Patents by Inventor Nirmal Ramaswamy

Nirmal Ramaswamy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11515417
    Abstract: A transistor comprises a first conductive contact, a heterogeneous channel comprising at least one oxide semiconductor material over the first conductive contact, a second conductive contact over the heterogeneous channel, and a gate electrode laterally neighboring the heterogeneous channel. A device, a method of forming a device, a memory device, and an electronic system are also described.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: November 29, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, Ramanathan Gandhi, Durai Vishak Nirmal Ramaswamy, Yi Fang Lee, Kamal M. Karda
  • Publication number: 20220367118
    Abstract: Some embodiments include an apparatus having horizontally-spaced bottom electrodes supported by a supporting structure. Leaker device material is directly against the bottom electrodes. Insulative material is over the bottom electrodes, and upper electrodes are over the insulative material. Plate material extends across the upper electrodes and couples the upper electrodes to one another. The plate material is directly against the leaker device material. The leaker device material electrically couples the bottom electrodes to the plate material, and may be configured to discharge at least a portion of excess charge from the bottom electrodes to the plate material. Some embodiments include methods of forming apparatuses which include capacitors having bottom electrodes and top electrodes, with the top electrodes being electrically coupled to one another through a conductive plate. Leaker devices are formed to electrically couple the bottom electrodes to the conductive plate.
    Type: Application
    Filed: July 14, 2022
    Publication date: November 17, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Ashonita A. Chavan, Beth R. Cook, Manuj Nahar, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11501817
    Abstract: Methods, systems, and devices for operating a ferroelectric memory cell or cells are described. A cell may be written with a value that is intended to convey a different logic state than may typically be associated with the value. For example, a cell that has stored a charge associated with one logic state for a time period may be re-written to store a different charge, and the re-written cell may still be read to have the originally stored logic state. An indicator may be stored in a latch to indicate whether the logic state currently stored by the cell is the intended logic state of the cell. A cell may, for example, be re-written with an opposite value periodically, based on the occurrence of an event, or based on a determination that the cell has stored one value (or charge) for a certain time period.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: November 15, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Alessandro Calderoni, Durai Vishak Nirmal Ramaswamy, Kirk Prall, Ferdinando Bedeschi
  • Publication number: 20220352167
    Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. The capacitor comprises a first electrode electrically coupled to a source/drain region of the transistor. The first electrode comprises an annulus in a straight-line horizontal cross-section and a capacitor insulator radially inward of the first electrode annulus. A second electrode is radially inward of the capacitor insulator. A capacitor-electrode structure extends elevationally through the vertically-alternating tiers. Individual of the second electrodes of individual of the capacitors are electrically coupled to the elevationally-extending capacitor-electrode structure. A sense line is electrically coupled to another source/drain region of multiple of the transistors that are in different memory-cell tiers. Additional embodiments and aspects are disclosed, including methods.
    Type: Application
    Filed: July 18, 2022
    Publication date: November 3, 2022
    Applicant: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 11476262
    Abstract: A method of forming an array of capacitors comprises forming rows and columns of horizontally-spaced openings in a sacrificial material. Fill material is formed in multiple of the columns of the openings and lower capacitor electrodes a are formed in a plurality of the columns that are between the columns of the openings comprising the fill material therein. The fill material is of different composition from that of the lower capacitor electrodes. The fill material is between a plurality of horizontally-spaced groups that individually comprises the lower capacitor electrodes. Immediately-adjacent of the groups are horizontally spaced apart from one another by a gap that comprises at least one of the columns of the openings comprising the fill material therein. The sacrificial material is removed to expose laterally-outer sides of the lower capacitor electrodes. A capacitor insulator is formed over tops and the laterally-outer sides of the lower capacitor electrodes.
    Type: Grant
    Filed: July 28, 2020
    Date of Patent: October 18, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11476259
    Abstract: A device comprises a vertical transistor. The vertical transistor comprises a semiconductive pillar, at least one gate electrode, a gate dielectric material, and void spaces. The semiconductive pillar comprises a source region, a drain region, and a channel region extending vertically between the source region and the drain region, the channel region comprising a semiconductive material having a band gap greater than 1.65 electronvolts. The at least one gate electrode laterally neighbors the semiconductive pillar. The gate dielectric material is laterally between the semiconductive pillar and the at least one gate electrode. The void spaces are vertically adjacent the gate dielectric material and laterally intervening between the at least one gate electrode and each of the source region and the drain region of the semiconductive pillar. Related electronic systems and methods are also disclosed.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: October 18, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Ramanathan Gandhi, Hong Li, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Sanh D. Tang, Scott E. Sills
  • Patent number: 11476252
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first data line located in a first level of the apparatus; a second data line located in a second level of the apparatus; a first memory cell located in a third level of the apparatus between the first and second levels, the first memory cell including a first transistor coupled to the first data line, and a second transistor coupled between the first data line and a charge storage structure of the first transistor; and a second memory cell located in a fourth level of the apparatus between the first and second levels, the second memory cell including a third transistor coupled to the second data line, and a fourth transistor coupled between the second data line and a charge storage structure of the third transistor, the first transistor coupled in series with the third transistor between the first and second data lines.
