Patents by Inventor Satyavolu S. Papa Rao

Satyavolu S. Papa Rao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150144887
    Abstract: A technique is provided for manufacturing a nanogap in a nanodevice. An oxide is disposed on a wafer. A nanowire is disposed on the oxide. A helium ion beam is applied to cut the nanowire into a first nanowire part and a second nanowire part which forms the nanogap in the nanodevice. Applying the helium ion beam to cut the nanogap forms a signature of nanowire material in proximity to at least one opening of the nano gap.
    Type: Application
    Filed: January 28, 2015
    Publication date: May 28, 2015
    Inventors: Yann Astier, Jingwei Bai, Michael A. Guillorn, Satyavolu S. Papa Rao, Joshua T. Smith
  • Publication number: 20150144888
    Abstract: A technique is provided for manufacturing a nanogap in a nanodevice. An oxide is disposed on a wafer. A nanowire is disposed on the oxide. A helium ion beam is applied to cut the nanowire into a first nanowire part and a second nanowire part which forms the nanogap in the nanodevice. Applying the helium ion beam to cut the nanogap forms a signature of nanowire material in proximity to at least one opening of the nanogap.
    Type: Application
    Filed: January 28, 2015
    Publication date: May 28, 2015
    Inventors: Yann Astier, Jingwei Bai, Michael A. Guillorn, Satyavolu S. Papa Rao, Joshua T. Smith
  • Publication number: 20150140716
    Abstract: A technique is provided for manufacturing a nanogap in a nanodevice. An oxide is disposed on a wafer. A nanowire is disposed on the oxide. A helium ion beam is applied to cut the nanowire into a first nanowire part and a second nanowire part which forms the nanogap in the nanodevice. Applying the helium ion beam to cut the nanogap forms a signature of nanowire material in proximity to at least one opening of the nano gap.
    Type: Application
    Filed: January 28, 2015
    Publication date: May 21, 2015
    Inventors: Yann Astier, Jingwei Bai, Michael A. Guillorn, Satyavolu S. Papa Rao, Joshua T. Smith
  • Publication number: 20150136228
    Abstract: A method of forming a photovoltaic device is provided that includes a p-n junction with a p-type semiconductor portion and an n-type semiconductor portion, wherein an upper exposed surface of one of the semiconductor portions represents a front side surface of the semiconductor substrate. Patterned antireflective coating layers are formed on the front side surface of the semiconductor surface to provide a grid pattern including a busbar region and finger region. A mask having a shape that mimics each patterned antireflective coating layer is provided atop each patterned antireflective coating layer. A metal layer is electrodeposited on the busbar region and the finger regions. After removing the mask, an anneal is performed that reacts metal atoms from the metal layer react with semiconductor atoms from the busbar region and the finger regions forming a metal semiconductor alloy.
    Type: Application
    Filed: January 29, 2015
    Publication date: May 21, 2015
    Inventors: Kathryn C. Fisher, Qiang Huang, Satyavolu S. Papa Rao, David L. Rath
  • Publication number: 20150137069
    Abstract: An anti-retraction capping material is formed on a surface of a nanowire that is located upon a dielectric membrane. A gap is then formed into the anti-retraction capping material and nanowire forming first and second capped nanowire structures of a nanodevice. The nanodevice can be used for recognition tunneling measurements including, for example DNA sequencing. The anti-retraction capping material serves as a mobility barrier to pin, i.e., confine, a nanowire portion of each of the first and second capped nanowire structures in place, allowing long-term structural stability. In some embodiments, interelectrode leakage through solution during recognition tunneling measurements can be minimized.
    Type: Application
    Filed: January 29, 2015
    Publication date: May 21, 2015
    Inventors: Yann A.N. Astier, Jingwei Bai, Satyavolu S. Papa Rao, Kathleen B. Reuter, Joshua T. Smith
  • Publication number: 20150118839
    Abstract: A method for cleaning etch residues that may include treating an etched surface with an aqueous lanthanoid solution, wherein the aqueous lanthanoid solution removes an etch residue that includes a majority of hydrocarbons and at least one element selected from the group consisting of carbon, oxygen, fluorine, nitrogen and silicon. In one example, the aqueous solution may be cerium ammonium nitrate (Ce(NH4)(NO3)),(CAN).
