Patents by Inventor Satoru Yamaguchi
Satoru Yamaguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 9336587Abstract: Included is a multiple resolution image generating unit which applies a plurality of noise removing filters to a semiconductor circuit pattern image and generates a multiple resolution image, a multiple resolution differential image generating unit which generates a multiple resolution differential image from a difference of images between hierarchies of the multiple resolution image, and a contour extracting unit which extracts a contour of the semiconductor circuit pattern based on an intensity signal of the semiconductor circuit pattern image. The contour extracting unit calculates an intensity signal level upon extracting a contour of the semiconductor circuit pattern from the multiple resolution image by using an image signal of the multiple resolution differential image, and extracts a contour of the semiconductor circuit pattern based on the calculated intensity signal level.Type: GrantFiled: April 23, 2013Date of Patent: May 10, 2016Assignee: Hitachi High-Technologies CorporationInventors: Takuma Shibahara, Michio Oikawa, Kei Sakai, Satoru Yamaguchi
-
Patent number: 9329034Abstract: An object of the invention is to provide: a sample unevenness device that stably identifies unevenness formed on a sample, regardless of a pattern formation state or image acquisition conditions; and a computer program. As an aspect to achieve the above object, a device and computer program are proposed that obtain the area of a plurality of regions formed by a profile waveform of a given threshold or lower for a profile formed based on a detection signal obtained by scanning with a charged particle beam with respect to the sample; and determine either or both of that a site corresponding to a region with a relatively large area is a concave portion or that a space portion and a site corresponding to a space with a relatively small area is a convex portion or a line portion.Type: GrantFiled: October 14, 2011Date of Patent: May 3, 2016Assignee: Hitachi High-Technologies CorporationInventors: Hitoshi Namai, Satoru Yamaguchi, Fumihiro Sasajima
-
Publication number: 20160001860Abstract: An ocean exploration apparatus including: a probe body; a buoyancy adjusting section that adjusts buoyancy generated in the probe body; a posture adjusting section that adjusts a posture of the probe body; a position information acquiring section that acquires position information of the probe body; a wing section that moves the probe body using a lifting force applied from seawater; a sensor section that is provided in the probe body and measures an electromagnetic field; and a control section that controls operations of the buoyancy adjusting section, the posture adjusting section, the position information acquiring section, and the sensor section according to predetermined conditions.Type: ApplicationFiled: June 22, 2015Publication date: January 7, 2016Inventors: Hideki MIZUNAGA, Satoru YAMAGUCHI
-
Publication number: 20150357158Abstract: An object of the present invention is to provide a method for pattern measurement and a charged particle radiation device in which a pattern formed by using a DSA technique can be very precisely measured and inspected. According to an aspect for achieving the object, a method for pattern measurement or a charged particle radiation device for realizing the measurement is proposed as follows. A charged particle is radiated to a polymer compound used for a self-organization lithography technique, and a specific polymer is considerably contracted as compared to the other polymer among multiple polymers forming the polymer compound. Thereafter, dimensions between multiple edges of the other polymer are measured, based on a signal obtained by scanning a region including the other polymer with the charged particle beam.Type: ApplicationFiled: January 22, 2014Publication date: December 10, 2015Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Makoto SUZUKI, Satoru YAMAGUCHI, Kei SAKAI, Miki ISAWA, Satoshi TAKADA, Kazuhisa HASUMI, Masami IKOTA
-
Publication number: 20150285627Abstract: The purpose of the present invention is to provide an overlay error measuring device which measures an overlay error with high accuracy even when a lower layer pattern is disposed under a thin film and a sufficient signal amount cannot be ensured. The present invention proposes an overlay error measuring device provided with an arithmetic processing unit for measuring a pattern formed on a sample on the basis of a signal waveform obtained by a charged particle beam device. The arithmetic processing unit finds a correlation with the signal waveform using a partial waveform obtained on the basis of partial extraction of the signal waveform, forms a correlation profile indicating the correlation, and measures an overlay error using the correlation profile.Type: ApplicationFiled: June 5, 2013Publication date: October 8, 2015Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Satoru Yamaguchi, Kei Sakai, Osamu Inoue, Kazuyuki Hirao, Osamu Komuro
-
Patent number: 9119287Abstract: A hook portion projecting outward is provided on a side plate portion of an upper case. An upper case includes a support surface that supports a display surface of a display panel. A lower case includes a sidewall that faces an outer circumferential side of the side plate portion. The sidewall has an opening into which the hook portion is inserted. The hook portion is inserted in the opening in a state in which no load is applied in a plane parallel to the support surface, and is elastically deformable toward center of the support surface up to a position not overlapping the opening when a portion inserted in the opening is pressed from outside of the support surface toward the center of the support surface.Type: GrantFiled: February 11, 2014Date of Patent: August 25, 2015Assignee: JAPAN DISPLAY INC.Inventors: Yuichi Tsubaki, Satoru Yamaguchi
-
