Abstract: A conventional pattern inspection, which compares an image to be inspected with a reference image and subjects the resulting difference value to the defect detection using the threshold of defect determination, has difficulty in highly-sensitive inspection. Because defects occur only in specific circuit pattern sections, false reports occur in the conventional pattern inspections which are not based on the position. Disclosed are a defect inspection method and a device thereof which perform a pattern inspection by acquiring a GP image in advance, designating a place to be inspected and a threshold map to the GP image on the GUI, setting the identification reference of the defects, next acquiring the image to be inspected, applying the identification reference to the image to be inspected, and identifying the defects with the identification reference, thereby enabling the highly-sensitive inspection.

Abstract: Disclosed is a method of inspecting an object to be inspected in a semiconductor manufacturing process, for resolving the problem to increase defect detection sensitivity. An image capture means is used to image capture a designated area of the object to be inspected; a defect is detected in the captured image; a circuit pattern is recognized from the captured image; a characteristic value is computed, relating to an image tone and shape, from the detected defect; a characteristic value is computed, relating to the image tone and shape, from the recognized circuit pattern; either a specified defect or circuit pattern is filtered and extracted from the detected defect and the recognized circuit pattern; a mapping characteristic value is determined from the characteristic value of either the filtered and extracted specified defect or circuit pattern; and the distribution of the determined characteristic values is displayed onscreen in a map format.

Abstract: A method for measuring a vibration property of a structure by applying an impulse input to the structure, which comprises: step (A) of pulse-irradiating the surface of the structure or a part adjacent to the surface with a laser beam to apply an impulse input to the structure and measuring a response output from the structure to which the impulse input has been applied; step (B) of determining the relationship between the laser intensity of the laser beam and the impulse input induced by the laser beam by a rigid pendulum method and determining an impulse input F corresponding to the laser intensity of the laser beam, with which the structure has been pulse-irradiated, based on the relationship; and step (C) of measuring the vibrational amplitude value of frequency response of the structure from the response output measured in step (A) and the impulse input F measured in step (B).

Abstract: In performing a programmed-point inspection of a circuit pattern using a review SEM, stable inspection can be performed while suppressing the generation of a false report even when a variation in a circuit pattern to be inspected is large. SEM images that are obtained by sequentially imaging a predetermined circuit pattern using the review SEM are stored into a storage unit. Images that meet a set condition are selected from the stored SEM images, and averaged to create an average image (GP image). By performing pattern check by GP comparison using this GP image, an inspection can be performed while suppressing the generation of a false report even when a variation in the circuit patterns is large.

Abstract: A circuit-pattern inspection apparatus and related method provide a highly sensitive defect inspection of an area including the most circumferential portion of a memory mat of a semiconductor chip formed on a semiconductor wafer. In certain examples, an image of a circuit pattern of a die formed on the semiconductor wafer is acquired to judge whether or not the circuit pattern contains a defect.

Abstract: To provide a packaged high-catechin beverage in which a low-caffeine green tea extract is added. A packaged beverage containing from 0.03 to 1.0 wt % of non-polymer catechins, in which a low-caffeine green tea extract obtained by a method of brining a green tea extract into contact with a 91/9 to 97/3 by weight mixture of an organic solvent and water, activated carbon, and acid clay or activated clay is added.

Abstract: The present invention relates to a defect inspection apparatus for inspecting defects in patterns formed on a semiconductor device, on the GUI of which for the confirmation of the inspection results an area is provided for displaying any one of or facing each other the features amount of defects, and the image during inspection or the reacquired image, and on the GUI of which a means is provided for setting the classification class and importance of the defects, and based on the classification class and the importance of the defects information set by this setting means, the classification conditions or the defect judging conditions are automatically or manually set so that the inspection conditions may be set easily.

Abstract: In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.

Abstract: To provide a packaged high-catechin beverage in which a low-caffeine green tea extract is added. A packaged beverage containing from 0.03 to 1.0 wt % of non-polymer catechins, in which a low-caffeine green tea extract obtained by a method of brining a green tea extract into contact with a 91/9 to 97/3 by weight mixture of an organic solvent and water, activated carbon, and acid clay or activated clay is added.

Abstract: Provided are a method and a device for defect inspection, wherein, in a state where a few DOIs exist in a large number of nuisances, a classification performance can be improved by a few appropriate defect instructions and a high classification performance is ensured while mitigating the burden of user's defect instructions. The method and device for defect inspection is characterized by repeating extraction of one or more defects from a plurality of defects detected by imaging a sample, instruction of a classification class of the extracted defects, and calculation of a classification criterion and a classification performance from the image information and classification class of the defects, and determining, based on the finally obtained classification criterion, the classification class of the unknown defects.

Abstract: Provided is an examination technique to detect defects with high sensitivity at an outer-most repeative portion of a memory mat of a semiconductor device and even in a peripheral circuit having no repetitiveness. A circuit pattern inspection apparatus comprises an image detection unit for acquiring an image of a circuit pattern composed of multiple die having a repeative pattern, a defect judgement unit which composes, in respect of an acquired detected image, reference images by switching addition objectives depending on regions of repeative pattern and the other regions and compares a composed reference image with the detected image to detect a defect, and a display unit for displaying the image of the detected defect.

