Patents by Inventor Neil Greeley

Neil Greeley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of Modifying Oxide Spacers
    Publication number: 20090017627
    Abstract: Methods for reducing line roughness of spacers and other features utilizing a non-plasma and non-wet etch fluoride processing technology are provided. Embodiments of the methods can be used for spacer or line reduction and/or smoothing the surfaces along the edges of such features through the reaction and subsequent removal of material.
    Type: Application
    Filed: July 12, 2007
    Publication date: January 15, 2009
    Inventors: Joseph Neil Greeley, Paul Morgan, Mark Kiehlbauch