Abstract: A die bonding apparatus including a vertically moving block, a collet holder provided on the vertically moving block such that the collet holder itself freely moves up and down, a collet which holds a die to be bonded to a substrate and is installed in the collet holder, a first contact provided on the vertically moving block, and a second contact provided on the collet holder so that the second contact is pressed by a spring to make contact with the upper surface of the first contact. The position where rapid downward movement of the collet is stopped and the bonding load applied to the substrate are decided based upon a signal which is generated upon separation of the two contacts.

Abstract: A tape bonding method using an intermediate member provided between a bonding tool and a carrier tape having leads thereon. The intermediate member is made of a polyimide film, metal foil, glass material, elastic material, etc. and can be in a form of endless belt provided between a driving pulley and a driven pulley.