Patents by Inventor Song Guo
Song Guo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20230238218Abstract: A separated gas inlet structure for blocking plasma backflow includes a gas inlet flange and an upper gas inlet nozzle and a lower gas inlet nozzle made of ceramic materials. The upper gas inlet nozzle is coaxially nested or stacked at the top of the lower gas inlet nozzle; a broken line type gas inlet channel is in the upper gas inlet nozzle and the lower gas inlet nozzle and the gas inlet channel includes an upper axial channel, a radial channel, a lower axial channel and a gas outlet; the radial channel or the lower axial channel is at a mounting matching part of the upper gas inlet nozzle and the lower gas inlet nozzle; and the top of the lower axial channel points to a bottom wall surface of the upper gas inlet nozzle.Type: ApplicationFiled: May 19, 2021Publication date: July 27, 2023Inventors: Haiyang LIU, Xiaobo LIU, Dongdong HU, Jun ZHANG, Shiran CHENG, Song GUO, Na LI, Kaidong XU
-
Publication number: 20230207283Abstract: A Faraday shielding apparatus includes a Faraday shielding plate and a resistance wire attached to the lower end of the Faraday shielding plate; the Faraday shielding plate includes a conductive ring and a plurality of conductive petal-shaped members radially symmetrically connected to the outer periphery of the conductive ring; and an insulating and thermally conductivity layer is on the outer surface of the resistance wire. During the etching process, the heating circuit and the resistance wire are conductively connected, increasing the temperature of the resistance wire when it is energized. The Faraday shielding plate is between a radio frequency coil and the resistance wire to form a shield. The output terminal of the heating power supply is filtered by way of a filter circuit unit, then is connected to the resistance wire, preventing coupling between the radio frequency coil and the resistance wire.Type: ApplicationFiled: May 27, 2021Publication date: June 29, 2023Inventors: Song GUO, Haiyang LIU, Chengyi WANG, Shiran CHENG, Xiaobo LIU, Jun ZHANG, Dongdong HU, Kaidong XU
-
Publication number: 20230207284Abstract: A Faraday shielding apparatus includes a Faraday shielding plate and a heating circuit; the Faraday shielding plate includes a conductive ring and a plurality of conductive petal-shaped members radially symmetrically connected to the outer periphery of the conductive ring; when the heating circuit is used in the etching process, the Faraday shielding plate is heated by electricity. During the etching process, the heating circuit is conductively connected to the Faraday shielding plate, increasing the temperature of the Faraday shielding plate when it is energized, heating a medium window and reducing the amount of product deposits. During the cleaning process, the heating circuit and the Faraday shield are turned off, and the Faraday shielding plate is connected to a shielding power supply to clean the dielectric window. The output terminal of the heating power supply is filtered by way of a filter circuit unit, then connected to the Faraday shielding plate.Type: ApplicationFiled: May 27, 2021Publication date: June 29, 2023Inventors: Song GUO, Haiyang LIU, Chengyi WANG, Shiran CHENG, Xiaobo LIU, Jun ZHANG, Dongdong HU, Kaidong XU
-
Publication number: 20230207260Abstract: An anti-breakdown ion source discharge apparatus includes a discharge chamber, a coil support, an upper insulation fixing block, a discharge component and an ion source chamber. The discharge component includes a radio-frequency coil, a lower conductive connector and an upper conductive connector. The radio-frequency coil is fixed on a coil support base; the coil support base is clamped on an inner wall of the bottom of the ion source base; the coil support is along the circumference of the coil support base; the radio-frequency coil passes through the coil support; the upper conductive connector passes by the radio-frequency coil and the coil support base from the outside of the radio-frequency coil and extends into the bottom of the discharge chamber; and the upper insulation fixing block is sleeved over the upper conductive connector and is fixed on the inner wall of the bottom of the ion source chamber.Type: ApplicationFiled: May 19, 2021Publication date: June 29, 2023Inventors: Yaoyao ZHANG, Dongdong HU, Jun ZHANG, Na LI, Haiyang LIU, Shiran CHENG, Song GUO, Kaidong XU
-
Publication number: 20230098684Abstract: Disclosed are a dynamic simulation display method and a system for a working machine structure. The method firstly acquires working condition data such as angle data of a lower arm of a working machine in real time, and then dynamically updates the currently displayed working machine structure according to the working condition data obtained, which enables users to grasp a working condition change, a working state, a relative position and other information of the working machine according to the updated displayed working machine structure intuitively. A burden of information acquisition on the users may be reduced, and using experience of the working machine on the users may be improved.Type: ApplicationFiled: December 6, 2022Publication date: March 30, 2023Applicant: ZHEJIANG SANY EQUIPMENT CO., LTD.Inventors: Xiaodong HAN, Hao SUN, Song GUO
