Abstract: In a method for manufacturing a thermally-assisted magnetic head that includes a slider and an LD unit, the slider including an air bearing surface (ABS) that faces a recording medium and including a waveguide with a core for light propagation that extends from a light entering surface, which is different from the ABS, to the ABS, the LD unit being attached to the light entering surface of the slider, and the thermally-assisted magnetic head performing magnetic recording while heating the recording medium with near-field light that is excited from linearly polarized laser light, the LD unit is disposed in a position facing the light entering surface of the slider, a photo detector is disposed in a position facing the ABS of the slider, and a polarizer transmitting only light having a polarization component that is orthogonal to a polarization direction of the linearly polarized laser light is disposed between the ABS and the photo detector.

Abstract: A magnetic recording head capable of a satisfying thermally-assisted magnetic recording without depending on the use of a near-field light generator is provided. The head comprises a waveguide and a main magnetic pole having a main pole tip. Further, at least a portion of the main pole tip is embedded in a groove provided in the upper surface of the waveguide. Further, a second clad layer is provided on the first clad layer and on a rear side from the main pole tip. This configuration of the first and second clad layers suppresses the absorption of the light propagating through the waveguide by the main magnetic pole. Further, the configuration in which at least a portion of the main pole tip is embedded in the groove can cause the distance between the light spot center of the waveguide and the main magnetic pole to be sufficiently small.

Abstract: Provided is a method for manufacturing a thermally-assisted magnetic recording head including a light source unit with a light source and a slider with an optical system. The method comprises steps of: adhering by suction the light source unit with a back holding jig; moving the back holding jig, then aligning a light-emission center of the light source with a light-receiving end surface of the optical system in directions within a slider back surface of the slider; bringing the light source unit into contact with the slider back surface, with a suction surface of the back holding jig tilted from the normal to the slider back surface; applying a load to a load application surface of the unit substrate by a loading means to bring a joining surface of the light source unit into conformity with the slider back surface; and bonding the light source unit and the slider. This method can improve the conformity, thereby achieving adequately strong junction and adequately high accuracy in position.

Abstract: Provided is a light source unit that is to be joined to a slider to form a thermally-assisted magnetic recording head. The light source unit comprises: a unit substrate having a source-installation surface; a light source provided in the source-installation surface and emitting thermal-assist light; and a photodetector bonded to a rear joining surface of the unit substrate in such a manner that a rear light-emission center of the light source is covered with a light-receiving surface of the photodetector. The photodetector can be sufficiently close to the light source; thus, constant feedback adjustment with high efficiency for the light output of the light source can be performed. This adjustment enables light output from the light source to be controlled in response to changes in light output due to surroundings and to changes with time to stabilize the intensity of light with which a magnetic recording medium is irradiated.

Abstract: A waveguide has a core through which laser light can propagate in a TM mode, that has a rectangular cross section perpendicular to a propagative direction of the laser light, and through which the laser light can propagate in a fundamental mode in which only one portion exists on the cross section of the core where a light intensity of the laser light becomes maximal, and a higher order mode in which two or more portions exist where the light intensity becomes maximal, a clad surrounding the core, and a light absorbing element in the clad, and wherein a distance between the light absorbing element and the core is shorter than a penetration length of evanescent light in the higher order mode, but is longer than a penetration length of evanescent light in the fundamental mode.

Abstract: Provided is a method for manufacturing a thermally-assisted magnetic recording head in which a light source unit including a light source and a slider including an optical system are joined. The method comprises steps of: adhering by suction the light source unit with a back holding jig; bringing the light source unit into contact with a slider back surface of the slider; applying a load to a load application surface of the light source unit by a loading means to bring a joining surface of the light source unit into conformity with the slider back surface; positioning the light source unit apart from the slider, and then aligning the light source with the optical system; bringing again the light source unit into contact with the slider; and applying a load again to the load application surface to bring the joining surface into conformity with the slider back surface.

