Patents by Inventor Roy R. Yu
Roy R. Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9259902Abstract: A 4D device comprises a 2D multi-core logic and a 3D memory stack connected through the memory stack sidewall using a fine pitch T&J connection. 3D memory in the stack is thinned from the original wafer thickness to no remaining Si. A tongue and groove device at the memory wafer top and bottom surfaces allows an accurate stack alignment. The memory stack also has micro-channels on the backside to allow fluid cooling, and is further diced at the fixed clock-cycle distance, and flipped on its side and re-assembled on to a template into a pseudo-wafer format. The top side wall of the assembly is polished and built with BEOL to fan-out and use the T&J fine pitch connection to join to the 2D logic wafer. The other side of the memory stack is polished, fanned-out, and bumped with C4 solder. The invention also comprises a process for manufacturing the device.Type: GrantFiled: January 18, 2012Date of Patent: February 16, 2016Assignee: International Business Machines CorporationInventors: Roy R. Yu, Wilfried Haensch
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Publication number: 20160027760Abstract: A 4D device comprises a 2D multi-core logic and a 3D memory stack connected through the memory stack sidewall using a fine pitch T&J connection. The 3D memory in the stack is thinned from the original wafer thickness to no remaining Si. A tongue and groove device at the memory wafer top and bottom surfaces allows an accurate stack alignment. The memory stack also has micro-channels on the backside to allow fluid cooling. The memory stack is further diced at the fixed clock-cycle distance and is flipped on its side and re-assembled on to a template into a pseudo-wafer format. The top side wall of the assembly is polished and built with BEOL to fan-out and use the T&J fine pitch connection to join to the 2D logic wafer. The other side of the memory stack is polished, fanned-out, and bumped with C4 solder. The invention also comprises a process for manufacturing the device.Type: ApplicationFiled: September 18, 2015Publication date: January 28, 2016Applicant: Internatonal Business Machines CorporationInventors: Roy R. YU, Wilfried HAENSCH
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Publication number: 20160005686Abstract: A 4D device comprises a 2D multi-core logic and a 3D memory stack connected through the memory stack sidewall using a fine pitch T&J connection. The 3D memory in the stack is thinned from the original wafer thickness to no remaining Si. A tounge and groove device at the memory wafer top and bottom surfaces allows an accurate stack alignment. The memory stack also has micro-channels on the backside to allow fluid cooling. The memory stack is further diced at the fixed clock-cycle distance and is flipped on its side and re-assembled on to a template into a pseudo-wafer format. The top side wall of the assembly is polished and built with BEOL to fan-out and use the T&J fine pitch connection to join to the 2D logic wafer. The other side of the memory stack is polished, fanned-out, and bumped with C4 solder. The invention also comprises a process for manufacturing the device.Type: ApplicationFiled: September 17, 2015Publication date: January 7, 2016Applicant: International Business Machines CorporationInventors: Roy R. YU, Wilfried HAENSCH
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Patent number: 9171742Abstract: The present disclosure relates to methods and devices for manufacturing a three-dimensional chip package. A method includes forming a linear groove on an alignment rail, attaching an alignment rod to the linear groove, forming alignment channels on a plurality of integrated circuit chips, and aligning the plurality of integrated circuit chips by stacking the plurality of integrated circuit chips along the alignment rail. Another method includes forming an alignment ridge on an alignment rail, forming alignment channels on a plurality of integrated circuit chips, and aligning the plurality of integrated circuit chips by stacking the plurality of integrated circuit chips along the alignment rail.Type: GrantFiled: July 22, 2013Date of Patent: October 27, 2015Assignee: GLOBALFOUNDRIES U.S. 2 LLCInventors: Evan G. Colgan, Steven A. Cordes, Daniel C. Edelstein, Vijayeshwar D. Khanna, Kenneth Latzko, Qinghuang Lin, Peter J. Sorce, Sri M. Sri-Jayantha, Robert L. Wisnieff, Roy R. Yu
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Publication number: 20150270172Abstract: A process and resultant article of manufacture made by such process comprises forming through vias needed to connect a bottom device layer in a bottom silicon wafer to the one in the top device layer in a top silicon wafer comprising a silicon-on-insulator (SOI) wafer. Through vias are disposed in such a way that they extend from the middle of the line (MOL) interconnect of the top wafer to the buried oxide (BOX) layer of the SOI wafer with appropriate insulation provided to isolate them from the SOI device layer.Type: ApplicationFiled: June 8, 2015Publication date: September 24, 2015Applicant: International Business Machines CorporationInventors: Sampath D. Purushotaman, Roy R. Yu
