Patents by Inventor Nirmal Ramaswamy

Nirmal Ramaswamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230132576
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a memory cell including a first transistor, a second transistor, and a dielectric structure formed in a trench. The first transistor includes a first channel region, and a charge storage structure separated from the first channel region. The second transistor includes a second channel region formed over the charge storage structure. The dielectric structure includes a first dielectric portion formed on a first sidewall of the trench, and a second dielectric portion formed on a second sidewall of the trench. The charge storage structure is between and adjacent the first and second dielectric portions.
    Type: Application
    Filed: October 29, 2021
    Publication date: May 4, 2023
    Inventors: Durai Vishak Nirmal Ramaswamy, Kamal M. Karda
  • Publication number: 20230121892
    Abstract: A method used in forming an electronic component comprising conductive material and ferroelectric material comprises forming a non-ferroelectric metal oxide-comprising insulator material over a substrate. A composite stack comprising at least two different composition non-ferroelectric metal oxides is formed over the substrate. The composite stack has an overall conductivity of at least 1×102 Siemens/cm. The composite stack is used to render the non-ferroelectric metal oxide-comprising insulator material to be ferroelectric. Conductive material is formed over the composite stack and the insulator material. Ferroelectric capacitors and ferroelectric field effect transistors independent of method of manufacture are also disclosed.
    Type: Application
    Filed: November 30, 2022
    Publication date: April 20, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11631453
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes multiple levels of two-transistor (2T) memory cells vertically arranged above a substrate. Each 2T memory cell includes a charge storage transistor having a gate, a write transistor having a gate, a vertically extending access line, and a single bit line pair. The source or drain region of the write transistor is directly coupled to a charge storage structure of the charge storage transistor. The vertically extending access line is coupled to gates of both the charge storage transistor and the write transistor of 2T memory cells in multiple respective levels of the multiple vertically arranged levels. The vertically extending access line and the single bit line pair are used for both write operations and read operations of each of the 2T memory cells to which they are coupled.
    Type: Grant
    Filed: December 8, 2021
    Date of Patent: April 18, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu, Karthik Sarpatwari, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11616073
    Abstract: Some embodiments include apparatuses and methods forming the apparatuses. One of the apparatuses includes a first transistor including a first channel region, and a charge storage structure separated from the first channel region; a second transistor including a second channel region formed over the charge storage structure; and a data line formed over and contacting the first channel region and the second channel region, the data line including a portion adjacent the first channel region and separated from the first channel region by a dielectric material.
    Type: Grant
    Filed: October 29, 2021
    Date of Patent: March 28, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Eric S. Carman, Karthik Sarpatwari, Durai Vishak Nirmal Ramaswamy, Richard E Fackenthal, Haitao Liu
  • Publication number: 20230081634
    Abstract: A transistor comprises a first conductive contact, a heterogeneous channel comprising at least one oxide semiconductor material over the first conductive contact, a second conductive contact over the heterogeneous channel, and a gate electrode laterally neighboring the heterogeneous channel. A device, a method of forming a device, a memory device, and an electronic system are also described.
    Type: Application
    Filed: October 27, 2022
    Publication date: March 16, 2023
    Inventors: Scott E. Sills, Ramanathan Gandhi, Durai Vishak Nirmal Ramaswamy, Yi Fang Lee, Kamal M. Karda
  • Patent number: 11605723
    Abstract: Some embodiments include integrated memory having an array of access transistors. Each access transistor includes an active region which has a first source/drain region, a second source/drain region and a channel region. The active regions of the access transistors include semiconductor material having elements selected from Groups 13 and 16 of the periodic table. First conductive structures extend along rows of the array and have gating segments adjacent the channel regions of the access transistors. Heterogenous insulative regions are between the gating segments and the channel regions. Second conductive structures extend along columns of the array, and are electrically coupled with the first source/drain regions. Storage-elements are electrically coupled with the second source/drain regions. Some embodiments include a transistor having a semiconductor oxide channel material. A conductive gate material is adjacent to the channel material.
    Type: Grant
    Filed: July 28, 2020
    Date of Patent: March 14, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11600691
    Abstract: A memory cell comprises a capacitor having a first conductive capacitor electrode having laterally-spaced walls that individually have a top surface. A second conductive capacitor electrode is laterally between the walls of the first capacitor electrode, and comprises a portion above the first capacitor electrode. Ferroelectric material is laterally between the walls of the first capacitor electrode and laterally between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the ferroelectric material. A parallel current leakage path is between an elevationally-inner surface of the portion of the second capacitor electrode that is above the first capacitor electrode and at least one of the individual top surfaces of the laterally-spaced walls of the first capacitor electrode.
