Patents by Inventor Souheil Benzerrouk

Souheil Benzerrouk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8624501
    Abstract: Methods, systems, and computer program products are described for measuring and controlling parameters of a plasma generator. A current in a primary winding of a transformer or inductive element that generates a plasma is measured. A voltage across a secondary winding of the transformer or inductive element is measured. Based on the current of the primary winding and the voltage across the secondary winding, a parameter of the plasma is determined. The parameter includes a resistance value associated with the plasma, a power value associated with the plasma, or both.
    Type: Grant
    Filed: December 8, 2010
    Date of Patent: January 7, 2014
    Assignee: MKS Instruments, Inc.
    Inventors: Siddharth P. Nagarkatti, Ali Shajii, Souheil Benzerrouk
  • Patent number: 8581975
    Abstract: A pulsed thermography defect detection apparatus including active and passive infrared (IR) thermography for non-destructive testing (NDT) of powdermetallic (P/M) components for on-line and off-line inspection.
    Type: Grant
    Filed: June 18, 2007
    Date of Patent: November 12, 2013
    Assignee: Worcester Polytechnic Institute
    Inventors: Souheil Benzerrouk, Reinhold Ludwig, Diran Apelian
  • Publication number: 20130025788
    Abstract: A processing chamber including multiple plasma sources in a process chamber top. Each one of the plasma sources is a ring plasma source including a primary winding and multiple ferrites. A plasma processing system is also described. A method of plasma processing is also described.
    Type: Application
    Filed: September 26, 2012
    Publication date: January 31, 2013
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Entley
  • Publication number: 20120314728
    Abstract: A power supply system for an arc furnace includes a three phase transformer assembly, back to back SCRs coupled between a power source and the three phase transformer assembly primary windings, and three saturable-reactors, coupled between the three phase transformer assembly secondary windings and a load. A controlled DC current source is coupled between a system controller and each of said three saturable-reactors. The system controller is configured for monitoring the power source and an output current at the load, and for controlling the back-to-back SCRs and the current source.
    Type: Application
    Filed: June 8, 2011
    Publication date: December 13, 2012
    Applicant: Warner Power LLC
    Inventors: Souheil Benzerrouk, Christopher Carl Johnson
  • Publication number: 20120146508
    Abstract: Methods, systems, and computer program products are described for measuring and controlling parameters of a plasma generator. A current in a primary winding of a transformer or inductive element that generates a plasma is measured. A voltage across a secondary winding of the transformer or inductive element is measured. Based on the current of the primary winding and the voltage across the secondary winding, a parameter of the plasma is determined. The parameter includes a resistance value associated with the plasma, a power value associated with the plasma, or both.
    Type: Application
    Filed: December 8, 2010
    Publication date: June 14, 2012
    Applicant: MKS Instruments, Inc.
    Inventors: Siddharth P. Nagarkatti, Ali Shajii, Souheil Benzerrouk
  • Publication number: 20120034394
    Abstract: A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber and multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites. A system and method for generating a plasma are also described.
    Type: Application
    Filed: August 6, 2010
    Publication date: February 9, 2012
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Publication number: 20120035766
    Abstract: A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites and multiple plasma chamber outlets coupling the plasma chamber to a process chamber. Each one of the plasma chamber outlets having a respective plasma restriction. A system and method for generating a plasma are also described.
    Type: Application
    Filed: August 6, 2010
    Publication date: February 9, 2012
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Publication number: 20120031876
    Abstract: A plasma source includes multiple ring plasma chambers, multiple primary windings, multiple ferrites and a control system. Each one of the primary windings is wrapped around an exterior one of the ring plasma chambers. Each one of the plurality of the ring plasma chamber passes through a respective portion of the plurality of ferrites. The control system is coupled to each of the ring plasma chambers. A system and method for generating and using a plasma are also described.
    Type: Application
    Filed: August 6, 2010
    Publication date: February 9, 2012
    Inventors: Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William R. Entley
  • Publication number: 20100327927
    Abstract: A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
    Type: Application
    Filed: June 25, 2009
    Publication date: December 30, 2010
    Applicant: MKS Instruments, Inc.
    Inventors: Siddharth Nagarkatti, Feng Tian, David Lam, Abdul Rashid, Souheil Benzerrouk, Ilya Bystryak, David Menzer, Jack J. Schuss, Jesse E. Ambrosina
  • Publication number: 20100219757
    Abstract: Described are methods and apparatuses, including computer program products, for igniting and/or sustaining a plasma in a reactive gas generator. Power is provided from an ignition power supply to a plasma ignition circuit. A pre-ignition signal of the plasma ignition circuit is measured. The power provided to the plasma ignition circuit is adjusted based on the measured pre-ignition signal and an adjustable pre-ignition control signal. The adjustable pre-ignition control signal is adjusted after a period of time has elapsed.
    Type: Application
    Filed: February 27, 2009
    Publication date: September 2, 2010
    Inventors: Souheil Benzerrouk, Siddharth P. Nagarkatti, Andrew Cowe, Ali Shajii, Jesse E. Ambrosina, Ken Tran, Xing Chen
  • Publication number: 20100033565
    Abstract: A pulsed thermography defect detection apparatus including active and passive infrared (IR) thermography for non-destructive testing (NDT) of powdermetallic (P/M) components for on-line and off-line inspection.
    Type: Application
    Filed: June 18, 2007
    Publication date: February 11, 2010
    Applicant: WORCESTER POLYTECHNIC INSTITUTE
    Inventors: Souheil Benzerrouk, Reinhold Ludwig, Diran Apelian