Patents by Inventor Ming-Yih Wang
Ming-Yih Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11500016Abstract: A circuit screening system includes a target circuit under test, a power circuit, and a clock generating circuit. The target circuit under test receives a first testing signal in a first period, and a second testing signal in a second period, and the first testing signal is different from the second testing signal. The power circuit provides a supply voltage to the target circuit under test, wherein a voltage level of the supply voltage maintains at a first voltage level in the first period, is pulled up to a second voltage level and back to the first level after the first period, and maintains at the first voltage level in a second period after the first period. The clock generating circuit provides a clock signal to the target circuit under test, wherein the clock signal has different profiles in the first period and the second period.Type: GrantFiled: December 7, 2020Date of Patent: November 15, 2022Assignee: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Chi-Che Wu, Tsung-Yang Hung, Jia-Ming Guo, Edna Fang, Ming-Yih Wang
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Publication number: 20220352067Abstract: A semiconductor structure and method of manufacturing a semiconductor structure are provided. The semiconductor structure includes a package structure. The package structure includes a passivation layer formed over an interconnect structure; an electrically-conductive structure formed on the passivation layer and extending through the passivation layer to electrically contact the interconnect structure; a dielectric structure formed over the passivation layer and surrounding the electrically-conductive structure to expose at least a portion of a top surface of the electrically-conductive structure; and a metallic protection structure formed on the top surface of the electrically-conductive structure exposed from the dielectric structure. The top surface of the metallic protection structure is aligned with or lower than a top surface of the dielectric structure.Type: ApplicationFiled: April 29, 2021Publication date: November 3, 2022Inventors: CHUN-WEI CHANG, HSUAN-MING HUANG, JIAN-HONG LIN, MING-HONG HSIEH, MINGNI CHANG, MING-YIH WANG
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Publication number: 20220300695Abstract: The present disclosure provides a method for manufacturing a semiconductor structure. The method includes receiving layout data representing information for manufacturing the semiconductor structure. A first parasitic capacitance is formed in a first region and a second parasitic capacitance is formed in a second region. The method further includes determining a parasitic capacitance difference between the first region and the second region; and forming a dummy conductor in the second region. A system for manufacturing a semiconductor device is also provided.Type: ApplicationFiled: June 10, 2022Publication date: September 22, 2022Inventors: HSUAN-MING HUANG, AN SHUN TENG, MINGNI CHANG, MING-YIH WANG, YINLUNG LU
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Patent number: 11361141Abstract: The present disclosure provides a method for manufacturing a semiconductor structure. The method includes receiving layout data representing information for manufacturing the semiconductor structure having a metal layer over a substrate. A first parasitic capacitance and a second parasitic capacitance are formed between the metal layer and the substrate. The method further includes determining a parasitic capacitance difference between a first region and a second region. The method further includes forming a dummy capacitor to minimize the parasitic capacitance difference. A system for manufacturing a semiconductor device is also provided.Type: GrantFiled: July 27, 2020Date of Patent: June 14, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Hsuan-Ming Huang, An Shun Teng, Mingni Chang, Ming-Yih Wang, Yinlung Lu
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Publication number: 20220178998Abstract: A circuit screening system includes a target circuit under test, a power circuit, and a clock generating circuit. The target circuit under test receives a first testing signal in a first period, and a second testing signal in a second period, and the first testing signal is different from the second testing signal. The power circuit provides a supply voltage to the target circuit under test, wherein a voltage level of the supply voltage maintains at a first voltage level in the first period, is pulled up to a second voltage level and back to the first level after the first period, and maintains at the first voltage level in a second period after the first period. The clock generating circuit provides a clock signal to the target circuit under test, wherein the clock signal has different profiles in the first period and the second period.Type: ApplicationFiled: December 7, 2020Publication date: June 9, 2022Inventors: CHI-CHE WU, TSUNG-YANG HUNG, JIA-MING GUO, EDNA FANG, MING-YIH WANG
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Patent number: 11309258Abstract: A semiconductor structure includes a substrate, a MIM capacitor disposed over the substrate, a first insulating layer disposed over the MIM capacitor, an ONON stack disposed over the first insulating layer, a connecting via disposed in the first insulating layer, and a connecting pad disposed in the ONON stack and in contact with the connecting via. The ONON stack covers sidewalls of the connecting pad and a portion of a top surface of the connecting pad. The ONON stack includes a first silicon oxide layer, a first silicon nitride layer, a second silicon oxide layer and a second silicon nitride layer upwardly disposed over the first insulating layer. A thickness of the second silicon nitride layer is greater than a thickness of the second silicon oxide layer and greater than a thickness of the first silicon nitride layer.Type: GrantFiled: July 6, 2020Date of Patent: April 19, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Tung-Jiun Wu, Yinlung Lu, Mingni Chang, Ming-Yih Wang