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: March 7, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Muralikrishnan Balakrishnan, Beth R. Cook, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11581319
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a memory cell, first, second, and third data lines, and first and second access lines. Each of the first, second, and third data lines includes a length extending in a first direction. Each of the first and second access lines includes a length extending in a second direction. The memory cell includes a first transistor including a charge storage structure, and a first channel region electrically separated from the charge storage structure, and a second transistor including a second channel region electrically coupled to the charge storage structure. The first data line is electrically coupled to the first channel region. The second data line is electrically coupled to the first channel region. The third data line is electrically coupled to the second channel region, the second channel region being between the charge storage structure and the third data line.
    Type: Grant
    Filed: January 11, 2021
    Date of Patent: February 14, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Srinivas Pulugurtha, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20230041784
    Abstract: Some embodiments include a ferroelectric transistor having a conductive gate structure, a first ring extending around the conductive gate structure and a second ring extending around the first ring. The first ring includes ferroelectric material. The second ring includes insulative material. A mass of channel material is outward of the second ring. Some embodiments include integrated assemblies and methods of forming integrated assemblies.
    Type: Application
    Filed: March 16, 2022
    Publication date: February 9, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Kamal M. Karda
  • Publication number: 20230030364
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a memory cell, first, second, and third data lines, and first and second access lines. Each of the first, second, and third data lines includes a length extending in a first direction. Each of the first and second access lines includes a length extending in a second direction. The memory cell includes a first transistor including a charge storage structure, and a first channel region electrically separated from the charge storage structure, and a second transistor including a second channel region electrically coupled to the charge storage structure. The first data line is electrically coupled to the first channel region. The second data line is electrically coupled to the first channel region. The third data line is electrically coupled to the second channel region, the second channel region being between the charge storage structure and the third data line.
    Type: Application
    Filed: October 6, 2022
    Publication date: February 2, 2023
    Inventors: Srinivas Pulugurtha, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20230031904
    Abstract: Some embodiments include apparatuses and methods of operating such apparatuses. One of such apparatuses includes a data line, a conductive region, and a memory cell including a first transistor and a second transistor. The first transistor includes a first channel region coupled to the data line and the conductive region, a charge storage structure, and a first gate. The second transistor includes a second channel region coupled to the data line and the charge storage structure, and a second gate. The first gate is electrically separated from the second gate and opposite from the second gate in a direction from the first channel region to the second channel region.
    Type: Application
    Filed: July 29, 2021
    Publication date: February 2, 2023
    Inventors: Eric S. Carman, Durai Vishak Nirmal Ramaswamy, Richard E Fackenthal, Kamal M. Karda, Karthik Sarpatwari, Haitao Liu, Duane R. Mills, Christian Caillat
  • Publication number: 20230030585
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first data line located in a first level of the apparatus; a second data line located in a second level of the apparatus; a first memory cell located in a third level of the apparatus between the first and second levels, the first memory cell including a first transistor coupled to the first data line, and a second transistor coupled between the first data line and a charge storage structure of the first transistor; and a second memory cell located in a fourth level of the apparatus between the first and second levels, the second memory cell including a third transistor coupled to the second data line, and a fourth transistor coupled between the second data line and a charge storage structure of the third transistor, the first transistor coupled in series with the third transistor between the first and second data lines.
    Type: Application
    Filed: October 17, 2022
    Publication date: February 2, 2023
    Inventors: Karthik Sarpatwari, Kamal M. Karda, Durai Vishak Nirmal Ramaswamy, Haitao Liu
  • Publication number: 20230027308
    Abstract: Some embodiments include an integrated assembly having a first bottom electrode adjacent to a second bottom electrode. An intervening region is directly between the first and second bottom electrodes. Capacitor-insulative-material is adjacent to the first and second bottom electrodes. The capacitor-insulative-material is substantially not within the intervening region. Top-electrode-material is adjacent to the capacitor-insulative-material. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 20, 2021
    Publication date: January 26, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Marcello Mariani, Giorgio Servalli
  • Publication number: 20230013333
    Abstract: A method of forming an array of capacitors comprises forming rows and columns of horizontally-spaced openings in a sacrificial material. Fill material is formed in multiple of the columns of the openings and lower capacitor electrodes a are formed in a plurality of the columns that are between the columns of the openings comprising the fill material therein. The fill material is of different composition from that of the lower capacitor electrodes. The fill material is between a plurality of horizontally-spaced groups that individually comprises the lower capacitor electrodes. Immediately-adjacent of the groups are horizontally spaced apart from one another by a gap that comprises at least one of the columns of the openings comprising the fill material therein. The sacrificial material is removed to expose laterally-outer sides of the lower capacitor electrodes. A capacitor insulator is formed over tops and the laterally-outer sides of the lower capacitor electrodes.