Abstract: A near-field light generating device includes: a base having a top surface; a waveguide that allows laser light to propagate therethrough and is disposed above the top surface of the base; and a surface plasmon generating element that is disposed above the top surface of the base so as to adjoin the waveguide in a direction parallel to the top surface of the base. The waveguide has a side surface that faces the surface plasmon generating element. The surface plasmon generating element includes: a coupling part that is opposed to a part of the side surface of the waveguide with spacing therebetween and causes excitation of a surface plasmon by coupling with evanescent light occurring from the part of the side surface; and a near-field light generating part that generates near-field light based on the surface plasmon excited at the coupling part.

Abstract: A heat-assisted magnetic recording head includes a slider, and an edge-emitting laser diode fixed to the slider. The slider has a waveguide and an overcoat layer that covers the waveguide. The laser diode has an emitting end face including an emission part for emitting laser light, and a bottom surface. The laser diode is arranged so that the bottom surface faces the top surface of the slider. The waveguide has an incident end face opposed to the emission part of the laser diode. The overcoat layer has an end face that faces the emitting end face of the laser diode. As viewed from above, the end face of the overcoat layer has a convex shape protruding toward the emitting end face of the laser diode so that a part of the end face of the overcoat layer lying over the incident end face of the waveguide comes closest to the emitting end face of the laser diode.

Abstract: When first and second near-field light-generating portions are irradiated with laser light or other energy rays, near-field light is generated at the tips of both the near-field light-generating portions. By means of the near-field light thus generated, a magnetic recording medium opposing the medium-opposing surface is heated, and the coercivity of the magnetic recording medium is lowered. Since at least a portion of the main magnetic pole is positioned within the spot region including the region between the first and second near-field light-generating portions, the tips of both the near-field light-generating portions and the main magnetic pole can be brought extremely close together, and high-density recording can be performed.

Abstract: In a semiconductor device manufacturing method, an etching mask (75b) having a predetermined opening pattern is formed on an etching target film (74) disposed on a target object. Then, an etching process is performed on the etching target film (74) through the opening pattern of the etching mask (75b) within a first process chamber, thereby forming a groove or hole (78a) in the etching target film. Then, the target object treated by the etching process is transferred from the first process chamber to a second process chamber, within a vacuum atmosphere. Then, a silylation process is performed on a side surface of the groove or hole (78a), which is an exposed portion of the etching target film (74), within the second process chamber.

Abstract: Provided is a near-field light generator capable of avoiding a noise to the generated near-field light. The generator comprises a waveguide and a plasmon antenna comprising a propagation surface or edge, for propagating surface plasmon, extending to a near-field light generating end. A portion of one side surface of the waveguide is opposed to a portion of the propagation surface or edge, so as for the waveguide light to be coupled with the plasmon antenna. And an end surface of the waveguide is inclined in such a way as to become away from the plasmon antenna toward the near-field light generating end side. The light that propagates through the waveguide and is not transformed into surface plasmon is refracted or totally reflected in the inclined end surface, does not come close to the generated near-field light, thus does not become a noise for the generated near-field light.

Abstract: An optical waveguide, on account of its ability to apply phase resonance of a wavelength and of a first and second triangular plate-like spot size converter members formed of the same material as a core material and being arranged and formed in a substantially symmetrical structure, can promote shortening of the waveguide length and contrive to reduce the size of the optical waveguide itself. Further, an optical waveguide having excellent spot size conversion efficiency can be obtained even in a reduced size.

Abstract: A near-field light generating device includes: a waveguide having a groove that opens in the top surface; a clad layer disposed on the top surface of the waveguide and having an opening that is contiguous to the groove; a near-field light generating element accommodated in the opening; and a buffer layer interposed between the near-field light generating element and each of the waveguide and the clad layer in the groove and the opening. The near-field light generating element includes: first and second side surfaces that decrease in distance from each other toward the groove; an edge part that connects the first and second side surfaces to each other and is opposed to the groove with the buffer layer therebetween; and a near-field light generating part that lies at one end of the edge part and generates near-field light.