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Publication number: 20210396804Abstract: A method is provided in the present disclosure. The method includes several operations: generating, by a processing unit, a mapping table associated with multiple scan chains and multiple shift cycles corresponding to multiple values stored in the scan chains in an integrated circuit; determining, based on the mapping table, at least one fail flip flop in the scan chains in response to the values outputted from the scan chains; and identifying at least one fault site corresponding to the at least one fail flip flop.Type: ApplicationFiled: September 16, 2020Publication date: December 23, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chi-Che WU, Tsung-Yang HUNG, Ming-Yih WANG
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Publication number: 20210389256Abstract: A method includes: determining a defective area in a semiconductor device of a semiconductor wafer; thinning the semiconductor wafer from a backside of the semiconductor wafer; bonding a first substrate to the backside of the semiconductor wafer, wherein the first substrate includes an opening and the defective area is exposed through the opening; and performing a test on the defective area by projecting a light beam from the backside through the opening.Type: ApplicationFiled: June 12, 2020Publication date: December 16, 2021Inventors: Chi-Che Wu, Tsung-Yang Hung, Ming-Yih Wang
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Patent number: 11199508Abstract: A method includes: determining a defective area in a semiconductor device of a semiconductor wafer; thinning the semiconductor wafer from a backside of the semiconductor wafer; bonding a first substrate to the backside of the semiconductor wafer, wherein the first substrate includes an opening and the defective area is exposed through the opening; and performing a test on the defective area by projecting a light beam from the backside through the opening.Type: GrantFiled: June 12, 2020Date of Patent: December 14, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chi-Che Wu, Tsung-Yang Hung, Ming-Yih Wang
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Publication number: 20210375723Abstract: An integrated circuit (IC) with through-circuit vias (TCVs) and methods of forming the same are disclosed. The IC includes a semiconductor device, first and second interconnect structures disposed on first and second surfaces of the semiconductor device, respectively, first and second inter-layer dielectric (ILD) layers disposed on front and back surfaces of the substrate, respectively, and a TCV disposed within the first and second interconnect structures, the first and second ILD layers, and the substrate. The TCV is spaced apart from the semiconductor device by a portion of the substrate and portions of the first and second ILD layers. A first end of the TCV, disposed over the front surface of the substrate, is connected to a conductive line of the first interconnect structure and a second end of the TCV, disposed over the back surface of the substrate, is connected to a conductive line of the second interconnect structure.Type: ApplicationFiled: January 29, 2021Publication date: December 2, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jian-Hong LIN, Hsin-Chun CHANG, Ming-Hong HSIEH, Ming-Yih WANG, Yinlung LU
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Publication number: 20210366918Abstract: A memory device includes a transistor, an anti-fuse element, a first gate via, a second gate via, and a bit line. The transistor includes a fin structure and a first gate structure across the fin structure. The anti-fuse element includes the fin structure and a second gate structure across the fin structure. The first gate via is connected to the first gate structure of the transistor and is spaced apart from the fin structure in a top view. The second gate via is connected to the second gate structure of the anti-fuse element and is directly above the fin structure. The bit line is connected to the fin structure and the transistor.Type: ApplicationFiled: August 4, 2021Publication date: November 25, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chiung-Ting OU, Ming-Yih WANG, Jian-Hong LIN
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Publication number: 20210356521Abstract: An apparatus for testing a device under test (DUT) is provided. The apparatus includes a power supply device and a data generating device. The power supply device is configured to provide a first voltage and a second voltage to the DUT. The data generating device is configured to provide first data to the DUT. The power supply device is configured to provide the first voltage to the DUT in a first time duration. The data generating device is configured to provide the first data to the DUT in the first time duration. The power supply device is configured to provide the second voltage to the DUT in a second time duration after the first time duration. The second voltage is different from the first voltage.Type: ApplicationFiled: August 10, 2020Publication date: November 18, 2021Inventors: CHI-CHE WU, TSUNG-YANG HUNG, MING-YIH WANG, JIA-MING GUO
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Patent number: 11094702Abstract: A memory device includes a transistor, an anti-fuse element, a gate via, and a bit line. The transistor includes two source/drain regions. The anti-fuse element is connected to one of the source/drain regions of the transistor. The anti-fuse element includes a channel and a gate structure above the channel. The gate via is above the gate structure of the anti-fuse element. A lateral distance between a center of the gate via and a sidewall of the channel is less than a width of the gate via. The bit line is connected to another of the source/drain regions of the transistor.Type: GrantFiled: February 10, 2020Date of Patent: August 17, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chiung-Ting Ou, Ming-Yih Wang, Jian-Hong Lin
