Abstract: A scalable flat-panel nano-particle MEMS/NEMS thruster includes a grid having a plurality of electrodes to establish electrical fields. A liquid is disposed in a liquid reservoir of the grid. The liquid is positioned within the electrical fields. A plurality of nano-particles are suspended in the liquid. A plurality of MEMS and NEMS micron-size vias are disposed in the grid. The electrical fields extract the plurality of nano-particles from the liquid and accelerate the nano-particles in the vias to provide propulsion system thrust.

Abstract: A process and apparatus for depositing thin films and coatings using a vacuum arc plasma source having hot, non-consumable anode is described. Plasma and macroparticles of the cathode material are emitted from the cathode. Part of this material arrives at the hot refractory anode, where it is re-evaporated without macroparticle generation. Substrates exposed to the vapor flow from the anode, but shielded from a direct line of sight with the cathode, are coated with cathode material without macroparticle inclusions.