Patents by Inventor Michael R. Seacrist

Michael R. Seacrist has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11942360
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Grant
    Filed: March 13, 2023
    Date of Patent: March 26, 2024
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Patent number: 11887885
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Grant
    Filed: October 19, 2022
    Date of Patent: January 30, 2024
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Publication number: 20230215759
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Application
    Filed: March 13, 2023
    Publication date: July 6, 2023
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Patent number: 11626318
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: April 11, 2023
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Publication number: 20230062816
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Application
    Filed: October 19, 2022
    Publication date: March 2, 2023
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Patent number: 11532501
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Grant
    Filed: February 3, 2021
    Date of Patent: December 20, 2022
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Patent number: 11289577
    Abstract: A scalable process for fabricating graphene/hexagonal boron nitride (h-BN) heterostructures is disclosed herein. The process includes (BN)XHy-radical interfacing with active sites on silicon nitride coated silicon (Si3N4/Si) surfaces for nucleation and growth of large-area, uniform and ultrathin h-BN directly on Si3N4/Si substrates (B/N atomic ratio=1:1.11±0.09). Further, monolayer graphene van der Waals bonded with the produced h-BN surface benefits from h-BN's reduced roughness (3.4 times) in comparison to Si3N4/Si. Because the reduced surface roughness leads to reduction in surface roughness scattering and charge impurity scattering, therefore an enhanced intrinsic charge carrier mobility (3 folds) for graphene on h-BN/Si3N4/Si is found.
    Type: Grant
    Filed: December 24, 2019
    Date of Patent: March 29, 2022
    Assignees: GlobalWafers Co., Ltd., Board of the Trustees of the University of Illinois
    Inventors: Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
  • Patent number: 11276759
    Abstract: A scalable process for fabricating graphene/hexagonal boron nitride (h-BN) heterostructures is disclosed herein. The process includes (BN)XHy-radical interfacing with active sites on silicon nitride coated silicon (Si3N4/Si) surfaces for nucleation and growth of large-area, uniform and ultrathin h-BN directly on Si3N4/Si substrates (B/N atomic ratio=1:1.11±0.09). Further, monolayer graphene van der Waals bonded with the produced h-BN surface benefits from h-BN's reduced roughness (3.4 times) in comparison to Si3N4/Si. Because the reduced surface roughness leads to reduction in surface roughness scattering and charge impurity scattering, therefore an enhanced intrinsic charge carrier mobility (3 folds) for graphene on h-BN/Si3N4/Si is found.
    Type: Grant
    Filed: December 24, 2019
    Date of Patent: March 15, 2022
    Assignees: GlobalWafers Co., Ltd., Board of Trustees of the University of Illinois
    Inventors: Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
  • Publication number: 20210242075
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Application
    Filed: April 19, 2021
    Publication date: August 5, 2021
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Patent number: 11075109
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Grant
    Filed: July 11, 2019
    Date of Patent: July 27, 2021
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Publication number: 20210159114
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Application
    Filed: February 3, 2021
    Publication date: May 27, 2021
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Patent number: 10943813
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: March 9, 2021
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Patent number: 10796905
    Abstract: A method is provided for forming Group IIIA-nitride layers, such as GaN, on substrates. The Group IIIA-nitride layers may be deposited on mesa-patterned semiconductor-on-insulator (SOI, e.g., silicon-on-insulator) substrates. The Group IIIA-nitride layers may be deposited by heteroepitaxial deposition on mesa-patterned semiconductor-on-insulator (SOI, e.g., silicon-on-insulator) substrates.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: October 6, 2020
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Gang Wang, Michael R. Seacrist
  • Patent number: 10658472
    Abstract: A scalable process for fabricating graphene/hexagonal boron nitride (h-BN) heterostructures is disclosed herein. The process includes (BN)XHy-radical interfacing with active sites on silicon nitride coated silicon (Si3N4/Si) surfaces for nucleation and growth of large-area, uniform and ultrathin h-BN directly on Si3N4/Si substrates (B/N atomic ratio=1:1.11±0.09). Further, monolayer graphene van der Waals bonded with the produced h-BN surface benefits from h-BN's reduced roughness (3.4 times) in comparison to Si3N4/Si. Because the reduced surface roughness leads to reduction in surface roughness scattering and charge impurity scattering, therefore an enhanced intrinsic charge carrier mobility (3 folds) for graphene on h-BN/Si3N4/Si is found.
