Patents by Inventor Qizhi Liu

Qizhi Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11869941
    Abstract: Disclosed are a structure including a transistor and a method of forming the structure. The transistor includes an emitter region with first and second emitter portions. The first emitter portion extends through a dielectric layer. The second emitter portion is on the first emitter portion and the top of the dielectric layer. An additional dielectric layer covers the top of the second emitter portion. The second emitter portion and the dielectric and additional dielectric layers are wider than the first emitter portion. At least a section of the second emitter portion is narrower than the dielectric and additional dielectric layers, thereby creating cavities positioned vertically between edge portions of the dielectric and additional dielectric layers and positioned laterally adjacent to the second emitter portion. The cavities are filled with dielectric material or dielectric material blocks the side openings to the cavities creating pockets of air, of gas or under vacuum.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: January 9, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Sarah A. McTaggart, Rajendran Krishnasamy, Qizhi Liu
  • Publication number: 20240006491
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor with a stepped emitter and methods of manufacture. The structure includes: a collector; a base over the collector; and an emitter over the base, the emitter comprising at least one stepped feature over the base.
    Type: Application
    Filed: June 29, 2022
    Publication date: January 4, 2024
    Inventors: Uppili S. RAGHUNATHAN, Vibhor JAIN, Qizhi LIU, Yves T. NGU, Ajay RAMAN, Rajendran KRISHNASAMY, Alvin J. JOSEPH
  • Publication number: 20240006524
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a patterned buried porous layer of semiconductor material and a device over the patterned buried porous layer, and methods of manufacture. The structure includes: a semiconductor substrate includes a patterned buried porous layer within the semiconductor substrate; a semiconductor compound material over the semiconductor substrate and the patterned buried porous layer; and at least one device on the semiconductor compound material. The non-patterned portions of the semiconductor substrate provide a thermal pathway within the semiconductor substrate.
    Type: Application
    Filed: June 29, 2022
    Publication date: January 4, 2024
    Inventors: Mark D. LEVY, Qizhi LIU, Jeonghyun HWANG
  • Publication number: 20240006517
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises silicon based material; an intrinsic base; and an extrinsic base overlapping the emitter region and the intrinsic base; an extrinsic base overlapping the emitter region and the intrinsic base; and an inverted “T” shaped spacer which separates the emitter region from the extrinsic base and the collector region from the emitter region.
    Type: Application
    Filed: September 19, 2023
    Publication date: January 4, 2024
    Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
  • Patent number: 11855196
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises silicon based material; an intrinsic base; and an extrinsic base overlapping the emitter region and the intrinsic base; an extrinsic base overlapping the emitter region and the intrinsic base; and an inverted “T” shaped spacer which separates the emitter region from the extrinsic base and the collector region from the emitter region.
    Type: Grant
    Filed: October 25, 2021
    Date of Patent: December 26, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
  • Patent number: 11855195
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises mono-crystal silicon based material; an intrinsic base under the emitter region and comprising semiconductor material; and an extrinsic base surrounding the emitter and over the intrinsic base.
    Type: Grant
    Filed: October 25, 2021
    Date of Patent: December 26, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
  • Publication number: 20230352570
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a bipolar junction transistor and methods of manufacture. The structure includes: a collector region; a base region adjacent to the collector region; an emitter region adjacent to the base region; contacts having a first material connecting to the collector region and the base region; and at least one contact having a second material connecting to the emitter region.
    Type: Application
    Filed: April 29, 2022
    Publication date: November 2, 2023
    Inventors: Mark D. Levy, Sarah A. McTaggart, Laura J. Silverstein, Qizhi Liu, Jason E. Stephens
  • Publication number: 20230266544
    Abstract: Structures including an edge coupler, and methods of fabricating a structure that includes an edge coupler. The structure includes an edge coupler having a waveguide core with an end surface and a longitudinal axis. The end surface defines a plane tilted in a first direction at a first acute angle relative to the longitudinal axis and tilted in a second direction at a second acute angle relative to the longitudinal axis. The second direction differs from the first direction.
    Type: Application
    Filed: February 24, 2022
    Publication date: August 24, 2023
    Inventors: Yusheng Bian, Nicholas Polomoff, Keith Donegan, Qizhi Liu, Steven M. Shank
  • Publication number: 20230268394
    Abstract: Disclosed are a structure including a transistor and a method of forming the structure. The transistor includes an emitter region with first and second emitter portions. The first emitter portion extends through a dielectric layer. The second emitter portion is on the first emitter portion and the top of the dielectric layer. An additional dielectric layer covers the top of the second emitter portion. The second emitter portion and the dielectric and additional dielectric layers are wider than the first emitter portion. At least a section of the second emitter portion is narrower than the dielectric and additional dielectric layers, thereby creating cavities positioned vertically between edge portions of the dielectric and additional dielectric layers and positioned laterally adjacent to the second emitter portion. The cavities are filled with dielectric material or dielectric material blocks the side openings to the cavities creating pockets of air, of gas or under vacuum.
    Type: Application
    Filed: February 24, 2022
    Publication date: August 24, 2023
    Applicant: GlobalFoundries U.S. Inc.
