Abstract: There is provided a solid-state imaging element capable of increasing a channel area of a pixel transistor and reducing a parasitic capacitance of a gate.

Abstract: To provide an electric potential measuring device that can further improve evaluation quality.

Abstract: To achieve decreased noise and improved sensitivity by reducing parasitic capacitance in a charge detection sensor. The charge detection sensor includes a detection element, a detection electrode, and a contact. The detection element is provided on one surface of a semiconductor substrate and detects a charge. The detection electrode is provided on another surface different from the one surface of the semiconductor substrate. The contact penetrates the semiconductor substrate and electrically connects the detection electrode and the detection element. Since no wiring layer is formed between the detection element and the detection electrode, the parasitic capacitance is reduced.

Abstract: An imaging element and device configured for reduced image quality deterioration are disclosed. In one example, a pixel unit of the imaging element includes a selection transistor and an amplification transistor each constituted by a multigate transistor. The selection transistor and amplification transistor may be a FinFET that includes a silicon channel having a fin shape. Moreover, gates of the selection transistor and the amplification transistor may be formed on an identical silicon channel having a fin shape. Furthermore, for example, an ion having a smaller thermal diffusivity than a thermal diffusivity of boron or phosphorous is injected into the silicon channel of the selection transistor. In addition, for example, a work function of a material of a gate electrode of the selection transistor is different from a work function of a material of a gate electrode of the amplification transistor.

Abstract: To provide an imaging element capable of adjusting characteristics of a pixel transistor and miniaturizing the pixel transistor. A solid-state imaging element is a solid-state imaging element including a plurality of pixels provided on a surface of a substrate, each of the pixels including: a photoelectric conversion section; a first transistor having one end connected to the photoelectric conversion section; a second transistor provided between a first power supply and a first signal line; and a third transistor connected between the second transistor and the first signal line. The second transistor includes a first channel region extending in a direction substantially perpendicular to the surface of the substrate, and a first gate electrode provided on an upper surface and both side surfaces of the first channel region and connected to another end of the first transistor.

Abstract: To achieve decreased noise and improved sensitivity by reducing parasitic capacitance in a charge detection sensor. The charge detection sensor includes a detection element, a detection electrode, and a contact. The detection element is provided on one surface of a semiconductor substrate and detects a charge. The detection electrode is provided on another surface different from the one surface of the semiconductor substrate. The contact penetrates the semiconductor substrate and electrically connects the detection electrode and the detection element. Since no wiring layer is formed between the detection element and the detection electrode, the parasitic capacitance is reduced.

Abstract: A semiconductor device, a semiconductor device manufacturing method, and an image capturing device capable of suppressing variations in transistor characteristics. The semiconductor device includes a semiconductor substrate, and a field effect transistor. The field effect transistor includes a semiconductor region having a channel, a gate electrode covering the semiconductor region, and a gate insulating film. The semiconductor region has a top face, and a first side face at one side of the top face in a gate width direction of the gate electrode. The gate electrode has a first part facing the top face over the gate insulating film, and a second part facing the first side face over the gate insulating film. A first end face of the first part and a second end face of the second part are flush at at least one end of the gate electrode in a gate length direction.

Abstract: Provided are a semiconductor device capable of reducing a substrate bias effect, and an imaging device using the semiconductor device. The semiconductor device includes a semiconductor substrate, and a field effect transistor provided on a first main surface of the semiconductor substrate. The field effect transistor includes a semiconductor region in which a channel is formed, a gate electrode covering the semiconductor region, a gate insulating film disposed between the semiconductor region and the gate electrode, and a first insulating film disposed between the semiconductor region and the semiconductor substrate. The semiconductor region has an upper surface, a first side surface located on one side of the upper surface in a first direction parallel to the upper surface, and a second side surface located on the other side of the upper surface in the first direction.

Abstract: There is provided a solid-state imaging device including: a first semiconductor layer including a photoelectric converter and an electric charge accumulation section for each pixel, the electric charge accumulation section in which a signal electric charge generated in the photoelectric converter is accumulated; a pixel separation section that is provided in the first semiconductor layer, and partitions a plurality of the pixels from each other; a second semiconductor layer that is provided with a pixel transistor and is stacked on the first semiconductor layer, the pixel transistor that reads the signal electric charge of the electric charge accumulation section; and a first shared coupling section that is provided between the second semiconductor layer and the first semiconductor layer, and is provided to straddle the pixel separation section and is electrically coupled to a plurality of the electric charge accumulation sections.

Abstract: In a solid-state imaging element provided with a differential pair of transistors, noise of a signal from the differential pair is reduced. The semiconductor integrated circuit includes a pixel circuit and a pair of TFETs (Tunnel Field Effect Transistors). In the semiconductor integrated circuit, the pixel circuit photoelectrically converts incident light to generate a pixel signal. Further, in the semiconductor integrated circuit, the pair of TFETs amplifies the difference between the pixel signal generated by the pixel circuit and a predetermined reference signal that changes with time, and outputs the amplified difference as a differential amplification signal.