    Type: Application
    Filed: September 22, 2022
    Publication date: January 19, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11552086
    Abstract: A method used in forming an electronic component comprising conductive material and ferroelectric material comprises forming a non-ferroelectric metal oxide-comprising insulator material over a substrate. A composite stack comprising at least two different composition non-ferroelectric metal oxides is formed over the substrate. The composite stack has an overall conductivity of at least 1×102 Siemens/cm. The composite stack is used to render the non-ferroelectric metal oxide-comprising insulator material to be ferroelectric. Conductive material is formed over the composite stack and the insulator material. Ferroelectric capacitors and ferroelectric field effect transistors independent of method of manufacture are also disclosed.
    Type: Grant
    Filed: August 10, 2020
    Date of Patent: January 10, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy, Manuj Nahar
  • Patent number: 11552198
    Abstract: A transistor comprises a pair of source/drain regions having a channel region there-between. A transistor gate construction is operatively proximate the channel region. The channel region comprises a direction of current flow there-through between the pair of source/drain regions. The channel region comprises at least one of GaP, GaN, and GaAs extending all along the current-flow direction. Each of the source/drain regions comprises at least one of GaP, GaN, and GaAs extending completely through the respective source/drain region orthogonal to the current-flow direction. The at least one of the GaP, the GaN, and the GaAs of the respective source/drain region is directly against the at least one of the GaP, the GaN, and the GaAs of the channel region. Each of the source/drain regions comprises at least one of elemental silicon and metal material extending completely through the respective source/drain region orthogonal to the current-flow direction. Other embodiments are disclosed.
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: January 10, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 11545492
    Abstract: A transistor comprises semiconductor material that is generally L-shaped or generally mirror L-shaped in at least one straight-line vertical cross-section thereby having an elevationally-extending stem and a base extending horizontally from a lateral side of the stem above a bottom of the stem. The semiconductor material of the stem comprises an upper source/drain region and a channel region there-below. The transistor comprises at least one of (a) and (b), where (a): the semiconductor material of the stem comprises a lower source/drain region below the channel region, and (b): the semiconductor material of the base comprises a lower source/drain region. A gate is operatively laterally adjacent the channel region of the stem. Other embodiments are disclosed, including arrays of memory cells individually comprising a capacitor and an elevationally-extending transistor. Methods are disclosed.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: January 3, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Publication number: 20220416088
    Abstract: A method of forming a device comprises forming dielectric structures over other dielectric structures overlying conductive contact structures, the dielectric structures separated from one another by trenches and laterally extending orthogonal to the other dielectric structures and the conductive contact structures. Conductive gate structures are formed on exposed side surfaces of the dielectric structures within the trenches. Dielectric oxide structures are formed on exposed side surfaces of the conductive gate structures within the trenches. Exposed portions of the other dielectric structures are removed to form isolation structures. Semiconductive pillars are formed on exposed side surfaces of the dielectric oxide structures and the isolation structures within the trenches. The semiconductive pillars are in electrical contact with the conductive contact structures. Additional conductive contact structures are formed on upper surfaces of the semiconductive pillars.
    Type: Application
    Filed: August 25, 2022
    Publication date: December 29, 2022
    Inventors: Scott E. Sills, Ramanathan Gandhi, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11527631
    Abstract: Memory cells having a first dielectric between a charge storage material and a semiconductor, conductive nanodots between the charge storage material and a control gate, and a second dielectric between the control gate and the conductive nanodots.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: December 13, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Nirmal Ramaswamy
  • Publication number: 20220392511
    Abstract: Some embodiments include apparatuses and methods operating the apparatuses. One of the apparatuses includes a first data line located over a substrate, a second data line located over the first data line, a third data line located over the second data line and electrically separated from the first and second data lines, and a memory cell coupled to the first, second, and third data lines. The memory cell includes a first material between the first and second data lines and electrically coupled to the first and second data lines; a second material located over the first data line and the first material, the second material electrically separated from the first material and electrically coupled to the third data line; and a memory element electrically coupled to the second material and electrically separated from the first material and first and second data lines.
    Type: Application
    Filed: August 15, 2022
    Publication date: December 8, 2022
    Inventors: Karthik Sarpatwari, Kamal M. Karda, Durai Vishak Nirmal Ramaswamy