Abstract: A three-dimensional ceramic heater, such as a cylindrical ceramic heater, is proposed in which the conductive ceramic heating element is multi-furcated into lanes at least in the folded-back sections so that the electric current tends to flow in a more uniform and hence laminar manner with the effect that the localized over heating is suppressed greatly.

Abstract: A three-dimensional ceramic heater, such as a cylindrical ceramic heater, is proposed in which the conductive ceramic heating element is multi-furcated into lanes at least in the folded-back sections so that the electric current tends to flow in a more uniform and hence laminar manner with the effect that the localized over heating is suppressed greatly.

Abstract: A ceramic heater comprising: a support body made of a first non-conductive ceramic material; a heater pattern, which is made of a conductive material and has a terminal junction at each end and is laid on the support body; a coating layer, which is made of a second non-conductive ceramic material and is laid to cover the support body and the heater pattern but not to cover the terminal junctions of the heater pattern; and a lead wire for connecting the terminal junctions to a power source; and this ceramic heater is comprised of that the terminal junctions of the heater are coated with a conductive protective layer; that each heater terminal junction coated with the protective layer and the lead that is connected to the power source are electrically connected to each other via a washer made of a malleable conductive material.

Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10?2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4.

Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

Abstract: There is disclosed a PBN container in which a conductive film is deposited on a surface of a body formed by depositing PBN (pyrolytic boron nitride), wherein, at least, an angle between a PBN cut face of the body and at least one wall surface adjacent to the PBN cut face is 20°-80°, and a method for producing a PBN (pyrolytic boron nitride) container comprising at least steps of depositing PBN to form a body, processing a PBN cut face of the formed body so that at least, an angle between the PBN cut face and at least one wall surface adjacent to the PBN cut face is 20°-80°, and coating a surface of the processed body with a conductive film. Thus, there can be provided a PBN container excellent in durability where a conductive film is laminated on a surface of a body formed by depositing PBN, and a method for producing the PBN container.

Abstract: There is disclosed a heating element 10 comprising: a single-piece heat-resistant base member 1 with a plate portion 1a in which a heater pattern 3a is formed, a rod portion 1b extending from one surface of the plate portion 1a and in which a current-carrying part 3b is formed, and an end portion 1c at an end of the rod portion 1b on the opposite side of the plate portion la and in which a power-supply terminal 3c is formed; a dielectric layer 2 with insulating property on the surface of the heat-resistant base member 1; a conductive layer 3 with conductive property on the dielectric layer 2, in which the conductive layer 3 is formed as the heater pattern 3a in the plate portion 1a, as the current-carrying part 3b in the rod portion 1b, and as the power-supply terminal 3c in the end portion 1c; and a protection layer 4 with insulating property which covers the surface of the heater pattern 3a and the current-carrying part 3b, in which the dielectric layer 2, the conductive layer 3 and the protection layer

Abstract: A ceramic heater including a plate member made of insulating ceramics in which one or more pair(s) of through-holes are formed, a rod member made of conductive ceramics with a power-supply terminal at one end. The rod member is inserted into the through hole in the plate member. A conductive layer made of conductive ceramics is formed on the plate member; and a coating layer made of insulating ceramics is formed on the conductive layer. One end face of the rod member has a same plane with a main surface of the plate member, the conductive layer has a heater pattern formed on the main surface of the plate member, and the rod members are electrically insulated not to be short-circuited to each other in the opposite main surface.

Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10?2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4.

Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

Abstract: There is disclosed a PBN container in which a conductive film is deposited on a surface of a body formed by depositing PBN (pyrolytic boron nitride), wherein, at least, an angle between a PBN cut face of the body and at least one wall surface adjacent to the PBN cut face is 20°-80°, and a method for producing a PBN (pyrolytic boron nitride) container comprising at least steps of depositing PBN to form a body, processing a PBN cut face of the formed body so that at least, an angle between the PBN cut face and at least one wall surface adjacent to the PBN cut face is 20°-80°, and coating a surface of the processed body with a conductive film. Thus, there can be provided a PBN container excellent in durability where a conductive film is laminated on a surface of a body formed by depositing PBN, and a method for producing the PBN container.

Abstract: A changeable model flight toy which can simulate the takeoff and landing attitudes and flight attitudes at low cost in accordance with different types of airplanes is provided. A plurality of airplane bodies having different outer appearance forms which can be maintained for a long period of time are interchangeably mounted on an inner sleeve. A changeable model flight toy 100 characterized by a flight operation unit 120 which is incorporated within airplane bodies 110, 210 is disclosed. A takeoff and landing control panel 130 hoists and lowers the flight operation unit 120 while bearing the unit 120. The airplane body 110, 210 comprises a nose side body 110A, 210A including the main wing 112, 212 and a tail assembly side body 110B, 210B including the tail assembly 115, 215.

