Abstract: The present disclosure provides a valve apparatus that prevents defects in the valve apparatus and prevents damage to the heat insulating material due to a cryogenic liquid fluid, and a semiconductor processing device including the same and a manufacturing method thereof.

Abstract: Provided is a substrate treating apparatus including: a fluid supply unit supplying a supercritical fluid to the treatment space, a plurality of components installed in the fluid supply line; and a detection member detecting whether or not metal particles are released from the component. The detection member includes: an upstream detection port connected to the fluid supply line upstream from a first component which is one of the plurality of components; a downstream detection port connected to the fluid supply line downstream from the first component; and a detector provided to be coupled to a selected detection port between the upstream detection port and the downstream detection port, and detecting metal particles from a fluid flowing through the detection port from the fluid supply line.

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber providing an inner space; a fluid supply unit configured to supply a treating fluid to the inner space; and a fluid exhaust unit configured to exhaust the treating fluid from the inner space, and wherein the fluid exhaust unit includes: an exhaust line connected to the chamber; and a pressure adjusting member installed at the exhaust line and configured to maintain a pressure of the inner space to a set pressure, and wherein the fluid supply unit includes: a fluid supply source; and a supply line provided between the fluid supply source and the chamber, and wherein at the supply line or the exhaust line a flow rate measuring member configured to measure a flow rate per unit time of the treating fluid flowing at the inner space is installed.

Abstract: The present invention discloses an exhausting device and an exhausting method in substrate processing equipment, and more particularly, a technique for controlling a processing process environment by providing a buffer space for storing chemical fumes outside a ventilation unit of the substrate processing equipment, and discharging the chemical fumes into the buffer space in accordance with a processing process in a chamber interior space.

Abstract: A highly stretchable superhydrophobic thin film using initiated chemical vapor deposition is prepared by a method in which a substrate is coated with a copolymer at a nanometer thickness by allowing a fluorine monomer containing 4 to 6 fluoroalkyl groups and having a glass transition temperature of 5° C. or less to react with a crosslinking monomer on the substrate in the presence of an initiator in an initiated chemical vapor deposition reactor and thus its durability can be secured in foldable and wearable devices.

Abstract: A display device includes a display substrate, a main circuit board, and first and second connection circuit boards. The display substrate includes a base layer, an insulating layer on the base layer, a first signal line on the base layer, a second signal line on the base layer, a first pad exposed from the insulating layer and connected to the first signal line, and a second pad connected to a side surface of the second signal line and disposed on a side surface and a bottom surface of the base layer. The first connection circuit board electrically connects the first pad and the main circuit board, and the second connection circuit board electrically connects the second pad and the main circuit board.

Abstract: A display device includes alignment electrodes spaced apart from each other, first and second light emitting elements between the alignment electrodes, a first pixel electrode electrically connected to first end portions of the first light emitting elements, a second pixel electrode electrically connected to second end portions of the first light emitting elements, a third pixel electrode electrically connected to the second pixel electrode and to first end portions of the second light emitting elements, a fourth pixel electrode electrically connected to second end portions of the second light emitting elements, and an insulating layer between the first pixel electrode and the second pixel electrode, wherein the insulating layer includes at least one opening exposing the second end portions of the first and second light emitting elements.

Abstract: A method of fabricating a display device includes: providing on a first jig a display panel to which is attached one side of a connection circuit board; providing a main circuit board on a second jig; supporting the connection circuit board with a supporter between the first jig and the second jig; and attaching another side of the connection circuit board to the main circuit board, wherein the supporter includes a base part and a plurality of guides on the base part, the guides being adjusted in length in an up-and-down direction.

Abstract: A display device includes a display substrate, a main circuit board, and first and second connection circuit boards. The display substrate includes a base layer, an insulating layer on the base layer, a first signal line on the base layer, a second signal line on the base layer, a first pad exposed from the insulating layer and connected to the first signal line, and a second pad connected to a side surface of the second signal line and disposed on a side surface and a bottom surface of the base layer. The first connection circuit board electrically connects the first pad and the main circuit board, and the second connection circuit board electrically connects the second pad and the main circuit board.

Abstract: A panel transfer tray according to an embodiment includes an accommodation part which accommodates a target panel, a protrusion protruding upward direction from an upper edge of the accommodation part, and a first movement prevention member disposed at one side of the accommodation part and disposed adjacent to the protrusion, and the first movement prevention member has a stair shape of which a planar area gradually decreases along the upward direction.

Abstract: The inventive concept provides a temperature controlling method. The temperature controlling method for controlling a temperature of a tank storing a treating fluid transferred to the chamber, comprises supplying the treating fluid to the inner space of the tank, heating the treating fluid at the inner space, and transferring the heated treating fluid to the chamber, wherein the temperature of the inner space is controlled based on a measured pressure of the inner space.

