Abstract: To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V1, and V2 communicating with each other fluid-tightly.

Abstract: A valve device with which a flow rate can be adjusted precisely includes: an operating member for operating a diaphragm provided in such a way as to be capable of moving between a closed position in which the diaphragm closes a flow path and an open position in which the diaphragm opens the flow path; a main actuator for moving the operating member to the open position or the closed position in response to the pressure of a supplied driving fluid; an adjustment actuator for adjusting the position of the operating member positioned in the open position; and a position detecting mechanism for detecting displacement of the operating member with respect to a valve body.

Abstract: The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3.

Abstract: A work management apparatus, method, and system enable to accurately manage position, tightening torque and other information for all fastening parts, for tightening work using a tool with a torque sensor. The system includes: a driver provided with a torque sensor; and first and second cameras that capture images of a product from different viewpoints. The torque sensor starts measurement of the tightening torque when a detected tightening torque exceeds a set threshold value, stops measurement of the tightening torque when the measurement data satisfies a predetermined condition, and outputs torque related data that includes measurement time. The system further includes: a PC that calculates coordinates of an engagement position of a bit from a plurality of image data captured by the first and the second cameras corresponding to the measurement time included in the torque related data; and a marker mounting device provided with a marker and removably mounted to the bit.

Abstract: A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomaly has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.

Abstract: A valve device includes: a body in which an in-flow path and an out-flow path are formed; a valve element that is configured to open and close the in-flow path and the out-flow path; a stem that is configured to move closer to and away from the body in order to cause the valve element to allow and block communication between the in-flow path and the out-flow path; a stroke adjustment portion that is configured to adjust an amount of stroke of the stem; and a displacement sensor that is configured to detect displacement of the stem.

Abstract: Provided is a fluid control device that can have a small size, while a member for detecting abnormality of the fluid control device is incorporated. In addition, a result of detecting an abnormality of the fluid control device is made easily recognizable from the outside. A fluid control device 1 includes an information processing module 5 provided in the device, a valve body 11 having a flow path, an actuator body 12 fixed to the valve body 11, a hollow casing 13 that is fixed to the actuator body 12 and has a side surface on which a through hole 133d is formed, a piston 126 that is provided in the actuator body 12 and in which a driving pressure introduction path 126b that communicates with a driving pressure introduction chamber S2 is formed, and an introduction pipe 21 through which driving pressure is introduced, the introduction pipe 21 having one end inserted to the driving pressure introduction path 126b and another end leading to an outside through the through hole 133d of the casing 13.

Abstract: An entire fluid supply line or an entire fluid controller constituted by a plurality of fluid control devices is precisely monitored. A fluid controller accumulating and having a plurality of fluid control devices. The fluid control devices include an operation information acquisition mechanism acquiring an operation information in the fluid control devices, an identification information storage storing a self-identification information, and a communication processing unit transmitting the operation information acquired by the operation information acquisition mechanism to an external terminal with the self-identification information stored in the identification information storage at different timings for each of the fluid control devices.

Abstract: A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.

Abstract: An electromagnetic valve has an inlet port and an outlet port. The electromagnetic valve is configured to open and close a driving fluid passage communicating the inlet port and the outlet port. The electromagnetic valve includes: a housing; a solenoid that includes a bobbin having a coil wound therearound; a moving core that is provided on an axis of the bobbin and is disposed movably in an axial direction; a stationary core that is provided on the axis of the bobbin and is fixed in the housing; and a valve that is configured to be movable together with the moving core and opens and closes the driving fluid passage. The inlet port is opened on one surface side of the housing in the axial direction of the bobbin while the outlet port is opened on the other surface side of the housing in the axial direction of the bobbin.

Abstract: A diaphragm valve capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member; a housing that is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member; and a humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing.

Abstract: A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.

Abstract: The present invention relates to a method and system for diagnosing blood vessel obstruction, such as would occur in deep vein thrombosis (DVT). More specifically, the present invention relates to a software tool for use with sensor hardware to allow users to perform standardised and repeatable testing of patients to assist with diagnosis of deep vein thrombosis or related conditions. The present invention further relates to an apparatus and method for conducting the diagnosis.

Abstract: In a semiconductor fabrication apparatus composed of a plurality of components, such as fluid control devices, a manager is to be enabled to identify components by intuition. Information on the identified component is to be provided to the manager in an easy-to-understand manner. In a system in which a manager terminal 3 and an information processor 2 are communicably configured via networks NW1 and NW2, the manager terminal 3 receives component information on a semiconductor fabrication apparatus 1 from the information processor 2. Upon the identification of the position of a component constituting the semiconductor fabrication apparatus 1 on the captured image of the semiconductor fabrication apparatus 1 using an identification processing unit 32, a compositing processing unit 33 creates a composite image in which component information is composited with the captured image at the position of the component identified, and an image display unit 34 displays the composite image.

Abstract: A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

Abstract: Provided is a fluid control device that can have a small size, while a member for detecting abnormality of the fluid control device is incorporated. In addition, a result of detecting an abnormality of the fluid control device is made easily recognizable from the outside. A fluid control device 1 includes an information processing module 5 provided in the device, a valve body 11 having a flow path, an actuator body 12 fixed to the valve body 11, a hollow casing 13 that is fixed to the actuator body 12 and has a side surface on which a through hole 133d is formed, a piston 126 that is provided in the actuator body 12 and in which a driving pressure introduction path 126b that communicates with a driving pressure introduction chamber S2 is formed, and an introduction pipe 21 through which driving pressure is introduced, the introduction pipe having one end inserted to the driving pressure introduction path 126b and another end leading to an outside through the through hole 133d of the casing 13.

Abstract: To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.

Abstract: A valve device allows simple flow rate control when the bulb is opened. Valve device includes: a valve body having a first flow path and a second flow path formed therein; a valve body for closing an opening of the first flow path to shut off a gateway between the first flow path and the second flow path and for opening the first flow path to communicate the first flow path and the second flow path; an operating member for moving between a closed position for closing the opening in the valve body and an open position for opening the opening; and an adjusting actuator for defining an open position of the operating member and having an electrically driven material made of a compound that deforms in response to a change in an electric field, and for changing the defined open position by deformation of the electrically driven material.

Abstract: To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V1, and V2 communicating with each other fluid-tightly.

Abstract: An entire fluid supply line constituted by a plurality of fluid control devices is precisely monitored. In addition, the control accuracy of the fluid supply line is improved by suppressing variations in operations of the fluid control devices. A fluid supply line L1 formed from a plurality of fluid control devices F1 and V11 to V14 communicating with each other in a fluid-tight manner includes: a first connection means that connects between a mechanism outside the fluid supply line L1 and a fluid control device on the fluid supply line L1 and F1; and a second connection means that branches from the first connection means on the fluid supply line L1 and is connected to other fluid control devices F1 and V11 to V14.