Abstract: There is disclosed a ceramic heater 11 comprising: a plate member 12 made of insulating ceramics in which one or more pair(s) of through-holes 13 are formed; a conductive layer 19 made of conductive ceramics; and a coating layer 21 made of insulating ceramics; wherein a joint member 14 made of conductive ceramics is inserted into the through-hole; an end face 16 of the joint member has a same plane with a main surface 15 of the plate member; the joint member is coated with the conductive layer 19 and thereby fixed to the plate member and also connected with the conductive layer having a heater pattern 20; and an opposite side of the joint member projects from the plate member and the projecting portion 18 constitutes a terminal on which the coating layer is not formed.

Abstract: There is disclosed a ceramic heater 11 comprising: at least a plate member 12 made of insulating ceramics in which one or more pair(s) of through-holes 13 are formed; a rod member 14, being made of conductive ceramics, having a power-supply terminal 18 at one end thereof, and being inserted into the through-hole 13 at another end thereof; a conductive layer 19 made of conductive ceramics formed on the plate member 12; and a coating layer 21 made of insulating ceramics formed on the conductive layer; wherein one end face 16 of the rod member has a same plane with a main surface 15 of the plate member; the conductive layer 19 having a heater pattern 20 is formed on the main surface 15 of the plate member having the same plane; and the rod members 14 are electrically insulated not to be short-circuited to each other in the opposite main surface 17.

Abstract: There is disclosed a heating element 10 comprising: a single-piece heat-resistant base member 1 with a plate portion la in which a heater pattern 3a is formed, a rod portion 1b extending from one surface of the plate portion la and in which a current-carrying part 3b is formed, and an end portion 1c at an end of the rod portion 1b on the opposite side of the plate portion la and in which a power-supply terminal 3c is formed; a dielectric layer 2 with insulating property on the surface of the heat-resistant base member 1; a conductive layer 3 with conductive property on the dielectric layer 2, in which the conductive layer 3 is formed as the heater pattern 3a in the plate portion 1a, as the current-carrying part 3b in the rod portion 1b, and as the power-supply terminal 3c in the end portion 1c; and a protection layer 4 with insulating property which covers the surface of the heater pattern 3a and the current-carrying part 3b, in which the dielectric layer 2, the conductive layer 3 and the protection layer

Abstract: To provide a types changeable model flight toy, which can simulate the takeoff and landing attitudes and flight attitudes at low cost in accordance with the types of airplanes by easily and reliably replacing only a plurality of airplane bodies having different outer appearance forms every type of the airplane to each other, and can maintain the endurance for a long period of time.

Abstract: A pyrolytic boron nirtride double container for a source of molecular beams used in molecular beam epitaxy, wherein the transmissivity of an inner container of the pyrolytic boron nitride double container with respect to light having a wave number of 2600 cm?1 to 6500 cm?1 is 90% or less of that of an outer container. The pyrolytic boron nitride double container, which enables molecular beams to generate stably with good temperature controllability and high heat efficiency and which can be used in a stable manner, is provided through a simple process and at low cost, so that molecular beam epitaxial growth can be stabilized, quality of the epitaxial film can be improved, and even though the rise and drop in the temperature of the material melt is repeated, or even at an emergency suspension of the operation, the trouble due to breakage of the container can be prevented.

Abstract: There is disclosed a vessel for pretreatment of elementary analysis wherein the vessel is a ceramic vessel produced by chemical vapor deposition (CVD) method. And there is disclosed an inductively coupled plasma torch that has at least an induction coil and a nozzle and is used in an apparatus for elementary analysis by ICP method, wherein the nozzle is a ceramic nozzle produced by CVD method. Thus, there can be provided a vessel for pretreatment of elementary analysis that excels in heat resistance and chemical resistance such as acid resistance, and has high purity. There can be also provided an inductively coupled plasma torch used in an apparatus for analysis by ICP method that enables accurate elementary analysis and excels in durability, and an apparatus for elementary analysis by ICP method having this.

Abstract: There is disclosed a wafer heating apparatus having an electrostatic adsorption function, comprising: heating elements; electrodes for electrostatic adsorption; a supporting substrate on which are formed the heating elements and the electrodes for electrostatic adsorption; and an insulator layer formed over the heating elements and the electrodes for electrostatic adsorption, wherein where a sheet resistance (&OHgr;/□) in a surface direction of the insulator layer is A and a volume resistivity (&OHgr;·cm) in a thickness direction of the insulator layer is B, a ratio of the sheet resistance to the volume resistivity (A/B) is 0.01 or more. Thus, there can be provided a wafer heating apparatus having an electrostatic adsorption function that has sufficient electrostatic adsorption power without causing dielectric breakdown when electrostatically adsorbing and heating wafers.

Abstract: A pressure regulating valve (20) for adjusting a pressure of a supply/discharge passage (10) to a pressure balanced against a weight of a body to be carried (1) is provided. The supply/discharge passage (10) is connected to a working chamber (8) of a cylinder (2) for raising and lowering the body to be carried (1). A control valve (38) for increasing and decreasing a pressure in a control passage (28) in accordance with a balance between the weight of the body to be carried (1) and a working force in a reaction force chamber (42) to which a pilot pressure is introduced from the control passage (28) is also provided.