Abstract: A fat or oil composition containing the following ingredients (A) and (B): (A) 100 parts by weight of a fat or oil containing 15 wt. % or more of diacylglycerols having, in the constituent fatty acids thereof, an unsaturated fatty acid content of 80 wt. % or more, a conjugated linoleic acid content of from 2 to 92 wt. %, and an ?3 unsaturated fatty acid content of less than 15 wt. %; having a monoacylglycerol content of 5 wt. % or less and a free fatty acid content of 5 wt. % or less; and containing 1,3-diacylglycerol/1,2-diacylglycerol at a weight ratio of from 1 to 5; and (B) from 0.001 to 2 parts by weight of a tocopherol.

Abstract: Disclosed herein are a circuit-pattern inspection apparatus, and a circuit-pattern inspection method, which are capable of making a highly sensitive defect judgment of an area including the most circumferential portion of a memory mat of a semiconductor chip formed on a semiconductor wafer.

Abstract: Provided is a packaged non-tea beverage, excellent in the storage stability of the flavor, color tone and content of catechins. The packaged non-tea beverage, which includes a purified green tea extract having a ratio of gallate-type catechins in non-polymer catechins of less than 50% by mass, contains (A) 0.072 to 1.2% by mass of non-polymer catechins and (B) 0.001 to 12 mg/100 mL of gallic acid.

Abstract: A packaged beverage with a green tea extract mixed therein, which contains (A) a non-polymer catechin, (B) oxalic acid or a salt thereof, and (C) caffeine, where the content weight ratio (B)/(A) is from 0.00005 to 0.1, and the content weight ratio (A)/(C) is from 5 to 10000. The packaged beverage contains catechins at high concentration, is reduced in bitterness and astringency and is suited for long-term drinking, is excellent in the stability of bitterness and astringency and also in the feeling as it passes down the throat, and further, remains stable in its color tone even when filled in a clear container and stored at high temperatures.

Abstract: A packaged beverage with a green tea extract mixed therein, which contains (A) a non-polymer catechin, and (B) from 0.0001 to 20 wt %, in terms of equivalent glucose amount, and less than 0.05 wt %, in terms of equivalent fructose amount, of a carbohydrate, wherein the packaged beverage has a pH of from 2 to 6. The packaged beverage contains catechins at high concentration, is reduced in bitterness and astringency and is suited for long-term drinking, is excellent in the stability of bitterness and astringency and also in the feeling as it passes down the throat, and further, remains stable in its color tone over a long term even when filled in a clear container and stored at high temperatures.

Abstract: A non-tea-based, packaged beverage with a green tea extract mixed therein contains the following ingredients (A) and (B): (A) 0.06 to 0.5 wt. % of non-polymer catechins, and (B) 9 to 13.5 mM of citric acid or a salt thereof. Its pH is from 3.4 to 4.2. The non-tea-based, packaged beverage contains catechins at a high concentration, is reduced in bitterness and astringency, is suited for long-term drinking, and is excellent in the stability of bitterness and astringency and also in the feeling as it passes down the throat, and moreover, its color tone remains stable over a long term even when packed in a clear package and stored at high temperatures.

Abstract: A packaged beverage with a green tea extract mixed therein, comprising the following ingredients (A), (B) and (C): (A) from 0.01 to 1.0 wt % of non-polymer catechins, (B) oxalic acid or a salt thereof, and (C) caffeine, wherein a content weight ratio [(B)/(A)] of said oxalic acid or salt thereof (B) to said non-polymer catechins (A) is from 0.00005 to 0.1, and a content weight ratio [(A)/(C)] of said non-polymer catechins (A) to said caffeine (C) is from 5 to 10000. The packaged beverage contains catechins at high concentration, is reduced in bitterness and astringency and is suited for long-term drinking, is excellent in the stability of bitterness and astringency and also in the feeling as it passes down the throat, and further, remains stable in its color tone even when filled in a clear container and stored at high temperatures.

Abstract: To provide a packaged high-catechin beverage in which a low-caffeine green tea extract is added. A packaged beverage containing from 0.03 to 1.0 wt % of non-polymer catechins, in which a low-caffeine green tea extract obtained by a method of brining a green tea extract into contact with a 91/9 to 97/3 by weight mixture of an organic solvent and water, activated carbon, and acid clay or activated clay is added.

Abstract: A packaged beverage with a green tea extract mixed therein, comprising the following ingredients (A) and (B): (A) from 0.01 to 1.0 wt % of non-polymer catechins, and (B) from 0.0001 to 20 wt %, in terms of equivalent glucose amount, and less than 0.05 wt %, in terms of equivalent fructose amount, of a carbohydrate, wherein said beverage has a pH of from 2 to 6. The packaged beverage contains catechins at high concentration, is reduced in bitterness and astringency and is suited for long-term drinking, is excellent in the stability of bitterness and astringency and also in the feeling as it passes down the throat, and further, remains stable in its color tone over a long term even when filled in a clear container and stored at high temperatures.