Patents by Inventor Shahab Siddiqui

Shahab Siddiqui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11961895
    Abstract: A first semiconductor device includes an interfacial layer over a substrate, a first high-? dielectric layer over the interfacial layer, a second high-? dielectric layer over the first high-? dielectric layer, a Ti—Si mixing layer over the second high-? dielectric layer, and a gate electrode layer over the Ti—Si mixing layer. A second semiconductor device includes an interfacial layer over a substrate, a first high-? dielectric layer over the interfacial layer, a Ti—Si mixing layer over the first high-? dielectric layer, a second high-? dielectric layer over the Ti—Si mixing layer, and a gate electrode layer over the second high-? dielectric layer. The method includes forming an interfacial layer over a substrate, forming a first high-? dielectric layer over the interfacial layer, forming a second high-? dielectric layer over the first high-? dielectric layer, and forming a gate electrode layer over the second high-? dielectric layer.
    Type: Grant
    Filed: September 8, 2021
    Date of Patent: April 16, 2024
    Assignee: International Business Machines Corporation
    Inventors: Ruqiang Bao, Ravikumar Ramachandran, Barry Linder, Shahab Siddiqui, Elnatan Mataev
  • Publication number: 20240105769
    Abstract: A semiconductor device includes a substrate having a first region and a second region separated from the first region by distance to define a space therebetween. A first semiconductor device including a gate dielectric is on the first region. The first semiconductor device can implement a FinFet-based input/output (I/O) device in the first region. A second semiconductor device excluding a gate dielectric is on the second region. The second semiconductor device can implement a nanosheet-based logic device in the second region.
    Type: Application
    Filed: September 28, 2022
    Publication date: March 28, 2024
    Inventors: Shahab Siddiqui, Ruqiang Bao, Charlotte DeWan Adams, Curtis S. Durfee, Anthony I. Chou, Barry Paul Linder, Ravikumar Ramachandran, Dechao Guo
  • Patent number: 11888048
    Abstract: A method of forming a semiconductor structure includes forming a first nanosheet stack and a second nanosheet stack on a semiconductor substrate. The first nanosheet stack includes a plurality of alternating first sacrificial layers and first channel layers. The first sacrificial layers each define a first sacrificial height. The second nanosheet stack includes a plurality of alternating second sacrificial layers and second channel layers. The second sacrificial layers each define a second sacrificial height greater than the first sacrificial height of the first sacrificial layers. The method further includes removing the first and second sacrificial layers respectively from the first and second nanosheet stacks. A metal gate is deposited over the first and second nanosheet stacks to form respective first and second nanosheet transistor structures.
    Type: Grant
    Filed: November 9, 2021
    Date of Patent: January 30, 2024
    Assignee: International Business Machines Corporation
    Inventors: Shahab Siddiqui, Koji Watanabe, Charlotte DeWan Adams, Kai Zhao, Daniel James Dechene, Rishikesh Krishnan
  • Patent number: 11876124
    Abstract: Embodiments of the invention are directed to a semiconductor device that includes a channel fin; a trench adjacent to an upper region of the channel fin; and an oxygen-blocking layer within the trench. The oxygen-blocking layer includes an oxygen gettering material configured to remove oxygen from an environment to which the oxygen-blocking layer is exposed.
    Type: Grant
    Filed: July 7, 2022
    Date of Patent: January 16, 2024
    Assignee: International Business Machines Corporation
    Inventors: Chen Zhang, Christopher J. Waskiewicz, Shahab Siddiqui, Ruilong Xie
  • Publication number: 20230218425
    Abstract: Example fluid collection devices, and related systems and methods of use are described. The fluid collection device includes a fluid impermeable barrier having a rear region and a front region at least partially defining an opening and positioned on the fluid impermeable barrier to be at least proximate to a urethra of a user. The fluid impermeable barrier at least partially defines a chamber and an aperture sized and dimensioned to receive a conduit therethrough. The fluid collection device includes a fluid permeable body positioned at least partially within the chamber to extend across at least a portion of the opening and configured to wick fluid away from the opening. The fluid collection device includes a dry adhesive region positioned on the rear region of the fluid impermeable barrier at least partially distal to the opening to interface a garment worn by the user.
