Abstract: A method for producing titanium-doped synthetic quartz glass includes: (A) providing a liquid SiO2 feedstock material that comprises more than 60% by weight of the polyalkylsiloxane D4; (B) evaporating the liquid SiO2 feedstock material to produce a gaseous SiO2 feedstock vapor; (C) evaporating a liquid TiO2 feedstock material to produce a gaseous TiO2 feedstock vapor; (D) converting the SiO2 feedstock vapor and the TiO2 feedstock vapor into SiO2 particles and TiO2 particles, respectively; (E) depositing the SiO2 particles and the TiO2 particles on a deposition surface while forming a titanium-doped SiO2 soot body; (F) vitrifying the titanium-doped SiO2 soot body while forming the synthetic quartz glass, whereby the TiO2 concentration of the synthetic quartz glass is between 5% by weight and 11% by weight.

Abstract: The Ti3+ ions present in Ti-doped silica glass cause a brown staining of the glass, causing inspection of the lens to become more difficult. Known methods for reducing Ti3+ ions in favor of Ti4+ ions in Ti-doped silica glass include a sufficiently high proportion of OH-groups and carrying out an oxygen treatment prior to vitrification, which both have disadvantages. In order to provide a cost-efficient production method for Ti-doped silica glass, which at a hydroxyl group content of less than 120 ppm shows an internal transmittance (sample thickness 10 mm) of at least 70% in the wavelength range of 400 nm to 1000 nm, the TiO2—SiO2 soot body is subjected to a conditioning treatment with a nitrogen oxide prior to vitrification. The blank produced in this way from Ti-doped silica glass has the ratio Ti3+/Ti4+?5×10?4.

Abstract: A blank made of titanium-doped silica glass for a mirror substrate for use in EUV lithography is provided. The blank includes a surface portion to be provided with a reflective film and having an optically used area (CA) over which a coefficient of thermal expansion (CTE) has a two-dimensional inhomogeneity (dCTE) distribution profile averaged over a thickness of the blank. A maximum inhomogeneity (dCTEmax) of less than 5 ppb/K is defined as a difference between a CTE maximum value and a CTE minimum value. The dCTEmax is at least 0.5 ppb/K. The CA forms a non-circular area having a centroid. The dCTE distribution profile is not rotation-symmetrical and is defined over the CA, such that straight profile sections normalized to a unit length and extending through the centroid of the area yield a dCTE family of curves forming a curve band with a bandwidth of less than 0.5×dCTEmax.

Abstract: A blank of TiO2—SiO2 glass for a mirror substrate for use in EUV lithography has a low need for adaptation to optimize the progression of the coefficient of thermal expansion, and consequently also the progression of the zero crossing temperature Tzc. The TiO2—SiO2 glass has at a mean value of the fictive temperature Tf in the range between 920° C. and 970° C. a dependence expressed as the differential quotient dTzc/dTf of its zero crossing temperature Tzc on the fictive temperature Tf of less than 0.3.

Abstract: A substrate for an EUV mirror which contains a zero crossing temperature profile that departs from the statistical distribution is provided. A method for producing a substrate for an EUV mirror is also provided, in which the zero crossing temperature profile in the substrate is adapted to the operating temperature of the mirror. A lithography method using the substrate is also described.

Abstract: The Ti3+ ions present in Ti-doped silica glass cause a brown staining of the glass, causing inspection of the lens to become more difficult. Known methods for reducing Ti3+ ions in favor of Ti4+ ions in Ti-doped silica glass include a sufficiently high proportion of OH-groups and carrying out an oxygen treatment prior to vitrification, which both have disadvantages. In order to provide a cost-efficient production method for Ti-doped silica glass, which at a hydroxyl group content of less than 120 ppm shows an internal transmittance (sample thickness 10 mm) of at least 70% in the wavelength range of 400 nm to 1000 nm, the TiO2—SiO2 soot body is subjected to a conditioning treatment with a nitrogen oxide prior to vitrification. The blank produced in this way from Ti-doped silica glass has the ratio Ti3+/Ti4+?5×10?4.

Abstract: A blank of TiO2—SiO2 glass for a mirror substrate for use in EUV lithography has a low need for adaptation to optimize the progression of the coefficient of thermal expansion, and consequently also the progression of the zero crossing temperature Tzc. The TiO2—SiO2 glass has at a mean value of the fictive temperature Tf in the range between 920° C. and 970° C. a dependence expressed as the differential quotient dTzc/dTf of its zero crossing temperature Tzc on the fictive temperature Tf of less than 0.3.

Abstract: A blank made of titanium-doped silica glass for a mirror substrate for use in EUV lithography is provided. The blank includes a surface portion to be provided with a reflective film and having an optically used area (CA) over which a coefficient of thermal expansion (CTE) has a two-dimensional inhomogeneity (dCTE) distribution profile averaged over a thickness of the blank. A maximum inhomogeneity (dCTEmax) of less than 5 ppb/K is defined as a difference between a CTE maximum value and a CTE minimum value. The dCTEmax is at least 0.5 ppb/K. The CA forms a non-circular area having a centroid. The dCTE distribution profile is not rotation-symmetrical and is defined over the CA, such that straight profile sections normalized to a unit length and extending through the centroid of the area yield a dCTE family of curves forming a curve band with a bandwidth of less than 0.5×dCTEmax.

