the heating process. At least one of a heating time and a heating temperature is adjusted based on a substrate rest time which includes a period of time between a time point at which a FOUP 10 is unloaded from the first substrate processing apparatus and a time point at which the FOUP 10 is loaded into the second substrate processing apparatus.

Abstract: There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.

Abstract: An optical element is provided includes an optical layer having a flat incident surface on which light is incident and a wavelength-selective reflective layer disposed in the optical layer. Of light incident on the incident surface at an incident angle (?, ?), the optical element selectively directionally reflects light in at least one specific wavelength range in at least one direction other than a specular reflection direction (??, ?+180°) while transmitting light in at least one wavelength range other than the specific wavelength range, and is transparent to light in at least one wavelength range other than the specific wavelength range.

Abstract: There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.

Abstract: A substrate processing system includes a film-forming device to form photosensitive film on substrate, an exposure device to expose the film on the substrate, a relay device to transfer the substrate between the film-forming and exposure devices, a warping data acquisition device to acquire measured warping data of the substrate, a communication device to perform data communication with the exposure device, and a control device including film-forming, relay, measuring, and communication control sub-devices. The film-forming sub-device controls the film-forming device to form the film on the substrate, the relay sub-device controls the relay device to transfer the substrate to the exposure device, the measuring sub-device controls the warping data acquisition device to acquire the data after the controlling by the film-forming sub-device prior to the controlling by the relay sub-device, and the communication sub-device controls the communication device to transmit the data to the exposure device.

Abstract: A substrate processing system includes a film-forming device to form photosensitive film on substrate, an exposure device to expose the film on the substrate, a relay device to transfer the substrate between the film-forming and exposure devices, a warping data acquisition device to acquire measured warping data of the substrate, a communication device to perform data communication with the exposure device, and a control device including film-forming, relay, measuring, and communication control sub-devices. The film-forming sub-device controls the film-forming device to form the film on the substrate, the relay sub-device controls the relay device to transfer the substrate to the exposure device, the measuring sub-device controls the warping data acquisition device to acquire the data after the controlling by the film-forming sub-device prior to the controlling by the relay sub-device, and the communication sub-device controls the communication device to transmit the data to the exposure device.

Abstract: An optical element is provided includes an optical layer having a flat incident surface on which light is incident and a wavelength-selective reflective layer disposed in the optical layer. Of light incident on the incident surface at an incident angle (?, ?), the optical element selectively directionally reflects light in at least one specific wavelength range in at least one direction other than a specular reflection direction (??, ?+180°) while transmitting light in at least one wavelength range other than the specific wavelength range, and is transparent to light in at least one wavelength range other than the specific wavelength range.

Abstract: An optical element is provided includes an optical layer having a flat incident surface on which light is incident and a wavelength-selective reflective layer disposed in the optical layer. Of light incident on the incident surface at an incident angle (?, ?), the optical element selectively directionally reflects light in at least one specific wavelength range in at least one direction other than a specular reflection direction (??, ?+180°) while transmitting light in at least one wavelength range other than the specific wavelength range, and is transparent to light in at least one wavelength range other than the specific wavelength range.

Abstract: An optical element includes a first surface, a second surface positioned to face the first surface, and a plurality of reflecting surfaces arrayed in a first region defined by the first surface and the second surface, wherein the reflecting surfaces have a first length in a first direction vertical to the first surface and are arrayed at a pitch in a second direction perpendicular to the first direction, light incident on one of the first surface and the second surface is reflected by the reflecting surfaces toward the other surface, and predetermined parameters satisfy predetermined relational formulae representing conditions for ensuring total reflection at the reflecting surfaces and for avoiding total reflection at a light emergent surface.

Abstract: An optical element is provided includes an optical layer having a flat incident surface on which light is incident and a wavelength-selective reflective layer disposed in the optical layer. Of light incident on the incident surface at an incident angle (?, ?), the optical element selectively directionally reflects light in at least one specific wavelength range in at least one direction other than a specular reflection direction (??, ?+180°) while transmitting light in at least one wavelength range other than the specific wavelength range, and is transparent to light in at least one wavelength range other than the specific wavelength range.

Abstract: A substrate processing system includes a film-forming device to form photosensitive film on substrate, an exposure device to expose the film on the substrate, a relay device to transfer the substrate between the film-forming and exposure devices, a warping data acquisition device to acquire measured warping data of the substrate, a communication device to perform data communication with the exposure device, and a control device including film-forming, relay, measuring, and communication control sub-devices. The film-forming sub-device controls the film-forming device to form the film on the substrate, the relay sub-device controls the relay device to transfer the substrate to the exposure device, the measuring sub-device controls the warping data acquisition device to acquire the data after the controlling by the film-forming sub-device prior to the controlling by the relay sub-device, and the communication sub-device controls the communication device to transmit the data to the exposure device.