    Type: Application
    Filed: January 5, 2023
    Publication date: July 13, 2023
    Inventors: Briana Lewis, Nathaniel Barnes, Danielle Glickstein, Ash-Shakur Abdullah Manning, Shahab Siddiqui
  • Publication number: 20230107182
    Abstract: VFET devices having a porous bottom air spacer formed by oxidation are provided. In one aspect, a VFET device includes: at least one fin present on a substrate, wherein the at least one fin serves as a vertical fin channel of the VFET device; a bottom source/drain region at a base of the at least one fin; a bottom air-containing spacer disposed on the bottom source/drain region; a gate stack alongside the at least one fin; a top spacer above the gate stack at a top of the at least one fin; and a top source/drain region at a top of the at least one fin. A method of forming a VFET device is also provided.
    Type: Application
    Filed: October 5, 2021
    Publication date: April 6, 2023
    Inventors: HUIMEI ZHOU, Yi Song, Veeraraghavan S. Basker, Curtis S. Durfee, Shahab Siddiqui
  • Publication number: 20230075740
    Abstract: A first semiconductor device includes an interfacial layer over a substrate, a first high-? dielectric layer over the interfacial layer, a second high-? dielectric layer over the first high-? dielectric layer, a Ti—Si mixing layer over the second high-? dielectric layer, and a gate electrode layer over the Ti—Si mixing layer. A second semiconductor device includes an interfacial layer over a substrate, a first high-? dielectric layer over the interfacial layer, a Ti—Si mixing layer over the first high-? dielectric layer, a second high-? dielectric layer over the Ti—Si mixing layer, and a gate electrode layer over the second high-? dielectric layer. The method includes forming an interfacial layer over a substrate, forming a first high-? dielectric layer over the interfacial layer, forming a second high-? dielectric layer over the first high-? dielectric layer, and forming a gate electrode layer over the second high-? dielectric layer.
    Type: Application
    Filed: September 8, 2021
    Publication date: March 9, 2023
    Inventors: Ruqiang Bao, Ravikumar Ramachandran, Barry Linder, Shahab Siddiqui, Elnatan Mataev
  • Publication number: 20230029561
    Abstract: Epitaxially grow first lower source-drain regions within a substrate. Portions of the substrate adjacent the lower regions are doped to form second lower source-drain regions. An undoped silicon layer is formed over the first and second lower regions. Etch completely through the undoped layer into the first and second lower regions to form fins and to define bottom junctions beneath the fins. The fins and bottom junctions define intermediate cavities. Form lower spacers, gates, and upper spacers in the cavities; form top junctions on outer surfaces of the fins; and form epitaxially grown first upper source-drain regions outward of the upper spacers and opposite the first lower regions. The first upper regions are doped the same as the first lower regions. Form second upper source-drain regions outward of the upper spacers and opposite the second lower regions; these are doped the same as the second lower regions.
    Type: Application
    Filed: October 15, 2022
    Publication date: February 2, 2023
    Inventors: Kai Zhao, Shahab Siddiqui, Daniel James Dechene, Rishikesh Krishnan, Charlotte DeWan Adams
  • Patent number: 11515427
    Abstract: Epitaxially grow first lower source-drain regions within a substrate. Portions of the substrate adjacent the lower regions are doped to form second lower source-drain regions. An undoped silicon layer is formed over the first and second lower regions. Etch completely through the undoped layer into the first and second lower regions to form fins and to define bottom junctions beneath the fins. The fins and bottom junctions define intermediate cavities. Form lower spacers, gates, and upper spacers in the cavities; form top junctions on outer surfaces of the fins; and form epitaxially grown first upper source-drain regions outward of the upper spacers and opposite the first lower regions. The first upper regions are doped the same as the first lower regions. Form second upper source-drain regions outward of the upper spacers and opposite the second lower regions; these are doped the same as the second lower regions.
    Type: Grant
    Filed: June 15, 2020
    Date of Patent: November 29, 2022
    Assignee: International Business Machines Corporation
    Inventors: Kai Zhao, Shahab Siddiqui, Daniel James Dechene, Rishikesh Krishnan, Charlotte DeWan Adams
  • Publication number: 20220336627
    Abstract: Embodiments of the invention are directed to a semiconductor device that includes a channel fin; a trench adjacent to an upper region of the channel fin; and an oxygen-blocking layer within the trench. The oxygen-blocking layer includes an oxygen gettering material configured to remove oxygen from an environment to which the oxygen-blocking layer is exposed.
