Abstract: Provided are a device and a method which are capable of performing crosstalk-removed high-quality data reproduction from a high-density recording type optical disc. The device includes a photo detector that outputs a readout signal from a reproduction track of an information recording disc, an adjacent track reproduction binary signal supply unit that outputs a binary signal (binary data) which is a reproduction signal of an adjacent track of the reproduction track, a multi-input adaptive equalizer that includes an equalizer unit that receives the readout signal from the reproduction track and an adjacent track reproduction binary signal and outputs an equalization signal by an adaptive equalization process based on an input signal, and a binarization processing unit that executes a binarization process based on the equalization signal and generates a reproduction signal of the reproduction track.

Abstract: A method of reforming an insulating film deposited on a substrate having a recess pattern constituted by a bottom and sidewalls, includes: providing the film deposited on the substrate having the recess pattern in an evacuatable reaction chamber, wherein a property of a portion of the film deposited on the sidewalls is inferior to that of a portion of the film deposited on a top surface of the substrate; adjusting a pressure of an atmosphere of the reaction chamber to 10 Pa or less, which atmosphere is constituted by H2 and/or He without a precursor and without a reactant; and applying RF power to the atmosphere of the pressure-adjusted reaction chamber to generate a plasma to which the film is exposed, thereby reforming the portion of the film deposited on the sidewalls to improve the property of the sidewall portion of the film.

Abstract: Provided are a device and a method which are capable of performing crosstalk-removed high-quality data reproduction from a high-density recording type optical disc. The device includes a photo detector that outputs a readout signal from a reproduction track of an information recording disc, an adjacent track reproduction binary signal supply unit that outputs a binary signal (binary data) which is a reproduction signal of an adjacent track of the reproduction track, a multi-input adaptive equalizer that includes an equalizer unit that receives the readout signal from the reproduction track and an adjacent track reproduction binary signal and outputs an equalization signal by an adaptive equalization process based on an input signal, and a binarization processing unit that executes a binarization process based on the equalization signal and generates a reproduction signal of the reproduction track.

Abstract: A method for etching a target layer on a substrate by a dry etching process includes at least one etching cycle, wherein an etching cycle includes: depositing a carbon halide film using reactive species on the target layer on the substrate; and etching the carbon halide film using a plasma of a non-halogen hydrogen-containing etching gas, which plasma alone does not substantially etch the target layer, thereby generating a hydrogen halide as etchant species at a boundary region of the carbon halide film and the target layer, thereby etching a portion of the target layer in the boundary region.

Abstract: A method of reforming an insulating film deposited on a substrate having a recess pattern constituted by a bottom and sidewalls, includes: providing the film deposited on the substrate having the recess pattern in an evacuatable reaction chamber, wherein a property of a portion of the film deposited on the sidewalls is inferior to that of a portion of the film deposited on a top surface of the substrate; adjusting a pressure of an atmosphere of the reaction chamber to 10 Pa or less, which atmosphere is constituted by H2 and/or He without a precursor and without a reactant; and applying RF power to the atmosphere of the pressure-adjusted reaction chamber to generate a plasma to which the film is exposed, thereby reforming the portion of the film deposited on the sidewalls to improve the property of the sidewall portion of the film.

Abstract: A method for etching a target layer on a substrate by a dry etching process includes at least one etching cycle, wherein an etching cycle includes: depositing a halogen-containing film using reactive species on the target layer on the substrate; and etching the halogen-containing film using a plasma of a non-halogen etching gas, which plasma alone does not substantially etch the target layer, to generate etchant species at a boundary region of the halogen-containing film and the target layer, thereby etching a portion of the target layer in the boundary region.

Abstract: An angle wrench has a simple structure and is capable of accurately measuring rotation angle. The angle wrench is used for tightening an object to be tightened by means of the rotation angle method, and includes a handle having a grip; a head section having a tightening head for tightening the object to be tightened, and a tail section that extends from the tightening head pivotally supported with respect to the handle via a head pin; torque-detecting mechanisms for detecting when the torque for tightening the object being tightened reaches the specified torque; and a rotation angle-measuring section for measuring the rotation angle of the angle wrench in a tightening action, on the basis of the angular velocity of the angle wrench around the axis of the object being tightened, after the torque-detecting mechanism has detected that the specified torque has been reached.

Abstract: An angle wrench has a simple structure and is capable of accurately measuring rotation angle. The angle wrench is used for tightening an object to be tightened by means of the rotation angle method, and includes a handle having a grip; a head section having a tightening head for tightening the object to be tightened, and a tail section that extends from the tightening head pivotally supported with respect to the handle via a head pin; torque-detecting mechanisms for detecting when the torque for tightening the object being tightened reaches the specified torque; and a rotation angle-measuring section for measuring the rotation angle of the angle wrench in a tightening action, on the basis of the angular velocity of the angle wrench around the axis of the object being tightened, after the torque-detecting mechanism has detected that the specified torque has been reached.

