Patents by Inventor Michael J. Wodjenski
Michael J. Wodjenski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210370259Abstract: Adsorbents of varying types and forms are described, as usefully employed in gas supply packages that include a gas storage and dispensing vessel holding such adsorbent for storage of sorbate gas thereon, and a gas dispensing assembly secured to the vessel for discharging the sorbate gas from the gas supply package under dispensing conditions thereof. Corresponding gas supply packages are likewise described, and various methods of processing the adsorbent, and manufacturing the gas supply packages.Type: ApplicationFiled: August 10, 2021Publication date: December 2, 2021Inventors: Lawrence H. Dubois, Donald J. Carruthers, Melissa A. Petruska, Edward A. Sturm, Shaun M. Wilson, Steven M. Lurcott, Bryan C. Hendrix, Joseph D. Sweeney, Michael J. Wodjenski, Oleg Byl, Ying Tang, Joseph R. Despres, Matthew Thomas Marlow, Christopher Scannell, Daniel Elzer, Kavita Murthi
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Patent number: 10895010Abstract: Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.Type: GrantFiled: October 25, 2016Date of Patent: January 19, 2021Assignee: ENTEGRIS, INC.Inventors: John M. Cleary, Jose I. Arno, Bryan C. Hendrix, Donn Naito, Scott Battle, John N. Gregg, Michael J. Wodjenski, Chongying Xu
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Publication number: 20200206717Abstract: Adsorbents of varying types and forms are described, as usefully employed in gas supply packages that include a gas storage and dispensing vessel holding such adsorbent for storage of sorbate gas thereon, and a gas dispensing assembly secured to the vessel for discharging the sorbate gas from the gas supply package under dispensing conditions thereof. Corresponding gas supply packages are likewise described, and various methods of processing the adsorbent, and manufacturing the gas supply packages.Type: ApplicationFiled: November 4, 2016Publication date: July 2, 2020Inventors: Lawrence H. Dubois, Donald J. Carruthers, Melissa A. Petruska, Edward A. Sturm, Shaun M. Wilson, Steven M. Lurcott, Bryan C. Hendrix, Joseph D. Sweeney, Michael J. Wodjenski, Oleg Byl, Ying Tang, Joseph R. Despres, Matthew Thomas Marlow, Christopher Scannell, Daniel Elzer, Kavita Murthi
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Publication number: 20190078696Abstract: Fluid supply packages of varying types are described, which are useful for delivery of fluids to fluid-utilizing facilities such as semiconductor manufacturing facilities, solar panel manufacturing facilities, and flat-panel display manufacturing facilities. The fluid supply packages include fluid supply vessels and valve heads of varied configuration, as useful to constitute fluid supply packages that are pressure-regulated and/or adsorbent-based in character.Type: ApplicationFiled: July 8, 2016Publication date: March 14, 2019Inventors: Glenn M. Tom, Karl W. Olander, James A. Dietz, Michael J. Wodjenski, Edward A. Sturm, Susan K. Dimascio, Luping Wang, James V. McManus, Steven M. Lurcott, Jose I. Amo, Paul J. Marganski, Joseph D. Sweeney, Shaun M. Wilson, Steven E. Bishop, Greg Nelson, Donald J. Carruthers, Sharad N. Yedave, Ying Tang, Joseph Despres, Barry Chambers, Richard Ray, Daniel Elzer
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Patent number: 9636626Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.Type: GrantFiled: June 22, 2015Date of Patent: May 2, 2017Assignee: Entegris, Inc.Inventors: Dennis Brestovansky, Michael J. Wodjenski, Jose I. Arno, J. Donald Carruthers, Philip A. Moroco
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Patent number: 9631778Abstract: Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters.Type: GrantFiled: July 10, 2015Date of Patent: April 25, 2017Assignee: Entegris, Inc.Inventors: Joseph D. Sweeney, Anthony M. Avila, Michael J. Wodjenski, Joseph R. Despres, Thomas H. Baum
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Publication number: 20170037511Abstract: Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.Type: ApplicationFiled: October 25, 2016Publication date: February 9, 2017Inventors: John M. Cleary, Jose I. Arno, Bryan C. Hendrix, Donn Naito, Scott Battle, John N. Gregg, Michael J. Wodjenski, Chongying Xu
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Publication number: 20170003056Abstract: An adsorbent assembly for use in an adsorption heating and/or cooling system is described. The adsorbent assembly includes an array of adsorbent articles in which at least one adsorbent article is arranged in at least one of the following compatible arrangements (i)-(iii): (i) in contact with at least one other adsorbent article along matable engagement surfaces of respective contacting articles, with the contacting articles being configured to form a communicating gas flow passage through the contacting articles or at peripheral portions thereof; (ii) in a tube comprising at least one matable engagement surface that is in contact with a complementary matable engagement surface of another tube containing at least one adsorbent article; and (iii) in contact with a deformable foil member that is in contact with at least one other adsorbent article and/or a heat transfer member.Type: ApplicationFiled: November 28, 2014Publication date: January 5, 2017Applicant: ENTEGRIS, INC.Inventors: Edward A. Sturm, J. Donald Carruthers, Shaun M. Wilson, Michael J. Wodjenski, Lawrence H. Dubois
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Publication number: 20160041136Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: ApplicationFiled: October 19, 2015Publication date: February 11, 2016Applicant: Entegris, Inc.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank DiMeo, JR.
