Abstract: A spectroscope includes an optical fiber 218, a collimator optical system 231 for collimating signal light come out from the optical fiber 218, a spectroscopic element 233 for dispersing the signal light collimated by the collimator optical system 231, a detector 237 composed of a plurality of detector elements 237a disposed at least in a direction of dispersion and detecting the light dispersed by the spectroscopic element 233, and a focusing optical system 236 for focusing the signal light come out from the detector 237 onto a detecting surface of the detector 237. It is set such that the focusing optical system 236 makes a diameter of a spot of the signal light focused on the detecting surface of the detector 237 smaller than an arranged pitch of the detector 237 and a numerical aperture of the collimator optical system 231 is larger than that of the optical fiber 218.

Abstract: A confocal microscope includes a light source that emits illuminating light beam, an illuminating optical system that irradiates the illuminating light beam onto a specimen, a condensing optical system that condenses the light reflected off the specimen and a light detection unit. The light detection unit includes a mask member, a movable shutter and a light detector. The mask member includes a plurality of reflecting/transmitting surfaces each constituting a light separating surface, and only the central portion of the light flux entering the mask member from the condensing optical system exits through a pinhole. The movable shutter opens or closes off a plurality of pinholes individually, and the light detector detects the light flux having passed through the pinholes.

Abstract: A spectroscope capable of suppressing the dimension and the cost with avoiding a problem caused by polarization dependency of the diffraction grating. The spectroscope includes a polarizing beam splitter plate 3 that divides the light from an input fiber 1 into a first and a second optical paths and polarizes each light of each optical path having different direction of polarization with each other, a Fresnel rhomb half wave plate 5 that arranges the direction of polarization of the light in the first optical path into that in the second optical path and a plane mirror 4 that deflects the second optical path such that at least a portion of an area where the light through the first optical path is incident on the diffraction grating 6 and an area where the light through the second optical path is incident on the diffraction grating overlap each other.

Abstract: A multibeam type scanning microscope that has N beams, wherein the system is devised so that the respective beams perform scanning in LM stages in the Y direction at maximum magnification where the discrete scanning direction is the Y direction, thus performing scanning in an area of N×LM stages overall, and scanning is controlled so that the following processes (1) and (2) are successively repeated LK times at a magnification that is 1/LK times the maximum magnification. Here, L, M and N are integers of 2 or greater, and K is a natural number. (1) The respective beams perform scanning in the Y direction at a sampling interval that is LK times that at the maximum magnification. (2) When scanning of LM-K stages is completed in the Y direction, and the repetition is less than the LKth time, the scanning skips ((N?1)×LM-K+1) stages.

Abstract: A spectroscope capable of suppressing the dimension and the cost with avoiding a problem caused by polarization dependency of the diffraction grating. The spectroscope includes a polarizing beam splitter plate 3 that divides the light from an input fiber 1 into a first and a second optical paths and polarizes each light of each optical path having different direction of polarization with each other, a Fresnel rhomb half wave plate 5 that arranges the direction of polarization of the light in the first optical path into that in the second optical path and a plane mirror 4 that deflects the second optical path such that at least a portion of an area where the light through the first optical path is incident on the diffraction grating 6 and an area where the light through the second optical path is incident on the diffraction grating overlap each other.

Abstract: A spectroscope includes an optical fiber 218, a collimator optical system 231 for collimating signal light come out from the optical fiber 218, a spectroscopic element 233 for dispersing the signal light collimated by the collimator optical system 231, a detector 237 composed of a plurality of detector elements 237a disposed at least in a direction of dispersion and detecting the light dispersed by the spectroscopic element 233, and a focusing optical system 236 for focusing the signal light come out from the detector 237 onto a detecting surface of the detector 237. It is set such that the focusing optical system 236 makes a diameter of a spot of the signal light focused on the detecting surface of the detector 237 smaller than an arranged pitch of the detector 237 and a numerical aperture of the collimator optical system 231 is larger than that of the optical fiber 218.

Abstract: A confocal microscope includes a light source that emits illuminating light beam, an illuminating optical system that irradiates the illuminating light beam onto a specimen, a condensing optical system that condenses the light reflected off the specimen and a light detection unit. The light detection unit includes a mask member, a movable shutter and a light detector. The mask member includes a plurality of reflecting/transmitting surfaces each constituting a light separating surface, and only the central portion of the light flux entering the mask member from the condensing optical system exits through a pinhole. The movable shutter opens or closes off a plurality of pinholes individually, and the light detector detects the light flux having passed through the pinholes.