Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator.

Abstract: A piezoelectric thin film element having a first electrode, a second electrode and a piezoelectric thin film between the electrodes, wherein the thin film comprises a laminate having two or more piezoelectric thin film layers and wherein a first thin film layer is doped by one or more dopants and a second film layer is doped by one or more dopants and wherein at least one dopant of the second thin film layer is different from the dopant or dopants of the first thin film layer.

Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator.

Abstract: The present invention relates to a method of preparing a solid solution ceramic material having increased electromechanical strain, as well as ceramic materials obtainable therefrom and uses thereof.

Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator.

Abstract: The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator.

Abstract: The present invention relates to a method for identifying a solid solution ceramic material of a plurality of perovskite compounds which exhibits an electric field induced strain derived from a reversible phase transition, as well as a method for making such ceramic materials and ceramic materials obtainable therefrom. In particular, the present invention is directed to a method of identifying a solid solution ceramic material of at least three perovskite compounds which exhibits an electric field induced strain derived from a reversible phase transition; said method comprising the steps of: i) determining a molar ratio of at least one tetragonal perovskite compound to at least one non-tetragonal perovskite compound which, when combined to form a solid solution, provides a ceramic material comprising a major portion of a tetragonal phase having an axial ratio c/a of greater than 1.005 to 1.

Abstract: The present invention relates to a bismuth-based solid solution ceramic material, as well as a process for preparing the ceramic material and uses thereof, particularly in an actuator component employed, for example, in a droplet deposition apparatus. In particular, the present invention relates to a ceramic material having a general chemical formula (I): (I): x(Bi0.5Na0.5)TiO3-y(Bi0.5K0.5)TiO3-z1SrHfO3-z2SrZrO3, wherein x+y+Z1+Z2=1; y, (z1+z2)?0; x?0. In embodiments, the present invention also relates to a ceramic material having a general chemical formula (II): x(Bi0.5Na0.5)TiO3-y(Bi0.5K0.5)TiO3-y(Bi0.5K0.5)TiO3-ZiSrHfO3-z2SrZrO3, wherein x+y+z?i+z2=1; x, y, fa+z2)?0; as well as a ceramic material of general formula (III): y(Bi0.5K0.5)TiO3-z1SrHfO3-z2SrZrO3, wherein y+z1,+z2=1; y, (z1+z2)?0.

Abstract: The present invention relates to an electrical element comprising a multilayer thin film ceramic member which is a dielectric exhibiting piezoelectric/electrostrictive properties which make it suitable for use in microelectromechanical systems.

Abstract: A method of forming a micro-structure involves forming a multi-layered structure including i) an oxidizable material layer on a substrate and ii) another oxidizable material layer on the oxidizable material layer. The oxidizable material layer is formed of an oxidizable material having an expansion coefficient, during oxidation, that is more than 1. The method further involves forming a template, including a plurality of pores, from the other oxidizable material layer, and growing a nano-pillar inside each pore. The nano-pillar has a predefined length that terminates at an end. A portion of the template is selectively removed to form a substantially even plane that is oriented in a position opposed to the substrate. A material is deposited on at least a portion of the plane to form a film layer thereon, and the remaining portion of the template is selectively removed to expose the nano-pillars.

Abstract: A method of poling piezoelectric elements of an actuator comprises applying an electric pulse heating waveform to the piezoelectric element(s) in order to increase the temperature thereof to a poling temperature (S202), applying an electric field poling waveform to the piezoelectric element(s) for a poling time period (S203), and apply an electric field holding poling waveform to the piezoelectric element(s) to maintain poling whilst the temperature of the actuator decreases (S204).

Abstract: A piezoelectric thin film element having a first electrode, a second electrode and a piezoelectric thin film between the electrodes, wherein the thin film comprises a laminate having two or more piezoelectric thin film layers and wherein a first thin film layer is doped by one or more dopants and a second film layer is doped by one or more dopants and wherein at least one dopant of the second thin film layer is different from the dopant or dopants of the first thin film layer.

Abstract: actuator component for a droplet deposition head made up of a number of patterned layers, each layer extending in a plane normal to a layering direction, with the layers being stacked one upon another in said layering direction. A row of fluid chambers is formed within the layers, with the row extending in a row direction, which is substantially perpendicular to the layering direction. Each fluid chamber is provided with a respective nozzle and a respective actuating element, which is actuable to cause the ejection of fluid from the chamber in question through the corresponding one of the nozzles. A row of inlet passageways is also formed within the layers of the actuator component, with the row extending in the row direction. Each inlet passageway is fluidically connected so as to supply fluid to a respective one of said fluid chambers.