Abstract: In a semiconductor device manufacturing method, an etching mask (75b) having a predetermined opening pattern is formed on an etching target film (74) disposed on a target object. Then, an etching process is performed on the etching target film (74) through the opening pattern of the etching mask (75b) within a first process chamber, thereby forming a groove or hole (78a) in the etching target film. Then, the target object treated by the etching process is transferred from the first process chamber to a second process chamber, within a vacuum atmosphere. Then, a silylation process is performed on a side surface of the groove or hole (78a), which is an exposed portion of the etching target film (74), within the second process chamber.

Abstract: A curved waveguide is a curved waveguide that propagates laser light entering from the laser diode as propagating light.

Abstract: Provided is a manufacturing method of heat-assisted magnetic recording head, in which a light source unit can be easily joined to a slider with sufficiently high accuracy, under avoiding the excessive mechanical stress. The manufacturing method comprises the steps of: moving relatively the light source unit and the slider, while applying a sufficient voltage between an upper electrode of the light source and an electrode layer provided in the slider; and setting the light source unit and the slider in desired positions in a direction perpendicular to the element-integration surface of the slider substrate. The desired positions are positions where the light source just emits due to a surface contact between: the protruded portion of the lower surface of the light source; and the upper surface of the electrode layer, which is a portion of the wall surface of a step formed on the head part.

Abstract: Provided is a method for manufacturing a thermally-assisted magnetic recording head with “composite slider structure”. In the method, the waveguide is irradiated with a first light from opposed-to-medium surface side, and the passing first light is detected on back surface side to obtain an image of the light-receiving end surface, and a light-receiving center position is determined from the image. Further, the light source is irradiated with a second light from opposite side to joining surface, and the passing second light is detected on the joining surface side to obtain an image of the light-emitting end surface, and a light-emitting center position is determined from the image. Then, the slider and the light source unit are moved based on the determined positions of the light-receiving and light-emitting centers, aligned and bonded. As a result, alignment can be performed with high accuracy in a short process time under simplified process.

Abstract: A waveguide has a core through which laser light can propagate in a TM mode, that has a rectangular cross section perpendicular to a propagative direction of the laser light, and through which the laser light can propagate in a fundamental mode in which only one portion exists on the cross section of the core where a light intensity of the laser light becomes maximal, and a higher order mode in which two or more portions exist where the light intensity becomes maximal, a clad surrounding the core, and a light absorbing element in the clad, and wherein a distance between the light absorbing element and the core is shorter than a penetration length of evanescent light in the higher order mode, but is longer than a penetration length of evanescent light in the fundamental mode.

Abstract: A method for manufacturing a thermally-assisted magnetic recording head is provided, in which a light source unit including a light source and a slider including an optical system are bonded. A unit substrate is made of a material transmitting light having a predetermined wavelength, and a unit adhesion material layer that contains Sn, Sn alloy, Pb alloy or Bi alloy is formed on the light source unit and/or the slider. The manufacturing method includes: aligning the light source unit and the slider in such a way that a light from the light source can enter the optical system and the unit adhesion material layer is sandwiched therebetween; and causing a light including the predetermined wavelength to enter the unit substrate to melt the unit adhesion material layer. The unit adhesion material layer melted by the light including the predetermined wavelength can ensure high alignment accuracy as well as higher bonding strength and less change with time.

Abstract: A method for manufacturing a thermally-assisted magnetic recording head is provided, in which a light source unit including a light source and a slider including an optical system are bonded. A unit substrate is made of a material transmitting light having a predetermined wavelength, and an adhesion material layer is formed on the light source unit and/or the slider. The manufacturing method includes: aligning the light source unit and the slider in such a way that a light from the light source can enter the optical system and the adhesion material layer is sandwiched therebetween; irradiating the adhesion material layer with a light including the predetermined wavelength through the unit substrate; and bonding them. The adhesion material layer melted by the light including the predetermined wavelength and transmitted through the unit substrate can ensure high alignment accuracy as well as higher bonding strength and less change with time.