    Inventors: Sarah A. McTaggart, Rajendran Krishnasamy, Qizhi Liu
  • Patent number: 11719895
    Abstract: Structures including an edge coupler, and methods of fabricating a structure that includes an edge coupler. The structure includes an edge coupler having a waveguide core with an end surface and a longitudinal axis. The end surface defines a plane tilted in a first direction at a first acute angle relative to the longitudinal axis and tilted in a second direction at a second acute angle relative to the longitudinal axis. The second direction differs from the first direction.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: August 8, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yusheng Bian, Nicholas Polomoff, Keith Donegan, Qizhi Liu, Steven M. Shank
  • Patent number: 11656409
    Abstract: Embodiments of the disclosure provide an optical antenna for a photonic integrated circuit (PIC). The optical antenna includes a semiconductor waveguide on a semiconductor layer. The semiconductor waveguide includes a first vertical sidewall over the semiconductor layer over the semiconductor layer. A plurality of grating protrusions extends horizontally from the first vertical sidewall of the semiconductor waveguide.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: May 23, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yusheng Bian, Qizhi Liu
  • Publication number: 20230127768
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises mono-crystal silicon based material; an intrinsic base under the emitter region and comprising semiconductor material; and an extrinsic base surrounding the emitter and over the intrinsic base.
    Type: Application
    Filed: October 25, 2021
    Publication date: April 27, 2023
    Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
  • Publication number: 20230129914
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises silicon based material; an intrinsic base; and an extrinsic base overlapping the emitter region and the intrinsic base; an extrinsic base overlapping the emitter region and the intrinsic base; and an inverted “T” shaped spacer which separates the emitter region from the extrinsic base and the collector region from the emitter region.
    Type: Application
    Filed: October 25, 2021
    Publication date: April 27, 2023
    Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
  • Patent number: 11579360
    Abstract: Embodiments of the disclosure provide an optical antenna for a photonic integrated circuit (PIC). The optical antenna includes a vertically oriented semiconductor waveguide with a first end on a semiconductor layer. The vertically oriented semiconductor waveguide includes a first sidewall and a second sidewall opposite the first sidewall. A reflective material is along the second sidewall of the vertically oriented semiconductor waveguide. A first plurality of grating protrusions extends from the first sidewall of the vertically oriented semiconductor waveguide.
    Type: Grant
    Filed: June 22, 2021
    Date of Patent: February 14, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yusheng Bian, Qizhi Liu
  • Patent number: 11567266
    Abstract: Structures for a grating coupler and methods of fabricating a structure for a grating coupler. The structure includes a grating coupler having a central portion and edge portions. The central portion and the edge portions define a sidewall, and the central portion and the edge portions have a first longitudinal axis along which the edge portions are arranged in a spaced relationship. Each edge portion projects from the sidewall at an angle relative to the first longitudinal axis. A waveguide core is optically coupled to the grating coupler. The first longitudinal axis is aligned in a first direction, and the waveguide core has a second longitudinal axis that is aligned in a second direction different from the first direction.
    Type: Grant
    Filed: December 15, 2021
    Date of Patent: January 31, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Judson Holt, Yusheng Bian, Qizhi Liu, Elizabeth Strehlow
  • Publication number: 20220404547
    Abstract: Embodiments of the disclosure provide an optical antenna for a photonic integrated circuit (PIC). The optical antenna includes a vertically oriented semiconductor waveguide with a first end on a semiconductor layer. The vertically oriented semiconductor waveguide includes a first sidewall and a second sidewall opposite the first sidewall. A reflective material is along the second sidewall of the vertically oriented semiconductor waveguide. A first plurality of grating protrusions extends from the first sidewall of the vertically oriented semiconductor waveguide.
    Type: Application
    Filed: June 22, 2021
    Publication date: December 22, 2022
    Inventors: Yusheng Bian, Qizhi Liu
  • Patent number: 11488950
    Abstract: Aspects of the disclosure provide an integrated circuit (IC) structure with a bipolar transistor stack within a substrate. The bipolar transistor stack may include: a collector, a base on the collector, and an emitter on a first portion of the base. A horizontal width of the emitter is less than a horizontal width of the base, and an upper surface of the emitter is substantially coplanar with an upper surface of the substrate. An extrinsic base structure is on a second portion of the base of the bipolar transistor stack, and horizontally adjacent the emitter. The extrinsic base structure includes an upper surface above the upper surface of the substrate.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: November 1, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Uzma B. Rana, Vibhor Jain, Anthony K. Stamper, Qizhi Liu, Siva P. Adusumilli
  • Publication number: 20220291446
    Abstract: Embodiments of the disclosure provide an optical antenna for a photonic integrated circuit (PIC). The optical antenna includes a semiconductor waveguide on a semiconductor layer. The semiconductor waveguide includes a first vertical sidewall over the semiconductor layer over the semiconductor layer. A plurality of grating protrusions extends horizontally from the first vertical sidewall of the semiconductor waveguide.
    Type: Application
    Filed: March 10, 2021
    Publication date: September 15, 2022
    Inventors: Yusheng Bian, Qizhi Liu
  • Publication number: 20220254774
    Abstract: Aspects of the disclosure provide an integrated circuit (IC) structure with a bipolar transistor stack within a substrate. The bipolar transistor stack may include: a collector, a base on the collector, and an emitter on a first portion of the base. A horizontal width of the emitter is less than a horizontal width of the base, and an upper surface of the emitter is substantially coplanar with an upper surface of the substrate. An extrinsic base structure is on a second portion of the base of the bipolar transistor stack, and horizontally adjacent the emitter. The extrinsic base structure includes an upper surface above the upper surface of the substrate.
    Type: Application
    Filed: February 11, 2021
    Publication date: August 11, 2022
    Inventors: Uzma B. Rana, Vibhor Jain, Anthony K. Stamper, Qizhi Liu, Siva P. Adusumilli
  • Patent number: 11374092
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to virtual bulk in semiconductor on insulator technology and methods of manufacture. The structure includes a heterojunction bipolar transistor formed on a semiconductor on insulator (SOI) wafer with a doped sub-collector material in a buried insulator region under a semiconductor substrate of the SOI wafer.
    Type: Grant
    Filed: February 7, 2020
    Date of Patent: June 28, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: John J. Pekarik, Vibhor Jain, Herbert Ho, Claude Ortolland, Qizhi Liu