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Publication number: 20150270246Abstract: A volumetric integrated circuit manufacturing method is provided. The method includes assembling a slab element of elongate chips, exposing a wiring layer between adjacent elongate chips of the slab element, metallizing a surface of the slab element at and around the exposed wiring layer to form a metallized surface electrically coupled to the wiring layer and passivating the metallized surface to hermetically seal the metallized surface.Type: ApplicationFiled: March 21, 2014Publication date: September 24, 2015Applicant: International Business Machines CorporationInventors: Daniel C. Edelstein, Michael A. Gaynes, Thomas M. Shaw, Bucknell C. Webb, Roy R. Yu
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Patent number: 9111925Abstract: An enhanced 3D integration structure comprises a logic microprocessor chip bonded to a collection of vertically stacked memory slices and an optional set of outer vertical slices comprising optoelectronic devices. Such a device enables both high memory content in close proximity to the logic circuits and a high bandwidth for logic to memory communication. Additionally, the provision of optoelectronic devices in the outer slices of the vertical slice stack enables high bandwidth direct communication between logic processor chips on adjacent enhanced 3D modules mounted next to each other or on adjacent packaging substrates. A method to fabricate such structures comprises using a template assembly which enables wafer format processing of vertical slice stacks.Type: GrantFiled: August 23, 2013Date of Patent: August 18, 2015Assignee: International Business Machines CorporationInventors: Evan George Colgan, SAmpath Purushothaman, Roy R. Yu
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Publication number: 20150054149Abstract: A process and resultant article of manufacture made by such process comprises forming through vias needed to connect a bottom device layer in a bottom silicon wafer to the one in the top device layer in a top silicon wafer comprising a silicon-on-insulator (SOI) wafer. Through vias are disposed in such a way that they extend from the middle of the line (MOL) interconnect of the top wafer to the buried oxide (BOX) layer of the SOI wafer with appropriate insulation provided to isolate them from the SOI device layer.Type: ApplicationFiled: August 21, 2013Publication date: February 26, 2015Applicant: International Business Machines CorporationInventors: Sampath Purushothaman, Roy R. Yu
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Patent number: 8962448Abstract: A computer readable medium is provided that is encoded with a program comprising instructions for performing a method for fabricating a 3D integrated circuit structure. Provided are an interface wafer including a first wiring layer and through-silicon vias, and a first active circuitry layer wafer including active circuitry. The first active circuitry layer wafer is bonded to the interface wafer. Then, a first portion of the first active circuitry layer wafer is removed such that a second portion remains attached to the interface wafer. A stack structure including the interface wafer and the second portion of the first active circuitry layer wafer is bonded to a base wafer. Next, the interface wafer is thinned so as to form an interface layer, and metallizations coupled through the through-silicon vias in the interface layer to the first wiring layer are formed on the interface layer.Type: GrantFiled: August 10, 2012Date of Patent: February 24, 2015Assignee: International Business Machines CorporationInventors: Mukta G. Farooq, Robert Hannon, Subramanian S. Iyer, Steven J. Koester, Fei Liu, Sampath Purushothaman, Albert M. Young, Roy R. Yu
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Publication number: 20150024549Abstract: The present disclosure relates to methods and devices for manufacturing a three-dimensional chip package. A method includes forming a linear groove on an alignment rail, attaching an alignment rod to the linear groove, forming alignment channels on a plurality of integrated circuit chips, and aligning the plurality of integrated circuit chips by stacking the plurality of integrated circuit chips along the alignment rail. Another method includes forming an alignment ridge on an alignment rail, forming alignment channels on a plurality of integrated circuit chips, and aligning the plurality of integrated circuit chips by stacking the plurality of integrated circuit chips along the alignment rail.Type: ApplicationFiled: July 22, 2013Publication date: January 22, 2015Applicant: International Business Machines CorporationInventors: Evan G. Colgan, Steven A. Cordes, Daniel C. Edelstein, Vijayeshwar D. Khanna, Kenneth Latzko, Qinghuang Lin, Peter J. Sorce, Sri M. Sri-Jayantha, Robert L. Wisnieff, Roy R. Yu
