Abstract: A method of manufacturing a thermally-assisted magnetic recording head includes: providing a light source unit including a light source; providing a substrate having a thermally-assisted magnetic recording head section thereon, the thermally-assisted magnetic recording head section including a magnetic pole, a plasmon generator, and an optical waveguide; inserting a metal between the light source unit and the substrate, and thus allowing the metal to be melted; and performing alignment between the light source unit and the thermally-assisted magnetic recording head section under application of pressure in a direction that allows the light source unit and the substrate to approach each other, while maintaining the metal melted.

Abstract: A thermally-assisted magnetic recording head is provided, in which the light-source output can be adjusted according to its variation by environmental influences and over time. The head comprises: a light source; a write head element provided in a element-integration surface; an optical system provided in the element-integration surface and configured to guide a light emitted from the light source to the vicinity of one end of the write head element; and a light detector for monitoring the light-source output, provided in the element-integration surface and comprising a light-receiving surface covering an area directly above at least a portion of the optical system. This light detector with such a light-receiving surface can detect a leakage light emitted from the optical system as a monitoring light. Therefore, feedback adjustment of the light-source output can be realized to stabilize the intensity of light for thermal-assist applied to a magnetic recording medium.

Abstract: A method for manufacturing a thermally-assisted magnetic recording head is provided, in which joined are: a light source unit that includes a light source having a surface including a light-emission center on the joining surface side of a unit substrate; and a slider that includes an optical system having a light-receiving end surface reaching a back surface opposite to the opposed-to-medium surface. This method utilizes “semi-active alignment” that uses an alignment light, and comprises steps of: causing a light to enter the light source from a surface opposite to the light-emission center; detecting the light that has passed through the light source and is emitted from the light-emission center to align the light-emission center with the light-receiving end surface of the slider; and bonding the light source unit to the slider. This manufacturing method can achieve the alignment with a sufficiently high alignment accuracy in a short processing time.

Abstract: A method of manufacturing a thermally-assisted magnetic recording head includes: providing a light source unit including a laser diode; providing a slider having a thermally-assisted magnetic recording head section thereon, the thermally-assisted magnetic recording head section including a magnetic pole, an optical waveguide, and a plasmon generator, the magnetic pole and the optical waveguide both extending toward an air bearing surface, the plasmon generator being located between the magnetic pole and the optical waveguide; driving the laser diode to allow a light beam to be emitted therefrom, the light beam including both a TE polarization component and a TM polarization component; performing an alignment between the light source unit and the thermally-assisted magnetic recording head section, based on a light intensity distribution of the TE polarization component in the light beam which has been emitted from the laser diode and then passed through the optical waveguide; and bonding the light source unit

Abstract: A substarate processing apparatus capable of reducing the capacity of a space in an internal chamber. The internal chamber is housed in a space in an external chamber. A gas supply unit supplies a process gas into the space in the internal chamber. The space in the external chamber is under a reduced pressure or filled with an inert gas. An enclosure being movable and included in the internal chamber defines the space in the internal chamber with a stage heater included in the internal chamber. When a wafer is transferred in and out by a transfer arm used to transfer the wafer, the enclosure exits out of a motion range within which the transfer arm can move.

Abstract: A thermally-assisted magnetic head includes a slider including an air bearing surface (ABS) and a waveguide with a core that extends from a light entering surface to the ABS, and a laser diode (LD) unit attached to the light entering surface. The LD unit faces the light entering surface, and a photo detector faces the ABS. A polarizer that only transmits light having a polarization component orthogonal to a polarization direction of linearly polarized laser light is disposed between the ABS and the photo detector. An LD of the LD unit is activated, and the linearly polarized laser light enters the core from the light entering surface. Light radiated from the ABS enters the polarizer, and an alignment of the slider and the LD unit is performed while the photo detector detects the light transmitted through the polarizer.