Patent number: 9000365Abstract: Provided are a pattern measuring apparatus and a computer program which determine whether a gap formed in a sample (201) is a core gap (211) or a spacer gap (212). The secondary electron profile of the sample (201) is acquired, the feature quantities of the secondary electron profile at the positions of edges (303, 305) are detected, and based on the detected feature quantities, whether each gap adjacent to each of the edges (303, 305) is the core gap (211) or the spacer gap (212) is determined. Furthermore, the waveform profile of the spacer (207) is previously stored, the secondary electron profile of the sample (201) is acquired, a matching degree of the secondary electron profile and the stored waveform profile at the position of each spacer (207) is detected, and based on the detected matching degree, whether the each gap adjacent to each spacer (207) is the core gap (211) or the spacer gap (212) is determined.Type: GrantFiled: April 7, 2010Date of Patent: April 7, 2015Assignee: Hitachi High-Technologies CorporationInventors: Yuzuru Mochizuki, Maki Tanaka, Miki Isawa, Satoru Yamaguchi
-
Patent number: 8953855Abstract: An object of the present invention is to provide an edge detection technique and equipment which are capable of stably detecting an edge by suppressing the influence of noise even in the case where the image is obtained by charged particle radiation equipment, such as a scanning electron microscope and has a low S/N ratio. More specifically, the present invention is to propose a technique and equipment which are configured to determine a peak position (edge) on the basis of the following two edge extraction techniques. That is, the present invention is to propose a technique and equipment wherein at least two peaks are formed by using, as edge detection techniques, for example, one peak detection technique having a relatively high sensitivity and the other peak detection technique which is relatively less susceptible to the influence of noise than the one peak detection technique, and wherein a position where the peaks coincide with each other is determined as a true peak position (edge position).Type: GrantFiled: February 26, 2009Date of Patent: February 10, 2015Assignee: Hitachi High-Technologies CorporationInventors: Hitoshi Namai, Osamu Komuro, Satoru Yamaguchi, Fumihiro Sasajima
-
Publication number: 20150002652Abstract: The purpose of the present invention is to provide an image forming device and the like that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In order to achieve the purpose, there is proposed an image forming device that forms an integrated image by integrating a plurality of image signals and that is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals.Type: ApplicationFiled: February 12, 2013Publication date: January 1, 2015Applicant: Hitachi High-Technologies CorporationInventors: Yasunori Takasugi, Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao
-
Publication number: 20140313992Abstract: An information processing apparatus that selects a channel recommended to be used upon receiving a notification of a detection result indicating that a first wireless communication device among a plurality of wireless communication devices has detected a specific radio wave; and transmits channel information indicating the recommended channel a second wireless communication device among the plurality of wireless communication devices located near the first wireless communication device.Type: ApplicationFiled: March 7, 2014Publication date: October 23, 2014Applicant: BUFFALO INC.Inventor: Satoru Yamaguchi
-
Patent number: 8844971Abstract: An inner fender that faces a wheel arch of a bumper face includes an undercut portion formed on a side of an inner peripheral wall, the side of the inner peripheral wall being an outer side with respect to a vehicle width direction. The undercut portion includes a lower side wall that radially inwardly recedes from the inner peripheral wall and is superposed with a lower end of the wheel arch of the bumper face, an upper side wall that radially outwardly protrudes from the inner peripheral wall and is disposed above the lower side wall so as to be continuous with the lower side wall, and a flange that extends outward in the vehicle width direction from a front end of the upper side wall and is secured to an inner portion of the bumper face.Type: GrantFiled: July 25, 2012Date of Patent: September 30, 2014Assignee: Honda Motor Co., LtdInventors: Hirofumi Tanaka, Satoru Yamaguchi
-
Publication number: 20140240961Abstract: A hook portion projecting outward is provided on a side plate portion of an upper case. An upper case includes a support surface that supports a display surface of a display panel. A lower case includes a sidewall that faces an outer circumferential side of the side plate portion. The sidewall has an opening into which the hook portion is inserted. The hook portion is inserted in the opening in a state in which no load is applied in a plane parallel to the support surface, and is elastically deformable toward center of the support surface up to a position not overlapping the opening when a portion inserted in the opening is pressed from outside of the support surface toward the center of the support surface.Type: ApplicationFiled: February 11, 2014Publication date: August 28, 2014Applicant: Japan Display Inc.Inventors: Yuichi TSUBAKI, Satoru YAMAGUCHI
-
Publication number: 20140232969Abstract: The present disclosure includes a liquid crystal panel; a backlight that illuminates the liquid crystal panel; a display cover that covers a display surface of the liquid crystal panel; a housing case that houses the backlight; a display cover support case to whose inside the housing case is fixed and whose outer circumferential surface serves as a pasting surface pasted to the display cover; pressure-sensitive adhesive members that are arranged between the pasting surface of the display cover support case and the display cover, and join together the display cover and the display cover support case with a pressure-sensitive adhesive force; and an adhesive that is arranged in an area located on the pasting surface and interposed between the pressure-sensitive adhesive members in the longitudinal direction of the pasting surface, and that bonds together the display cover and the display cover support case.Type: ApplicationFiled: February 13, 2014Publication date: August 21, 2014Applicant: Japan Display Inc.Inventors: Yuichi TSUBAKI, Satoru YAMAGUCHI