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Publication number: 20150024548Abstract: A computer readable medium is provided that is encoded with a program comprising instructions for performing a method for fabricating a 3D integrated circuit structure. Provided are an interface wafer including a first wiring layer and through-silicon vias, and a first active circuitry layer wafer including active circuitry. The first active circuitry layer wafer is bonded to the interface wafer. Then, a first portion of the first active circuitry layer wafer is removed such that a second portion remains attached to the interface wafer. A stack structure including the interface wafer and the second portion of the first active circuitry layer wafer is bonded to a base wafer. Next, the interface wafer is thinned so as to form an interface layer, and metallizations coupled through the through-silicon vias in the interface layer to the first wiring layer are formed on the interface layer.Type: ApplicationFiled: August 10, 2012Publication date: January 22, 2015Applicant: International Business Machines CorporationInventors: Mukta G. Farooq, Robert Hannon, Subramanian S. Iyer, Steven J. Koester, Fei Liu, Sampath Purushothaman, Albert M. Young, Roy R. Yu
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Patent number: 8738167Abstract: A method is provided for fabricating a 3D integrated circuit structure. According to the method, a first active circuitry layer wafer is provided. The first active circuitry layer wafer comprises a P+ portion covered by a P? layer, and the P? layer includes active circuitry. The first active circuitry layer wafer is bonded face down to an interface wafer that includes a first wiring layer, and then the P+ portion of the first active circuitry layer wafer is selectively removed with respect to the P? layer of the first active circuitry layer wafer. Next, a wiring layer is fabricated on the backside of the P? layer. Also provided are a non-transitory computer readable medium encoded with a program for fabricating a 3D integrated circuit structure, and a 3D integrated circuit structure.Type: GrantFiled: February 16, 2012Date of Patent: May 27, 2014Assignee: International Business Machines CorporationInventors: Mukta G. Farooq, Robert Hannon, Subramanian S. Iyer, Steven J. Koester, Sampath Purushothaman, Roy R. Yu
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Patent number: 8664081Abstract: A computer readable medium is provided that is encoded with a program comprising instructions for performing a method for fabricating a 3D integrated circuit structure. Provided are an interface wafer including a first wiring layer and through-silicon vias, and a first active circuitry layer wafer including active circuitry. The first active circuitry layer wafer is bonded to the interface wafer. Then, a first portion of the first active circuitry layer wafer is removed such that a second portion remains attached to the interface wafer. A stack structure including the interface wafer and the second portion of the first active circuitry layer wafer is bonded to a base wafer. Next, the interface wafer is thinned so as to form an interface layer, and metallizations coupled through the through-silicon vias in the interface layer to the first wiring layer are formed on the interface layer.Type: GrantFiled: August 10, 2012Date of Patent: March 4, 2014Assignee: International Business Machines CorporationInventors: Mukta G. Farooq, Robert Hannon, Subramanian S. Iyer, Steven J. Koester, Fei Liu, Sampath Purushothaman, Albert M. Young, Roy R. Yu
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Publication number: 20140021616Abstract: A semiconductor structure is provided and includes a substrate having an edge surface and a device surface with a central area, a crack stop structure disposed on the device surface and a circuit structure including components disposed on the device surface in the central area and interconnects electrically coupled to the components. The interconnects are configured to extend from the central area to the edge surface while bridging over the crack stop structure.Type: ApplicationFiled: July 19, 2012Publication date: January 23, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Diego Anzola, Evan G. Colgan, Kevin K. Dezfulian, Daniel C. Edelstein, Mark C. H. Lamorey, Sampath Purushothaman, Thomas M. Shaw, Roy R. Yu
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Publication number: 20140024146Abstract: A semiconductor structure is provided and includes a substrate having an edge surface and a device surface with a central area, a crack stop structure disposed on the device surface and a circuit structure including components disposed on the device surface in the central area and interconnects electrically coupled to the components. The interconnects are configured to extend from the central area to the edge surface while bridging over the crack stop structure.Type: ApplicationFiled: August 3, 2012Publication date: January 23, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Diego Anzola, Evan G. Colgan, Kevin K. Dezfulian, Daniel C. Edelstein, Mark C. H. Lamorey, Sampath Purushothaman, Thomas M. Shaw, Roy R. Yu