Abstract: A plasmon antenna of the present invention is used in a thermally assisted magnetic head that includes: a medium-facing surface set, parallel to an XY plane; a magnetic pole for writing, extending toward the medium-facing surface, and a plasmon antenna comprising a pair of small metal bodies irradiated with excitation light for near-field light generation propagating in a Z-axis direction. Respective corners of the small metal bodies are spaced apart opposite each other along a TE mode direction of the excitation light. A distance between the corners gives the shortest distance between the small metal bodies, and a distance from each corner to the leading end of the magnetic pole gives a shortest distance from the small metal bodies to the leading end.

Abstract: A method of manufacturing a thermally-assisted magnetic recording head includes: providing bar including, arranged in a first direction, a plurality of thermally-assisted magnetic recording head sections each including a waveguide, and a plurality of light source units each including a substrate with a light source mounted on a first surface of the substrate; bonding a second surface of the substrate to the bar with a bonding layer while allowing a light emitting position of the light source to be in opposition to the waveguide and allowing the first surface to be parallel to the first direction; and separating the bar for each of the thermally-assisted magnetic recording head sections. The substrate is bonded to the bar by radiating each laser beam from a dead angle direction where the first surface on which the light source units are provided is hidden from view.

Abstract: A curved waveguide is a curved waveguide that propagates laser light entering from the laser diode as propagating light.

Abstract: Provided is a method for manufacturing a thermally-assisted magnetic recording head with “composite slider structure”. In the method, the waveguide is irradiated with a first light from opposed-to-medium surface side, and the passing first light is detected on back surface side to obtain an image of the light-receiving end surface, and a light-receiving center position is determined from the image. Further, the light source is irradiated with a second light from opposite side to joining surface, and the passing second light is detected on the joining surface side to obtain an image of the light-emitting end surface, and a light-emitting center position is determined from the image. Then, the slider and the light source unit are moved based on the determined positions of the light-receiving and light-emitting centers, aligned and bonded. As a result, alignment can be performed with high accuracy in a short process time under simplified process.

Abstract: A spot size converter according to the present invention is capable of shortening the waveguide length in the spot size converter and of promoting a size reduction of the optical waveguide itself because two cores having a taper portion are combined and those tapering angles are mutually aligned. Furthermore, spot size conversion efficiency is favorable even in a small size.

Abstract: Provided is a method for manufacturing a thermally-assisted magnetic recording head including a light source unit with a light source and a slider with an optical system. The method comprises steps of: adhering by suction the light source unit with a back holding jig; moving the back holding jig, then aligning a light-emission center of the light source with a light-receiving end surface of the optical system in directions within a slider back surface of the slider; bringing the light source unit into contact with the slider back surface, with a suction surface of the back holding jig tilted from the normal to the slider back surface; applying a load to a load application surface of the unit substrate by a loading means to bring a joining surface of the light source unit into conformity with the slider back surface; and bonding the light source unit and the slider. This method can improve the conformity, thereby achieving adequately strong junction and adequately high accuracy in position.

Abstract: A method for manufacturing a thermally-assisted magnetic recording head is provided, in which a light source unit including a light source and a slider including an optical system are bonded. A unit substrate is made of a material transmitting light having a predetermined wavelength, and an adhesion material layer is formed on the light source unit and/or the slider. The manufacturing method includes: aligning the light source unit and the slider in such a way that a light from the light source can enter the optical system and the adhesion material layer is sandwiched therebetween; irradiating the adhesion material layer with a light including the predetermined wavelength through the unit substrate; and bonding them. The adhesion material layer melted by the light including the predetermined wavelength and transmitted through the unit substrate can ensure high alignment accuracy as well as higher bonding strength and less change with time.

Abstract: A method for manufacturing a thermally-assisted magnetic recording head is provided, in which a light source unit including a light source and a slider including an optical system are bonded. A unit substrate is made of a material transmitting light having a predetermined wavelength, and a unit adhesion material layer that contains Sn, Sn alloy, Pb alloy or Bi alloy is formed on the light source unit and/or the slider. The manufacturing method includes: aligning the light source unit and the slider in such a way that a light from the light source can enter the optical system and the unit adhesion material layer is sandwiched therebetween; and causing a light including the predetermined wavelength to enter the unit substrate to melt the unit adhesion material layer. The unit adhesion material layer melted by the light including the predetermined wavelength can ensure high alignment accuracy as well as higher bonding strength and less change with time.