Abstract: An actuator component for a droplet deposition head, comprising: a plurality of fluid chambers, each fluid chamber being provided with a respective nozzle and a respective piezoelectric actuating element, which is actuable to cause the ejection of fluid from the chamber in question through the corresponding one of the nozzles by deforming a membrane, which bounds, in part, the chamber in question; wherein each piezoelectric actuating element comprises: a piezoelectric member having a top side and an opposing bottom side, the bottom side being nearest to the membrane, the top and bottom sides being spaced apart in a thickness direction; a lower electrode, disposed adjacent said bottom side of the piezoelectric member; an upper electrode, disposed adjacent said top side of the piezoelectric member; wherein each upper electrode comprises: a first layer, which is formed of a first conductive material; a second layer, which is formed of a second conductive material, the first layer being disposed between the secon

Abstract: The present disclosure is drawn to a piezoelectric thin film stack and method of preparing the same. The piezoelectric thin film stack can comprise a substrate with an oxide application surface, a metal oxide adhesive blend layer applied to the oxide application surface, and a piezoelectric film applied directly to the metal oxide adhesive blend layer.

Abstract: The present invention relates to a method for identifying a solid solution ceramic material of a plurality of perovskite compounds which exhibits an electric field induced strain derived from a reversible phase transition, as well as a method for making such ceramic materials and ceramic materials obtainable therefrom. In particular, the present invention is directed to a method of identifying a solid solution ceramic material of at least three perovskite compounds which exhibits an electric field induced strain derived from a reversible phase transition; said method comprising the steps of: i) determining a molar ratio of at least one tetragonal perovskite compound to at least one non-tetragonal perovskite compound which, when combined to form a solid solution, provides a ceramic material comprising a major portion of a tetragonal phase having an axial ratio c/a of greater than 1.005 to 1.

Abstract: A droplet deposition head having a fluid chamber connected to a droplet ejection nozzle and to a reservoir for the fluid, and a piezoelectric actuator element formed at least in part by a fluid chamber wall having an electrode thereon, which element is displaceable in response to a drive voltage to generate a pressure in the chamber to eject a droplet of fluid from the chamber through the nozzle wherein the electrode is provided with a passivation coating which comprises, at least in part, a laminate comprising an inorganic insulating layer nearest to or contacting the electrode and an organic insulating layer overlying the inorganic insulating layer wherein defects in the insulating layers tend to be misaligned at the interface there between and wherein the inorganic insulating layer has thickness less than or equal to 500 nm and the organic insulating layer has a thickness less than 3 ?m.

Abstract: A piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between wherein the first electrode is a platinum metal electrode having an average grain size greater than 50 nm and wherein a piezoelectric thin film adjacent the platinum metal electrode comprises a laminate having a plurality of piezoelectric thin film layers wherein a piezoelectric thin film layer contacting the platinum metal electrode comprises lead zirconate titanate (PZT) of composition at or about PbZrxTi1-xO3 where 0<x?0.60 and has a degree of pseudo cubic {100} orientation greater than or equal to 90%.

Abstract: An inkjet printhead having a fluidic chamber substrate, the fluidic chamber substrate having at least two droplet units provided in an array therein, the droplet units comprising: a fluidic chamber, a first fluidic port provided at a first surface of the fluidic chamber substrate, wherein the first fluidic port is in fluidic communication with the fluidic chamber, a nozzle formed in a nozzle layer provided at a second surface of the fluidic chamber substrate; and a vibration plate provided at the first surface of the fluidic chamber substrate, the vibration plate comprising an actuator for effecting pressure fluctuations within the fluidic chamber; and wherein the droplet units are arranged adjacent each other about an axis extending substantially in a width direction of the droplet units, wherein the first fluidic ports of the droplet units are staggered a first stagger offset distance from each other substantially in a length direction of the droplet units, and wherein a wiring layer extends over the first

Abstract: The present invention relates to a bismuth-based solid solution ceramic material, as well as a process for preparing the ceramic material and uses thereof, particularly in an actuator component employed, for example, in a droplet deposition apparatus. In particular, the present invention relates to a ceramic material having a general chemical formula (I): (I): x(Bi0.5Na0.5)TiO3-y(Bi0.5K0.5)TiO3-z1SrHfO3-z2SrZrO3, wherein x+y+Z1+Z2=1; y, (z1+z2)?0; x?0. In embodiments, the present invention also relates to a ceramic material having a general chemical formula (II): x(Bi0.5Na0.5)TiO3-y(Bi0.5K0.5)TiO3-y(Bi0.5K0.5)TiO3-ZiSrHfO3-z2SrZrO3, wherein x+y +z-i+z2=1; x, y, fa+z2)?0; as well as a ceramic material of general formula (III): y(Bi0.5K0.5)TiO3-z1SrHfO3-z2SrZrO3, wherein y+z1,+z2=1; y, (z1+z2)?0.