Patents by Inventor Shing-Yih Shih

Shing-Yih Shih has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11640948
    Abstract: A connector structure and a manufacturing method thereof are provided. The connector structure includes a semiconductor substrate, a metal layer, a passivation layer, and a conductive structure. The metal layer is over the semiconductor substrate. The passivation layer is over the metal layer and includes an opening. The conductive structure is in contact with the metal layer in a patterned surface structure of the conductive structure through the opening of the passivation layer.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: May 2, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shing-Yih Shih, Tieh-Chiang Wu
  • Publication number: 20230110531
    Abstract: A method for fabricating a semiconductor device includes providing a base wafer comprising a scribing portion; bonding a first stacked die and a second stacked die onto a front surface of the base wafer through a hybrid bonding process; conformally forming a re-fill layer to cover the first stacked die and the second stacked die; forming a first molding layer to cover the re-fill layer and configure an intermediate semiconductor device comprising the base wafer, the first stacked die, the second stacked die, the re-fill layer, and the first molding layer; and dicing the intermediate semiconductor device along the scribing portion to separate the first stacked die and the second stacked die, the re-fill layer, the first molding layer, and the base wafer.
    Type: Application
    Filed: October 8, 2021
    Publication date: April 13, 2023
    Inventor: SHING-YIH SHIH
  • Publication number: 20230113020
    Abstract: The present application discloses a semiconductor device with a re-fill layer. The semiconductor device includes a chip stack including a first base die; a first stacked die positioned on a front surface of the first base die; and a re-fill layer positioned on a sidewall of the stacked die. The re-fill layer includes silicon oxide, silicon nitride, silicon oxynitride, silicon nitride oxide, titanium oxide, aluminum oxide, or hafnium oxide.
    Type: Application
    Filed: October 13, 2021
    Publication date: April 13, 2023
    Inventor: SHING-YIH SHIH
  • Patent number: 11621341
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate including a first region, and a first transistor positioned in the first region. The first transistor includes a first bottom gate structure positioned on the substrate, a first channel layer positioned on the first bottom gate structure, a first top gate structure positioned on the first channel layer, and two first source/drain regions positioned on two sides of the first channel layer.
    Type: Grant
    Filed: March 16, 2020
    Date of Patent: April 4, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11610833
    Abstract: The present disclosure provides a semiconductor device, a semiconductor assembly and method of manufacturing the semiconductor assembly. The semiconductor device includes a substrate, a conductive feature in the substrate, an isolation liner between the substrate and the conductive feature, and a main component in the substrate. The conductive feature includes first to third blocks. The first block has a uniform first critical dimension, wherein the main component is disposed around the first block. The second block has a uniform second critical dimension greater than the first critical dimension. The third block is interposed between the first block and the second block and has varying third critical dimensions.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: March 21, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Shing-Yih Shih, Jheng-Ting Jhong
  • Patent number: 11605596
    Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a substrate, a conductive feature, a redistribution layer, at least one through silicon via and at least one bump. The conductive feature is disposed over a front surface of the substrate, and the redistribution layer is disposed over a back surface opposite to the front surface. The through silicon via penetrates through the substrate and contacts the conductive feature embedded in an insulative layer. The bump contacts the redistribution layer and the through silicon via and serves as an electrical connection therebetween.
    Type: Grant
    Filed: November 15, 2021
    Date of Patent: March 14, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11605612
    Abstract: The present disclosure provides a method of manufacturing a semiconductor package assembly. The method includes steps of providing a plurality of first dies arranged horizontally; forming a redistribution layer on the first dies and the first insulative material, wherein the redistribution layer is divided into a first segment and a second segment electrically isolated from the first segment; mounting a plurality of second dies on the first segment of the redistribution layer; depositing a second insulative layer on the second dies and the redistribution layer; and forming a plurality of conductive plugs penetrating through the second insulative material and contacting the second segment of the redistribution layer.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: March 14, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Publication number: 20230060355
    Abstract: A semiconductor package structure includes a first semiconductor wafer including a first bonding pad. The semiconductor package structure also includes a second semiconductor wafer including a second bonding pad and a third bonding pad. The second bonding pad and the third bonding pad are bonded to the first bonding pad of the first semiconductor wafer. The semiconductor package structure further includes a first via penetrating through the second semiconductor wafer to physically contact the first bonding pad of the first semiconductor wafer. A portion of the first via is disposed between the second bonding pad and the third bonding pad.