Abstract: Provided is a semiconductor device that includes a semiconductor layer, a channel region, first and second main electrode regions, a gate insulating film, and a gate electrode. The first and second main electrode regions are on opposing ends of the channel region. The gate insulating film is disposed on the inner walls of first and second trenches and on the upper surface of the channel region. The gate electrode includes a first protruding section, a second protruding section, and a horizontal section. The first protruding section and the second protruding section are embedded in first and second trenches respectively. The horizontal section is connected to the upper ends of the first and second protruding sections and disposed on the upper surface of the channel region. The depth of the first and second main electrode regions is equal to or greater than the depth of the first and second protruding sections.

Abstract: An imaging element and device configured for reduced image quality deterioration are disclosed. In one example, a pixel unit of the imaging element includes a selection transistor and an amplification transistor each constituted by a multigate transistor. The selection transistor and amplification transistor may be a FinFET that includes a silicon channel having a fin shape. Moreover, gates of the selection transistor and the amplification transistor may be formed on an identical silicon channel having a fin shape. Furthermore, for example, an ion having a smaller thermal diffusivity than a thermal diffusivity of boron or phosphorous is injected into the silicon channel of the selection transistor. In addition, for example, a work function of a material of a gate electrode of the selection transistor is different from a work function of a material of a gate electrode of the amplification transistor.

Abstract: To provide an electric potential measuring device that can further improve evaluation quality.

Abstract: In a solid-state imaging element provided with a differential pair of transistors, noise of a signal from the differential pair is reduced. The semiconductor integrated circuit includes a pixel circuit and a pair of TFETs (Tunnel Field Effect Transistors). In the semiconductor integrated circuit, the pixel circuit photoelectrically converts incident light to generate a pixel signal. Further, in the semiconductor integrated circuit, the pair of TFETs amplifies the difference between the pixel signal generated by the pixel circuit and a predetermined reference signal that changes with time, and outputs the amplified difference as a differential amplification signal.

Abstract: To achieve decreased noise and improved sensitivity by reducing parasitic capacitance in a charge detection sensor. The charge detection sensor includes a detection element, a detection electrode, and a contact. The detection element is provided on one surface of a semiconductor substrate and detects a charge. The detection electrode is provided on another surface different from the one surface of the semiconductor substrate. The contact penetrates the semiconductor substrate and electrically connects the detection electrode and the detection element. Since no wiring layer is formed between the detection element and the detection electrode, the parasitic capacitance is reduced.

Abstract: A solid-state imaging device comprising a semiconductor substrate; a logic circuit region having a first gate electrode; a pixel region having a plurality of pixel units, each which includes at least one second gate electrode; a first gate insulating film forming between the first gate electrode in the logic circuit region and the semiconductor substrate; a second gate insulating film forming between the second gate electrode in the pixel region and the semiconductor substrate; a first insulating layer covering the first gate electrode and the second gate electrode; and an offset spacer on a sidewall of the first gate electrode being formed by etch back of the first insulating layer on the first gate electrode.

Abstract: A solid-state imaging device comprising a semiconductor substrate; a logic circuit region having a first gate electrode; a pixel region having a plurality of pixel units, each which includes at least one second gate electrode; a first gate insulating film forming between the first gate electrode in the logic circuit region and the semiconductor substrate; a second gate insulating film forming between the second gate electrode in the pixel region and the semiconductor substrate; a first insulating layer covering the first gate electrode and the second gate electrode; and an offset spacer on a sidewall of the first gate electrode being formed by etch back of the first insulating layer on the first gate electrode.

Abstract: A method is provided for manufacturing a solid-state imaging device including a semiconductor substrate having a photoelectric conversion portion, a pixel transistor region and a logic circuit region. The method includes the steps of forming a first gate electrode on the semiconductor substrate with a first gate insulating film therebetween, a second gate electrode in the pixel transistor region on the semiconductor substrate with a second gate insulating film therebetween; forming a first insulating layer to cover the first gate electrode, the second gate electrode, a floating diffusion region where a floating diffusion portion is to be formed, and the photoelectric conversion portion; and forming an offset spacer on a sidewall of the first gate electrode by etch back of the first insulating layer in a state where the photoelectric conversion portion, the pixel transistor region and the floating diffusion region are masked.

Abstract: A method is provided for manufacturing a solid-state imaging device including a semiconductor substrate having a photoelectric conversion portion, a pixel transistor region and a logic circuit region. The method includes the steps of forming a first gate electrode on the semiconductor substrate with a first gate insulating film therebetween, a second gate electrode in the pixel transistor region on the semiconductor substrate with a second gate insulating film therebetween; forming a first insulating layer to cover the first gate electrode, the second gate electrode, a floating diffusion region where a floating diffusion portion is to be formed, and the photoelectric conversion portion; and forming an offset spacer on a sidewall of the first gate electrode by etch back of the first insulating layer in a state where the photoelectric conversion portion, the pixel transistor region and the floating diffusion region are masked.

Abstract: A semiconductor device 100 includes a silicon substrate 102, an N-type MOSFET 118 including a first high dielectric constant film 111 and a polycrystalline silicon film 114 on the silicon substrate 102, and a P-type MOSFET 120 including a second high dielectric constant film 12 and a polycrystalline silicon film 114 juxtaposed to N-type MOSFET 118 on the silicon substrate 102. The second high dielectric constant film 112 is formed to have the film thickness thinner than the film thickness of the first high dielectric constant film 111. The first high dielectric constant film 111 and the second high dielectric constant film 112 contains one or more element(s) selected from Hf and Zr.