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Publication number: 20210249421Abstract: A memory device includes a transistor, an anti-fuse element, a gate via, and a bit line. The transistor includes two source/drain regions. The anti-fuse element is connected to one of the source/drain regions of the transistor. The anti-fuse element includes a channel and a gate structure above the channel. The gate via is above the gate structure of the anti-fuse element. A lateral distance between a center of the gate via and a sidewall of the channel is less than a width of the gate via. The bit line is connected to another of the source/drain regions of the transistor.Type: ApplicationFiled: February 10, 2020Publication date: August 12, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chiung-Ting OU, Ming-Yih WANG, Jian-Hong LIN
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Publication number: 20210210447Abstract: A semiconductor structure is provided. The semiconductor structure includes a metallization structure with a dielectric surface. A first protecting structure over the dielectric surface. A first protecting structure over the passivation layer. A conductive pad over the dielectric surface. A polymer layer over the first protecting structure and the conductive pad. A conductive bump electrically coupled to the conductive pad through an opening of the polymer layer. A first portion of the first protecting structure is leveled with the conductive pad and a second portion of the first protecting structure is higher than the conductive pad.Type: ApplicationFiled: March 19, 2021Publication date: July 8, 2021Inventors: TUNG-JIUN WU, MINGNI CHANG, MING-YIH WANG, YINLUNG LU
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Patent number: 10957664Abstract: A semiconductor structure and manufacturing method thereof are provided. The semiconductor structure includes a metallization structure with a dielectric surface. A first protecting structure is on the dielectric surface. A conductive pad is on the dielectric surface and is leveled with the first protecting structure. A polymer layer is over the first protecting structure and the conductive pad. A conductive bump is electrically coupled to the conductive pad through an opening of the polymer layer. A method for manufacturing a semiconductor structure is also provided.Type: GrantFiled: May 29, 2019Date of Patent: March 23, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Tung-Jiun Wu, Mingni Chang, Ming-Yih Wang, Yinlung Lu
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Publication number: 20200402924Abstract: A semiconductor structure includes a substrate, a MIM capacitor disposed over the substrate, a first insulating layer disposed over the MIM capacitor, an ONON stack disposed over the first insulating layer, a connecting via disposed in the first insulating layer, and a connecting pad disposed in the ONON stack and in contact with the connecting via. The ONON stack covers sidewalls of the connecting pad and a portion of a top surface of the connecting pad. The ONON stack includes a first silicon oxide layer, a first silicon nitride layer, a second silicon oxide layer and a second silicon nitride layer upwardly disposed over the first insulating layer. A thickness of the second silicon nitride layer is greater than a thickness of the second silicon oxide layer and greater than a thickness of the first silicon nitride layer.Type: ApplicationFiled: July 6, 2020Publication date: December 24, 2020Inventors: TUNG-JIUN WU, YINLUNG LU, MINGNI CHANG, MING-YIH WANG
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Patent number: 10868185Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a semiconductive substrate, and a first contact plug formed on the semiconductive substrate. The semiconductor structure further includes a dielectric layer encircling the first contact plug. The semiconductor structure further includes a multilayer structure deposited on the dielectric layer and encircling the first contact plug. The dielectric layer produces a tensile stress pulling the first contact plug outward along a width direction. The multilayer structure produces a compressive stress that compensates for the tensile stress caused by the dielectric layer. A method of forming the semiconductor structure is also provided.Type: GrantFiled: November 27, 2018Date of Patent: December 15, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chin-Shan Wang, Yi-Miaw Lin, Ming-Yih Wang
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Publication number: 20200381378Abstract: A semiconductor structure and manufacturing method thereof are provided. The semiconductor structure includes a metallization structure with a dielectric surface. A first protecting structure is on the dielectric surface. A conductive pad is on the dielectric surface and is leveled with the first protecting structure. A polymer layer is over the first protecting structure and the conductive pad. A conductive bump is electrically coupled to the conductive pad through an opening of the polymer layer. A method for manufacturing a semiconductor structure is also provided.Type: ApplicationFiled: May 29, 2019Publication date: December 3, 2020Inventors: TUNG-JIUN WU, MINGNI CHANG, MING-YIH WANG, YINLUNG LU
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Publication number: 20200356719Abstract: The present disclosure provides a method for manufacturing a semiconductor structure. The method includes receiving a layout data representing information for manufacturing the semiconductor structure having a metal layer over a substrate. A first parasitic capacitance and a second parasitic capacitance are formed between the metal layer and the substrate. The method further includes determining a parasitic capacitance difference between a first region and a second region. The method further includes forming a dummy capacitor to minimize the parasitic capacitance difference. A system for manufacturing a semiconductor device is also provided.Type: ApplicationFiled: July 27, 2020Publication date: November 12, 2020Inventors: HSUAN-MING HUANG, AN SHUN TENG, MINGNI CHANG, MING-YIH WANG, YINLUNG LU