-
Patent number: 8666165Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.Type: GrantFiled: October 10, 2008Date of Patent: March 4, 2014Assignee: Hitachi, Ltd.Inventors: Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima, Yasuhiko Ozawa
-
Publication number: 20140003703Abstract: Included is a multiple resolution image generating unit which applies a plurality of noise removing filters to a semiconductor circuit pattern image and generates a multiple resolution image, a multiple resolution differential image generating unit which generates a multiple resolution differential image from a difference of images between hierarchies of the multiple resolution image, and a contour extracting unit which extracts a contour of the semiconductor circuit pattern based on an intensity signal of the semiconductor circuit pattern image. The contour extracting unit calculates an intensity signal level upon extracting a contour of the semiconductor circuit pattern from the multiple resolution image by using an image signal of the multiple resolution differential image, and extracts a contour of the semiconductor circuit pattern based on the calculated intensity signal level.Type: ApplicationFiled: April 23, 2013Publication date: January 2, 2014Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Takuma SHIBAHARA, Michio OIKAWA, Kei SAKAI, Satoru YAMAGUCHI
-
Patent number: 8608238Abstract: A space between the trailing edge of a front fender and the outer surface of a front pillar lower in the vehicle width direction is covered with a synthetic resin enclosure inserted from the wheel housing side. The upper end of a main body of the enclosure is provided with an upper extending portion extending toward the lower end of the front pillar upper, and a reinforcing rib is formed on the outer surface of the upper extending portion so as to make the reinforcing rib in contact with the inner surface of a projecting portion of the front fender. A pressure applied to the projecting portion of the front fender is transmitted to the front pillar lower via the reinforcing rib, and thus the surface stiffness of the projecting portion of the front fender can be improved without adding a particular reinforcing member.Type: GrantFiled: July 25, 2012Date of Patent: December 17, 2013Assignee: Honda Motor Co., Ltd.Inventors: Hirofumi Tanaka, Satoru Yamaguchi
-
Patent number: 8571130Abstract: A transmitting apparatus for transmitting user data, includes: an establishing section that establishes three or more transmission paths for a receiving apparatus; a first generation section that generates a user data unit which includes user data to be transmitted to the receiving apparatus; and a second generation section that generates an error correction data unit which includes error correction data to be used for error correction of the user data to be transmitted to the receiving apparatus. At least one of the three or more transmission paths transmits the error correction data unit, and at least two of the three or more transmission paths transmits the user data unit.Type: GrantFiled: June 30, 2011Date of Patent: October 29, 2013Assignee: Buffalo Inc.Inventors: Satoru Yamaguchi, Daisuke Yamada, Nagahiro Matsuura, Hiroshi Katano, Masato Kato
-
Publication number: 20130270436Abstract: An object of the invention is to provide: a sample unevenness device that stably identifies unevenness formed on a sample, regardless of a pattern formation state or image acquisition conditions; and a computer program. As an aspect to achieve the above object, a device and computer program are proposed that obtain the area of a plurality of regions formed by a profile waveform of a given threshold or lower for a profile formed based on a detection signal obtained by scanning with a charged particle beam with respect to the sample; and determine either or both of that a site corresponding to a region with a relatively large area is a concave portion or that a space portion and a site corresponding to a space with a relatively small area is a convex portion or a line portion.Type: ApplicationFiled: October 14, 2011Publication date: October 17, 2013Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hitoshi Namai, Satoru Yamaguchi, Fumihiro Sasajima
-
Patent number: 8504833Abstract: A relay device first uses latest authentication data to determine whether request-authentication data transmitted from a wireless communications device is valid. If the latest authentication data is used to determine that the request-authentication data is valid, the relay device carries out relayed communications with the wireless communications device. If the latest authentication data is used to determine that the request-authentication data is invalid, the relay device next uses a former authentication data to determine whether the request-authentication data is valid. If the former authentication data is used to determine that the request-authentication data is valid, the relay device provides the wireless communications device with the latest authentication data to update authentication data in the wireless communications device.Type: GrantFiled: July 25, 2011Date of Patent: August 6, 2013Assignee: Buffalo Inc.Inventor: Satoru Yamaguchi
-
Patent number: 8434816Abstract: A tongue of a finger hook of an openable area is opened outward about a resin hinge by pressing the tongue from the inner side of the inner fender. When the finger hook is pulled by the finger hooked therein, the openable area undergoes elastic deformation and can be opened from the fender panel. When the openable area is opened, a gap ? is formed between the fender panel and the openable area. In order to pull the finger hook, the finger is inserted into the finger hook from the resin hinge side to the slit portion side.Type: GrantFiled: July 24, 2012Date of Patent: May 7, 2013Assignee: Honda Motor Co., LtdInventors: Hirofumi Tanaka, Satoru Yamaguchi