    Type: Application
    Filed: August 31, 2021
    Publication date: March 2, 2023
    Inventor: Shing-Yih SHIH
  • Patent number: 11587901
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a first semiconductor structure including a first substrate, and a first circuit layer positioned on the first substrate, a first redistribution structure positioned on the first circuit layer, and a second semiconductor structure including a second circuit layer positioned on the first redistribution structure, and a second substrate positioned on the second circuit layer. A layout of the first circuit layer and a layout of the second circuit layer are substantially the same and the first redistribution structure is electrically coupled to the first semiconductor structure and the second semiconductor structure.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: February 21, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11574891
    Abstract: The present application discloses a semiconductor device with a heat dissipation unit and a method for fabricating the semiconductor device. The semiconductor device includes a die stack, an intervening bonding layer positioned on the die stack, and a carrier structure including a carrier substrate positioned on the intervening bonding layer, and through semiconductor vias positioned in the carrier substrate and on the intervening bonding layer for thermally conducting heat.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: February 7, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11521916
    Abstract: The present application discloses provides a method for fabricating a semiconductor device including providing a first semiconductor die including a first conductive layer, forming a first etch stop layer on the first conductive layer, bonding a second semiconductor die, which includes a second conductive layer above the first etch stop layer and a second etch stop layer on the second conductive layer, onto the first etch stop layer, performing a via etch process to concurrently form a first via opening to expose the first etch stop layer and a second via opening to expose the second etch stop layer, conformally forming isolation layers in the first via opening and the second via opening, performing a punch etch process to extend the first via opening and the second via opening, and concurrently forming a first through substrate via in the first via opening and a second through substrate via in the second via opening.
    Type: Grant
    Filed: March 11, 2022
    Date of Patent: December 6, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11502025
    Abstract: The present application discloses a semiconductor device with an etch stop layer having greater thickness and a method for fabricating the semiconductor device. The semiconductor device includes a first semiconductor die including a first conductive layer, a first etch stop layer positioned on the first conductive layer, a second semiconductor die including a second conductive layer positioned above the first etch stop layer, a second etch stop layer positioned on the second conductive layer, a first through substrate via positioned along the second semiconductor die and the first etch stop layer, extended to the first semiconductor die, and positioned on the first conductive layer, and a second through substrate via extended to the second semiconductor die, positioned along the second etch stop layer, and positioned on the second conductive layer. A thickness of the second etch stop layer is greater than a thickness of the first etch stop layer.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: November 15, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11502038
    Abstract: The present disclosure provides a semiconductor structure having a first wafer including a first substrate, a first dielectric layer over the first substrate, and a first conductive pad surrounded by the first dielectric layer; a second wafer including a second dielectric layer, a second substrate over the second dielectric layer, and a second conductive pad surrounded by the second dielectric layer; a bonding dielectric disposed between the first dielectric layer and the second dielectric layer to bond the first dielectric layer with the second dielectric layer; and a conductive via extending from the first conductive pad and surrounded by the bonding dielectric, the second conductive pad and the second wafer.
    Type: Grant
    Filed: August 3, 2020
    Date of Patent: November 15, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11476200
    Abstract: The present disclosure provides a semiconductor package structure. The semiconductor package structure includes a first die, at least a second die, an RDL disposed over the second die, a molding encapsulating the first die and the second die, a plurality of first conductors disposed in the molding, and a plurality of second conductors disposed in the second die. The first die has a first side and a second side opposite to the first side. The second die has a third side facing the first side of the first die and a fourth side opposite to the third side. The RDL is disposed on the fourth side of the second die. The first die is electrically connected to the RDL through the plurality of first conductors, and the second die is electrically connected to the RDL through the plurality of second conductors.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: October 18, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11469210
    Abstract: A semiconductor package includes a first interposer, a second interposer, and a gap between the first interposer and the second interposer. The first interposer and the second interposer are coplanar. A first die is mounted on the first interposer and the second interposer. The first die includes first connection elements connecting the first die to the first interposer or the second interposer. A redistribution layer (RDL) structure is disposed on bottom surfaces of the first and second interposers for connecting the first interposer with the second interposer. The RDL structure includes at least one bridge trace traversing the gap to electrically connect the first interposer with the second interposer.