    Type: Application
    Filed: October 24, 2014
    Publication date: April 30, 2015
    Inventors: Robert L. Bruce, Sebastian U. Engelmann, Eric A. Joseph, Mahmoud Khojasteh, Masahiro Nakamura, Satyavolu S. Papa Rao, Bang N. To, George G. Totir, Yu Zhu
  • Patent number: 9012329
    Abstract: A nanogap of controlled width in-between noble metals is produced using sidewall techniques and chemical-mechanical-polishing. Electrical connections are provided to enable current measurements across the nanogap for analytical purposes. The nanogap in-between noble metals may also be formed inside a Damascene trench. The nanogap in-between noble metals may also be inserted into a crossed slit nanopore framework. A noble metal layer on the side of the nanogap may have sub-layers serving the purpose of multiple simultaneous electrical measurements.
    Type: Grant
    Filed: April 4, 2013
    Date of Patent: April 21, 2015
    Assignee: International Business Machines Corporation
    Inventors: Yann Astier, Jingwei Bai, Michael F. Lofaro, Satyavolu S. Papa Rao, Joshua T. Smith, Chao Wang
  • Patent number: 9013010
    Abstract: A pair of electrode plates can be provided by directional deposition and patterning of a conductive material on sidewalls of a template structure on a first dielectric layer. An electrode line straddling the center portion is formed. A dielectric spacer and a conformal conductive layer are subsequently formed. Peripheral electrodes laterally spaced from the electrode line are formed by pattering the conformal conductive layer. After deposition of a second dielectric material layer that encapsulates the template structure, the template structure is removed to provide a cavity that passes through the pair of electrode plates, the electrode line, and the peripheral electrodes. A nanoscale sensor thus formed can electrically characterize a nanoscale string by passing the nanoscale string through the cavity while electrical measurements are performed employing the various electrodes.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: April 21, 2015
    Assignee: International Business Machines Corporation
    Inventors: Josephine B. Chang, Michael A. Guillorn, Eric A. Joseph, Satyavolu S. Papa Rao
  • Patent number: 8969122
    Abstract: Processes for fabricating photovoltaic devices in which the front side contact metal semiconductor alloy metallization patterns have a uniform thickness at edge portions as well as a central portion of each metallization pattern are provided.
    Type: Grant
    Filed: June 14, 2011
    Date of Patent: March 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Kathryn C. Fisher, Qiang Huang, Satyavolu S. Papa Rao, David L. Rath
  • Patent number: 8962374
    Abstract: A stack of a first anti-reflective coating (ARC) layer and a titanium layer is formed on a front surface of a semiconductor substrate including a p-n junction, and is subsequently patterned so that a semiconductor surface is physically exposed in metal contact regions of the front surface of the semiconductor substrate. The remaining portion of the titanium layer is converted into a titania layer by oxidation. A metal layer is plated on the metal contact regions, and a copper line is subsequently plated on the metal layer or a metal semiconductor alloy derived from the metal layer. A second ARC layer is deposited over the titania layer and the copper line, and is subsequently patterned to provide electrical contact to the copper line.
