Patents by Inventor Mei Chang

Mei Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200357616
    Abstract: Embodiments of the invention generally provide a processing chamber used to perform a physical vapor deposition (PVD) process and methods of depositing multi-compositional films. The processing chamber may include: an improved RF feed configuration to reduce any standing wave effects; an improved magnetron design to enhance RF plasma uniformity, deposited film composition and thickness uniformity; an improved substrate biasing configuration to improve process control; and an improved process kit design to improve RF field uniformity near the critical surfaces of the substrate. The method includes forming a plasma in a processing region of a chamber using an RF supply coupled to a multi-compositional target, translating a magnetron relative to the multi-compositional target, wherein the magnetron is positioned in a first position relative to a center point of the multi-compositional target while the magnetron is translating and the plasma is formed, and depositing a multi-compositional film on a substrate.
    Type: Application
    Filed: July 24, 2020
    Publication date: November 12, 2020
    Inventors: Adolph Miller ALLEN, Lara HAWRYLCHAK, Zhigang XIE, Muhammad M. RASHEED, Rongjun WANG, Xianmin TANG, Zhendong LIU, Tza-Jing GUNG, Srinivas GANDIKOTA, Mei CHANG, Michael S. COX, Donny YOUNG, Kirankumar SAVANDAIAH, Zhenbin GE
  • Publication number: 20200333538
    Abstract: A fiber optical connector includes a connector housing and an optical-fiber component. The connector housing includes a receiving space. Two ends of the connector housing respectively form a first connector opening and a second connector opening. The first connector opening and the second connector opening communicate with the receiving space. Plural pins are assembled on a side surface of the connector housing, and the optical fiber component is inserted into the receiving space from the first connector opening. The connector housing has an improved structural strength. The assembling between the pins and the circuit board allows the connector to be fixedly positioned with the circuit board.
    Type: Application
    Filed: April 10, 2020
    Publication date: October 22, 2020
    Inventors: Yang-Yang Cui, Yan-Mei Chang
  • Publication number: 20200326490
    Abstract: A fiber optical connector includes a connector housing and an optical-fiber component. The connector housing includes a receiving space. One end of the connector housing forms a connector opening communicating with the receiving space. Two side walls of the connector housing include buckling portions adjacent to the connector opening. The optical-fiber component is positioned in the receiving space. The optical-fiber component includes a sleeve piece, and a length of the sleeve piece is in a range between 6.25 mm and 10.25 mm. The sleeve piece includes a block member assembled in the connector opening. A total length of the fiber optical connector is in a range between 30 mm and 35 mm. Two sides of the block member respectively form an engaging portion, and each of the engaging portions is engaged with the corresponding buckling portion.
    Type: Application
    Filed: April 10, 2020
    Publication date: October 15, 2020
    Inventors: Yang-Yang Cui, Yan-Mei Chang
  • Publication number: 20200299834
    Abstract: A method of depositing a coating and a layered structure is provided. A coating is deposited on a substrate to make a layered structure, such that an interface between the coating and the substrate is formed. The coating includes silicon, oxygen, and carbon, where the carbon doping in the coating increases between the interface and the top surface of the coating. The top surface of the coating is inherently hydrophobic and icephobic, and reduces the wetting of water or ice film on the layered structure, without requiring reapplication of the coating.
    Type: Application
    Filed: February 19, 2020
    Publication date: September 24, 2020
    Inventors: Rajeev BAJAJ, Mei CHANG, Deenesh PADHI
  • Publication number: 20200303250
    Abstract: The present disclosure generally relates to methods for processing of substrates, and more particularly relates to methods for forming a metal gapfill. In one implementation, the method includes forming a metal gapfill in an opening using a multi-step process. The multi-step process includes forming a first portion of the metal gapfill, performing a sputter process to form one or more layers on one or more side walls, and growing a second portion of the metal gapfill to fill the opening with the metal gapfill. The metal gapfill formed by the multi-step process is seamless, and the one or more layers formed on the one or more side walls seal any gaps or defects between the metal gapfill and the side walls. As a result, fluids utilized in subsequent processes do not diffuse through the metal gapfill.