    Type: Application
    Filed: July 7, 2022
    Publication date: October 20, 2022
    Inventors: Chen Zhang, Christopher J. Waskiewicz, Shahab Siddiqui, Ruilong Xie
  • Patent number: 11476346
    Abstract: Embodiments of the invention are directed to a method of forming a semiconductor device. A non-limiting example of the method includes forming a top spacer trench adjacent to an upper region of the channel fin. An oxygen-blocking layer is deposited within the top spacer trench and over the upper region of the channel fin. A top spacer is formed within the top spacer trench and over a portion of the oxygen-blocking layer that is within the top spacer trench. The oxygen-blocking layer includes an oxygen gettering material.
    Type: Grant
    Filed: June 24, 2020
    Date of Patent: October 18, 2022
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Chen Zhang, Christopher J. Waskiewicz, Shahab Siddiqui, Ruilong Xie
  • Publication number: 20220211536
    Abstract: Embodiments disclosed herein include fluid collection assemblies with at least one securement body. In an embodiment, a fluid collection assembly is disclosed. The fluid collection assembly includes a fluid impermeable barrier at least defining a chamber, at least one opening, and a fluid outlet. The fluid collection assembly also includes at least one porous material disposed in the chamber and at least one securement body configured to limit movement of the fluid collection assembly relative to a region about a urethral opening of a patient. The at least one securement body includes at least one of a plurality of fibers exhibiting an average lateral dimension of about 5 ?m or less, a plurality of suction cups, or at least one friction material exhibiting a coefficient of static friction that is greater than at least a portion of the at least one porous material.
    Type: Application
    Filed: January 3, 2022
    Publication date: July 7, 2022
    Inventors: Ashley Marie Johannes, Shahab Siddiqui, Kathleen Davis
  • Publication number: 20220152343
    Abstract: A case for a catheter system is disclosed, the case including a case body including a first side coupled to a second side. The case can include padding with a plurality of cavities to receive components of the catheter system and a strap to secure components of the catheter system to an interior of the case body. The case can further include one or more clips affixed to an interior wall of the first side or the second side of the case body. The one or more clips can be configured to secure additional catheter tubing or an external catheter to the interior wall of case body.
    Type: Application
    Filed: November 11, 2021
    Publication date: May 19, 2022
    Inventors: Kyle Daw, Shahab Siddiqui
  • Publication number: 20220069104
    Abstract: A method of forming a semiconductor structure includes forming a first nanosheet stack and a second nanosheet stack on a semiconductor substrate. The first nanosheet stack includes a plurality of alternating first sacrificial layers and first channel layers. The first sacrificial layers each define a first sacrificial height. The second nanosheet stack includes a plurality of alternating second sacrificial layers and second channel layers. The second sacrificial layers each define a second sacrificial height greater than the first sacrificial height of the first sacrificial layers. The method further includes removing the first and second sacrificial layers respectively from the first and second nanosheet stacks. A metal gate is deposited over the first and second nanosheet stacks to form respective first and second nanosheet transistor structures.
    Type: Application
    Filed: November 9, 2021
    Publication date: March 3, 2022
    Inventors: Shahab Siddiqui, Koji Watanabe, Charlotte DeWan Adams, Kai Zhao, Daniel James Dechene, Rishikesh Krishnan
  • Publication number: 20210408261
    Abstract: Embodiments of the invention are directed to a method of forming a semiconductor device. A non-limiting example of the method includes forming a top spacer trench adjacent to an upper region of the channel fin. An oxygen-blocking layer is deposited within the top spacer trench and over the upper region of the channel fin. A top spacer is formed within the top spacer trench and over a portion of the oxygen-blocking layer that is within the top spacer trench. The oxygen-blocking layer includes an oxygen gettering material.