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Publication number: 20150306537Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.Type: ApplicationFiled: June 22, 2015Publication date: October 29, 2015Applicant: Entegris, Inc.Inventors: Dennis Brestovansky, Michael J. Wodjenski, Jose I. Arno, J. Donald Carruthers, Philip A. Moroco
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Publication number: 20150308626Abstract: Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters.Type: ApplicationFiled: July 10, 2015Publication date: October 29, 2015Applicant: Entegris, Inc.Inventors: Joseph D. Sweeney, Anthony M. Avila, Michael J. Wodjenski, Joseph R. Despres, Thomas H. Baum
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Patent number: 9170246Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: GrantFiled: October 15, 2013Date of Patent: October 27, 2015Assignee: ENTEGRIS, INC.Inventors: James Dietz, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank DiMeo, Jr.
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Patent number: 9126139Abstract: A durable carbon pyrolyzate adsorbent having reversible sorptive affinity for hydrogen sulfide, and including the following characteristics: (a) a bulk density as measured by ASTM D2854 in a range of from 0.55 g/cc adsorbent to 1.25 g/cc adsorbent; (b) an H2S capacity in a range of from 140 cc H2S/g adsorbent to 250 cc H2S/g adsorbent, at normal conditions (1 atm, 293.15° K); (c) an H2S capacity in a range of from 1.0 cc H2S/g adsorbent to 15.0 cc H2S/g adsorbent, at partial pressure of 0.76 torr (101.3 Pa) (1000 ppm) of H2S at 293.15° K; and (d) a single pellet radial crush strength in a range of from 7 kilopond (kP) to 40 kilopond (kP) as measured by ASTM D4179.Type: GrantFiled: May 29, 2013Date of Patent: September 8, 2015Assignee: ENTEGRIS, INC.Inventors: Shaun M. Wilson, Edward A. Sturm, Michael J. Wodjenski, J. Donald Carruthers, Joshua B. Sweeney
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Patent number: 9109755Abstract: Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.Type: GrantFiled: June 18, 2011Date of Patent: August 18, 2015Assignee: ENTEGRIS, INC.Inventors: Joseph D. Sweeney, Anthony M. Avila, Michael J. Wodjenski, Joseph R. Despres, Thomas H. Baum
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Patent number: 9062829Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.Type: GrantFiled: August 13, 2013Date of Patent: June 23, 2015Assignee: ENTEGRIS, INC.Inventors: Dennis Brestovansky, Michael J. Wodjenski, Jose I. Arno, J. Donald Carruthers, Philip A. Moroco
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Publication number: 20140329025Abstract: Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.Type: ApplicationFiled: July 19, 2014Publication date: November 6, 2014Inventors: John M. Cleary, Jose I. Arno, Bryan C. Hendrix, Donn Naito, Scott Battle, John N. Gregg, Michael J. Wodjenski, Chongying Xu
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Patent number: 8821640Abstract: Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.Type: GrantFiled: August 31, 2007Date of Patent: September 2, 2014Assignee: Advanced Technology Materials, Inc.Inventors: John M. Cleary, Jose I. Arno, Bryan C. Hendrix, Donn Naito, Scott Battle, John N. Gregg, Michael J. Wodjenski, Chongying Xu
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Publication number: 20140041440Abstract: A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.Type: ApplicationFiled: October 15, 2013Publication date: February 13, 2014Applicant: Advanced Technology Materials, Inc.Inventors: James DIETZ, Steven E. Bishop, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim, Frank Dimeo, JR.
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Publication number: 20130334068Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.Type: ApplicationFiled: August 13, 2013Publication date: December 19, 2013Applicant: Advanced Technology Materials, Inc.Inventors: Dennis Brestovansky, Michael J. Wodjenski, Jose I. Arno, J. Donald Carruthers, Phillip A. Moroco
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Publication number: 20130324397Abstract: A durable carbon pyrolyzate adsorbent having reversible sorptive affinity for hydrogen sulfide, and including the following characteristics: (a) a bulk density as measured by ASTM D2854 in a range of from 0.55 g/cc adsorbent to 1.25 g/cc adsorbent; (b) an H2S capacity in a range of from 140 cc H2S/g adsorbent to 250 cc H2S/g adsorbent, at normal conditions (1 atm, 293.15° K); (c) an H2S capacity in a range of from 1.0 cc H2S/g adsorbent to 15.0 cc H2S/g adsorbent, at partial pressure of 0.76 ton (101.3 Pa) (1000 ppm) of H2S at 293.15° K; and (d) a single pellet radial crush strength in a range of from 7 kilopond (kP) to 40 kilopond (kP) as measured by ASTM D4179.Type: ApplicationFiled: May 29, 2013Publication date: December 5, 2013Applicant: Advanced Technology Materials, Inc.Inventors: Shaun M. Wilson, Edward A. Sturm, Michael J. Wodjenski, J. Donald Carruthers, Joshua B. Sweeney