    Type: Grant
    Filed: August 26, 2020
    Date of Patent: October 18, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Karthik Sarpatwari, Kamal M. Karda, Durai Vishak Nirmal Ramaswamy, Haitao Liu
  • Publication number: 20220310636
    Abstract: Various embodiments comprise apparatuses and methods of forming the apparatuses. In one embodiment, an exemplary apparatus includes a plurality of memory cells. At least a portion of the memory cells have a bottom electrode with each bottom electrode being at least partially electrically isolated from remaining ones of the bottom electrodes. At least one resistive interconnect electrically couples two or more of the bottom electrodes. The resistive interconnect is arranged to discharge at least a portion of excess charge from the two or more bottom electrodes. Additional apparatuses and methods of forming the apparatuses are disclosed.
    Type: Application
    Filed: June 15, 2022
    Publication date: September 29, 2022
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Publication number: 20220302318
    Abstract: A device comprises vertically oriented transistors. The device comprises a pillar comprising at least one oxide semiconductor material, the pillar wider in a first lateral direction at an upper portion thereof than at a lower portion thereof, a gate dielectric material over sidewalls of the pillar and extending in the first lateral direction, and at least one gate electrode adjacent to at least a portion of the gate dielectric material. Related devices, electronic systems, and methods are also disclosed.
    Type: Application
    Filed: June 10, 2022
    Publication date: September 22, 2022
    Inventors: Durai Vishak Nirmal Ramaswamy, Scott E. Sills
  • Publication number: 20220302317
    Abstract: A device comprises a vertical transistor. The vertical transistor comprises a semiconductive pillar, at least one gate electrode, a gate dielectric material, and void spaces. The semiconductive pillar comprises a source region, a drain region, and a channel region extending vertically between the source region and the drain region, the channel region comprising a semiconductive material having a band gap greater than 1.65 electronvolts. The at least one gate electrode laterally neighbors the semiconductive pillar. The gate dielectric material is laterally between the semiconductive pillar and the at least one gate electrode. The void spaces are vertically adjacent the gate dielectric material and laterally intervening between the at least one gate electrode and each of the source region and the drain region of the semiconductive pillar. Related electronic systems and methods are also disclosed.
    Type: Application
    Filed: April 14, 2021
    Publication date: September 22, 2022
    Inventors: Kamal M. Karda, Ramanathan Gandhi, Hong Li, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Sanh D. Tang, Scott E. Sills
  • Patent number: 11437521
    Abstract: A method of forming a device comprises forming dielectric structures over other dielectric structures overlying conductive contact structures, the dielectric structures separated from one another by trenches and laterally extending orthogonal to the other dielectric structures and the conductive contact structures. Conductive gate structures are formed on exposed side surfaces of the dielectric structures within the trenches. Dielectric oxide structures are formed on exposed side surfaces of the conductive gate structures within the trenches. Exposed portions of the other dielectric structures are removed to form isolation structures. Semiconductive pillars are formed on exposed side surfaces of the dielectric oxide structures and the isolation structures within the trenches. The semiconductive pillars are in electrical contact with the conductive contact structures. Additional conductive contact structures are formed on upper surfaces of the semiconductive pillars.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: September 6, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, Ramanathan Gandhi, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20220278112
    Abstract: Some embodiments include apparatuses in which one of such apparatus includes a first memory cell including a first transistor having a first channel region coupled between a data line and a conductive region, and a first charge storage structure located between the first data line and the conductive region, and a second transistor having a second channel region coupled to and located between the first data line and the first charge storage structure; a second memory cell including a third transistor having a third channel region coupled between a second data line and the conductive region, and a second charge storage structure located between the second data line and the conductive region, and a fourth transistor having a fourth channel region coupled to and located between the second data line and the second charge storage structure; a conductive line forming a gate of each of the first, second, third, and fourth transistors; and a conductive structure located between the first and second charge storage stru
    Type: Application
    Filed: February 26, 2021
    Publication date: September 1, 2022
    Inventors: Kamal M. Karda, Haitao Liu, Karthik Sarpatwari, Durai Vishak Nirmal Ramaswamy, Alessandro Calderoni, Richard E. Fackenthal, Duane R. Mills
  • Publication number: 20220278103
    Abstract: Some embodiments include apparatuses and methods using a substrate, a pillar having a length perpendicular to the substrate, a first conductive plate, a second conductive plate, a memory cell located between the first and second conductive plates and electrically separated from the first and second conductive plates, and a conductive connection. The first conductive plate is located in a first level of the apparatus and being separated from the pillar by a first dielectric located in the first level. The second conductive plate is located in a second level of the apparatus and being separated from the pillar by a second dielectric located in the second level. The memory cell includes a first semiconductor material located in a third level of the apparatus between the first and second levels and contacting the pillar and the conductive connection, and a second semiconductor material located in a fourth level of the apparatus between the first and second levels and contacting the pillar.
