Patents by Inventor Rolf Scheben
Rolf Scheben has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11874291Abstract: A method for temperature compensation of a MEMS sensor. The method includes: in a balancing step, a temperature gradient is produced by a thermal element and a first and a second temperature are determined at a first and a second temperature measurement point, wherein a deflection of a movable structure produced by the temperature gradient is measured and a compensation value is ascertained dependent on the first and second temperature and the deflection; in a measurement step, a physical stimulus is measured by way of a deflection of the movable structure and a third and fourth temperature is determined at the first and second temperature measurement points; in a compensation step, a measured value of the physical stimulus is ascertained dependent on the measured deflection, the third and fourth temperature and the compensation value. A method is also provided including: a regulation step, and a measurement step.Type: GrantFiled: April 27, 2022Date of Patent: January 16, 2024Assignee: ROBERT BOSCH GMBHInventors: Amin Jemili, Jochen Reinmuth, Dusan Radovic, Rolf Scheben, Steffen Becker
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Patent number: 11860184Abstract: A micromechanical structure including a substrate, a moveable seismic mass, a detection structure, and a main spring. The seismic mass is connected to the substrate using the main spring. A first direction and a second direction perpendicular thereto define a main extension plane of the substrate. The detection structure detects a deflection of the seismic mass and includes first electrodes mounted at the seismic mass and second electrodes mounted at the substrate. The first electrodes and second electrodes have a two-dimensional extension in the first and second directions. The micromechanical structure has a graduated stop structure including a first spring stop, a second spring stop, and a fixed stop.Type: GrantFiled: September 16, 2021Date of Patent: January 2, 2024Assignee: ROBERT BOSCH GMBHInventors: Cristian Nagel, Johannes Classen, Lars Tebje, Rolf Scheben, Rudy Eid
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Patent number: 11719539Abstract: A micromechanical component for a yaw rate sensor. The component includes a substrate having a substrate surface, a first rotor mass developed in one piece, which is able to be set into a first torsional vibration about a first axis of rotation aligned perpendicular to the substrate surface, and at least one first component of the micromechanical component. The first rotor mass is connected to the at least one first component via at least one first spring element. The at least one first spring element extends through a lateral concavity on the first rotor mass in each case and is connected to a recessed edge region of the first rotor mass. A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described.Type: GrantFiled: April 20, 2021Date of Patent: August 8, 2023Assignee: ROBERT BOSCH GMBHInventors: Matthias Kuehnel, Nils Felix Kuhlmann, Robert Maul, Rolf Scheben, Steffen Markisch, Thorsten Balslink, Wolfram Geiger
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Patent number: 11697583Abstract: A micromechanical device including a substrate, a movable mass, and a stop spring structure, which includes a stop. The substrate includes a substrate surface in parallel to a main extension plane and the movable mass is situated movably above the substrate surface in relation to the substrate. The stop spring structure is connected to the movable mass. The stop is designed to strike against the substrate surface in the event of a deflection of the movable mass in a z direction, perpendicular to the main extension plane. The stop spring structure, at the location of the stop, includes a first spring constant, a second spring constant, in parallel to the main extension plane, and a third spring constant, in parallel to the main extension plane and perpendicular to the x direction. The first spring constant is greater than the second spring constant and/or is greater than the third spring constant.Type: GrantFiled: April 7, 2021Date of Patent: July 11, 2023Assignee: ROBERT BOSCH GMBHInventors: Cristian Nagel, Johannes Classen, Rolf Scheben, Rudy Eid
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Publication number: 20230194262Abstract: A sensor system. The sensor system includes a rotation rate sensor and a control unit, the rotation rate sensor including a seismic mass and being configured to drive a movement of the seismic mass with the aid of a driving force, the control unit being configured to detect a free fall of the sensor system and to deactivate the driving force in the event of a detection of the free fall. A method for securing a sensor system, in a detection step a free fall of the sensor system being detected by the control unit, and in a securing step the driving force being deactivated by the control unit, is also described.Type: ApplicationFiled: November 30, 2022Publication date: June 22, 2023Inventors: Alexander Tsapkolenko, Hartmut Ruf, Mirko Hofmann, Rolf Scheben
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Publication number: 20230095336Abstract: A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.Type: ApplicationFiled: April 14, 2021Publication date: March 30, 2023Inventors: Matthias Kuehnel, Nils Felix Kuhlmann, Robert Maul, Rolf Scheben, Steffen Markisch, Thorsten Balslink, Wolfram Geiger