-
Patent number: 11594536Abstract: Some embodiments include an integrated assembly having a CMOS region with fins extending along a first direction, and with gating structures extending across the fins. A circuit arrangement is associated with the CMOS region and includes a pair of the gating structures spaced by an intervening region having a missing gating structure. The circuit arrangement has a first dimension along the first direction. A second region is proximate to the CMOS region. Conductive structures are associated with the second region. Some of the conductive structures are electrically coupled with the circuit arrangement. A second dimension is a distance across said some of the conductive structures along the first direction. The conductive structures and the circuit arrangement are aligned such that the second dimension is substantially the same as the first dimension. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: March 10, 2021Date of Patent: February 28, 2023Assignee: Micron Technology, Inc.Inventors: Yong Mo Yang, Mohd Kamran Akhtar, Huyong Lee, Sangmin Hwang, Song Guo
-
Publication number: 20230028297Abstract: A method of forming a semiconductor device comprising forming a silicon carbide material on a patterned material. The silicon carbide material is subjected to a plasma to expose horizontal portions of the silicon carbide material to the plasma. The horizontal portions of the silicon carbide material are selectively removed, and the patterned material is removed to form a pattern of the silicon carbide material.Type: ApplicationFiled: July 18, 2022Publication date: January 26, 2023Inventors: Vivek Yadav, Silvia Borsari, Song Guo
-
Publication number: 20230022071Abstract: An apparatus comprising active areas and shallow trench isolation structures on a base material. A first conductive material is vertically adjacent to an active area of the active areas and between laterally adjacent shallow trench isolation structures. A second conductive material is vertically adjacent to the first conductive material and between the laterally adjacent shallow trench isolation structures. A silicon carbide material is on sidewalls of the shallow trench isolation structures and exhibits substantially vertical sidewalls. An oxide material is adjacent to the active areas and shallow trench isolation structures, a nitride material is adjacent to the oxide material, and a digit line is adjacent to the second conductive material. An electronic system and methods of forming an apparatus are also disclosed.Type: ApplicationFiled: July 18, 2022Publication date: January 26, 2023Inventors: Chunhua Yao, Song Guo, Vivek Yadav
-
Patent number: 11551948Abstract: A semiconductor manufacturing apparatus, including a chip supply module used for providing a plurality of chips; a load plate supply module including a load plate and a load-plate motion platform used for holding the load plate; a chip transfer-loading module including a chip transfer-loading platform used for suctioning chips. The chip transfer-loading platform is used at a first position for transferring chips from the chip supply module. The chip transfer-loading platform carries the chips to a second position to bond the chips onto a load plate to form a bonding sheet. A packaging module is used for packaging the bonding plate on the load-plate motion platform to form a packaged chip.Type: GrantFiled: August 9, 2018Date of Patent: January 10, 2023Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.Inventors: Feibiao Chen, Song Guo
-
Publication number: 20220375733Abstract: Provided are a faraday cleaning device and a plasma processing system, the device comprising a reaction chamber, a bias electrode, a wafer, a chamber cover, a coupling window, an air inlet nozzle, a vertical coil, and a faraday layer, wherein the coupling window is installed at the upper end face of the chamber cover, the chamber cover is installed at the upper end face of the reaction chamber, the bias electrode is assembled inside the reaction chamber, the wafer is installed at the upper end face of the bias electrode, the air inlet nozzle is assembled inside the coupling window, the faraday layer is installed at the upper end face of the coupling window, and the vertical coil is assembled at the upper end face of the faraday layer.Type: ApplicationFiled: February 26, 2020Publication date: November 24, 2022Applicant: JIANGSU LEUVEN INSTRUMENTS CO., LTDInventors: Haiyang LIU, Dongdong HU, Xiaobo LIU, Na LI, Shiran CHENG, Song GUO, Zhihao WU, Kaidong XU
-