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Patent number: 8629553Abstract: A method is provided for fabricating a 3D integrated circuit structure. According to the method, a first active circuitry layer wafer is provided. The first active circuitry layer wafer comprises a P+ portion covered by a P? layer, and the P? layer includes active circuitry. The first active circuitry layer wafer is bonded face down to an interface wafer that includes a first wiring layer, and then the P+ portion of the first active circuitry layer wafer is selectively removed with respect to the P? layer of the first active circuitry layer wafer. Next, a wiring layer is fabricated on the backside of the P? layer. Also provided are a tangible computer readable medium encoded with a program for fabricating a 3D integrated circuit structure, and a 3D integrated circuit structure.Type: GrantFiled: February 16, 2012Date of Patent: January 14, 2014Assignee: International Business Machines CorporationInventors: Mukta G. Farooq, Robert Hannon, Subramanian S. Iyer, Steven J. Koester, Sampath Purushothaman, Roy R. Yu
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Publication number: 20130341791Abstract: An enhanced 3D integration structure comprises a logic microprocessor chip bonded to a collection of vertically stacked memory slices and an optional set of outer vertical slices comprising optoelectronic devices. Such a device enables both high memory content in close proximity to the logic circuits and a high bandwidth for logic to memory communication. Additionally, the provision of optoelectronic devices in the outer slices of the vertical slice stack enables high bandwidth direct communication between logic processor chips on adjacent enhanced 3D modules mounted next to each other or on adjacent packaging substrates. A method to fabricate such structures comprises using a template assembly which enables wafer format processing of vertical slice stacks.Type: ApplicationFiled: August 23, 2013Publication date: December 26, 2013Applicant: International Bushiness Machines CorporationInventors: Evan George Colgan, Sampath Purushothaman, Roy R. Yu
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Patent number: 8569874Abstract: A chip stack structure includes a logic chip having an active device surface, and memory slices of a memory unit vertically aligned such that a surface of the memory slices is oriented perpendicular to the active device surface of the logic chip. The chip stack structure also includes wiring patterned on an upper surface of the memory slices, the wiring electrically connecting memory leads of the memory slices to logic grids corresponding to logic grid connections of the logic chip.Type: GrantFiled: March 9, 2011Date of Patent: October 29, 2013Assignee: International Business Machines CorporationInventors: Evan G. Colgan, Monty M. Denneau, Sampath Purushothaman, Klmberley A. Kelly, Roy R. Yu
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Patent number: 8563396Abstract: A process and resultant article of manufacture made by such process comprises forming through vias needed to connect a bottom device layer in a bottom silicon wafer to the one in the top device layer in a top silicon wafer comprising a silicon-on-insulator (SOI) wafer. Through vias are disposed in such a way that they extend from the middle of the line (MOL) interconnect of the top wafer to the buried oxide (BOX) layer of the SOI wafer with appropriate insulation provided to isolate them from the SOI device layer.Type: GrantFiled: January 29, 2011Date of Patent: October 22, 2013Assignee: International Business Machines CorporationInventors: Sampath Purushothaman, Roy R. Yu
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Patent number: 8546188Abstract: A first set of semiconductor substrates includes semiconductor chips having bonding pads arranged in a primary pattern. A second set of semiconductor substrates includes semiconductor chips having bonding pads arranged in a mirror-image pattern. A first semiconductor substrate from the first set is bonded to a second semiconductor substrate from the second set such that each bonding pads is bonded to a mirror-image bonding pad. Additional substrates are bonded sequentially such that the bonded structure includes an even number of semiconductor substrates of which one half have bonding pads of the primary pattern and are bonded to the side of the first semiconductor substrate, while the other half have bonding pads of the mirror-image pattern and are bonded to the side of the second semiconductor substrate. The mirror-image patterns of the bonding pads enable maximal cancellation of wafer bow.Type: GrantFiled: April 9, 2010Date of Patent: October 1, 2013Assignee: International Business Machines CorporationInventors: Fei Liu, Albert M. Young, Roy R. Yu