Abstract: An optical body includes a first optical layer, a second optical layer having an incident surface on which light is incident, and a reflecting layer sandwiched between the first and second optical layers, wherein the first optical layer includes a plurality of convex or concave structures formed on or in a surface thereof on which the reflecting layer is disposed, ridges of the convex structures or ridges between the concave structures adjacent to each other have tip portions projecting toward the incident surface side, the tip portions are deformed from an ideal shape, the second optical layer is transparent and has a refractive index of 1.1 or more and 1.9 or less, and the optical body selectively directionally reflects part of light entering the incident surface, which part is in a specific wavelength band, in direction other than the specular reflection direction.

Abstract: An optical body includes a first optical layer having a random concave-convex surface, a reflecting layer formed on the concave-convex surface, and a second optical layer formed on the reflecting layer to embed the concave-convex surface, wherein the reflecting layer is a wavelength-selective reflecting layer for diffusely reflecting, of incident light, light in a specific wavelength band and transmitting light other than the specific wavelength band therethrough.

Abstract: There is disclosed a polishing cleaning mechanism configured to be in contact with a rear surface of a substrate which is held in a substrate holding unit for holding the rear surface of the substrate and perform a polishing process and a cleaning process on the rear surface of the substrate, including a cleaning member configured to clean the rear surface of the substrate, a polishing member configured to polish the rear surface of the substrate, and a support member configured to support the polishing member and the cleaning member to face the rear surface of the substrate held in the substrate holding unit, wherein a surface of the polishing member facing the substrate and a surface of the cleaning member facing the substrate differ in relative height from each other.

Abstract: An optical body includes a substrate having a concave-convex surface, a reflecting layer formed on the concave-convex surface, and an optical layer formed on the reflecting layer to embed the concave-convex surface, wherein the reflecting layer directionally reflects light, the concave-convex surface is made up of a plurality of triangular pillars arrayed in a one-dimensional pattern, and the triangular pillar has an apex angle ? and a slope angle ?, the apex angle ? and the slope angle ? satisfying a formula (1) or (2) given below: 30???4.5??285(70???80)??(1) 30????1.5?+195(80???100)??(2).

Abstract: An optical body includes a first optical layer having a concave-convex surface, a wavelength-selective reflecting layer formed on the concave-convex surface, and a second optical layer formed on the wavelength-selective reflecting layer to embed the concave-convex surface, the wavelength-selective reflecting layer having a multilayer structure formed by successively stacking at least a first high refractive index layer, a metal layer, and a second high refractive index layer, wherein, given that optical film thicknesses of the first high refractive index layer and the second high refractive index layer are x and y, respectively, and a geometrical film thickness of the metal layer is z, x, y and z satisfy the following formula (1): z ? 12.1 ? exp ? { - 1 2 ? ( x - 120 145.17 ) 2 - 1 2 ? ( y - 120 123.

Abstract: An optical body includes a substrate having a concave-convex surface, a reflecting layer formed on the concave-convex surface, and an optical layer formed on the reflecting layer to embed the concave-convex surface, wherein the reflecting layer directionally reflects light, the concave-convex surface is made up of a plurality of triangular pillars arrayed in a one-dimensional pattern, and the triangular pillar has an apex angle ? and a slope angle ?, the apex angle ? and the slope angle ? satisfying a formula (1) or (2) given below: 30???4.5??285(70???80)??(1) 30????1.5?+195(80???100)??(2).

Abstract: An optical body includes a first optical layer having a concave-convex surface, a wavelength selective reflecting layer formed on the concave-convex surface, and a second optical layer formed on the wavelength selective reflecting layer and embedding the concave-convex surface. The wavelength selective reflecting layer selectively directionally reflects light in a particular wavelength band while transmitting light other than the particular wavelength band therethrough. The concave-convex surface is made up of a plurality of triangular pillars arrayed in a one-dimensional pattern, and the triangular pillar has an apex angle ? and a slope angle ?, the apex angle ? and the slope angle ? satisfying a predetermined relationship.

Abstract: An optical element is provided with a wavelength-selective reflection layer having a five-layer configuration in which high-refractive-index layers and metal layers are alternately stacked. The present invention is designed so that the ratio ? of an optical film thickness db of the entire metal layer relative to an optical film thickness da of the high-refractive-index layers as a whole, and the ratio ? (=d3/d1) of an optical film thickness d3 of the third high-refractive-index layer with respect to the optical film thickness d1 of the first high-refractive-index layer as viewed from either the first optical layer side or the second optical layer side are included within a predetermined range.