MICROELECTRONIC DEVICES INCLUDING MEMORY CELL STRUCTURES, AND RELATED METHODS AND ELECTRONIC SYSTEMS
Publication number: 20220375942Abstract: A microelectronic device comprises memory cell structures extending from a base material. At least one memory cell structure of the memory cell structures comprises a central portion in contact with a digit line, extending from the base material and comprising opposing arcuate surfaces, an end portion in contact with a storage node contact on a side of the central portion, and an additional end portion in contact with an additional storage node contact on an opposite side of the central portion. Related microelectronic devices, electronic systems, and methods are also described.Type: ApplicationFiled: May 18, 2021Publication date: November 24, 2022Inventors: Stephen D. Snyder, Thomas A. Figura, Siva Naga Sandeep Chalamalasetty, Ping Chieh Chiang, Scott L. Light, Yashvi Singh, Yan Li, Song Guo -
Patent number: 11501804Abstract: A microelectronic device comprises a semiconductive pillar structure comprising a central portion, a first end portion, and a second end portion on a side of the central portion opposite the first end portion, the first end portion oriented at an angle with respect to the central portion and extending substantially parallel to the second end portion, a digit line contact on the central portion of the semiconductive pillar structure, a first storage node contact on the first end portion, and a second storage node contact on the second end portion. Related microelectronic devices, electronic systems, and methods are also described.Type: GrantFiled: August 13, 2020Date of Patent: November 15, 2022Assignee: Micron Technology, Inc.Inventors: Fredrick D. Fishburn, Si-Woo Lee, Scott L. Light, Song Guo
-
Publication number: 20220358089Abstract: A method implemented by an electronic device, wherein the method comprises displaying a search interface comprising a search box, displaying a first search result in response to receiving a first keyword in the search box, displaying a second search result in response to receiving a second keyword in the search box, where the second search result includes a first icon, and storing a first association relationship in response to a touch operation on the first icon, wherein the first association relationship includes at least one of an association relationship between a first application and the first keyword, an association relationship between a first system function and the first keyword, and an association relationship between a first application function and the first keyword, and wherein the first association relationship finds the first icon by entering the first keyword in the search box.Type: ApplicationFiled: June 24, 2020Publication date: November 10, 2022Inventors: Lin Liu, Song Guo
-
Publication number: 20220335982Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices and access lines, and shared vertically oriented digit line. The access devices having a first source/drain region and a second source drain region separated by a channel region, and gates opposing the channel region. Horizontal oriented access lines are coupled to the gates and separated from a channel region by a gate dielectric. The memory cells have horizontally oriented storage nodes coupled to the second source/drain region of the horizontally oriented access devices. The shared, vertically oriented digit line is shared between two neighboring horizontal access devices and is coupled to the first source/drain regions of the two neighboring horizontally oriented access devices.Type: ApplicationFiled: April 19, 2021Publication date: October 20, 2022Inventors: Yuan He, Song Guo
-
Publication number: 20220319816Abstract: Disclosed is a plasma etching system, comprising a reaction chamber, a base located in the reaction chamber and used for bearing a workpiece, and a dielectric window located on the reaction chamber. Flat plate type electrodes and coil electrodes are provided on the outer surface of the dielectric window; the flat plate type electrodes are located right over the base, and the coil electrodes are arranged in the peripheral regions of the flat plate type electrodes in a surrounding manner; a Faraday shielding layer is further provided between the coil electrodes and the outer surface of the dielectric window.Type: ApplicationFiled: February 26, 2020Publication date: October 6, 2022Applicant: JIANGSU LEUVEN INSTRUMENTS CO. LTDInventors: Haiyang LIU, Dongdong HU, Na LI, Xiaobo LIU, Shiran CHENG, Song GUO, Zhihao WU, Kaidong XU
-