Abstract: A film forming cycle based on pulse CVD or ALD is repeated multiple times to form a single layer of insulation film, while a reforming cycle is implemented in the aforementioned process, either once or multiple times per each film forming cycle, by treating the surface of formed film using a treating gas that has been activated by a plasma.

Abstract: In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.

Abstract: An optical disk reproducing device includes: a signal reproducing section configured to read and decode information recorded on an optical disk by an optical pickup unit, and reproduce the information, wherein the signal reproducing section includes a gain controlled amplifier circuit configured to amplify an radio frequency signal generated from a light receiving element, an automatic gain control circuit configured to control a gain of the gain controlled amplifier circuit, and a signal processing section configured to derive a part of an automatic gain control value generated in the automatic gain control circuit, and generate a control signal for adjusting one of an optical system path and a detection system path for controlling the optical pickup unit.

Abstract: A servo control device includes a plurality of reproduction channels, a plurality of analog/digital (A/D) converters, a servo error detecting circuit that generates a servo error signal, a servo signal processing device that executes predetermined processing for the servo error signal to generate a control signal, and a sampling frequency converter that converts the sampling frequency between the servo error detecting circuit and the servo signal processing device. A first clock is included as a sampling clock of the A/D converters and a processing clock of the servo error detecting circuit. A second clock is included as a processing clock of the servo signal processing device. The sampling frequency converter converts the sampling frequency by processing the servo error signal by the servo error detecting circuit in synchronization with the first clock and processing the signal processed in synchronization with the first clock in synchronization with the second clock.

Abstract: A servo control device includes a plurality of reproduction channels, a plurality of analog/digital (A/D) converters, a servo error detecting circuit that generates a servo error signal, a servo signal processing device that executes predetermined processing for the servo error signal to generate a control signal, and a sampling frequency converter that converts the sampling frequency between the servo error detecting circuit and the servo signal processing device. A first clock is included as a sampling clock of the A/D converters and a processing clock of the servo error detecting circuit. A second clock is included as a processing clock of the servo signal processing device. The sampling frequency converter converts the sampling frequency by processing the servo error signal by the servo error detecting circuit in synchronization with the first clock and processing the signal processed in synchronization with the first clock in synchronization with the second clock.

Abstract: In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.

Abstract: In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.

Abstract: A method for forming an interconnect structure with airgaps, includes: providing a structure having a trench formed on a substrate; depositing a spacer oxide layer on sidewalls of the trench as sidewall spacers by plasma enhanced atomic layer deposition; filling the trench having the sidewall spacers with copper; removing the sidewall spacers to form an airgap structure; and encapsulating the airgap structure, wherein airgaps are formed between the filled copper and the sidewalls of the trench.

Abstract: A substrate processing method includes preparing a substrate having a low-k interlayer dielectric film as a to-be-etched film and a photoresist film, formed on the low-k interlayer insulating film, serving as an etching mask with a predetermined circuit pattern; etching the low-k interlayer insulating film through the photoresist film to form grooves and/or holes in the low-k interlayer insulating film; ashing the photoresist film by using hydrogen radicals generated by bring a hydrogen-containing gas into contact with a catalyst of a high temperature; and recovering damage to the low-k interlayer insulating film due to the ashing by supplying a specific recovery gas. The method further includes recovering damage to the low-k interlayer insulating film due to the etching by supplying a specific recovery gas.

Abstract: Disclosed herein is an optical disk playback apparatus including: a signal playback device configured to read and decode information recorded to an optical disk through an optical pickup unit in order to reproduce the information; the signal playback device including a signal generation circuit, a first signal processing device, a second signal processing device, a modulator, a switch, an analog to digital converter, and a third signal processing device.

Abstract: A DPD tracking error signal detection apparatus includes the following. Four differentiators remove DC components and differentiate four signal with varying differential phases. The signals are then sampled and quantized by four A/D converters, and output to a non-inverting unit and an inverting unit. A phase inverter/compositor then leaves as-is or phase-inverts the output signals, according to a control signal. The non-inverting and the inverting unit each include two Hilbert transformers that phase-shift the output from the A/D converters, two delay units that delay the output of the other A/D converters to match the delay of the Hilbert transformers, two cross-correlators that calculate the cross-correlation between pairs of Hilbert transformers and delay units, and an adding unit that combines the cross-correlator results and outputs the combined result to the phase inverter/compositor.

Abstract: A tracking error signal detection device employing a differential phase detection method includes first and second differentiators which remove direct current components in first and second signal groups in which a phase difference between the first and second signal groups changes in accordance with a tracking error signal, and which differentiate the first and second signal groups, first and second analog/digital converters which sample and quantize signals output from the first and second differentiators, respectively, a Hilbert transformer performing a 90-degree phase shift on one of signals output from the first and second analog/digital converters, a delay circuit delaying one of the signals output from the second and first analog/digital converters by an amount of delay equal to that caused by the Hilbert transformer, and a phase comparator calculating a phase difference between a signal output from the Hilbert transformer and a signal output from the delay circuit.