    Type: Application
    Filed: May 16, 2022
    Publication date: September 1, 2022
    Inventors: Kamal M. Karda, Karthik Sarpatwari, Haitao Liu, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20220262813
    Abstract: Some embodiments include an integrated assembly having a carrier-sink-structure, and having digit lines over the carrier-sink-structure. Transistor body regions are over the digit lines. Extensions extend from the carrier-sink-structure to the transistor body regions. The extensions are configured to drain excess carriers from the transistor body regions. Lower source/drain regions are between the transistor body regions and the digit lines, and are coupled with the digit lines. Upper source/drain regions are over the transistor body regions, and are coupled with storage elements. Gates are adjacent the transistor body regions. The transistor body regions, lower source/drain regions and upper source/drain regions are together comprised a plurality of transistors. The transistors and the storage elements are together comprised by a plurality of memory cells of a memory array. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: May 2, 2022
    Publication date: August 18, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Kamal M. Karda, Haitao Liu, Durai Vishak Nirmal Ramaswamy, Yunfei Gao, Sanh D. Tang, Deepak Chandra Pandey
  • Patent number: 11417381
    Abstract: Some embodiments include apparatuses and methods operating the apparatuses. One of the apparatuses includes a first data line located over a substrate, a second data line located over the first data line, a third data line located over the second data line and electrically separated from the first and second data lines, and a memory cell coupled to the first, second, and third data lines. The memory cell includes a first material between the first and second data lines and electrically coupled to the first and second data lines; a second material located over the first data line and the first material, the second material electrically separated from the first material and electrically coupled to the third data line; and a memory element electrically coupled to the second material and electrically separated from the first material and first and second data lines.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: August 16, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Karthik Sarpatwari, Kamal M. Karda, Durai Vishak Nirmal Ramaswamy
  • Publication number: 20220254896
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a transistor including a source contact, a drain contact, and a channel region including an oxide semiconductor material as the channel material. At least one of the drain contact or the source contact includes a conductive material, such as ruthenium, to reduce the Schottky effects at the interface with the channel material.
    Type: Application
    Filed: April 28, 2022
    Publication date: August 11, 2022
    Inventors: Durai Vishak Nirmal Ramaswamy, Ramanathan Gandhi, Scott E. Sills
  • Patent number: 11411002
    Abstract: A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. The capacitor comprises a first electrode electrically coupled to a source/drain region of the transistor. The first electrode comprises an annulus in a straight-line horizontal cross-section and a capacitor insulator radially inward of the first electrode annulus. A second electrode is radially inward of the capacitor insulator. A capacitor-electrode structure extends elevationally through the vertically-alternating tiers. Individual of the second electrodes of individual of the capacitors are electrically coupled to the elevationally-extending capacitor-electrode structure. A sense line is electrically coupled to another source/drain region of multiple of the transistors that are in different memory-cell tiers. Additional embodiments and aspects are disclosed, including methods.
    Type: Grant
    Filed: August 25, 2020
    Date of Patent: August 9, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Durai Vishak Nirmal Ramaswamy
  • Patent number: 11404217
    Abstract: Some embodiments include an apparatus having horizontally-spaced bottom electrodes supported by a supporting structure. Leaker device material is directly against the bottom electrodes. Insulative material is over the bottom electrodes, and upper electrodes are over the insulative material. Plate material extends across the upper electrodes and couples the upper electrodes to one another. The plate material is directly against the leaker device material. The leaker device material electrically couples the bottom electrodes to the plate material, and may be configured to discharge at least a portion of excess charge from the bottom electrodes to the plate material. Some embodiments include methods of forming apparatuses which include capacitors having bottom electrodes and top electrodes, with the top electrodes being electrically coupled to one another through a conductive plate. Leaker devices are formed to electrically couple the bottom electrodes to the conductive plate.
    Type: Grant
    Filed: April 17, 2020
    Date of Patent: August 2, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Ashonita A. Chavan, Beth R. Cook, Manuj Nahar, Durai Vishak Nirmal Ramaswamy
  • Patent number: 11398571
    Abstract: A device comprises vertically oriented transistors. The device comprises a pillar comprising at least one oxide semiconductor material, the pillar wider in a first lateral direction at an upper portion thereof than at a lower portion thereof, a gate dielectric material over sidewalls of the pillar and extending in the first lateral direction, and at least one gate electrode adjacent to at least a portion of the gate dielectric material. Related devices, electronic systems, and methods are also disclosed.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: July 26, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Scott E. Sills
  • Patent number: 11393978
    Abstract: An array of cross point memory cells comprises spaced first lines which cross spaced second lines. Two memory cells are individually between one of two immediately adjacent of the second lines and a same single one of the first lines.
    Type: Grant
    Filed: July 16, 2020
    Date of Patent: July 19, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Scott E. Sills, Durai Vishak Nirmal Ramaswamy, Alessandro Calderoni