Patents by Inventor Souheil Benzerrouk

Souheil Benzerrouk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11072543
    Abstract: A water disinfection chamber includes one or more UVC LEDs. The chamber is constructed of Teflon or employs a Teflon PTFE liner to increase UV reflections through the volume of the chamber. LEDs are positioned in specific locations to both provide maximum UV intensity in the main fluid flow path and an angle to allow enough reflections to fill the chamber with UV light to disinfect the fluid flowing through the chamber. The chamber is scalable in size and in the number of LEDs employed including the number of rings where LEDs are located.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: July 27, 2021
    Assignee: Canopus Water Technologies, Inc.
    Inventor: Souheil Benzerrouk
  • Patent number: 11053140
    Abstract: A water disinfection system preferably includes a battery compartment, a control printed circuit board (PCB) to manage several parameters including timing, voltage rate, and user-interface. A high voltage power supply is coupled to a set of electrodes to cause an electric discharge. The electric discharge results in a series of reactions in the water that eliminate bacteria and viruses, dissolves organic material, and oxidizes inorganic compounds.
    Type: Grant
    Filed: February 18, 2020
    Date of Patent: July 6, 2021
    Assignee: Vegapure Water System Inc.
    Inventor: Souheil Benzerrouk
  • Publication number: 20200392019
    Abstract: A water disinfection chamber includes one or more UVC LEDs. The chamber is constructed of Teflon or employs a Teflon PTFE liner to increase UV reflections through the volume of the chamber. LEDs are positioned in specific locations to both provide maximum UV intensity in the main fluid flow path and an angle to allow enough reflections to fill the chamber with UV light to disinfect the fluid flowing through the chamber. The chamber is scalable in size and in the number of LEDs employed including the number of rings where LEDs are located.
    Type: Application
    Filed: May 23, 2018
    Publication date: December 17, 2020
    Inventor: Souheil Benzerrouk
  • Publication number: 20200325040
    Abstract: A water disinfection system preferably includes a battery compartment, a control printed circuit board (PCB) to manage several parameters including timing, voltage rate, and user-interface. A high voltage power supply is coupled to a set of electrodes to cause an electric discharge. The electric discharge results in a series of reactions in the water that eliminate bacteria and viruses, dissolves organic material, and oxidizes inorganic compounds.
    Type: Application
    Filed: February 18, 2020
    Publication date: October 15, 2020
    Inventor: Souheil Benzerrouk
  • Patent number: 10604422
    Abstract: A water container or bottle with integrated disinfection preferably includes a battery compartment, a control printed circuit board (PCB) to manage several parameters including timing, voltage rate, and user-interface. A high voltage power supply is coupled to a set of electrodes to cause an electric discharge. The electric discharge results in a series of reactions in the water that eliminate bacteria and viruses, dissolves organic material, and oxidizes inorganic compounds.
    Type: Grant
    Filed: November 14, 2018
    Date of Patent: March 31, 2020
    Assignee: VEGAPURE WATER SYSTEM INC.
    Inventor: Souheil Benzerrouk
  • Patent number: 10424460
    Abstract: A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites and multiple plasma chamber outlets coupling the plasma chamber to a process chamber. Each one of the plasma chamber outlets having a respective plasma restriction. A system and method for generating a plasma are also described.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: September 24, 2019
    Assignee: Lam Research Corporation
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Publication number: 20190169049
    Abstract: A water container or bottle with integrated disinfection preferably includes a battery compartment, a control printed circuit board (PCB) to manage several parameters including timing, voltage rate, and user-interface. A high voltage power supply is coupled to a set of electrodes to cause an electric discharge. The electric discharge results in a series of reactions in the water that eliminate bacteria and viruses, dissolves organic material, and oxidizes inorganic compounds.
    Type: Application
    Filed: November 14, 2018
    Publication date: June 6, 2019
    Inventor: Souheil Benzerrouk
  • Patent number: 10283325
    Abstract: A processing chamber including multiple plasma sources in a process chamber top. Each one of the plasma sources is a ring plasma source including a primary winding and multiple ferrites. A plasma processing system is also described. A method of plasma processing is also described.
    Type: Grant
    Filed: October 10, 2012
    Date of Patent: May 7, 2019
    Assignee: Lam Research Corporation
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Publication number: 20180228015
    Abstract: A chamber top for a processing chamber is provided. The chamber top includes a first plasma source oriented horizontally over the chamber top and a second plasma source oriented horizontally over the chamber top. The second plasma source is arranged concentrically around the first plasma source. Also included is a first plurality of ferrites encircling the first plasma source and a second plurality of ferrites encircling the second plasma source. A first primary winding is disposed around an outer circumference of the first plasma source and a second primary winding disposed around an outer circumference of the second plasma source. The first and second primary windings pass through the respective plurality of ferrites. A plurality of outlets is disposed on a lower portion of the first and second plasma sources, and the plurality of outlets is oriented between adjacent ones of the first and second plurality of ferrites.