    Type: Grant
    Filed: June 27, 2012
    Date of Patent: February 24, 2015
    Assignee: International Business Machines Corporation
    Inventors: Satyavolu S. Papa Rao, Kathryn C. Fisher, Harold J. Hovel, Qiang Huang, Susan Huang, Young-Hee Kim
  • Patent number: 8946844
    Abstract: A stack of a first anti-reflective coating (ARC) layer and a titanium layer is formed on a front surface of a semiconductor substrate including a p-n junction, and is subsequently patterned so that a semiconductor surface is physically exposed in metal contact regions of the front surface of the semiconductor substrate. The remaining portion of the titanium layer is converted into a titania layer by oxidation. A metal layer is plated on the metal contact regions, and a copper line is subsequently plated on the metal layer or a metal semiconductor alloy derived from the metal layer. A second ARC layer is deposited over the titania layer and the copper line, and is subsequently patterned to provide electrical contact to the copper line.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: February 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Satyavolu S. Papa Rao, Kathryn C. Fisher, Harold J. Hovel, Qiang Huang, Young-hee Kim, Susan Huang
  • Publication number: 20140374695
    Abstract: An anti-retraction capping material is formed on a surface of a nanowire that is located upon a dielectric membrane. A gap is then formed into the anti-retraction capping material and nanowire forming first and second capped nanowire structures of a nanodevice. The nanodevice can be used for recognition tunneling measurements including, for example DNA sequencing. The anti-retraction capping material serves as a mobility barrier to pin, i.e., confine, a nanowire portion of each of the first and second capped nanowire structures in place, allowing long-term structural stability. In some embodiments, interelectrode leakage through solution during recognition tunneling measurements can be minimized.
    Type: Application
    Filed: September 30, 2013
    Publication date: December 25, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Yann A. N. Astier, Jingwei Bai, Satyavolu S. Papa Rao, Kathleen B. Reuter, Joshua T. Smith
  • Publication number: 20140374694
    Abstract: A technique is provided for manufacturing a nanogap in a nanodevice. An oxide is disposed on a wafer. A nanowire is disposed on the oxide. A helium ion beam is applied to cut the nanowire into a first nanowire part and a second nanowire part which forms the nanogap in the nanodevice. Applying the helium ion beam to cut the nanogap forms a signature of nanowire material in proximity to at least one opening of the nanogap.
    Type: Application
    Filed: June 19, 2013
    Publication date: December 25, 2014
    Inventors: Yann Astier, Jingwei Bai, Michael A. Guillorn, Satyavolu S. Papa Rao, Joshua T. Smith
  • Publication number: 20140377900
    Abstract: A technique is provided for manufacturing a nanogap in a nanodevice. An oxide is disposed on a wafer. A nanowire is disposed on the oxide. A helium ion beam is applied to cut the nanowire into a first nanowire part and a second nanowire part which forms the nanogap in the nanodevice. Applying the helium ion beam to cut the nanogap forms a signature of nanowire material in proximity to at least one opening of the nano gap.
    Type: Application
    Filed: July 18, 2013
    Publication date: December 25, 2014
    Inventors: Yann Astier, Jingwei Bai, Michael A. Guillorn, Satyavolu S. Papa Rao, Joshua T. Smith
  • Patent number: 8900975
    Abstract: A pair of electrode plates can be provided by directional deposition and patterning of a conductive material on sidewalls of a template structure on a first dielectric layer. An electrode line straddling the center portion is formed. A dielectric spacer and a conformal conductive layer are subsequently formed. Peripheral electrodes laterally spaced from the electrode line are formed by pattering the conformal conductive layer. After deposition of a second dielectric material layer that encapsulates the template structure, the template structure is removed to provide a cavity that passes through the pair of electrode plates, the electrode line, and the peripheral electrodes. A nanoscale sensor thus formed can electrically characterize a nanoscale string by passing the nanoscale string through the cavity while electrical measurements are performed employing the various electrodes.
    Type: Grant
    Filed: January 3, 2013
    Date of Patent: December 2, 2014
    Assignee: International Business Machines Corporation
    Inventors: Josephine B. Chang, Michael A. Guillorn, Eric A. Joseph, Satyavolu S. Papa Rao
  • Patent number: 8865502
    Abstract: The present disclosure provides a method of forming a back side surface field of a solar cell without utilizing screen printing. The method includes first forming a p-type dopant layer directly on the back side surface of the semiconductor substrate that includes a p/n junction utilizing an electrodeposition method. The p/n junction is defined as the interface that is formed between an n-type semiconductor portion of the substrate and an underlying p-type semiconductor portion of the substrate. The plated structure is then annealed to from a P++ back side surface field layer directly on the back side surface of the semiconductor substrate. Optionally, a metallic film can be electrodeposited on an exposed surface of the P++ back side surface layer.