    Type: Application
    Filed: February 27, 2020
    Publication date: September 24, 2020
    Inventors: Xi CEN, Feiyue MA, Kai WU, Yu LEI, Kazuya DAITO, Yi XU, Vikash BANTHIA, Mei CHANG, He REN, Raymond Hoiman HUNG, Yakuan YAO, Avgerinos V. GELATOS, David T. OR, Jing ZHOU, Guoqiang JIAN, Chi-Chou LIN, Yiming LAI, Jia YE, Jenn-Yue WANG
  • Patent number: 10784157
    Abstract: Described are doped TaN films, as well as methods for providing the doped TaN films. Doping TaN films with Ru, Cu, Co, Mn, Al, Mg, Cr, Nb, Ti and/or V allows for enhanced copper barrier properties of the TaN films. Also described are methods of providing films with a first layer comprising doped TaN and a second layer comprising one or more of Ru and Co, with optional doping of the second layer.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: September 22, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Annamalai Lakshmanan, Paul F. Ma, Mei Chang, Jennifer Shan
  • Patent number: 10763090
    Abstract: Embodiments of the invention generally provide a processing chamber used to perform a physical vapor deposition (PVD) process and methods of depositing multi-compositional films. The processing chamber may include: an improved RF feed configuration to reduce any standing wave effects; an improved magnetron design to enhance RF plasma uniformity, deposited film composition and thickness uniformity; an improved substrate biasing configuration to improve process control; and an improved process kit design to improve RF field uniformity near the critical surfaces of the substrate.
    Type: Grant
    Filed: August 15, 2016
    Date of Patent: September 1, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang, Xianmin Tang, Zhendong Liu, Tza-Jing Gung, Srinivas Gandikota, Mei Chang, Michael S. Cox, Donny Young, Kirankumar Savandaiah, Zhenbin Ge
  • Patent number: 10752990
    Abstract: Apparatus and methods for supplying a gas to a processing chamber are described. The apparatus comprises an inlet line and an outlet line, each with two valves, in fluid communication an ampoule. A bypass line connects the inlet valve and outlet valve closest to the ampoule. The apparatus and methods of use allow a precursor residue to be removed from the delivery lines of a processing chamber.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: August 25, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Daping Yao, Kenric Choi, Xiaoxiong Yuan, Jiang Lu, Can Xu, Paul F. Ma, Mei Chang
  • Patent number: 10744282
    Abstract: One embodiment describes an insulin formulation that is specifically adapted for aerosolization. The formulation comprises a major amount of water and a minor amount of insulin. Further, the formulation is preservative free, without meta-cresol, cresol or phenol, to permit the formulation to be aerosolized using a vibrating aperture plate without substantial foaming of the insulin formulation.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: August 18, 2020
    Assignee: Aerami Therapeutics, Inc.
    Inventors: John S. Patton, Ryan S. Patton, Mei-chang Kuo, Yehuda Ivri
  • Patent number: 10724135
    Abstract: Methods of depositing a metal selectively onto a metal surface relative to a dielectric surface are described. Methods include reducing a metal oxide surface to a metal surface and protecting a dielectric surface to minimize deposition thereon and exposing the substrate to a metal precursor and an alcohol to deposit a film.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: July 28, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Feng Q. Liu, Mei Chang, David Thompson
  • Publication number: 20200211852
    Abstract: Methods and apparatus for selectively depositing a titanium material layer atop a substrate having a silicon surface and a dielectric surface are disclosed. In embodiments an apparatus is configured for forming a remote plasma reaction between titanium tetrachloride (TiCl4), hydrogen (H2) and argon (Ar) in a region between a lid heater and a showerhead of a process chamber at a first temperature of 200 to 800 degrees Celsius; and flowing reaction products into the process chamber to selectively form a titanium material layer upon the silicon surface of the substrate.
    Type: Application
    Filed: December 5, 2019
    Publication date: July 2, 2020
    Inventors: TAKASHI KURATOMI, I-CHENG CHEN, AVGERINOS V. GELATOS, PINGYAN LEI, MEI CHANG, XIANMIN TANG
  • Publication number: 20200163363
    Abstract: The presently disclosed subject matter relates to methods of diagnosing and treating chronic kidney disease (CKD) in an animal, comprising determining the amount of magnesium in a sample of the animal and providing the animal with a treatment regimen. In certain embodiments, the treatment regimen comprises administering an effective amount of magnesium.
    Type: Application
    Filed: May 31, 2018
    Publication date: May 28, 2020
    Applicant: MARS, INCORPORATED
    Inventors: Vincent Biourge, Jonathan Elliot, Dirk Hendrik Nicolaas Van Den Broek, Rosanne Ellen Jepson, Yu-Mei Chang
  • Publication number: 20200155451
    Abstract: Dry powder vancomycin compositions and methods for administering and preparing such compositions are provided.
    Type: Application
    Filed: January 8, 2020
    Publication date: May 21, 2020
    Inventors: John Lord, Jaakko Taneli Jouhikainen, Herman E. Snyder, Pravin Soni, Mei-Chang Kuo
  • Patent number: 10640870
    Abstract: A gas feedthrough assembly and processing apparatus using the same are disclosed herein. In some embodiments, the gas feedthrough assembly, includes a dielectric body; at least one channel extending through the dielectric body; and a dielectric tube disposed within the at least one channel, wherein an inner diameter of the at least one channel is greater than an outer diameter of the dielectric tube such that a gap is formed between an outer wall of the dielectric tube and an inner wall of the at least one channel.