Abstract: Provided is a heat-assisted magnetic recording head constituted of a light source unit and a slider, which can be easily joined to each other with sufficiently high accuracy of joining position. The slider comprises a head part including a waveguide having an incident center on its end. The surface including an emission center of the light source is protruded from a joining surface of the unit substrate. And a step is provided on an end surface of the head part. The protruded portion of a lower surface of the light source has a surface contact with a wall surface of the step. Further, the distance between the wall surface of the step and the incident center of the waveguide is set to be equal to the distance between the emission center of the light source and the protruded portion of the lower surface of the light source.

Abstract: Provided is a method and apparatus to manufacture a thermally-assisted magnetic recording head in which a light source unit including a light source and a slider including an optical system are joined. The method comprises steps of: adhering by suction the light source unit with a back holding jig; bringing the light into contact with a slider back surface; applying a load to a load application surface of the light source unit by a loading means to bring a joining surface of the light source unit into conformity with the slider back surface; positioning the light source unit apart from the slider, and then aligning the light source with the optical system; bringing again the light source unit into contact with the slider; and applying a load again to the load application surface.

Abstract: Provided is a method for forming a near-field light generating element, which is capable of sufficiently suppressing the unevenness of a waveguide surface and the distortion within the waveguide. The forming method comprises the steps of: forming a first etching stopper layer on a lower waveguide layer; forming a second etching stopper layer; forming, on the second etching stopper layer, a plasmon antenna material layer; performing etching with the second etching stopper layer used as a stopper, to form a first side surface of plasmon antenna; forming a side-surface protecting mask so as to cover the first side surface; and performing etching with the first and second etching stopper layers used as stoppers, to form the second side surface. By providing the first and second etching stopper layer, over-etching can be prevented even when each etching process takes enough etch time, which allows easy management of etching endpoints.

Abstract: A thermally-assisted magnetic recording head includes a surface-emitting type light source for emitting substantially collimated beam, a first diffraction optical element for focusing the substantially collimated beam emitted from the surface-emitting type light source, a second diffraction optical element for collimating the light beam focused by the first diffraction optical element, a waveguide integrally formed with the second diffraction optical element and made of the material as that of second diffraction optical element, the light beam collimated by the second diffraction optical element being incident to the waveguide, an optical-path direction conversion element for converting a direction of an optical path of the incident light beam to a propagation direction of the waveguide, the propagation direction being toward an opposed-to-medium surface, and a magnetic pole for generating write field from its end face on the opposed-to-medium surface side.

Abstract: A waveguide is provided, in which the optical coupling efficiency to a light source is sufficiently high, and the light-emitting spot center is stably provided at the intended position. The waveguide comprises a multilayered structure in which refractive indexes of layers having a surface contact with each other are different from each other. The multilayered structure is divided into a plurality of groups, and the length from the light-receiving end surface to the light-emitting end surface of one group is different from that of the neighboring group, and the protruded light-emitting end surface of the first group defined as a group that has the largest length includes a center of the light-emitting spot. In this waveguide, the state in which the light-emitting spot center is positioned within the light-emitting end surface does not easily be changed, even when the light-receiving spot center within the light-receiving end surface is rather displaced.

Abstract: A thermally-assisted magnetic recording head is provided, in which a light source having sufficiently high output power for performing thermal-assist is disposed in the element-integration surface of the substrate to achieve improved mass-productivity. The head includes: a light source having a multilayered structure including a photonic-band layer and having a light-emitting surface opposed to the element-integration surface; a diffraction optical element that converges the emitted light; a light-path changer that changes the direction of the converged light; a waveguide that propagates the direction-changed light toward the opposed-to-medium surface; and a magnetic pole that generates write field. The surface-emitting type light source includes a photonic-band layer having a periodic structure in which a light from an active region resonates, and thus emits laser light on a quite different principle from a VCSEL.