Abstract: A display device includes a display panel including first to fourth panel pads and a connection board including first to fourth connection board pads coupled to the first to fourth pads, respectively. The first and second panel pads are electrically connected to each other, and the third and fourth panel pads are electrically connected to each other. The connection board includes a driving circuit which generates a first test result signal based on a first panel test signal transmitted to the first connection board pad and a first panel feedback signal received from the second connection board pad, generates a second test result signal based on a second panel test signal transmitted to the third connection board pad and a second panel feedback signal received from the fourth connection board pad, and sequentially outputs the first and second test result signals as a test result signal.

Abstract: The present invention relates to a method for producing a 3- to 3.5-valent vanadium solution from a 4-valent vanadium solution by a catalytic reaction in the presence of a reducing agent, which generates a gas product during oxidation; a method for producing an electrolyte for a vanadium redox flow battery; and an apparatus for producing a liquid electrolyte for a vanadium redox flow battery. The present invention is characterized in that when a 3- to 3.5-valent vanadium electrolyte is produced from a 4-valent vanadium electrolyte by a catalytic reaction in the presence of a reducing agent, which generates a gas product during oxidation, the gas product produced in the catalytic reaction is captured with inert gas bubbles, which are carrier gases, and is removed from the reaction solution of the catalytic reaction by gas-liquid phase separation, thereby accelerating the catalytic reaction towards the forward reaction.

Abstract: A display device includes a display panel including first to fourth panel pads and a connection board including first to fourth connection board pads coupled to the first to fourth pads, respectively. The first and second panel pads are electrically connected to each other, and the third and fourth panel pads are electrically connected to each other. The connection board includes a driving circuit which generates a first test result signal based on a first panel test signal transmitted to the first connection board pad and a first panel feedback signal received from the second connection board pad, generates a second test result signal based on a second panel test signal transmitted to the third connection board pad and a second panel feedback signal received from the fourth connection board pad, and sequentially outputs the first and second test result signals as a test result signal.

Abstract: A method of fabricating a display device includes: providing on a first jig a display panel to which is attached one side of a connection circuit board; providing a main circuit board on a second jig; supporting the connection circuit board with a supporter between the first jig and the second jig; and attaching another side of the connection circuit board to the main circuit board, wherein the supporter includes a base part and a plurality of guides on the base part, the guides being adjusted in length in an up-and-down direction.

Abstract: The present invention relates to a method for producing a 3- to 3.5-valent vanadium solution from a 4-valent vanadium solution by a catalytic reaction in the presence of a reducing agent, which generates a gas product during oxidation; a method for producing an electrolyte for a vanadium redox flow battery; and an apparatus for producing a liquid electrolyte for a vanadium redox flow battery. The present invention is characterized in that when a 3- to 3.5-valent vanadium electrolyte is produced from a 4-valent vanadium electrolyte by a catalytic reaction in the presence of a reducing agent, which generates a gas product during oxidation, the gas product produced in the catalytic reaction is captured with inert gas bubbles, which are carrier gases, and is removed from the reaction solution of the catalytic reaction by gas-liquid phase separation, thereby accelerating the catalytic reaction towards the forward reaction.

Abstract: A light guide is provided. The light guide includes an optic formed along a length of the light guide. In particular, the optic diffuses light incident from a light source, and the optic is formed to gradually change from a first shape to a second shape as the optic gets farther from an incident portion.

Abstract: A display device includes a display substrate, a main circuit board, and first and second connection circuit boards. The display substrate includes a base layer, an insulating layer on the base layer, a first signal line on the base layer, a second signal line on the base layer, a first pad exposed from the insulating layer and connected to the first signal line, and a second pad connected to a side surface of the second signal line and disposed on a side surface and a bottom surface of the base layer. The first connection circuit board electrically connects the first pad and the main circuit board, and the second connection circuit board electrically connects the second pad and the main circuit board.

Abstract: A light guide is provided. The light guide includes an optic formed along a length of the light guide. In particular, the optic diffuses light incident from a light source, and the optic is formed to gradually change from a first shape to a second shape as the optic gets farther from an incident portion.

Abstract: A method and system of controlling an engine for vehicle interior heating is provided. The method includes performing a first engine control when the engine is not in an engine-on state for vehicle driving, to perform heating control for interior heating at a predetermined range of a reference coolant temperature. Additionally, the method includes performing a second engine control when the engine is in an engine-on state for vehicle driving, to prolong an engine-on time for vehicle driving by setting a minimum value of the range of the reference coolant temperature to a lower value and setting a maximum value of the range of the reference coolant temperature to a higher value and to determine a point of time of engine-off operation based on a real-time lock up time and an average lock up time of an engine clutch for vehicle driving.