    Type: Grant
    Filed: March 21, 2017
    Date of Patent: May 5, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Daping Yao, Hyman W. H. Lam, Jiang Lu, Dien-Yeh Wu, Can Xu, Paul F. Ma, Mei Chang
  • Patent number: 10610448
    Abstract: A spa apparatus may comprise a cart, a magnifying lamp, a phototherapy mask, a bed, and a bathtub. A computer, a storage battery, and a communicator are electrically connected and installed inside the cart, and the cart is electrically connected to a power outlet and a display, which enables the cart to be moved and used not limited by the location of power supply. Moreover, the cart has a drawer and a spacing for the storage of beauty products and tools, and through sequentially connecting to a front arm, a rear arm, and a base, the phototherapy mask is configured to be used in different angles and to be held above or in front of a user's in a preferable height.
    Type: Grant
    Filed: May 29, 2018
    Date of Patent: April 7, 2020
    Assignees: Yi Jin Shiuan Beauty Co. Ltd., Dept. of Electrical Engineering, National Changhua University of Education
    Inventors: Hui-Mei Chang, Tsair-Rong Chen
  • Patent number: 10600685
    Abstract: In some embodiments, a method of forming a cobalt layer on a substrate disposed in a process chamber, includes: (a) exposing the substrate to a first process gas comprising a cobalt precursor and a hydrogen containing gas to grow a smooth cobalt layer on a first surface of the substrate and on sidewalls and a bottom surface of a feature formed in the first surface of the substrate; (b) purging the first process gas from the process chamber; and (c) annealing the substrate in a hydrogen atmosphere to fill in voids within the cobalt layer to form a void-free cobalt layer. In some embodiments, plasma treating the substrate in gas under low pressure and/or thermally baking the substrate in gas in an atmosphere under a low pressure, may be performed prior to anneal.
    Type: Grant
    Filed: November 27, 2017
    Date of Patent: March 24, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Daping Yao, Jiang Lu, Can Xu, Paul F. Ma, Mei Chang
  • Patent number: 10593539
    Abstract: A method and apparatus for removing native oxides from a substrate surface is provided. In one aspect, the apparatus comprises a support assembly. In one embodiment, the support assembly includes a shaft coupled to a disk-shaped body. The disk-shaped body includes an upper surface, a lower surface and a cylindrical outer surface. A flange extends radially outward from the cylindrical outer surface. A fluid channel is formed in the disk-shaped body and is coupled to the heat transfer fluid conduit of the shaft. A plurality of grooves formed in the upper surface are coupled by a hole to the vacuum conduit of the shaft. A gas conduit formed through the disk-shaped body couples the gas conduit of the shaft to the cylindrical outer surface of the disk-shaped body.
    Type: Grant
    Filed: April 26, 2012
    Date of Patent: March 17, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Chien-Teh Kao, Joel M. Huston, Mei Chang, Xiaoxiong (John) Yuan
  • Publication number: 20200078539
    Abstract: An aerosolization system includes a container that is configured to deliver a unit dosage of a liquid when squeezed a single time. The system also includes an aerosolizer that is constructed of a housing defining a mouthpiece, and an aerosol generator disposed in the housing. The aerosol generator includes a vibratable membrane having a front face and a rear face, and a vibratable element used to vibrate the membrane. Further, the housing includes an opening that is adapted to receive a unit dosage of the liquid from the container. The opening provides a liquid path to the rear face of the vibratable membrane.
    Type: Application
    Filed: November 15, 2019
    Publication date: March 12, 2020
    Inventors: John S. Patton, Ryan S. Patton, Mei-chang Kuo, Yehuda Ivri
  • Patent number: 10561608
    Abstract: Dry powder vancomycin compositions and methods for administering and preparing such compositions are provided.
    Type: Grant
    Filed: August 9, 2019
    Date of Patent: February 18, 2020
    Assignee: Savara Inc.
    Inventors: John Lord, Jaakko Taneli Jouhikainen, Herman E. Snyder, Pravin Soni, Mei-Chang Kuo
  • Patent number: 10559578
    Abstract: Embodiments of the invention provide methods of processing a substrate having a stack of spaced oxide layers with gaps between the oxide layers. A metallic nucleation layer is formed in the gaps and a cobalt film is deposited on the nucleation layer to form wordlines.
    Type: Grant
    Filed: June 1, 2018
    Date of Patent: February 11, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Jacqueline S. Wrench, Jing Zhou, Fuqun Grace Vasiknanonte, Jiang Lu, Paul F. Ma, Nobuyuki Sasaki, Sree Rangasai V. Kesapragada, Sang Ho Yu, Mei Chang