    Type: Application
    Filed: June 24, 2020
    Publication date: December 30, 2021
    Inventors: Chen Zhang, Christopher J. Waskiewicz, Shahab Siddiqui, Ruilong Xie
  • Patent number: 11211474
    Abstract: A method of forming a semiconductor structure includes forming a first nanosheet stack and a second nanosheet stack on a semiconductor substrate. The first nanosheet stack includes a plurality of alternating first sacrificial layers and first channel layers. The first sacrificial layers each define a first sacrificial height. The second nanosheet stack includes a plurality of alternating second sacrificial layers and second channel layers. The second sacrificial layers each define a second sacrificial height greater than the first sacrificial height of the first sacrificial layers. The method further includes removing the first and second sacrificial layers respectively from the first and second nanosheet stacks. A metal gate is deposited over the first and second nanosheet stacks to form respective first and second nanosheet transistor structures.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: December 28, 2021
    Assignee: International Business Machines Corporation
    Inventors: Shahab Siddiqui, Koji Watanabe, Charlotte DeWan Adams, Kai Zhao, Daniel James Dechene, Rishikesh Krishnan
  • Publication number: 20210391473
    Abstract: Epitaxially grow first lower source-drain regions within a substrate. Portions of the substrate adjacent the lower regions are doped to form second lower source-drain regions. An undoped silicon layer is formed over the first and second lower regions. Etch completely through the undoped layer into the first and second lower regions to form fins and to define bottom junctions beneath the fins. The fins and bottom junctions define intermediate cavities. Form lower spacers, gates, and upper spacers in the cavities; form top junctions on outer surfaces of the fins; and form epitaxially grown first upper source-drain regions outward of the upper spacers and opposite the first lower regions. The first upper regions are doped the same as the first lower regions. Form second upper source-drain regions outward of the upper spacers and opposite the second lower regions; these are doped the same as the second lower regions.
    Type: Application
    Filed: June 15, 2020
    Publication date: December 16, 2021
    Inventors: Kai Zhao, Shahab Siddiqui, Daniel James Dechene, Rishikesh Krishnan, Charlotte DeWan Adams
  • Publication number: 20210217873
    Abstract: A method of forming a semiconductor structure includes forming a first nanosheet stack and a second nanosheet stack on a semiconductor substrate. The first nanosheet stack includes a plurality of alternating first sacrificial layers and first channel layers. The first sacrificial layers each define a first sacrificial height. The second nanosheet stack includes a plurality of alternating second sacrificial layers and second channel layers. The second sacrificial layers each define a second sacrificial height greater than the first sacrificial height of the first sacrificial layers. The method further includes removing the first and second sacrificial layers respectively from the first and second nanosheet stacks. A metal gate is deposited over the first and second nanosheet stacks to form respective first and second nanosheet transistor structures.
    Type: Application
    Filed: January 14, 2020
    Publication date: July 15, 2021
    Inventors: Shahab Siddiqui, Koji Watanabe, Charlotte DeWan Adams, Kai Zhao, Daniel James Dechene, Rishikesh Krishnan
  • Publication number: 20190326112
    Abstract: A method of cleaning a low-k spacer cavity by a low energy RF plasma at a specific substrate temperature for a defect free epitaxial growth of Si, SiGe, Ge, III-V and III-N and the resulting device are provided. Embodiments include providing a substrate with a low-k spacer cavity; cleaning the low-k spacer cavity with a low energy RF plasma at a substrate temperature between room temperature to 600° C.; and forming an epitaxy film or a RSD in the low-k spacer cavity subsequent to the low energy RF plasma cleaning.
    Type: Application
    Filed: April 19, 2018
    Publication date: October 24, 2019
    Inventors: Shahab SIDDIQUI, Hamed PARVANEH, Mira PARK, Annie LEVESQUE, Yinxiao YANG, Hongyi MI, Asli SIRMAN
  • Publication number: 20190318966
    Abstract: A integrated circuit including an n-doped high-k dielectric layer conformally within a first opening in a dielectric layer such that the n-doped high-k dielectric layer is in direct contact with a portion of a substrate exposed at a bottom of the first opening, a p-doped high-k dielectric layer conformally within a second opening in the dielectric layer such that the p-doped high-k dielectric layer is in direct contact with a portion of the substrate exposed at a bottom of the second opening, a shared work function metal conformally within the first opening and the second opening above and in direct contact with both the p-doped high-k dielectric layer and the n-doped high-k dielectric layer, and a bulk fill material above and in direct contact with the shared work function metal.
    Type: Application
    Filed: June 27, 2019
    Publication date: October 17, 2019
    Inventors: Takashi Ando, Balaji Kannan, Siddarth Krishnan, Unoh Kwon, Shahab Siddiqui