Patents by Inventor Shulai Zhao

Shulai Zhao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7417216
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Grant
    Filed: March 21, 2006
    Date of Patent: August 26, 2008
    Assignee: Digirad Corporation
    Inventors: Lars S. Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Patent number: 7297927
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: November 20, 2007
    Assignee: Digirad Corporation
    Inventors: Lars S. Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Patent number: 7256386
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Grant
    Filed: May 10, 2004
    Date of Patent: August 14, 2007
    Assignee: Digirad Corporation
    Inventors: Lars S. Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Publication number: 20070012866
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Application
    Filed: August 31, 2006
    Publication date: January 18, 2007
    Inventors: Lars Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Publication number: 20060175539
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Application
    Filed: March 21, 2006
    Publication date: August 10, 2006
    Inventors: Lars Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Publication number: 20060175677
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Application
    Filed: March 21, 2006
    Publication date: August 10, 2006
    Inventors: Lars Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Patent number: 7087887
    Abstract: Waveguide sensors having a side-polished coupling port at the waveguide cladding to sense a material based on material-specific optical attenuation by evanescent coupling at the coupling port.
    Type: Grant
    Filed: October 29, 2003
    Date of Patent: August 8, 2006
    Assignee: IFOS, Inc.
    Inventors: Bo Pi, Shulai Zhao, Zhihao Chen
  • Publication number: 20060157811
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Application
    Filed: March 21, 2006
    Publication date: July 20, 2006
    Inventors: Lars Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Patent number: 7068868
    Abstract: Fiber sensors formed on side-polished fiber coupling ports based on evanescent coupling. Such sensors may be configured to measure various materials and may be used to form multi-phase sensing devices.
    Type: Grant
    Filed: November 12, 2003
    Date of Patent: June 27, 2006
    Assignee: IFOS, Inc.
    Inventors: Bo Pi, Wei-Cheng Wilson Lin, Zhihao Chen, Shulai Zhao
  • Publication number: 20040206886
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Application
    Filed: May 10, 2004
    Publication date: October 21, 2004
    Applicant: Digirad Corporation, a Delaware corporation
    Inventors: Lars S. Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Patent number: 6744948
    Abstract: Fiber tap monitors formed on side-polished fiber coupling ports based on evanescent coupling.
    Type: Grant
    Filed: June 20, 2002
    Date of Patent: June 1, 2004
    Assignee: Oluma, Inc.
    Inventors: Bo Pi, Shulai Zhao, Zheng Chen, Robert Morse, Jian Li
  • Patent number: 6734416
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Grant
    Filed: November 15, 2002
    Date of Patent: May 11, 2004
    Assignee: Digirad Corporation
    Inventors: Lars S. Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Patent number: 6690857
    Abstract: Fiber optical devices formed on substrates fabricated with grooves that operate based on evanescent optical coupling through a side-polished fiber surface in each fiber involved.
    Type: Grant
    Filed: December 3, 2002
    Date of Patent: February 10, 2004
    Assignee: Oluma, Inc.
    Inventors: Shulai Zhao, Bo Pi
  • Publication number: 20040008935
    Abstract: Fiber optical devices formed on substrates fabricated with grooves that operate based on evanescent optical coupling through a side-polished fiber surface in each fiber involved.
    Type: Application
    Filed: December 3, 2002
    Publication date: January 15, 2004
    Applicant: Oluma, Inc., a Delaware corporation
    Inventors: Shulai Zhao, Bo Pi
  • Patent number: 6670258
    Abstract: Ultra-low leakage current backside-illuminated semiconductor photodiode arrays are fabricated using a method of formation of a transparent, conducting bias electrode layer that avoids high-temperature processing of the substrate after the wafer has been gettered. As a consequence, the component of the reverse-bias leakage current associated with strain, crystallographic defects or impurities introduced during elevated temperature processing subsequent to gettering can be kept extremely low. An optically transparent, conductive bias electrode layer, serving as both an optical window and an ohmic backside equipotential contact surface for the photodiodes, is fabricated by etching through the polysilicon gettering layer and a portion of the thickness of heavily-doped crystalline silicon layer formed within, and near the back of, the substrate during the gettering process.
    Type: Grant
    Filed: April 20, 2001
    Date of Patent: December 30, 2003
    Assignee: Digirad Corporation
    Inventors: Lars S. Carlson, Shulai Zhao, John Sheridan, Alan Mollet
  • Patent number: 6630735
    Abstract: A semiconductor interconnection device having a semiconductor die, a plurality of epoxy bonds, and an array of insulating islands is disclosed. The semiconductor die has a plurality of conductive contacts. The plurality of epoxy bonds has a metallic substance such as silver. The epoxy bonds are configured to provide interconnection between the semiconductor die and an external structure. The plurality of epoxy bonds is selectively applied to the plurality of conductive contacts on the semiconductor die and corresponding conductive contacts on the external structure. The array of insulating islands is coupled to the plurality of conductive contacts. The islands are configured to prevent migration of the metallic substance from the plurality of epoxy bonds to the semiconductor die through the plurality of conductive contacts.
    Type: Grant
    Filed: April 7, 2000
    Date of Patent: October 7, 2003
    Assignee: Digirad Corporation
    Inventors: Lars S. Carlson, Shulai Zhao
  • Patent number: 6625349
    Abstract: Techniques for coupling optical energy between a side-polished port of a fiber in one substrate and a coupling port of a waveguide in another substrate.
    Type: Grant
    Filed: June 12, 2001
    Date of Patent: September 23, 2003
    Assignee: Oluma, Inc.
    Inventors: Shulai Zhao, Bo Pi
  • Patent number: 6621951
    Abstract: Thin-film techniques in forming fiber devices that engage fibers to a substrate with different material properties. Structure buffering, diffusion bonding, and thickness monitoring may be achieved by such thin-film techniques.
    Type: Grant
    Filed: June 27, 2001
    Date of Patent: September 16, 2003
    Assignee: Oluma, Inc.
    Inventors: Shulai Zhao, Bo Pi
  • Patent number: 6621952
    Abstract: Fiber optical devices formed on substrates fabricated with grooves that operate based on evanescent optical coupling through a side-polished fiber surface in each fiber involved. An index-changing liquid is used to control the evanescent optical coupling in response to a control signal.
    Type: Grant
    Filed: August 10, 2001
    Date of Patent: September 16, 2003
    Assignee: Oluma, Inc.
    Inventors: Bo Pi, Shulai Zhao
  • Patent number: 6597833
    Abstract: Optical wavelength-division multiplexers and demultiplexers based on Mach-Zehnder interferometers via evanescent coupling through a side-polished fiber port of a fiber.
    Type: Grant
    Filed: September 26, 2001
    Date of Patent: July 22, 2003
    Assignee: Oluma, Inc.
    Inventors: Bo Pi, Shulai Zhao