    Type: Grant
    Filed: April 28, 2017
    Date of Patent: May 19, 2020
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
  • Publication number: 20200152745
    Abstract: A scalable process for fabricating graphene/hexagonal boron nitride (h-BN) heterostructures is disclosed herein. The process includes (BN)XHy-radical interfacing with active sites on silicon nitride coated silicon (Si3N4/Si) surfaces for nucleation and growth of large-area, uniform and ultrathin h-BN directly on Si3N4/Si substrates (B/N atomic ratio=1:1.11±0.09). Further, monolayer graphene van der Waals bonded with the produced h-BN surface benefits from h-BN's reduced roughness (3.4 times) in comparison to Si3N4/Si. Because the reduced surface roughness leads to reduction in surface roughness scattering and charge impurity scattering, therefore an enhanced intrinsic charge carrier mobility (3 folds) for graphene on h-BN/Si3N4/Si is found.
    Type: Application
    Filed: December 24, 2019
    Publication date: May 14, 2020
    Inventors: Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
  • Publication number: 20200152744
    Abstract: A scalable process for fabricating graphene/hexagonal boron nitride (h-BN) heterostructures is disclosed herein. The process includes (BN)xHy-radical interfacing with active sites on silicon nitride coated silicon (Si3N4/Si) surfaces for nucleation and growth of large-area, uniform and ultrathin h-BN directly on Si3N4/Si substrates (B/N atomic ratio=1:1.11±0.09). Further, monolayer graphene van der Waals bonded with the produced h-BN surface benefits from h-BN's reduced roughness (3.4 times) in comparison to Si3N4/Si. Because the reduced surface roughness leads to reduction in surface roughness scattering and charge impurity scattering, therefore an enhanced intrinsic charge carrier mobility (3 folds) for graphene on h-BN/Si3N4/Si is found.
    Type: Application
    Filed: December 24, 2019
    Publication date: May 14, 2020
    Inventors: Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
  • Patent number: 10573517
    Abstract: A method for depositing a layer of graphene directly on the surface of a substrate, such as a semiconductor substrate is provided. Due to the strong adhesion of graphene and cobalt to a semiconductor substrate, the layer of graphene is epitaxially deposited.
    Type: Grant
    Filed: September 28, 2016
    Date of Patent: February 25, 2020
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Vikas Berry, Sanjay Behura, Phong Nguyen, Michael R. Seacrist
  • Publication number: 20200020766
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Application
    Filed: June 26, 2019
    Publication date: January 16, 2020
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Publication number: 20200020571
    Abstract: A semiconductor-on-insulator (e.g., silicon-on-insulator) structure having superior radio frequency device performance, and a method of preparing such a structure, is provided by utilizing a single crystal silicon handle wafer sliced from a float zone grown single crystal silicon ingot.
    Type: Application
    Filed: July 11, 2019
    Publication date: January 16, 2020
    Inventors: Michael R. Seacrist, Robert W. Standley, Jeffrey L. Libbert, Hariprasad Sreedharamurthy, Leif Jensen
  • Publication number: 20190206675
    Abstract: A method is provided for forming Group IIIA-nitride layers, such as GaN, on substrates. The Group IIIA-nitride layers may be deposited on mesa-patterned semiconductor-on-insulator (SOI, e.g., silicon-on-insulator) substrates. The Group IIIA-nitride layers may be deposited by heteroepitaxial deposition on mesa-patterned semiconductor-on-insulator (SOI, e.g., silicon-on-insulator) substrates.
    Type: Application
    Filed: March 5, 2019
    Publication date: July 4, 2019
    Inventors: Gang Wang, Michael R. Seacrist