    Type: Application
    Filed: April 10, 2018
    Publication date: August 9, 2018
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Entley
  • Patent number: 9967965
    Abstract: A processing chamber including multiple plasma sources in a process chamber top. Each one of the plasma sources is a ring plasma source including a primary winding and multiple ferrites. A plasma processing system is also described. A method of plasma processing is also described.
    Type: Grant
    Filed: September 26, 2012
    Date of Patent: May 8, 2018
    Assignee: Lam Research Corporation
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Entley
  • Publication number: 20170338025
    Abstract: A method to construct a high current electronic device such as an inductor or a transformer with a single or multi-layer PCB with split traces and/or laminated bus bars and a high current electronic device built according to these methods. Traces are set-up with cross-overs to ensure the length of all traces is equal to maintain good current sharing. Then, PCBs or bus bars are stacked to provide the turns required for the inductor. Cooling plates are provided to cool the structure which is in turn encapsulated in a potting material.
    Type: Application
    Filed: May 18, 2016
    Publication date: November 23, 2017
    Inventor: Souheil Benzerrouk
  • Publication number: 20160358754
    Abstract: A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites and multiple plasma chamber outlets coupling the plasma chamber to a process chamber. Each one of the plasma chamber outlets having a respective plasma restriction. A system and method for generating a plasma are also described.
    Type: Application
    Filed: August 22, 2016
    Publication date: December 8, 2016
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Patent number: 9449793
    Abstract: A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites and multiple plasma chamber outlets coupling the plasma chamber to a process chamber. Each one of the plasma chamber outlets having a respective plasma restriction. A system and method for generating a plasma are also described.
    Type: Grant
    Filed: August 6, 2010
    Date of Patent: September 20, 2016
    Assignee: Lam Research Corporation
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Publication number: 20160103465
    Abstract: A method to provide high resolution power control in SCR based power supplies utilizing dithering designed to introduce perturbations in the control signal to the power supply controller or firing circuit+, and to thereby control the output of the power supply with increased resolution.
    Type: Application
    Filed: October 21, 2015
    Publication date: April 14, 2016
    Inventor: Souheil Benzerrouk
  • Patent number: 9155181
    Abstract: A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber and multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites. A system and method for generating a plasma are also described.
    Type: Grant
    Filed: August 6, 2010
    Date of Patent: October 6, 2015
    Assignee: Lam Research Corporation
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Patent number: 8999104
    Abstract: A plasma source includes multiple ring plasma chambers, multiple primary windings, multiple ferrites and a control system. Each one of the primary windings is wrapped around an exterior one of the ring plasma chambers. Each one of the plurality of the ring plasma chamber passes through a respective portion of the plurality of ferrites. The control system is coupled to each of the ring plasma chambers. A system and method for generating and using a plasma are also described.
    Type: Grant
    Filed: August 6, 2010
    Date of Patent: April 7, 2015
    Assignee: Lam Research Corporation
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Patent number: 8912835
    Abstract: A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: December 16, 2014
    Assignee: MKS Instruments Inc.
    Inventors: Siddarth Nagarkatti, Feng Tian, David Lam, Abdul Rashid, Souheil Benzerrouk, Ilya Bystryak, David Menzer, Jack J. Schuss, Jesse E. Ambrosina
  • Publication number: 20140096908
    Abstract: A processing chamber including multiple plasma sources in a process chamber top. Each one of the plasma sources is a ring plasma source including a primary winding and multiple ferrites. A plasma processing system is also described. A method of plasma processing is also described.
    Type: Application
    Filed: October 10, 2012
    Publication date: April 10, 2014
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Patent number: 8692466
    Abstract: Described are methods and apparatuses, including computer program products, for igniting and/or sustaining a plasma in a reactive gas generator. Power is provided from an ignition power supply to a plasma ignition circuit. A pre-ignition signal of the plasma ignition circuit is measured. The power provided to the plasma ignition circuit is adjusted based on the measured pre-ignition signal and an adjustable pre-ignition control signal. The adjustable pre-ignition control signal is adjusted after a period of time has elapsed.
    Type: Grant
    Filed: February 27, 2009
    Date of Patent: April 8, 2014
    Assignee: MKS Instruments Inc.
    Inventors: Souheil Benzerrouk, Siddharth P. Nagarkatti, Andrew Cowe, Ali Shajii, Jesse E. Ambrosina, Ken Tran, Xing Chen
  • Patent number: 8659335
    Abstract: A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
    Type: Grant
    Filed: June 25, 2009
    Date of Patent: February 25, 2014
    Assignee: MKS Instruments, Inc.
    Inventors: Siddharth Nagarkatti, Feng Tian, David Lam, Abdul Rashid, Souheil Benzerrouk, Ilya Bystryak, David Menzer, Jack J. Schuss, Jesse E. Ambrosina