Abstract: A method for producing titanium-doped synthetic quartz glass includes: (A) providing a liquid SiO2 feedstock material that comprises more than 60% by weight of the polyalkylsiloxane D4; (B) evaporating the liquid SiO2 feedstock material to produce a gaseous SiO2 feedstock vapor; (C) evaporating a liquid TiO2 feedstock material to produce a gaseous TiO2 feedstock vapor; (D) converting the SiO2 feedstock vapor and the TiO2 feedstock vapor into SiO2 particles and TiO2 particles, respectively; (E) depositing the SiO2 particles and the TiO2 particles on a deposition surface while forming a titanium-doped SiO2 soot body; (F) vitrifying the titanium-doped SiO2 soot body while forming the synthetic quartz glass, whereby the TiO2 concentration of the synthetic quartz glass is between 5% by weight and 11% by weight.

Abstract: The invention puts forward a bidirectional DC-DC converter for high voltages that is as simple as possible and that entails as few losses as possible. The bidirectional DC-DC converter (1) converter comprises an input stage (2) to convert a DC input voltage into first AC voltage, a transformer (3) to transform the first AC voltage into a second AC voltage, and an output stage (4) to convert the second AC voltage into a DC output voltage, whereby, in order to provide the first and/or second AC voltage, at least one of the input stages (2) and/or output stages (4) comprises a branch of a multi-level converter (5) with a first number of active first semiconductor switches (61).

Abstract: The invention puts forward a bidirectional DC-DC converter for high voltages that is as simple as possible and that entails as few losses as possible. The bidirectional DC-DC converter (1) converter comprises an input stage (2) to convert a DC input voltage into first AC voltage, a transformer (3) to transform the first AC voltage into a second AC voltage, and an output stage (4) to convert the second AC voltage into a DC output voltage, whereby, in order to provide the first and/or second AC voltage, at least one of the input stages (2) and/or output stages (4) comprises a branch of a multi-level converter (5) with a first number of active first semiconductor switches (61).

Abstract: Many integrated development environments provide “intelligent feedback” to developers. Current “intelligent feedback” techniques may not work well with source code files comprising context sensitive programming languages because edits to one place in the code may change the meaning of arbitrary other places in the code, thus requiring additional full semantic parses to maintain correctness of the system. As provided herein, context-free “name” parsing may be performed to support entity candidate recursive semantic parsing in determining the meaning of the entity. A name parse may be performed to build and/or update a name table and a range table comprising names of entities and their positions within a source code file. Upon receiving a request to determine the meaning of a selected entity within the source code file, the tables may be queried to determine entity names and locations that are to be semantically parsed to determine a selected entity meaning.

Abstract: A method is provided for attracting the attention of a motor vehicle driver to a potential hazardous spot in an image, which is illustrated in a real form on a display of the motor vehicle or in a virtual form in a region of the motor vehicle. At least one laser scanner provided in the vehicle scans the surroundings in front of the vehicle and determines the shape of an object and the distance of the object from the vehicle. At least one infrared camera, in particular a thermal imaging camera, is provided on the vehicle. It records the surroundings in front of the vehicle and makes available the real or virtual image of the surroundings for display to the driver. The object is compared with at least a first reference object within the scope of a first pattern recognition process. If there is significant correspondence between the object and the reference object, that area on the real or virtual image displayed to the driver in which the object is to be found is determined.

Abstract: Many integrated development environments provide “intelligent feedback” to developers. Current “intelligent feedback” techniques may not work well with source code files comprising context sensitive programming languages because edits to one place in the code may change the meaning of arbitrary other places in the code, thus requiring additional full semantic parses to maintain correctness of the system. As provided herein, context-free “name” parsing may be performed to support entity candidate recursive semantic parsing in determining the meaning of the entity. A name parse may be performed to build and/or update a name table and a range table comprising names of entities and their positions within a source code file. Upon receiving a request to determine the meaning of a selected entity within the source code file, the tables may be queried to determine entity names and locations that are to be semantically parsed to determine a selected entity meaning.

Abstract: Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×1016 molecules/cm3 to 5.0×1016 molecules/cm3, and with a content of SiH groups of less than 5×1016 molecules/cm3, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.

Abstract: An apparatus is provided for calibrating an optical camera and/or an infrared camera, in particular an infrared tele-camera, that is/are arranged in a motor vehicle and that has a checkered appearance with first and second fields. In order to make the known apparatus suitable for a plurality of camera systems, it is suggested that the first fields are heated or cooled.

Abstract: Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×1016 molecules/cm3 to 5.0×1016 molecules/cm3, and with a content of SiH groups of less than 5×1016 molecules/cm3, to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.

Abstract: A method is provided for attracting the attention of a motor vehicle driver to a potential hazardous spot in an image, which is illustrated in a real form on a display of the motor vehicle or in a virtual form in a region of the motor vehicle. At least one laser scanner provided in the vehicle scans the surroundings in front of the vehicle and determines the shape of an object and the distance of the object from the vehicle. At least one infrared camera, in particular a thermal imaging camera, is provided on the vehicle. It records the surroundings in front of the vehicle and makes available the real or virtual image of the surroundings for display to the driver. The object is compared with at least a first reference object within the scope of a first pattern recognition process. If there is significant correspondence between the object and the reference object, that area on the real or virtual image displayed to the driver in which the object is to be found is determined.

Abstract: A device for sensing the linear axial displacement of an actuator comprises, in one embodiment, a movable, elongated magnet coupled to the actuator and a fixed Hall sensor. A one-dimensional bearing for the magnet is designed to receive bearing forces in a direction radial to the axial direction by permitting a displacement and pivoting movement of the magnet around the one-dimensional bearing. Arranging the Hall sensor in the region of the one-dimensional bearing ensures that the spacing or gap between the magnet and the Hall sensor remains constant, even in case of a pivoting and/or radial movement of the actuator and of the magnet connected thereto along the full length of displacement of the actuator. Accordingly, the results in sensing the linear displacement of the actuator are not adversely affected by admissible deflections of the actuator from the axial direction of linear displacement.