Abstract: The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3.

Abstract: In a semiconductor fabrication apparatus composed of a plurality of components, such as fluid control devices, a manager is to be enabled to identify components by intuition. Information on the identified component is to be provided to the manager in an easy-to-understand manner. In a system in which a manager terminal 3 and an information processor 2 are communicably configured via networks NW1 and NW2, the manager terminal 3 receives component information on a semiconductor fabrication apparatus 1 from the information processor 2. Upon the identification of the position of a component constituting the semiconductor fabrication apparatus 1 on the captured image of the semiconductor fabrication apparatus 1 using an identification processing unit 32, a compositing processing unit 33 creates a composite image in which component information is composited with the captured image at the position of the component identified, and an image display unit 34 displays the composite image.

Abstract: A cause of abnormality of a fluid control device and/or data with which abnormality can be predicted can be collected to be analyzed, and abnormality can be predicted based on a result of the analysis. A fluid control device 8 and a server 72 are configured to be able to communicate with each other through networks NW1 and 2. The fluid control device 8 includes an operation information acquisition mechanism that acquires a plurality of types of operation information about the fluid control device 8.

Abstract: A valve device and semiconductor production device that can be used long-term without seizing even during high-temperature use, and which do not have contaminants in the chambers thereof. The valve device includes: a boosting mechanism that amplifies drive force; a first and second stem receive force amplified by the boosting mechanism and move; and a diaphragm capable of opening and closing fluid passages. The boosting mechanism includes: a retainer and bearings; shafts having both ends thereof supported by the bearings; and arms pivotably supported by the shafts and having an outer end portion that receives drive force and an inner end portion that amplifies and transmits drive force to the first stem. In the retainer, bearings, shafts, and arms, the bearings and both ends of the shaft constitute a swinging portion in conjunction with the swinging by the arms, and thereamong, the bearings include a carbon fiber composite material.

Abstract: A predictor has a memory which stores at least one example for which an associated outcome is not known. The memory stores at least one decision tree comprising a plurality of nodes connected by edges, the nodes comprising a root node, internal nodes and leaf nodes. Individual ones of the nodes and individual ones of the edges each have an assigned module, comprising parameterized, differentiable operations, such that for each of the internal nodes the module computes a binary outcome for selecting a child node of the internal node. The predictor has a processor configured to compute the prediction by processing the example using a plurality of the differentiable operations selected according to a path through the tree from the root node to a leaf node.

Abstract: A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomalty has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.

Abstract: A diaphragm valve includes a valve body, a diaphragm, a bonnet, an operation mechanism, and a fixing mechanism. The fixing mechanism includes a clamping member for integrally sandwiching and fixing, from both right and left sides, circumferential edges of both the bonnet and the valve body. A circular pressing member for pressing a circumferential edge of the diaphragm from above is interposed between the diaphragm and the bonnet and has convex portions and concave portions. The convex portions fit into notches provided at the circumferential edge of the diaphragm or the valve body, and the concave portions are fitted by protrusions provided at the circumferential edge of the diaphragm or the valve body.

Abstract: Provided are a valve device free of changes in the position of the valve member caused by external force and fluid pressure, and a lock device for the valve device. The lock device has a tubular member fitted to the rotating part of the valve device so that the member is movable along the axis of the rotating part in both directions, wherein the member has a protrusion on its inner circumferential face along its axis, and the protrusion engages with or disengages from recesses in an outer circumferential face of a holder of the rotating part formed along its axis when the member moves in either direction; or the member has recesses in its inner circumferential face formed along its axis, and the recesses engage with or disengage from a protrusion on the outer circumferential face of the holder along its axis when the member moves in either direction.

Abstract: Provided are a valve device free of changes in the position of the valve member caused by external force and fluid pressure, and a lock device for the valve device. The lock device has a tubular member fitted to the rotating part of the valve device so that the member is movable along the axis of the rotating part in both directions, wherein the member has a protrusion on its inner circumferential face along its axis, and the protrusion engages with or disengages from recesses in an outer circumferential face of a holder of the rotating part formed along its axis when the member moves in either direction; or the member has recesses in its inner circumferential face formed along its axis, and the recesses engage with or disengage from a protrusion on the outer circumferential face of the holder along its axis when the member moves in either direction.

Abstract: A diaphragm valve includes a valve body, a diaphragm, a bonnet, an operation mechanism, and a fixing mechanism. The fixing mechanism includes a clamping member for integrally sandwiching and fixing, from both right and left sides, circumferential edges of both the bonnet and the valve body. A circular pressing member for pressing a circumferential edge of the diaphragm from above is interposed between the diaphragm and the bonnet and has convex portions and concave portions. The convex portions fit into notches provided at the circumferential edge of the diaphragm or the valve body, and the concave portions are fitted by protrusions provided at the circumferential edge of the diaphragm or the valve body.