    Type: Grant
    Filed: August 26, 2019
    Date of Patent: October 11, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Shing-Yih Shih
  • Patent number: 11469173
    Abstract: The present disclosure relates to a method of manufacturing a semiconductor structure. The method of manufacturing a semiconductor structure includes providing a carrier; disposing a dielectric layer over the carrier; removing a first portion of the dielectric layer to form an opening extending through the dielectric layer; removing a second portion of the dielectric layer to form a trench extending through and along the dielectric layer; disposing a conductive material into the opening and the trench to form a conductive via and a metallic strip, respectively; removing a third portion of the dielectric layer; detaching the dielectric layer from the carrier; disposing the dielectric layer over a substrate; disposing a die over the substrate; and forming a molding to surround the die.
    Type: Grant
    Filed: January 25, 2021
    Date of Patent: October 11, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 11462453
    Abstract: The present application discloses a semiconductor device with protection layers for reducing the metal to silicon leakage and a method for fabricating the semiconductor device. The semiconductor device includes a first die, a first conductive feature positioned in the first die, a second die positioned on the first die, a first mask layer positioned on the second die, a conductive filler layer positioned along the first mask layer and the second die, extending to the first die, and contacting the first conductive feature, isolation layers positioned between the conductive filler layer and the first die and between the conductive filler layer and the second die, and protection layers positioned between the conductive filler layer and the first mask layer and covering upper portions of the isolation layers.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: October 4, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Tse-Yao Huang, Shing-Yih Shih
  • Publication number: 20220310545
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a first semiconductor structure including a first substrate, and a first circuit layer positioned on the first substrate, a first redistribution structure positioned on the first circuit layer, and a second semiconductor structure including a second circuit layer positioned on the first redistribution structure, and a second substrate positioned on the second circuit layer. A layout of the first circuit layer and a layout of the second circuit layer are substantially the same and the first redistribution structure is electrically coupled to the first semiconductor structure and the second semiconductor structure.
    Type: Application
    Filed: March 26, 2021
    Publication date: September 29, 2022
    Inventor: SHING-YIH SHIH
  • Publication number: 20220310487
    Abstract: The present disclosure provides a semiconductor device, a semiconductor assembly and method of manufacturing the semiconductor assembly. The semiconductor device includes a substrate, a conductive feature in the substrate, an isolation liner between the substrate and the conductive feature, and a main component in the substrate. The conductive feature includes first to third blocks. The first block has a uniform first critical dimension, wherein the main component is disposed around the first block. The second block has a uniform second critical dimension greater than the first critical dimension. The third block is interposed between the first block and the second block and has varying third critical dimensions.
    Type: Application
    Filed: June 14, 2022
    Publication date: September 29, 2022
    Inventors: SHING-YIH SHIH, JHENG-TING JHONG
  • Patent number: 11450556
    Abstract: A semiconductor structure includes a semiconductor device, an interconnect structure, a dielectric layer, and a redistribution layer (RDL). The interconnect structure is disposed over the semiconductor device. The dielectric layer is disposed over the interconnect structure. The RDL includes a conductive structure over the dielectric layer and a conductive via extending downwards from the conductive structure and through the dielectric layer. The conductive via includes a bottom portion, a top portion and a tapered portion between the bottom and top portions, in which the tapered portion has a width variation greater than that of the bottom and top portions.
    Type: Grant
    Filed: September 13, 2020
    Date of Patent: September 20, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Shing-Yih Shih, Chih-Ching Lin