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Publication number: 20220357356Abstract: A method for temperature compensation of a MEMS sensor. The method includes: in a balancing step, a temperature gradient is produced by a thermal element and a first and a second temperature are determined at a first and a second temperature measurement point, wherein a deflection of a movable structure produced by the temperature gradient is measured and a compensation value is ascertained dependent on the first and second temperature and the deflection; in a measurement step, a physical stimulus is measured by way of a deflection of the movable structure and a third and fourth temperature is determined at the first and second temperature measurement points; in a compensation step, a measured value of the physical stimulus is ascertained dependent on the measured deflection, the third and fourth temperature and the compensation value. A method is also provided including: a regulation step, and a measurement step.Type: ApplicationFiled: April 27, 2022Publication date: November 10, 2022Inventors: Amin Jemili, Jochen Reinmuth, Dusan Radovic, Rolf Scheben, Steffen Becker
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Patent number: 11485630Abstract: A micromechanical sensor. The sensor includes a substrate, a cap element situated on the substrate, at least one seismic mass that is deflectable orthogonal to the cap element, an internal pressure that is lower by a defined amount relative to the surrounding environment prevailing inside a cavity, and a compensating element designed to provide a homogenization of a temperature gradient field in the cavity during operation of the micromechanical sensor.Type: GrantFiled: June 6, 2019Date of Patent: November 1, 2022Assignee: Robert Bosch GmbHInventors: Jan Waldmann, Rolf Scheben, Rudy Eid
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Publication number: 20220091154Abstract: A micromechanical structure including a substrate, a moveable seismic mass, a detection structure, and a main spring. The seismic mass is connected to the substrate using the main spring. A first direction and a second direction perpendicular thereto define a main extension plane of the substrate. The detection structure detects a deflection of the seismic mass and includes first electrodes mounted at the seismic mass and second electrodes mounted at the substrate. The first electrodes and second electrodes have a two-dimensional extension in the first and second directions. The micromechanical structure has a graduated stop structure including a first spring stop, a second spring stop, and a fixed stop.Type: ApplicationFiled: September 16, 2021Publication date: March 24, 2022Inventors: Cristian Nagel, Johannes Classen, Lars Tebje, Rolf Scheben, Rudy Eid
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Publication number: 20220048759Abstract: A microelectromechanical system, including a substrate having a major plane of extension. The microelectromechanical system includes a mass structure. The mass structure is formed to be movable relative to the substrate in a vertical direction, perpendicularly to the major plane of extension. The mass structure includes an electrode structure. The substrate includes a counter-electrode structure. The electrode structure and the counter-electrode structure are coupled capacitively. The mass structure has a deformation in a resting state of the microelectromechanical system. The electrode structure and/or the counter-electrode structure are formed as a function of the deformation of the mass structure.Type: ApplicationFiled: August 6, 2021Publication date: February 17, 2022Inventor: Rolf Scheben
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Publication number: 20210333103Abstract: A micromechanical component for a yaw rate sensor. The component includes a substrate having a substrate surface, a first rotor mass developed in one piece, which is able to be set into a first torsional vibration about a first axis of rotation aligned perpendicular to the substrate surface, and at least one first component of the micromechanical component. The first rotor mass is connected to the at least one first component via at least one first spring element. The at least one first spring element extends through a lateral concavity on the first rotor mass in each case and is connected to a recessed edge region of the first rotor mass. A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described.Type: ApplicationFiled: April 20, 2021Publication date: October 28, 2021Inventors: Matthias Kuehnel, Nils Felix Kuhlmann, Robert Maul, Rolf Scheben, Steffen Markisch, Thorsten Balslink, Wolfram Geiger
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Publication number: 20210323809Abstract: A micromechanical device including a substrate, a movable mass, and a stop spring structure, which includes a stop. The substrate includes a substrate surface in parallel to a main extension plane and the movable mass is situated movably above the substrate surface in relation to the substrate. The stop spring structure is connected to the movable mass. The stop is designed to strike against the substrate surface in the event of a deflection of the movable mass in a z direction, perpendicular to the main extension plane. The stop spring structure, at the location of the stop, includes a first spring constant, a second spring constant, in parallel to the main extension plane, and a third spring constant, in parallel to the main extension plane and perpendicular to the x direction. The first spring constant is greater than the second spring constant and/or is greater than the third spring constant.Type: ApplicationFiled: April 7, 2021Publication date: October 21, 2021Inventors: Cristian Nagel, Johannes Classen, Rolf Scheben, Rudy Eid
