Abstract: A method and apparatus for introducing a fluorine-containing flow stream to a deposition process to maintain process by-product volatility and reduce or eliminate by-product formation and/or interference.

Abstract: A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.

Abstract: A system for detection and control of deposition on pendant tubes in recovery and power boilers includes one or more deposit monitoring sensors operating in infrared regions of about 4 or 8.7 microns and directly producing images of the interior of the boiler, or producing feeding signals to a data processing system for information to enable a distributed control system by which the boilers are operated to operate said boilers more efficiently. The data processing system includes an image pre-processing circuit in which a 2-D image formed by the video data input is captured, and includes a low pass filter for performing noise filtering of said video input. It also includes an image compensation system for array compensation to correct for pixel variation and dead cells, etc., and for correcting geometric distortion. An image segmentation module receives a cleaned image from the image pre-processing circuit for separating the image of the recovery boiler interior into background, pendant tubes, and deposition.

Abstract: Apparatus and methods useful for disposal of hydrogen generated from a fluorine generation cell are described. In one embodiment the apparatus comprises an aerosol reduction unit and a catalytic combustion unit. The catalyst in the catalytic combustion unit is maintained at a temperature such that a pilot light or electrical spark apparatus may be eliminated. Fluorine generation apparatus and methods including an aerosol reduction unit and catalytic unit are also described.

Abstract: The use of a polyhedral oligomeric silsesquioxane compound and linking agent to form an ultra low-k dielectric film on semiconductor or integrated circuit surfaces is disclosed. The reaction between the polyhedral oligomeric silsesquioxane compound and linking agent is done in a chemical vapor deposition chamber.

Abstract: A method and system for thermally activating a oxidizing cleaning gas for use in a semiconductor process chamber cleaning process. The oxidizing cleaning gas is thermally activated by reacting the oxidizing cleaning gas with heated inert gas. The resulting thermally activated oxidizing cleaning gas does not readily deactivate, thus providing enhanced cleaning capabilities.

Abstract: The present invention is directed to a process and system for the versatile operation of process equipment, and especially semiconductor process chamber clean equipment, from any pressure level ranging from a vacuum to just less than one atmosphere absolute. The system of the present invention provides a storage vessel capable of storing gas at sub-atmospheric pressure and a vacuum pump. By using a vacuum pump, the vessel stores a reasonable quantity of gas without being pressurized above atmospheric pressure. Therefore, the entire capacity of the vessel can be supplied to the process because the vacuum pump pulls the contents from the vessel down to about 1 torr. In addition, the gas can be provided at a constant supply pressure, while providing a safe gas storage vessel, since the supply gas is never stored at a pressure above one atmosphere absolute.

Abstract: A method and system for thermally activating a oxidizing cleaning gas for use in a semiconductor process chamber cleaning process. The oxidizing cleaning gas is thermally activated by reacting the oxidizing cleaning gas with heated inert gas. The resulting thermally activated oxidizing cleaning gas does not readily deactivate, thus providing enhanced cleaning capabilities.

Abstract: A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.

Abstract: The use of a polyhedral oligometric silsesquioxane compound and linking agent to form an ultra low-k dielectric film on semiconductor or integrated circuit surfaces is disclosed. The reaction between the polyhedral oligometric silsesquioxane compound and linking agent is done in a chemical vapor deposition chamber.

Abstract: A valve for use with an ultra high purity gas comprising a valve body defining a valve chamber having a valve outlet through which gas is discharged and containing a reciprocable sealing member, characterized in that the valve chamber is in fluid communication with a source of the gas and in that the sealing member is reciprocable along an axis substantially parallel to the direction of flow of gas discharged from the valve outlet and into and out of sealing contact with a sealing face located within the valve chamber and circumscribing the inlet end of a valve outlet pipe, the opposite, outlet end of which pipe forms the valve outlet. The valve has a low wetted area and is thus easy to purge, and the valve design both reduces wear and restricts it to a single component which is easily replaced when necessary.

Abstract: Time sampled data from many hundreds of sensors spatially arranged on a subject is acquired, displayed and archived in real-time. A redundant array of acquisition processors coupled to temporary storage device are controlled by a system control processor. As the data is acquired, an operator interacts with a display processor to select sensors mapped on a computer model of the subject. The selected sensors are displayed as real-time `postage stamp` traces each located in a position reflecting their position on the subject. During acquisition in the background, or at some time later, the acquired data is archived onto a slower, but much larger data storage device such as a stream tape, or optical disk.

Abstract: A method of forming a seamless cylinder shell in which a layer of nickel is electroplated on a steel sheet so that a composite sheet is formed. The composite sheet is then preferably cut into a circular blank before further processing. The circular blank is subjected to an oxalic acid pretreatment for the nickel side and a zinc phosphate pretreatment for the steel side to retain a lubricant on the two opposed surfaces thereof and is thereafter lubricated with the lubricant. The circular blank is preferably cupped, relubricated, and drawn into the seamless cylinder shell. The seamless cylinder shell can be finished into a seamless gas cylinder by spinning one end of the cylinder into a cylinder head, internally threading the formed cylinder head, and then heat treating the cylinder.

Abstract: Laser drilling and real-time sensing and control of hole depth by the provision of magnetic field jack-up coils located around or to the side of a laser beam, in a stream of ionized plasma, and the coils are connected to a depth detector and comparator to halt laser drilling at a desired depth.

Abstract: Detection of the breakthrough of a laser beam through a workpiece wall uses one or more magnetic field pick-up coils. The coils are disposed on the drill side (side upon which the laser beam is impinging) of the workpiece. The coils sense the magnetic fields generated in the ionized plasma of particles escaping from the impact of the laser on the surface. The coils are connected to a breakthrough detector which generates a breakthrough signal upon the plasma and associated magnetic fields disappearing at breakthrough. The breakthrough signal is used to turn off the laser and/or change the application point at which the laser beam strikes the workpiece.

Abstract: A process and apparatus for thermally decomposing silicon containing gas for deposition on fluidized nucleating silicon seed particles is disclosed.Silicon seed particles are produced in a secondary fluidized reactor by thermal decomposition of a silicon containing gas. The thermally produced silicon seed particles are then introduced into a primary fluidized bed reactor to form a fludized bed. Silicon containing gas is introduced into the primary reactor where it is thermally decomposed and deposited on the fluidized silicon seed particles. Silicon seed particles having the desired amount of thermally decomposed silicon product thereon are removed from the primary fluidized reactor as ultra pure silicon product.An apparatus for carrying out this process is also disclosed.

Abstract: A process and apparatus for thermally decomposing silicon containing gas for deposition on fluidized nucleating silicon seed particles is disclosed.Silicon seed particles are produced in a secondary fluidized reactor by thermal decomposition of a silicon containing gas. The thermally produced silicon seed particles are then introduced into a primary fluidized bed reactor to form a fluidized bed. Silicon containing gas is introduced into the primary reactor where it is thermally decomposed and deposited on the fluidized silicon seed particles. Silicon seed particles having the desired amount of thermally decomposed silicon product thereon are removed from the primary fluidized reactor as ultra pure silicon product.An apparatus for carrying out this process is also disclosed.