Publication number: 20220297168Abstract: The present invention provides a rotatable faraday cleaning apparatus and a plasma processing system, said apparatus comprising a cavity cover, a motor, an eccentric wheel, a long-petalled assembly, a coupling window, a gas intake nozzle, a connecting rod, a short-petalled assembly, a first sector-shaped conductor, and a second sector-shaped conductor; the cavity cover is assembled on a reactor cavity main body, the coupling window is mounted on the cavity cover, the gas intake nozzle is provided on the coupling window, the first sector-shaped conductor is assembled on the gas intake nozzle, the second sector-shaped conductor is assembled on the gas intake nozzle, the long-petalled assembly is assembled on the gas intake nozzle, the short-petalled assembly is assembled on the gas intake nozzle, the connecting rod is assembled on the long-petalled assembly, the eccentric wheel is assembled on the connecting rod, and the motor is mounted on the eccentric wheel.Type: ApplicationFiled: February 28, 2020Publication date: September 22, 2022Applicant: JIANGSU LEUVEN INSTRUMENTS CO., LTDInventors: Haiyang LIU, Dongdong HU, Xiaobo LIU, Na LI, Shiran CHENG, Song GUO, Zhihao WU, Kaidong XU
-
Publication number: 20220302837Abstract: A current sense circuit includes a sense amplifier, a current mirror circuit, a resistor, a low-pass filter, and a capacitor. The sense amplifier is adapted to be coupled to a switching transistor of a DC-DC converter. The current mirror circuit is coupled to the sense amplifier, and is configured to generate a sense current proportional to a current flowing through the switching transistor. The resistor is coupled to the current mirror circuit, and is configured to generate a sense voltage based on the sense current. The low-pass filter is coupled to the resistor, and is configured to average the sense voltage over an averaging interval. The capacitor is coupled to the resistor, and is configured to store the sense voltage in a blanking interval that precedes the averaging interval, and provide a compensation current in the averaging interval.Type: ApplicationFiled: October 28, 2021Publication date: September 22, 2022Inventors: Song GUO, Saurav BANDYOPADHYAY
-
Publication number: 20220293598Abstract: Some embodiments include an integrated assembly having a CMOS region with fins extending along a first direction, and with gating structures extending across the fins. A circuit arrangement is associated with the CMOS region and includes a pair of the gating structures spaced by an intervening region having a missing gating structure. The circuit arrangement has a first dimension along the first direction. A second region is proximate to the CMOS region. Conductive structures are associated with the second region. Some of the conductive structures are electrically coupled with the circuit arrangement. A second dimension is a distance across said some of the conductive structures along the first direction. The conductive structures and the circuit arrangement are aligned such that the second dimension is substantially the same as the first dimension. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: March 10, 2021Publication date: September 15, 2022Applicant: Micron Technology, Inc.Inventors: Yong Mo Yang, Mohd Kamran Akhtar, Huyong Lee, Sangmin Hwang, Song Guo
-
Publication number: 20220254604Abstract: Disclosed in the present application is an inductively coupled plasma treatment system. Said system switches the connection between a radio frequency coil and a faraday shielding device by means of a switch switching radio frequency power. When a radio frequency power supply is connected to the radio frequency coil by means of a matched network, the radio frequency power is coupled into the radio frequency coil to perform plasma treatment process. When a radio frequency power supply is connected to a faraday shielding device by means of a matched network, the radio frequency power is coupled into the faraday shielding device to perform cleaning process on a dielectric window and an inner wall of a plasma treatment cavity.Type: ApplicationFiled: February 26, 2020Publication date: August 11, 2022Applicant: JIANGSU LEUVEN INSTRUMENTS CO. LTDInventors: Haiyang LIU, Xiaobo LIU, Xuedong LI, Na LI, Shiran CHENG, Song GUO, Dongdong HU, Kaidong XU
-
Publication number: 20220254615Abstract: The present invention provides a device for blocking plasma backflow in a process chamber to protect an air inlet structure, comprising an air inlet nozzle tightly connected to an air inlet flange. The inner cavity of the air inlet nozzle is provided with an air inlet guide body, wherein the air inlet guide body has an upper structure, a middle structure, and a lower structure, the upper, middle, and lower structures are an integrated structure, the upper, middle, and lower structures are all cylindrical, the cross-sectional diameter of the upper structure is smaller than that of the middle structure, a gas gathering area is arranged between the middle structure and the lower structure, and the middle structure and the lower structure are connected by the gas gathering area.Type: ApplicationFiled: February 29, 2020Publication date: August 11, 2022Applicant: JIANGSU LEUVEN INSTRUMENTS CO. LTDInventors: Na LI, Dongdong HU, Xiaobo LIU, Haiyang LIU, Shiran CHENG, Song GUO, Zhihao WU, Kaidong XU