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Publication number: 20210214213Abstract: A micromechanical sensor. The sensor includes a substrate, a cap element situated on the substrate, at least one seismic mass that is deflectable orthogonal to the cap element, an internal pressure that is lower by a defined amount relative to the surrounding environment prevailing inside a cavity, and a compensating element designed to provide a homogenization of a temperature gradient field in the cavity during operation of the micromechanical sensor.Type: ApplicationFiled: June 6, 2019Publication date: July 15, 2021Inventors: Jan Waldmann, Rolf Scheben, Rudy Eid
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Patent number: 10794928Abstract: A microelectromechanical component including, vertically at a distance from one another, a substrate device, a first, a second, and a third functional layer, a vertical stop being formed between the second and third functional layer, the vertical stop having a stop area on a surface of the second functional layer facing the third functional layer, wherein the second functional layer is connected to the first functional layer in a connecting area allocated to the stop area.Type: GrantFiled: May 9, 2018Date of Patent: October 6, 2020Assignee: Robert Bosch GmbHInventors: Benny Pekka Herzogenrath, Denis Gugel, Rolf Scheben, Rudy Eid
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Patent number: 10753742Abstract: A micromechanical rate-of-rotation sensor includes a first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive beam arranged along the first Coriolis element. The first drive beam is coupled via a first spring to the first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive electrode carrier extending from the first drive beam in a direction opposite to the first Coriolis element. The first drive electrode carrier is configured to carry a multiplicity of first drive electrodes extending parallel to the first drive beam.Type: GrantFiled: November 9, 2016Date of Patent: August 25, 2020Assignee: Robert Bosch GmbHInventors: Reinhard Neul, Torsten Ohms, Robert Maul, Mirko Hattass, Christian Hoeppner, Odd-Axel Pruetz, Benjamin Schmidt, Rolf Scheben, Friedjof Heuck
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Patent number: 10753743Abstract: A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support spring rods which resiliently connect, on opposite sides of the rocker spring rod, the rocker bar to the rotationally oscillating mass.Type: GrantFiled: November 10, 2016Date of Patent: August 25, 2020Assignee: Robert Bosch GmbHInventors: Reinhard Neul, Torsten Ohms, Robert Maul, Mirko Hattass, Christian Hoeppner, Odd-Axel Pruetz, Benjamin Schmidt, Rolf Scheben, Friedjof Heuck
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Patent number: 10260879Abstract: A sensor drive includes at least one first seismic mass and an operating apparatus. The operating apparatus is configured to put the first seismic mass into oscillatory motion such that (i) a projection of the oscillatory motion of the first seismic mass onto a first spatial direction is a first harmonic oscillation of the first seismic mass at a first frequency, and (ii) a projection of the oscillatory motion of the first seismic mass onto a second spatial direction oriented at an angle to the first spatial direction is a second harmonic oscillation of the first seismic mass at a second frequency not equal to the first frequency. A method includes operating such a sensor device having at least one seismic mass.Type: GrantFiled: January 21, 2015Date of Patent: April 16, 2019Assignee: Robert Bosch GmbHInventors: Robert Maul, Mirko Hattass, Rolf Scheben
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Publication number: 20190056226Abstract: A micromechanical rate-of-rotation sensor includes a first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive beam arranged along the first Coriolis element. The first drive beam is coupled via a first spring to the first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive electrode carrier extending from the first drive beam in a direction opposite to the first Coriolis element. The first drive electrode carrier is configured to carry a multiplicity of first drive electrodes extending parallel to the first drive beam.Type: ApplicationFiled: November 9, 2016Publication date: February 21, 2019Inventors: Reinhard Neul, Torsten Ohms, Robert Maul, Mirko Hattass, Christian Hoeppner, Odd-Axel Pruetz, Benjamin Schmidt, Rolf Scheben, Friedjof Heuck
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Publication number: 20180334381Abstract: A microelectromechanical component including, vertically at a distance from one another, a substrate device, a first, a second, and a third functional layer, a vertical stop being formed between the second and third functional layer, the vertical stop having a stop area on a surface of the second functional layer facing the third functional layer, wherein the second functional layer is connected to the first functional layer in a connecting area allocated to the stop area.Type: ApplicationFiled: May 9, 2018Publication date: November 22, 2018Inventors: Benny Pekka Herzogenrath, Denis Gugel, Rolf Scheben, Rudy Eid
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Publication number: 20180321039Abstract: A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support spring rods which resiliently connect, on opposite sides of the rocker spring rod, the rocker bar to the rotationally oscillating mass.Type: ApplicationFiled: November 10, 2016Publication date: November 8, 2018Inventors: Reinhard Neul, Torsten Ohms, Robert Maul, Mirko Hattass, Christian Hoeppner, Odd-Axel Pruetz, Benjamin Schmidt, Rolf Scheben, Friedjof Heuck