    Type: Grant
    Filed: June 10, 2010
    Date of Patent: October 21, 2014
    Assignee: International Business Machines Corporation
    Inventors: Kathryn C. Fisher, Nicholas C. M. Fuller, Satyavolu S. Papa Rao, Xiaoyan Shao, Jeffrey Hedrick
  • Patent number: 8865017
    Abstract: A method of texturing a surface of a crystalline silicon substrate is provided. The method includes immersing a crystalline silicon substrate into an aqueous alkaline etchant solution to form a pyramid shaped textured surface, with (111) faces exposed, on the crystalline silicon substrate. The aqueous alkaline etchant solution employed in the method of the present disclosure includes an alkaline component and a nanoparticle slurry component. Specifically, the aqueous alkaline etchant solution of the present disclosure includes 0.5 weight percent to 5 weight percent of an alkaline component and from 0.1 weight percent to 5 weight percent of a nanoparticle slurry on a dry basis.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: October 21, 2014
    Assignee: International Business Machines Corporation
    Inventors: Mahadevaiyer Krishnan, Jun Liu, Satyavolu S. Papa Rao, George G. Totir
  • Publication number: 20140302675
    Abstract: A nanogap of controlled width in-between noble metals is produced using sidewall techniques and chemical-mechanical-polishing. Electrical connections are provided to enable current measurements across the nanogap for analytical purposes. The nanogap in-between noble metals may also be formed inside a Damascene trench. The nanogap in-between noble metals may also be inserted into a crossed slit nanopore framework. A noble metal layer on the side of the nanogap may have sub-layers serving the purpose of multiple simultaneous electrical measurements.
    Type: Application
    Filed: April 4, 2013
    Publication date: October 9, 2014
    Applicant: International Business Machines Corporation
    Inventors: Yann Astier, Jingwei Bai, Michael F. Lofaro, Satyavolu S. Papa Rao, Joshua T. Smith, Chao Wang
  • Publication number: 20140183667
    Abstract: A pair of electrode plates can be provided by directional deposition and patterning of a conductive material on sidewalls of a template structure on a first dielectric layer. An electrode line straddling the center portion is formed. A dielectric spacer and a conformal conductive layer are subsequently formed. Peripheral electrodes laterally spaced from the electrode line are formed by pattering the conformal conductive layer. After deposition of a second dielectric material layer that encapsulates the template structure, the template structure is removed to provide a cavity that passes through the pair of electrode plates, the electrode line, and the peripheral electrodes. A nanoscale sensor thus formed can electrically characterize a nanoscale string by passing the nanoscale string through the cavity while electrical measurements are performed employing the various electrodes.
    Type: Application
    Filed: January 3, 2013
    Publication date: July 3, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Josephine B. Chang, Michael A. Guillorn, Eric A. Joseph, Satyavolu S. Papa Rao
  • Publication number: 20140183668
    Abstract: A pair of electrode plates can be provided by directional deposition and patterning of a conductive material on sidewalls of a template structure on a first dielectric layer. An electrode line straddling the center portion is formed. A dielectric spacer and a conformal conductive layer are subsequently formed. Peripheral electrodes laterally spaced from the electrode line are formed by pattering the conformal conductive layer. After deposition of a second dielectric material layer that encapsulates the template structure, the template structure is removed to provide a cavity that passes through the pair of electrode plates, the electrode line, and the peripheral electrodes. A nanoscale sensor thus formed can electrically characterize a nanoscale string by passing the nanoscale string through the cavity while electrical measurements are performed employing the various electrodes.
    Type: Application
    Filed: August 29, 2013
    Publication date: July 3, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Josephine B. Chang, Michael A. Guillorn, Eric A. Joseph, Satyavolu S. Papa Rao